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1. 发明授权

US06545275B1 Beam evaluation 有权
标题翻译：光束评估
公开(公告)号：US06545275B1
公开(公告)日：2003-04-08
申请号：US09390002
申请日：1999-09-03
申请人： Asher Pearl , Nadav Haas , Yacov Elgar
发明人： Asher Pearl , Nadav Haas , Yacov Elgar
IPC分类号： G01N2300
CPC分类号： H01J37/28 , H01J2237/2823
摘要： The present invention provides, according to a first aspect, a method for automatically evaluating the performance of a charged particle device. The method uses a signal coming from a gold-on-carbon reference target. From this signal the spot size of the particle beam is determined. The method according to the present invention has the advantage that it does not depend on operator judgment. Therefore, the method leads to improved consistency, accuracy and reliability of the beam characterization, and, accordingly, to a better characterization of the quality of the system's performance.
摘要翻译：根据第一方面，本发明提供一种用于自动评估带电粒子装置的性能的方法。该方法使用来自碳上参考靶的信号。从该信号中确定粒子束的光点尺寸。根据本发明的方法具有不依赖于操作者判断的优点。因此，该方法可以提高光束表征的一致性，准确性和可靠性，从而更好地表征系统性能的质量。

2. 发明授权

US07800062B2 Method and system for the examination of specimen 有权
标题翻译：样品检查方法和系统
公开(公告)号：US07800062B2
公开(公告)日：2010-09-21
申请号：US10912792
申请日：2004-08-06
申请人： Alex Goldenshtein , Radel Ben-Av , Asher Pearl , Igor Petrov , Nadav Haas , Pavel Adamec , Yaron Gold
发明人： Alex Goldenshtein , Radel Ben-Av , Asher Pearl , Igor Petrov , Nadav Haas , Pavel Adamec , Yaron Gold
IPC分类号： G01B15/04
CPC分类号： G01N23/22 , G01N23/203 , H01J37/1478 , H01J37/265 , H01J2237/202 , H01J2237/2611 , H01J2237/281
摘要： The present invention provides, according to a first aspect, a method for the examination of specimen with a beam of charged particles. The method provides one or more images of the specimen made with different view angles, so that, compared to a single image of the specimen, a lot of additional information about the specimen can be accessed. The different view angles (angles of incidence) are achieved by tilting the beam between the two images and moving the specimen to a new position so that the displacement of the beam caused by the tilting of the beam is compensated. Accordingly, while displaying/recording the second image the beam scans over the same area as it has scanned while displaying/recording the first image.
摘要翻译：根据第一方面，本发明提供一种用带电粒子束检查样品的方法。该方法提供了具有不同视角的样本的一个或多个图像，使得与样本的单个图像相比，可以访问大量关于样本的附加信息。通过在两个图像之间倾斜光束并将样本移动到新位置来实现不同的视角（入射角），使得由光束的倾斜引起的光束的位移被补偿。因此，当显示/记录第二图像时，在显示/记录第一图像的同时，光束扫描与其扫描的相同的区域。

3. 发明申请

US20050116164A1 Method and system for the examination of specimen 有权
标题翻译：样品检查方法和系统
公开(公告)号：US20050116164A1
公开(公告)日：2005-06-02
申请号：US10912792
申请日：2004-08-06
申请人： Alex Goldenshtein , Radel Ben-Av , Asher Pearl , Igor Petrov , Nadav Haas
发明人： Alex Goldenshtein , Radel Ben-Av , Asher Pearl , Igor Petrov , Nadav Haas
IPC分类号： G01N23/203 , G01N23/22 , G21K7/00 , G01N23/00
CPC分类号： G01N23/22 , G01N23/203 , H01J37/1478 , H01J37/265 , H01J2237/202 , H01J2237/2611 , H01J2237/281
摘要： The present invention provides, according to a first aspect, a method for the examination of specimen with a beam of charged particles. The method provides one or more images of the specimen made with different view angles, so that, compared to a single image of the specimen, a lot of additional information about the specimen can be accessed. The different view angles (angles of incidence) are achieved by tilting the beam between the two images and moving the specimen to a new position so that the displacement of the beam caused by the tilting of the beam is compensated. Accordingly, while displaying/recording the second image the beam scans over the same area as it has scanned while displaying/recording the first image.
摘要翻译：根据第一方面，本发明提供一种用带电粒子束检查样品的方法。该方法提供了具有不同视角的样本的一个或多个图像，使得与样本的单个图像相比，可以访问大量关于样本的附加信息。通过在两个图像之间倾斜光束并将样本移动到新位置来实现不同的视角（入射角），使得由光束的倾斜引起的光束的位移被补偿。因此，当显示/记录第二图像时，在显示/记录第一图像的同时，光束扫描与其扫描的相同的区域。

