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1. 发明专利

JP2003285076A Recovery method for fluorine-containing emulsifier 审中-公开
标题翻译：含氟含量乳化剂的回收方法
公开(公告)号：JP2003285076A
公开(公告)日：2003-10-07
申请号：JP2002368453
申请日：2002-12-19
申请人： Asahi Glass Co Ltd , Jiemuko:Kk , 旭硝子株式会社 , 株式会社ジェムコ
发明人： YANASE NOBUKAZU , EDA MASATAKA , KAMIYA HIROKI , OMORI KOTA , KAMIYA TAKESHI
IPC分类号： C02F1/58 , B01D11/04 , B01D17/02 , B01F17/00 , C02F1/52
CPC分类号： B01D17/0202 , C02F1/5236 , C02F2101/301 , C02F2101/36 , C02F2103/38
摘要： PROBLEM TO BE SOLVED: To provide a recovery method for recovering a fluorine-containing emulsifier economically by simple operation.
SOLUTION: In the recovery method for recovering the fluorine-containing emulsifier from wastewater after the polymerization of a fluorine-containing polymer containing the fluorine-containing emulsifier using a laminar composite hydroxide, the laminar composite hydroxide containing the fluorine-containing emulsifier between the layers thereof is produced to be separated from flocculated wastewater and this separated laminar composite hydroxide is dissolved in a mineral acid. Then, the fluorine-containing emulsifier is extracted from the obtained solution using a fluorohydrocarbon.
COPYRIGHT: (C)2004,JPO
摘要翻译：待解决的问题：提供通过简单的操作经济地回收含氟乳化剂的回收方法。解决方案：在使用层状复合氢氧化物聚合包含含氟乳化剂的含氟聚合物进行聚合之后从废水中回收含氟乳化剂的回收方法中，含有含氟乳化剂的层状复合氢氧化物介于产生其层与絮凝废水分离，将该分离的层状复合氢氧化物溶解于无机酸中。然后，使用氟代烃从所得溶液中提取含氟乳化剂。版权所有（C）2004，JPO

2. 发明专利

JP2003285075A Recovery method for fluorine-containing emulsifier 审中-公开
标题翻译：含氟含量乳化剂的回收方法
公开(公告)号：JP2003285075A
公开(公告)日：2003-10-07
申请号：JP2002368452
申请日：2002-12-19
申请人： Asahi Glass Co Ltd , Jiemuko:Kk , 旭硝子株式会社 , 株式会社ジェムコ
发明人： FUNAKI CHU , EDA MASATAKA , KAMIYA HIROKI , OMORI KOTA , KAMIYA TAKESHI , MIURA YASUTERU , YANASE NOBUKAZU
IPC分类号： B01D17/02 , C02F1/52 , C02F1/58 , C08F6/00
CPC分类号： B01D17/0202 , C02F1/5236 , C02F2101/14 , C02F2101/301 , C02F2101/36 , C02F2103/38
摘要： PROBLEM TO BE SOLVED: To provide a method for efficiently recovering a fluorine-containing emulsifier from flocculated wastewater of a fluorine-containing polymer by a simple method. SOLUTION: The fluorine-containing emulsifier is recovered from wastewater after the polymerization of the fluorine-containing polymer containing the fluorine-containing emulsifier and 1 mass% or less of a floating solid component or a substance becoming the floating solid component. In this recovery method, a laminar composite hydroxide is formed using divalent metal ions and trivalent metal ions and the fluorine-containing emulsifier contained in the wastewater is involved in the gaps between the layers of the laminar composite hydroxide before the separation of the laminar composite hydroxide from the wastewater. COPYRIGHT: (C)2004,JPO
摘要翻译：待解决的问题：提供一种通过简单的方法从含氟聚合物的絮凝废水中有效地回收含氟乳化剂的方法。解决方案：在含有含氟乳化剂的含氟聚合物聚合之后，从含水乳液中回收含氟乳化剂，1质量％以下的浮选固体成分或成为浮动固体成分的物质。在这种回收方法中，使用二价金属离子和三价金属离子形成层状复合氢氧化物，并且在层状复合氢氧化物分离之前，废水中包含的含氟乳化剂参与层状复合氢氧化物层之间的间隙来自废水。版权所有（C）2004，JPO

