专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20130104938A1 Methods For Mixed Acid Cleaning Of Showerhead Electrodes 有权
标题翻译：淋浴头电极混合酸洗方法
公开(公告)号：US20130104938A1
公开(公告)日：2013-05-02
申请号：US13483597
申请日：2012-05-30
申请人： Armen Avoyan , Cliff La Croix , Hong Shih , John Daugherty
发明人： Armen Avoyan , Cliff La Croix , Hong Shih , John Daugherty
IPC分类号： B08B9/00
CPC分类号： H01J37/3288 , B08B3/04 , B08B3/08 , B08B9/0323 , B08B9/0328 , C23C16/4407 , H01J37/3244 , H01J37/32889
摘要： In one embodiment, a method for cleaning a showerhead electrode my include sealing a showerhead electrode within a cleaning assembly such that a first cleaning volume is formed on a first side of the showerhead electrode and a second cleaning volume is formed on a second side of the showerhead electrode. An acidic solution can be loaded into the first cleaning volume on the first side of the showerhead electrode. The first cleaning volume on the first side of the showerhead electrode can be pressurized such that at least a portion of the acidic solution flows through one or more of the plurality of gas passages of the showerhead electrode. An amount of purified water can be propelled through the second cleaning volume on the second side of the showerhead electrode, and into contact with the second side of the showerhead electrode.
摘要翻译：在一个实施例中，一种用于清洁喷头电极的方法包括将喷头电极密封在清洁组件内，使得在喷头电极的第一侧上形成第一清洁体积，并且在第二侧面上形成第二清洁体积喷头电极酸性溶液可以装载到喷头电极的第一侧上的第一清洁体积中。可以对喷头电极的第一侧上的第一清洁体积进行加压，使得至少一部分酸性溶液流过喷头电极的多个气体通道中的一个或多个。净化水的量可以通过喷头电极第二侧上的第二清洁体积推进，并与喷头电极的第二侧接触。

2. 发明申请

US20130104942A1 Mixed Acid Cleaning Assemblies 有权
标题翻译：混合酸洗组件
公开(公告)号：US20130104942A1
公开(公告)日：2013-05-02
申请号：US13483566
申请日：2012-05-30
申请人： Armen Avoyan , Cliff La Croix , Hong Shih , John Daugherty
发明人： Armen Avoyan , Cliff La Croix , Hong Shih , John Daugherty
IPC分类号： B08B3/00
CPC分类号： H01J37/3288 , B08B3/04 , B08B3/08 , B08B9/0323 , B08B9/0328 , C23C16/4407 , H01J37/3244 , H01J37/32889
摘要： In one embodiment, a cleaning assembly may include a modular electrode sealing housing, an acid injection inlet, and a fluid injection inlet. The modular electrode sealing housing may include a high pressure closure member that contains a first cleaning volume and a low pressure closure member that contains a second cleaning volume. The acid injection inlet can be in fluid communication with the first cleaning volume of the high pressure closure member. The fluid injection inlet can be in fluid communication with the second cleaning volume of the low pressure closure member. During normal operation, a showerhead electrode can be sealed within the modular electrode sealing housing such that the first cleaning volume is located on a first side and the second cleaning volume is located on a second side of the showerhead electrode.
摘要翻译：在一个实施例中，清洁组件可以包括模块化电极密封壳体，酸注射入口和流体注射入口。模块化电极密封壳体可以包括包含第一清洁体积的高压关闭构件和包含第二清洁体积的低压关闭构件。酸注入口可以与高压关闭构件的第一清洁体积流体连通。流体注射入口可以与低压关闭构件的第二清洁体积流体连通。在正常操作期间，喷头电极可以密封在模块化电极密封壳体内，使得第一清洁体积位于第一侧上，第二清洁体积位于喷头电极的第二侧。

