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    • 5. 发明申请
    • ARRANGEMENT AND METHOD FOR IMAGE ACQUISITION ON A PROBER
    • 一个探测器的图像采集装置和方法
    • US20080158664A1
    • 2008-07-03
    • US11964747
    • 2007-12-27
    • Michael TeichAxel Becker
    • Michael TeichAxel Becker
    • G02B21/36
    • G02B21/241G02B21/006
    • A focused multi-planar image acquisition in real time, even while a test object is moving is achieved with a system and a method for a focused multi-planar image acquisition in a prober. When a surface of a test object is positioned laterally in relation to tips of separated probe needles, a microscope is focused on the surface of the test object at a first time and on a plane of the probe needles at a second time. The objective lens is provided with a microscope objective lens focusing system, which can focus the objective lens, independently of a vertical adjustment drive of the microscope, on the surface of the test object in a first focal plane and in a second focal plane, which is on a level with the probe needle tips.
    • 即使在测试对象正在移动的同时,也可以通过用于探测器中的聚焦多平面图像采集的系统和方法来实时地实现多焦点多平面图像采集。 当测试对象的表面相对于分离的探针的尖端横向定位时,显微镜在第一时间和第二次在探针的平面上聚焦在测试对象的表面上。 物镜上设有显微镜物镜聚焦系统,该系统可独立于显微镜的垂直调节驱动物体将物镜聚焦在第一焦平面和第二焦平面上的测试物体的表面上, 在探针针尖的水平上。
    • 6. 发明申请
    • PROCESS FOR THE INSPECTION OF A VARIETY OF REPETITIVE STRUCTURES
    • 检查多种重复结构的过程
    • US20070064992A1
    • 2007-03-22
    • US11470884
    • 2006-09-07
    • Michael TeichJuliane BuschAxel BeckerRalf KellerJorg KiesewetterUlf Hackius
    • Michael TeichJuliane BuschAxel BeckerRalf KellerJorg KiesewetterUlf Hackius
    • G06K9/00
    • G06T7/001
    • A process is provided for inspection of a variety of structures on the basis of a golden template, that was attained by recording and statistical analysis of greyscale pictures and is compared to the greyscale picture of the structure to be evaluated based on position. The underlying task is to report any such inspection process, with which a positioning of the test structure relative to the golden template and a structure detection with sub-pixel accuracy is carried out. In positioning of each further structure to be recorded, which follows a first recorded structure, the further structure is fundamentally positioned in accordance with the first positioned structure, applicable characteristic values of the greyscale picture recorded in this position are determined and hence a degree of similarity is determined. On this basis, the position of further structures relative to the primary position are determined and corrected with sub-pixel accuracy, before a new greyscale picture is recorded, which forms the basis for further analysis.
    • 提供了一种基于黄色模板来检查各种结构的过程,这是通过记录和统计分析灰度图像而获得的,并且与基于位置的待评估结构的灰度图像进行比较。 基本任务是报告任何这样的检查过程,通过该过程,测试结构相对于黄金模板的定位和进行子像素精度的结构检测。 在按照第一记录结构进行记录的每个另外的结构的定位中,根据第一定位结构基本上定位另外的结构,确定记录在该位置的灰度图像的适用特征值,并因此确定相似度 决心,决意,决定。 在此基础上,在记录新的灰度图像之前,以子像素精度确定和校正进一步结构相对于主位置的位置,这是进一步分析的基础。
    • 10. 发明申请
    • ARRANGEMENT AND METHOD FOR IMAGE ACQUISITION ON A PROBER
    • 一个探测器的图像采集装置和方法
    • US20110181710A1
    • 2011-07-28
    • US12847308
    • 2010-07-30
    • Michael TeichAxel Becker
    • Michael TeichAxel Becker
    • H04N7/18
    • G02B21/241G02B21/006
    • In a system and a method for capturing images in a prober, the surface of a test object is illuminated in succession with light of a first, second and third color; an image capturing device records a gray scale image of the surface; and a composite image is produced from the three gray scale images by an image evaluating device. The object is to qualitatively improve the image capturing, in order to raise the positioning accuracy by an improved display, as a result of which, finely structured test objects can be used. This object is achieved in that the lighting device is designed as a unit, controlled by the image evaluating unit, produces at least three colors and includes at least one light emitting diode (LED) as the lighting source.
    • 在用于在探测器中捕获图像的系统和方法中,测试对象的表面被第一,第二和第三颜色的光相继照射; 图像捕获装置记录表面的灰度图像; 并且通过图像评估装置从三个灰度图像产生合成图像。 本发明的目的是定性改进图像捕获,以通过改进的显示来提高定位精度,从而可以使用精细结构的测试对象。 该目的的实现是,照明装置被设计为由图像评估单元控制的单元,产生至少三种颜色,并且包括至少一个作为照明源的发光二极管(LED)。