4. 发明申请

US20050006598A1 Method and device for aligning a charged particle beam column 有权
标题翻译：用于对准带电粒子束柱的方法和装置
公开(公告)号：US20050006598A1
公开(公告)日：2005-01-13
申请号：US10492257
申请日：2002-10-04
申请人： Asher Pearl
发明人： Asher Pearl
IPC分类号： H01J37/21 , A61N5/00 , G01N21/00 , G21G5/00 , H01J3/26 , H01J37/08 , H01J37/153 , H01J37/22 , H01J37/26
CPC分类号： H01J37/1471 , H01J37/153 , H01J37/22 , H01J37/263 , H01J37/265 , H01J37/304 , H01J2237/045 , H01J2237/1501 , H01J2237/1532 , H01J2237/216 , H01J2237/221
摘要： The invention provides a method for automatically aligning a beam of charged particles with an aperture. Thereby, a defocusing is introduced and a signal calculated based on an image shift is applied to a deflection unit. Further, a method for correction of astigmatism is provided. Thereby, the sharpness is evaluated for a set of frames generated whilst varying the signals to a stigmator.
摘要翻译：本发明提供一种用于将带电粒子束自动对准孔的方法。由此，引入散焦，并将基于图像偏移计算的信号应用于偏转单元。此外，提供了用于校正散光的方法。因此，对于在将信号改变为标示符时产生的一组帧来评估清晰度。

5. 发明授权

US07335893B2 Method and device for aligning a charged particle beam column 有权
标题翻译：用于对准带电粒子束柱的方法和装置
公开(公告)号：US07335893B2
公开(公告)日：2008-02-26
申请号：US10492257
申请日：2002-10-04
申请人： Asher Pearl
发明人： Asher Pearl
IPC分类号： H01J37/26
CPC分类号： H01J37/1471 , H01J37/153 , H01J37/22 , H01J37/263 , H01J37/265 , H01J37/304 , H01J2237/045 , H01J2237/1501 , H01J2237/1532 , H01J2237/216 , H01J2237/221
摘要： The invention provides a method for automatically aligning a beam of charged particles with an aperture. Thereby, a defocusing is introduced and a signal calculated based on an image shift is applied to a deflection unit. Further, a method for correction of astigmatism is provided. Thereby, the sharpness is evaluated for a set of frames generated whilst varying the signals to a stigmator.
摘要翻译：本发明提供一种用于将带电粒子束自动对准孔的方法。由此，引入散焦，并将基于图像偏移计算的信号应用于偏转单元。此外，提供了用于校正散光的方法。因此，对于在将信号改变为标示符时产生的一组帧来评估清晰度。

6. 发明申请

US20060286772A1 Method of cross-section milling with focused ion beam (FIB) device 有权
标题翻译：用聚焦离子束（FIB）装置进行横截面铣削的方法
公开(公告)号：US20060286772A1
公开(公告)日：2006-12-21
申请号：US11153953
申请日：2005-06-16
申请人： Asher Pearl
发明人： Asher Pearl
IPC分类号： H01L21/00
CPC分类号： G01N1/32 , H01J2237/31745
摘要： A method of milling a cross section of a wafer and a milling device. The method includes a coarse scanning of at least two milling frames and a fine scanning of at least one milling frame. The milling device is adapted to cross-section milling of a wafer, said milling includes a coarse scanning of at least two milling frames and a fine scanning of at least one milling frame.
摘要翻译：铣削晶片和铣削装置的横截面的方法。该方法包括对至少两个铣削框架的粗略扫描和至少一个铣削框架的精细扫描。铣削装置适于对晶片进行横截面铣削，所述铣削包括至少两个铣削框架的粗略扫描和至少一个铣削框架的精细扫描。