3. 发明授权

US09293305B2 Mixed acid cleaning assemblies 有权
标题翻译：混合酸洗组件
公开(公告)号：US09293305B2
公开(公告)日：2016-03-22
申请号：US13483566
申请日：2012-05-30
申请人： Armen Avoyan , Cliff La Croix , Hong Shih , John Daugherty
发明人： Armen Avoyan , Cliff La Croix , Hong Shih , John Daugherty
IPC分类号： B08B3/08 , H01J37/32 , B08B9/032 , B08B3/04 , C23C16/44
CPC分类号： H01J37/3288 , B08B3/04 , B08B3/08 , B08B9/0323 , B08B9/0328 , C23C16/4407 , H01J37/3244 , H01J37/32889
摘要： In one embodiment, a cleaning assembly may include a modular electrode sealing housing, an acid injection inlet, and a fluid injection inlet. The modular electrode sealing housing may include a high pressure closure member that contains a first cleaning volume and a low pressure closure member that contains a second cleaning volume. The acid injection inlet can be in fluid communication with the first cleaning volume of the high pressure closure member. The fluid injection inlet can be in fluid communication with the second cleaning volume of the low pressure closure member. During normal operation, a showerhead electrode can be sealed within the modular electrode sealing housing such that the first cleaning volume is located on a first side and the second cleaning volume is located on a second side of the showerhead electrode.
摘要翻译：在一个实施例中，清洁组件可以包括模块化电极密封壳体，酸注射入口和流体注射入口。模块化电极密封壳体可以包括包含第一清洁体积的高压关闭构件和包含第二清洁体积的低压关闭构件。酸注入口可以与高压关闭构件的第一清洁体积流体连通。流体注射入口可以与低压关闭构件的第二清洁体积流体连通。在正常操作期间，喷头电极可以密封在模块化电极密封壳体内，使得第一清洁体积位于第一侧上，第二清洁体积位于喷头电极的第二侧。

4. 发明授权

US09396912B2 Methods for mixed acid cleaning of showerhead electrodes 有权
标题翻译：喷头电极混合酸洗方法
公开(公告)号：US09396912B2
公开(公告)日：2016-07-19
申请号：US13483597
申请日：2012-05-30
申请人： Armen Avoyan , Cliff La Croix , Hong Shih , John Daugherty
发明人： Armen Avoyan , Cliff La Croix , Hong Shih , John Daugherty
IPC分类号： B08B3/08 , B08B9/00 , H01J37/32 , B08B9/032 , B08B3/04 , C23C16/44
CPC分类号： H01J37/3288 , B08B3/04 , B08B3/08 , B08B9/0323 , B08B9/0328 , C23C16/4407 , H01J37/3244 , H01J37/32889
摘要： In one embodiment, a method for cleaning a showerhead electrode my include sealing a showerhead electrode within a cleaning assembly such that a first cleaning volume is formed on a first side of the showerhead electrode and a second cleaning volume is formed on a second side of the showerhead electrode. An acidic solution can be loaded into the first cleaning volume on the first side of the showerhead electrode. The first cleaning volume on the first side of the showerhead electrode can be pressurized such that at least a portion of the acidic solution flows through one or more of the plurality of gas passages of the showerhead electrode. An amount of purified water can be propelled through the second cleaning volume on the second side of the showerhead electrode, and into contact with the second side of the showerhead electrode.
摘要翻译：在一个实施例中，一种用于清洁喷头电极的方法包括将喷头电极密封在清洁组件内，使得在喷头电极的第一侧上形成第一清洁体积，并且在第二侧面上形成第二清洁体积喷头电极酸性溶液可以装载到喷头电极的第一侧上的第一清洁体积中。可以对喷头电极的第一侧上的第一清洁体积进行加压，使得至少一部分酸性溶液流过喷头电极的多个气体通道中的一个或多个。净化水的量可以通过喷头电极第二侧上的第二清洁体积推进，并与喷头电极的第二侧接触。

5. 发明申请

US20130019907A1 Dual Phase Cleaning Chambers and Assemblies Comprising The Same 有权
标题翻译：双相清洗室和组件包括它
公开(公告)号：US20130019907A1
公开(公告)日：2013-01-24
申请号：US13186827
申请日：2011-07-20
申请人： Armen Avoyan , Cliff La Croix , Hong Shih
发明人： Armen Avoyan , Cliff La Croix , Hong Shih
IPC分类号： B08B3/00
CPC分类号： H01J37/32862 , B08B3/00 , B08B3/02 , H01J21/00 , H01J37/32532 , H01L21/00
摘要： In one embodiment, a dual phase cleaning chamber may include a turbulent mixing chamber, a fluid diffuser, an isostatic pressure chamber and a rupture mitigating nozzle. The turbulent mixing chamber may be in fluid communication with a first fluid inlet and a second fluid inlet. The fluid diffuser may be in fluid communication with the turbulent mixing chamber. The rupture mitigating nozzle may include a first fluid collecting offset, a second fluid collecting offset, and a displacement damping projection. The displacement damping projection may be disposed between the first and second fluid collecting offset and may be offset away from each of the first fluid collecting offset and the second fluid collecting offset, and towards the fluid diffuser. A pressurized cleaning fluid introduced from the first fluid inlet, the second fluid inlet, or both flows through the outlet passage of the first and second fluid collecting offset.
摘要翻译：在一个实施例中，双相清洗室可以包括湍流混合室，流体扩散器，等静压压力室和破裂缓冲喷嘴。湍流混合室可以与第一流体入口和第二流体入口流体连通。流体扩散器可以与湍流混合室流体连通。破裂缓冲喷嘴可以包括第一流体收集偏移，第二流体收集偏移和位移阻尼突起。位移阻尼突起可以设置在第一和第二流体收集偏移之间，并且可以偏离第一流体收集偏移和第二流体收集偏移中的每一个并且朝向流体扩散器偏移。从第一流体入口，第二流体入口或二者引入的加压清洁流体流过第一和第二流体收集偏移的出口通道。