3. 发明专利

JP2006016571A Fluorine-containing compound, fluorine-containing cyclic polymer and method for producing the same 审中-公开
标题翻译：含氟化合物，含氟聚合物循环聚合物及其生产方法
公开(公告)号：JP2006016571A
公开(公告)日：2006-01-19
申请号：JP2004198172
申请日：2004-07-05
申请人： Asahi Glass Co Ltd , 旭硝子株式会社
发明人： TAKEBE YOKO , EDA MASATAKA , YOKOKOJI OSAMU
IPC分类号： C08F14/18
摘要： PROBLEM TO BE SOLVED: To obtain a fluorine-containing polymer that has high concentration of a functional group and sufficient properties of the functional group and causes no lowering in Tg.
SOLUTION: The fluorine-containing polymer has a monomer unit obtained by subjecting a fluorine-containing diene represented by formula (1): CF
2 =CFCH
2 -CHQ-R
2 (Q is a (CH
2 )
n (CF
3 )
2 OR
1 (n is 0 or 1; R
1 is hydrogen, a ≤20C alkyl group, a ≤15C alkoxycarbonyl group or a CH
2 R
3 (R
3 is a ≤15C alkoxycarbonyl group)); R
2 is a cyclic unsaturated hydrocarbon group or an alkyl group in which at least one hydrogen atom is substituted with a cyclic unsaturated hydrocarbon; in R
2 , a part of carbon atoms in the cyclic unsaturated hydrocarbon group may be substituted with a hetero atom or a carbonyl group, a part of hydrogen atoms in the cyclic unsaturated hydrocarbon group may be substituted with a fluorine atom, an alkyl group or a fluoroalkyl group) to cyclic polymerization.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了获得具有高浓度官能团和足够的官能团特性并且不降低Tg的含氟聚合物。解决方案：含氟聚合物具有通过使由式（1）表示的含氟二烯烃：CF 2 SBR 2 = CFCH 2 SBI 2 获得的单体单元 R 2 （Q为（CH 2 ） n （CF 3 （n为0或1; R 1为氢，≤20C烷基，≤15C烷氧基羰基或CH 2 （R SP 3是一个≤15C烷氧基羰基））; R 2 SP 2是环状不饱和烃基或烷基其中至少一个氢原子被环状不饱和烃取代;在R 2 SP 2中，环状不饱和烃基中的一部分碳原子可以被杂原子或羰基取代，部分的环状不饱和烃基中的氢原子可以被氟原子，烷基或氟代烷基取代）进行环状聚合。版权所有（C）2006，JPO＆NCIPI

4. 发明专利

JP2005298707A Fluoropolymer and resist composition 有权
标题翻译：氟聚合物和耐腐蚀组合物
公开(公告)号：JP2005298707A
公开(公告)日：2005-10-27
申请号：JP2004118534
申请日：2004-04-14
申请人： Asahi Glass Co Ltd , 旭硝子株式会社
发明人： TAKEBE YOKO , EDA MASATAKA , YOKOKOJI OSAMU
IPC分类号： G03F7/033 , C08F14/18 , C08F18/20 , C08F214/18 , C08F222/18 , C08F236/20 , G03F7/039 , H01L21/027
CPC分类号： C08F214/18 , C08F14/18 , C08F222/18 , C08F2/06
摘要： PROBLEM TO BE SOLVED: To provide a photolithographic resist composition using an ultraviolet radiation of ≤250 nm and a polymer for the composition.
SOLUTION: The fluoropolymer (A) has a unit derived from cyclization polymerization of at least one fluorine-containing diene chosen from a fluorine-containing diene of formula (1): CF
2 =CFCF
2 -C(CF
3 )(OR
1 )-CH
2 CH=CH
2 and a fluorine-containing diene of formula (2):CF
2 =CFCH
2 -CH((CH
2 )
n C(CF
3 )
2 (OR
1 ))-CH
2 CH=CH
2 and a unit derived from cyclization polymerization of a fluorine-containing diene of formula (3): CF
2 =CFCH
2 -CH(COOR
2 )-CH
2 CH=CH
2 (wherein R
1 is a hydrogen atom, a blocked group or the like; R
2 is a hydrocarbon group; and n is 0 or 1). The resist composition contains the fluoropolymer (A).
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供使用≤250nm的紫外线辐射的光刻抗蚀剂组合物和用于该组合物的聚合物。解决方案：含氟聚合物（A）具有衍生自选自式（1）的含氟二烯的至少一种含氟二烯烃的环化聚合的单元：CF 2 SBB = CFCF < SB> 2 -C（CF 3 ）（OR 1 ） - CH 2 CH = CH 2 和式（2）的含氟二烯：CF 2 SBB = CFCH SB 2 -CH（（CH 2 SB 2）SB ñ C（CF 3 ） 2 （OR 1 ）） - CH 2 CH = CH ＆lt; SB＆gt; 2＆gt;和由式（3）表示的含氟二烯的环化聚合衍生的单元：CF 2 SB = CHCH 2 CH 2其中R 1是氢原子，被封端的基团或类似物; R 2是烃基; n是0或1）。抗蚀剂组合物含有含氟聚合物（A）。版权所有（C）2006，JPO＆NCIPI

