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    • 5. 发明申请
    • INTEGRATED EXTRACTION ELECTRODE MANIPULATOR FOR ION SOURCE
    • 用于离子源的集成提取电极操作器
    • WO2016160421A1
    • 2016-10-06
    • PCT/US2016/023577
    • 2016-03-22
    • AXCELIS TECHNOLOGIES, INC.
    • VANDERBERG, BoVALINSKI, JosephCRISTOFORO, Michael
    • H01J37/067H01J37/04H01J37/317
    • H01J37/3171H01J27/024H01J37/08H01J2237/024H01J2237/061
    • A modular ion source and extraction apparatus 200 comprises an ion source chamber 202 selectively electrically coupled to a voltage potential, wherein the ion source chamber comprises an extraction aperture 203. An extraction electrode 206 is positioned proximate to the extraction aperture of the ion source chamber, wherein the extraction electrode is configured to extract ions from the ion source chamber, and may be electrically grounded. One or more linkages 208 operably couple to the ion source chamber, and one or more insulators 210 couple the extraction electrode to the respective one or more linkages, wherein the one or more insulators electrically insulate the respective one or more linkages from the extraction electrode, therein electrically insulating the extraction electrode from the ion source chamber. One or more actuators 212; 218, 220 operably couple the one or more linkages to the ion source chamber, wherein the one or more actuators are configured to translate the one or more linkages with respect to the ion source chamber, therein translating the extraction electrode in one or more axes,
    • 模块化离子源和提取装置200包括选择性地电耦合到电压电势的离子源室202,其中离子源室包括提取孔203.引出电极206位于靠近离子源室的提取孔的位置, 其中所述提取电极被配置为从所述离子源室提取离子,并且可以被电接地。 一个或多个连接件208可操作地耦合到离子源室,并且一个或多个绝缘体210将引出电极耦合到相应的一个或多个连接件,其中一个或多个绝缘体将相应的一个或多个连接件与引出电极电绝缘, 其中提取电极与离子源室电绝缘。 一个或多个致动器212; 218,220可操作地将所述一个或多个连接件耦合到所述离子源室,其中所述一个或多个致动器构造成相对于所述离子源室平移所述一个或多个连接件,其中所述引出电极在一个或多个轴中平移,
    • 6. 发明申请
    • MAGNETIC SCANNING SYSTEM WITH IMPROVED EFFICIENCY
    • 具有提高效率的磁扫描系统
    • WO2011136851A1
    • 2011-11-03
    • PCT/US2011/000736
    • 2011-04-27
    • AXCELIS TECHNOLOGIES INC.VANDERBERG, Bo
    • VANDERBERG, Bo
    • H01J37/147H01J37/317
    • H01J37/1475H01J37/3171H01J2237/1523H01J2237/1526
    • Some aspects of the present invention facilitate ion implantation by using a magnetic beam scanner (106, 300) that includes first and second magnetic elements having a beam path region therebetween. One or more magnetic flux compression elements (140a, b, 302, 304) are disposed proximate to the beam path region and between the first and second magnetic elements. During operation, the first and magnetic elements cooperatively generate an oscillatory time-varying magnetic field in the beam path region to scan an ion beam back and forth in time. The one or more magnetic flux compression elements compress the magnetic flux provided by the first and second magnetic elements, thereby reducing the amount of power required to magnetically scan the beam back and forth (relative to previous implementations). Other scanners, systems, and methods are also disclosed.
    • 本发明的一些方面通过使用包括其间具有光束路径区域的第一和第二磁性元件的磁束扫描器(106,300)来促进离子注入。 一个或多个磁通量压缩元件(140a,b,302,304)设置在光束路径区域附近以及第一和第二磁性元件之间。 在操作期间,第一和磁性元件协同地在光束路径区域中产生振荡时变磁场,以及时扫描离子束。 一个或多个磁通量压缩元件压缩由第一和第二磁性元件提供的磁通量,从而减少磁力扫描光束所需的功率量(相对于先前的实施方式)。 还公开了其他扫描仪,系统和方法。