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1. 发明授权

US06250156B1 Dual-mass micromachined vibratory rate gyroscope 有权
标题翻译：双质量微机械振动率陀螺仪
公开(公告)号：US06250156B1
公开(公告)日：2001-06-26
申请号：US09298631
申请日：1999-04-23
申请人： Ashwin A. Seshia , Roger T. Howe
发明人： Ashwin A. Seshia , Roger T. Howe
IPC分类号： G01C1900
CPC分类号： G01C19/5719
摘要： A microfabricated gyroscopic sensor for measuring rotation about a Z-axis. The sensor includes a substrate, a first mass, a second mass, a coupling system connecting the first mass and the second mass, and a suspension system connecting the first mass and the second mass to the substrate. The sensor further includes a drive system to cause the first mass and the second mass to vibrate in an antiphase mode along a drive axis, and a position sensor to measure a displacement of the first mass and the second mass along a sense axis perpendicular to the drive axis and generally parallel to the surface of the substrate, wherein rotation of the first mass and the second mass about the Z-axis perpendicular to the surface of the substrate and vibration of the first mass and the second mass along the drive axis generates a Coriolis force to vibrate the first mass and the second mass along the sense axis in antiphase to each other.
摘要翻译：用于测量围绕Z轴的旋转的微制造陀螺仪传感器。传感器包括基板，第一质量块，第二质量块，连接第一质量块和第二质量块的联接系统，以及将第一质量块和第二质量块连接到衬底的悬架系统。传感器还包括驱动系统，其使第一质量块和第二质量块沿着驱动轴以反相模式振动;以及位置传感器，用于测量第一质量块和第二质量块沿垂直于驱动轴线并且大致平行于基板的表面，其中第一质量块和第二质量块围绕垂直于衬底表面的Z轴的旋转和沿着驱动轴线的第一质量块和第二质量块的振动产生一个科里奥利力使第一质量和第二质量沿着感测轴彼此反相振动。

2. 发明申请

US20170012338A1 Unreleased Coupled MEMS Resonators and Transmission Filters 审中-公开
标题翻译：未发布的耦合MEMS谐振器和传输滤波器
公开(公告)号：US20170012338A1
公开(公告)日：2017-01-12
申请号：US15274056
申请日：2016-09-23
申请人： Wentao Wang , Andreja Erbes , Dana Weinstein , Ashwin A. Seshia
发明人： Wentao Wang , Andreja Erbes , Dana Weinstein , Ashwin A. Seshia
IPC分类号： H01P7/06 , H01L41/09 , H02N2/00 , H01P5/02
CPC分类号： H01P7/065 , G01N29/022 , G01N2291/0423 , G01N2291/106 , H01L41/09 , H01P5/02 , H02N2/001
摘要： Examples of the present invention include unreleased coupled multi-cavity resonators and transmission filters. In some examples, the resonators include resonant cavities coupled by acoustic couplers (ABGCs) and acoustic reflectors (ABRs). These acoustic components enable improved confinement of acoustic modes within the resonator to increase the quality factor (Q) and lower the motional resistance (Rx). A coupled resonator with 5 cavities coupled by 4 ABGCs can achieve a Q of 1095 while a single-cavity resonator of the same device size has a Q of 760. In some examples, the devices can be configured to work as electronic transmission filters in at least two types of filter configurations. In the transmission line filter configuration, the device can include a filter structure in an arrangement (LH)N H (LH)N, defined as a Fabry-Perot Resonator (FPR). In the multi-pole filter configuration, the device can include a filter structure in an arrangement similar to the multi-cavity resonator design.
摘要翻译：本发明的实例包括未发布的耦合多腔谐振器和透射滤波器。在一些示例中，谐振器包括通过声耦合器（ABGC）和声反射器（ABR）耦合的谐振腔。这些声学组件能够改善谐振器内的声学模式的限制，以增加质量因子（Q）并降低运动电阻（Rx）。具有5个通过4个ABGC耦合的腔的耦合谐振器可以实现1095的Q，而具有相同器件尺寸的单腔谐振器具有760的Q值。在一些示例中，器件可被配置为作为电子传输滤波器至少两种类型的过滤器配置。在传输线滤波器配置中，器件可以包括定义为法布里 - 珀罗谐振器（FPR）的布置（LH）N H（LH）N中的滤波器结构。在多极滤波器构造中，器件可以包括类似于多腔谐振器设计的布置的滤波器结构。

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