5. 发明专利

JP2005241737A Resist composition and method for manufacturing semiconductor device 审中-公开
标题翻译：耐蚀组合物和制造半导体器件的方法
公开(公告)号：JP2005241737A
公开(公告)日：2005-09-08
申请号：JP2004048008
申请日：2004-02-24
申请人： Asahi Glass Co Ltd , Semiconductor Leading Edge Technologies Inc , 旭硝子株式会社 , 株式会社半導体先端テクノロジーズ
发明人： OTOGURO AKIHIKO , IRIE SHIGEO , FUJII KIYOSHI , TAKEBE YOKO , EDA MASATAKA , YOKOKOJI OSAMU
IPC分类号： G03F7/032 , G03F7/039 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a resist composition having excellent transparency and dry etching durability with which a resist pattern having excellent sensitivity, resolution, flatness and heat resistance can be easily formed, and to provide a method for manufacturing a semiconductor device.
SOLUTION: The resist composition contains: (A) a fluorine-containing polymer having a monomer unit having a fluorine-containing alicyclic structure prepared by cyclization polymerization of fluorine-containing diene (I) expressed by formula (1):CF
2 =CFCH
2 CHQ-CH
2 CR
1 =CHR
2 ; (B) an acid generating compound which generates an acid by irradiation with active rays; and (C) an organic solvent. In formula (1), Q represents (CH
2 )nC(CF
3 )
2 OR
3 .
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：解决的问题：提供一种具有优异的透明性和耐蚀刻耐久性的抗蚀剂组合物，通过该抗蚀剂组合物可以容易地形成具有优异的灵敏度，分辨率，平坦度和耐热性的抗蚀剂图案，并提供一种制造半导体器件的方法。抗蚀剂组合物包含：（A）具有通过式（1）表示的含氟二烯（I）的环化聚合制备的具有含氟脂环结构的单体单元的含氟聚合物：CF SB> 2 = CFCH 2 CHQ-CH 2 CR 1 = CHR 2 ; （B）通过用活性射线照射产生酸的产酸化合物; 和（C）有机溶剂。在式（1）中，Q表示（CH 2 ）nC（CF 3 ）SB OR SP 3。版权所有（C）2005，JPO＆NCIPI

6. 发明专利

JP2006160988A Fluorine-containing polymer, method for producing the same and resist protective coat composition 审中-公开
标题翻译：含氟聚合物，其制备方法和耐腐蚀保护膜组合物
公开(公告)号：JP2006160988A
公开(公告)日：2006-06-22
申请号：JP2004358088
申请日：2004-12-10
申请人： Asahi Glass Co Ltd , 旭硝子株式会社
发明人： YOKOKOJI OSAMU , KAWAGUCHI YASUHIDE , EDA MASATAKA , TAKEBE YOKO , SASAKI TAKASHI
IPC分类号： C08F36/20
摘要： PROBLEM TO BE SOLVED: To provide a fluorine-containing polymer having high transparency in a wide wave length range; to provide a method for producing the polymer; and to provide a resist protective coat composition having excellent transparency to far ultraviolet rays and vacuum ultraviolet rays, and high effects for suppressing a PED effect (Postexposure Delay effect), soluble in an alkali developing liquid to enable the coat to be removed by a developing step in a current resist process, and capable of protecting a resist membrane from an immersion solvent even in an immersion lithography step. SOLUTION: The fluorine-containing polymer has a monomer unit obtained by subjecting a fluorine-containing diene represented by formula (1): CF 2 =CFCF 2 C(CF 3 )(OR 1 )-(CH 2 ) n CR 2 =CHR 3 (1) (wherein, R 1 is a ≤20C organic group having at least one substituent selected from the group consisting of a carboxy group, a sulfo group and a sulfonylfluoride group; R 2 and R 3 are each independently a hydrogen atom or a ≤12C alkyl group; and n is an integer of 0-2) to cyclic polymerization. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供在宽波长范围内具有高透明度的含氟聚合物; 以提供聚合物的制造方法; 并且提供对远紫外线和真空紫外线具有优异透明性的抗蚀剂保护涂层组合物，以及用于抑制PED效应（曝光后延迟效应）的高效果，其可溶于碱性显影液体中，以使涂层能够通过显影并且即使在浸没式光刻步骤中也能够将抗蚀剂膜从浸渍溶剂中保护。解决方案：含氟聚合物具有通过使由式（1）表示的含氟二烯烃：CF 2 SBR 2 = CFCF 2 SBC 2（C） CF 3 ）（OR 1 ） - （CH 2 ）名词 CR 2 =（CHR）3（1）（1）（其中，R SP 1是具有至少一个取代基的≤20C有机基团，该取代基选自羧基，磺基和磺酰氟基团; R 2 SP 3和R 3 SP 3各自独立地为氢原子或≤12C烷基，n为0-2的整数）进行环状聚合。版权所有（C）2006，JPO＆NCIPI