6. 发明授权

US09245719B2 Dual phase cleaning chambers and assemblies comprising the same 有权
标题翻译：双相清洗室及其组合体
公开(公告)号：US09245719B2
公开(公告)日：2016-01-26
申请号：US13186827
申请日：2011-07-20
申请人： Armen Avoyan , Cliff La Croix , Hong Shih
发明人： Armen Avoyan , Cliff La Croix , Hong Shih
IPC分类号： B08B3/00 , H01L21/00 , H01L37/00 , H01J37/32 , H01J21/00
CPC分类号： H01J37/32862 , B08B3/00 , B08B3/02 , H01J21/00 , H01J37/32532 , H01L21/00
摘要： In one embodiment, a dual phase cleaning chamber may include a turbulent mixing chamber, a fluid diffuser, an isostatic pressure chamber and a rupture mitigating nozzle. The turbulent mixing chamber may be in fluid communication with a first fluid inlet and a second fluid inlet. The fluid diffuser may be in fluid communication with the turbulent mixing chamber. The rupture mitigating nozzle may include a first fluid collecting offset, a second fluid collecting offset, and a displacement damping projection. The displacement damping projection may be disposed between the first and second fluid collecting offset and may be offset away from each of the first fluid collecting offset and the second fluid collecting offset, and towards the fluid diffuser. A pressurized cleaning fluid introduced from the first fluid inlet, the second fluid inlet, or both flows through the outlet passage of the first and second fluid collecting offset.
摘要翻译：在一个实施例中，双相清洗室可以包括湍流混合室，流体扩散器，等静压压力室和破裂缓冲喷嘴。湍流混合室可以与第一流体入口和第二流体入口流体连通。流体扩散器可以与湍流混合室流体连通。破裂缓冲喷嘴可以包括第一流体收集偏移，第二流体收集偏移和位移阻尼突起。位移阻尼突起可以设置在第一和第二流体收集偏移之间，并且可以偏离第一流体收集偏移和第二流体收集偏移中的每一个并且朝向流体扩散器偏移。从第一流体入口，第二流体入口或二者引入的加压清洁流体流过第一和第二流体收集偏移的出口通道。

7. 发明授权

US08580079B2 Electrode carrier assemblies 有权
标题翻译：电极载体组件
公开(公告)号：US08580079B2
公开(公告)日：2013-11-12
申请号：US12817699
申请日：2010-06-17
申请人： Cliff La Croix , Armen Avoyan , Duane Outka , Catherine Zhou , Hong Shih
发明人： Cliff La Croix , Armen Avoyan , Duane Outka , Catherine Zhou , Hong Shih
IPC分类号： H01J1/94
CPC分类号： H01J37/32532 , H01J37/32431
摘要： In accordance with one embodiment of the present disclosure, an electrode carrier assembly is provided including an electrode carrying annulus and a plurality of electrode mounting members. The electrode carrying annulus includes an electrode containment sidewall that forms an inner or outer radius of the electrode carrying annulus. The electrode carrying annulus further includes a plurality of radial sidewall projections that project radially away from the electrode containment sidewall. The radial sidewall projections each include an upward-facing tapered spacer including an upward-facing micro-mesa. The electrode mounting members each include a downward-facing tapered spacer including a downward-facing micro-mesa. The electrode mounting members are rotatably engaged with the electrode carrying annulus, and are configured to rotate between a free position and a bracketed position.
摘要翻译：根据本公开的一个实施例，提供了一种电极载体组件，其包括承载环的电极和多个电极安装构件。承载电极的电极包括形成电极承载环的内部或外部半径的电极容纳侧壁。承载电极的电极还包括多个径向侧壁突起，其径向突出远离电极容纳侧壁。径向侧壁突起各自包括面向上的微型台面的向上的锥形间隔件。电极安装构件各自包括面向下的微型台面的朝下的锥形间隔件。电极安装构件可旋转地与电极承载环形接合，并且构造成在空闲位置和支架位置之间旋转。