7. 发明授权

US07385205B2 Method and device for aligning a charged particle beam column 有权
标题翻译：用于对准带电粒子束柱的方法和装置
公开(公告)号：US07385205B2
公开(公告)日：2008-06-10
申请号：US11689870
申请日：2007-03-22
申请人： Asher Pearl
发明人： Asher Pearl
IPC分类号： H01J37/26
CPC分类号： H01J37/1471 , H01J37/153 , H01J37/22 , H01J37/263 , H01J37/265 , H01J37/304 , H01J2237/045 , H01J2237/1501 , H01J2237/1532 , H01J2237/216 , H01J2237/221
摘要： The invention provides a method and apparatus for automatically aligning a beam of charged particles with an aperture. Thereby, a defocusing is introduced and a signal calculated based on an image shift is applied to a deflection unit. Further, a method for correction of astigmatism is provided. Thereby, the sharpness is evaluated for a set of frames generated whilst varying the signals to a stigmator.
摘要翻译：本发明提供一种用于将带电粒子束自动对准孔的方法和装置。由此，引入散焦，并将基于图像偏移计算的信号应用于偏转单元。此外，提供了用于校正散光的方法。因此，对于在将信号改变为标示符时产生的一组帧来评估清晰度。

8. 发明申请

US20050062480A1 Source of liquid metal ions and a method for controlling the source 失效
公开(公告)号：US20050062480A1
公开(公告)日：2005-03-24
申请号：US10667875
申请日：2003-09-22
申请人： Asher Pearl
发明人： Asher Pearl
IPC分类号： G01N27/62 , H01J27/02 , H01J27/22 , H01J37/08 , H01J49/10
CPC分类号： H01J37/08 , H01J27/02 , H01J27/26 , H01J2237/08 , H01J2237/3174 , H01J2237/31749
摘要： The invention provides a system and method for controlling a source of liquid metal ions, the source comprises a tip a first electrode and a second electrode, the method includes the steps of: (i) maintaining the first electrode at a first voltage level range and maintaining the second voltage at a second voltage range, such as to extract metal ions formed on a tip of the source, during an active mode of operation of the source; and (ii) maintaining the first electrode at a third voltage level range and maintaining the second voltage at a fourth voltage level range, such as to substantially reduce an extraction of metal ions from the tip, during an idle mode of operation of the source. The third voltage level range and, alternatively or additionally, the fourth voltage level ranges does not include zero voltage level. The first voltage level range differs than the third voltage level range.

9. 发明申请

US20070235659A1 METHOD AND DEVICE FOR ALIGNING A CHARGED PARTICLE BEAM COLUMN 有权
标题翻译：用于对准带电粒子束柱的方法和装置
公开(公告)号：US20070235659A1
公开(公告)日：2007-10-11
申请号：US11689870
申请日：2007-03-22
申请人： Asher Pearl
发明人： Asher Pearl
IPC分类号： G21K1/08
CPC分类号： H01J37/1471 , H01J37/153 , H01J37/22 , H01J37/263 , H01J37/265 , H01J37/304 , H01J2237/045 , H01J2237/1501 , H01J2237/1532 , H01J2237/216 , H01J2237/221
摘要： The invention provides a method and apparatus for automatically aligning a beam of charged particles with an aperture. Thereby, a defocusing is introduced and a signal calculated based on an image shift is applied to a deflection unit. Further, a method for correction of astigmatism is provided. Thereby, the sharpness is evaluated for a set of frames generated whilst varying the signals to a stigmator.
摘要翻译：本发明提供一种用于将带电粒子束自动对准孔的方法和装置。由此，引入散焦，并将基于图像偏移计算的信号应用于偏转单元。此外，提供了用于校正散光的方法。因此，对于在将信号改变为标示符时产生的一组帧来评估清晰度。

10. 发明授权

US07105843B1 Method and system for controlling focused ion beam alignment with a sample 有权
标题翻译：用于控制与样品聚焦的离子束对准的方法和系统
公开(公告)号：US07105843B1
公开(公告)日：2006-09-12
申请号：US11140017
申请日：2005-05-27
申请人： Asher Pearl
发明人： Asher Pearl
IPC分类号： G01N1/00 , H01J37/244 , H01J37/302 , G21G5/00
CPC分类号： H01J37/304 , H01J2237/2826 , H01J2237/30433
摘要： A method for calibrating operational parameters of a charged particle beam device comprises generating a plurality of distinct spots on a specimen, each spot being generated in response to adjusted operational parameters of the charged particle beam device, and registering said respective operational parameters.
摘要翻译：用于校准带电粒子束装置的操作参数的方法包括在样本上产生多个不同的斑点，响应于带电粒子束装置的调整的操作参数产生每个斑点，并且登记所述各个操作参数。

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