7. 发明专利

JP2005239785A Fluorine-containing compound, fluoropolymer and its preparation method 有权
标题翻译：含氟化合物，氟聚合物及其制备方法
公开(公告)号：JP2005239785A
公开(公告)日：2005-09-08
申请号：JP2004048428
申请日：2004-02-24
申请人： Asahi Glass Co Ltd , 旭硝子株式会社
发明人： TAKEBE YOKO , EDA MASATAKA , YOKOKOJI OSAMU
IPC分类号： G03F7/039 , C07F7/08 , C08F36/20
摘要： PROBLEM TO BE SOLVED: To provide a fluoropolymer which has a hydroxyl group and shows a high transparency at a wide wavelength range, especially at a wavelength of ≤200 nm. SOLUTION: A fluorine-containing diene of formula (1): CF 2 =CFCH 2 CH(C(CF 3 ) 2 OH)CH 2 CR 1 =CHR 2 (wherein R 1 and R 2 are each independently a hydrogen atom, an alkyl group having ≤10 carbon atoms or a cyclic aliphatic hydrocarbon group, provided that at least one of them is a cyclic aliphatic hydrocarbon group) is provided. The fluoropolymer has a monomer unit derived from cyclic polymerization of the fluorine-containing diene. A preparation method of the fluoropolymer is also provided. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供具有羟基并在宽波长范围内显示高透明度的氟聚合物，特别是在≤200nm的波长下。解决方案：式（1）的含氟二烯：CF 2 SBB = CFCH 2 SBB CH 2（C（CF 3 SB 3） SB> 2 OH）CH CR 1 = CHR 2其中R 1 和R lt; SP＆gt; 2＆lt; SP＆gt;各自独立地为氢原子，碳原子数为10以上的烷基或环状脂族烃基，条件是其中至少一个为环状脂族烃基）。含氟聚合物具有衍生自含氟二烯的环状聚合的单体单元。还提供了含氟聚合物的制备方法。版权所有（C）2005，JPO＆NCIPI

8. 发明专利

JP2005097531A Fluorocopolymer, method of producing the same, and resist composition containing the same 审中-公开
标题翻译：氟聚合物，其制造方法和含有它们的耐热组合物
公开(公告)号：JP2005097531A
公开(公告)日：2005-04-14
申请号：JP2004131485
申请日：2004-04-27
申请人： Asahi Glass Co Ltd , 旭硝子株式会社
发明人： TAKEBE YOKO , EDA MASATAKA , YOKOKOJI OSAMU
IPC分类号： G03F7/039 , C08F220/10 , C08F236/20 , G03F7/004 , H01L21/027
CPC分类号： C08F236/20 , G03F7/0046 , G03F7/0395 , G03F7/0397
摘要： PROBLEM TO BE SOLVED: To provide a fluorocopolymer which has functional groups and high transparency in a wide wavelength region, and a resist composition comprising the fluoropolymer.
SOLUTION: The fluorocopolymer has units derived from a monomer unit obtained by cyclopolymerization of a fluorinated diene represented by formula (1) and units derived from another monomer unit obtained by cyclopolymerization or units derived from a monomer unit obtained by polymerization of an acrylic monomer. The resist composition contains the fluorocopolymer as a base polymer. The formula(1) is CF
2 =CFCH
2 CH(CH
2 C(CF
3 )
2 (OR
1 ))CH
2 CH=CH
2 . In the formula, R
1 is a hydrogen atom, a 20C or lower alkyl group optionally having an etheric oxygen atom, a 6C or lower alkoxycarbonyl group, or CH
2 R
2 (where R
2 is a 6C or lower alkoxycarbonyl group).
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供在宽波长区域具有官能团和高透明度的含氟共聚物和包含含氟聚合物的抗蚀剂组合物。解决方案：含氟共聚物具有衍生自通过式（1）表示的氟化二烯的环化聚合获得的单体单元的单元和由通过环化聚合获得的另一单体单元衍生的单元或衍生自通过丙烯酸聚合获得的单体单元的单元单体。抗蚀剂组合物含有作为基础聚合物的含氟共聚物。式（1）为CF 2 SB SB = CH 2 CH 2 CH 3（SB <3）SB > 2 （OR 1 ））CH 2 CH = CH 2 。在该式中，R SP 1是氢原子，任选具有醚性氧原子的20C或低级烷基，6C或低级烷氧基羰基或CH 2 SP> 2 （其中R 2 是6C或低级烷氧基羰基）。版权所有（C）2005，JPO＆NCIPI

9. 发明专利

JP2003284921A Recovery method for fluorine-containing emulsifier 审中-公开
标题翻译：含氟含量乳化剂的回收方法
公开(公告)号：JP2003284921A
公开(公告)日：2003-10-07
申请号：JP2002092032
申请日：2002-03-28
申请人： Asahi Glass Co Ltd , 旭硝子株式会社
发明人： FUNAKI CHU , EDA MASATAKA , KAMIYA HIROKI , YANASE NOBUKAZU
IPC分类号： B01D53/70 , B01D53/14 , B01D53/34 , B01D53/77 , C02F1/58
CPC分类号： B01D53/14 , B01D2257/2066 , Y02C20/30
摘要： PROBLEM TO BE SOLVED: To provide a method for recovering a fluorine-containing emulsifier container in the exhaust gas from a fluorine-containing polymer drying and heat-treating process in a high recovery ratio. SOLUTION: The exhaust gas of the drying process and/or the heat treatment process of the fluorine-containing polymer containing the fluorine-containing emulsifier, which is obtained by emulsion polymerization or aqueous dispersion polymerization in an aqueous medium containing the fluorine-containing emulsifier, is brought into contact with an aqueous solution the pH of which is adjusted to 7- COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供一种以高回收率从含氟聚合物干燥和热处理工艺中回收废气中的含氟乳化剂容器的方法。解决方案：含有含氟乳化剂的含氟聚合物的干燥过程的废气和/或热处理工艺，其通过乳液聚合或含水分散聚合在含有氟聚合物的水性介质中获得，使用碱将碱性水溶液吸收含氟乳化剂，将其pH调节至7〜12的水溶液接触。在含氟乳化剂的水溶液中形成层状复合氢氧化物，将含氟乳化剂固定在待回收的复合氢氧化物层之间的间隙。版权所有（C）2004，JPO

10. 发明专利

AU2003203383A1 METHOD OF RECOVERING FLUOROCHEMICAL EMULSIFYING AGENT 未知
公开(公告)号：AU2003203383A1
公开(公告)日：2003-09-02
申请号：AU2003203383
申请日：2003-01-24
申请人： ASAHI GLASS CO LTD , JEMCO INC
发明人： YANASE KOICHI , EDA MASATAKA , KAMIYA HIROKI , OMORI KOTA , KAMIYA TAKESHI
IPC分类号： C02F1/58 , B01D11/04 , B01D17/02 , C02F1/52 , C09K23/00
摘要： A method of recovering a fluorochemical emulsifying agent with a lamellar composite hydroxide from a wastewater resulting from polymerization for fluoropolymer production and containing the fluorochemical emulsifying agent, which comprises yielding a lamellar composite hydroxide containing the fluorochemical emulsifying agent trapped between sheets thereof, separating the lamellar composite hydroxide from the coagulation wastewater, dissolving the hydroxide in a mineral acid, and extracting the fluorochemical emulsifying agent from the solution with a fluorinated hydrocarbon. The fluorochemical emulsifying agent can be economically recovered through a simple procedure.

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