8. 发明授权

US08444456B2 Electrode securing platens and electrode polishing assemblies incorporating the same 有权
标题翻译：电极固定压板和电极抛光组件
公开(公告)号：US08444456B2
公开(公告)日：2013-05-21
申请号：US12917794
申请日：2010-11-02
申请人： Cliff La Croix , Armen Avoyan , Duane Outka , Catherine Zhou , Hong Shih
发明人： Cliff La Croix , Armen Avoyan , Duane Outka , Catherine Zhou , Hong Shih
IPC分类号： H01L21/304 , H01J1/88
CPC分类号： B24B37/30 , B24B41/061
摘要： In one embodiment, an electrode polishing assembly may include an electrode securing platen, a plurality of electrode locating fasteners, and an electrode. Each of the electrode locating fasteners may include an electrode spacing shoulder, a variance cancelling shoulder extending from the electrode spacing shoulder, a threaded platen clamping portion extending from the variance cancelling shoulder, and a threaded nut that engages the threaded platen clamping portion. The electrode locating fasteners clamp the electrode securing platen between the threaded nut and the electrode spacing shoulder. The variance cancelling shoulder is at least partially within one of a plurality of variance cancelling passages of the electrode securing platen. A minimum position stack-up is equal to a minimum passage size minus a maximum shoulder size. A maximum position stack-up is equal to a maximum passage size minus a minimum shoulder size. The maximum position stack-up is greater than the minimum position stack-up.
摘要翻译：在一个实施例中，电极抛光组件可以包括电极固定压板，多个电极定位紧固件和电极。每个电极定位紧固件可以包括电极间隔肩部，从电极间隔肩部延伸的方差消除肩部，从变形消除肩部延伸的螺纹压板夹持部分和与螺纹压板夹持部分接合的螺纹螺母。电极定位紧固件将电极固定压板夹在螺母和电极间隔肩之间。方差消除肩部至少部分地在电极固定台板的多个方差消除通路之一内。最小位置叠加等于最小通道尺寸减去最大肩部尺寸。最大位置叠加等于最大通道尺寸减去最小肩部尺寸。最大位置叠加大于最小位置叠加。

9. 发明申请

US20120108152A1 Electrode Securing Platens And Electrode Polishing Assemblies Incorporating The Same 有权
标题翻译：电极固定压板和电极抛光组件结合在一起
公开(公告)号：US20120108152A1
公开(公告)日：2012-05-03
申请号：US12917794
申请日：2010-11-02
申请人： Cliff La Croix , Armen Avoyan , Duane Outka , Catherine Zhou , Hong Shih
发明人： Cliff La Croix , Armen Avoyan , Duane Outka , Catherine Zhou , Hong Shih
IPC分类号： B24B41/06
CPC分类号： B24B37/30 , B24B41/061
摘要： In one embodiment, an electrode polishing assembly may include an electrode securing platen, a plurality of electrode locating fasteners, and an electrode. Each of the electrode locating fasteners may include an electrode spacing shoulder, a variance cancelling shoulder extending from the electrode spacing shoulder, a threaded platen clamping portion extending from the variance cancelling shoulder, and a threaded nut that engages the threaded platen clamping portion. The electrode locating fasteners clamp the electrode securing platen between the threaded nut and the electrode spacing shoulder. The variance cancelling shoulder is at least partially within one of a plurality of variance cancelling passages of the electrode securing platen. A minimum position stack-up is equal to a minimum passage size minus a maximum shoulder size. A maximum position stack-up is equal to a maximum passage size minus a minimum shoulder size. The maximum position stack-up is greater than the minimum position stack-up.
摘要翻译：在一个实施例中，电极抛光组件可以包括电极固定压板，多个电极定位紧固件和电极。每个电极定位紧固件可以包括电极间隔肩部，从电极间隔肩部延伸的方差消除肩部，从变形消除肩部延伸的螺纹压板夹持部分和与螺纹压板夹持部分接合的螺纹螺母。电极定位紧固件将电极固定压板夹在螺母和电极间隔肩之间。方差消除肩部至少部分地在电极固定台板的多个方差消除通路之一内。最小位置叠加等于最小通道尺寸减去最大肩部尺寸。最大位置叠加等于最大通道尺寸减去最小肩部尺寸。最大位置叠加大于最小位置叠加。

10. 发明申请

US20110308732A1 Electrode Carrier Assemblies 有权
标题翻译：电极载体组件
公开(公告)号：US20110308732A1
公开(公告)日：2011-12-22
申请号：US12817699
申请日：2010-06-17
申请人： Cliff La Croix , Armen Avoyan , Duane Outka , Catherine Zhou , Hong Shih
发明人： Cliff La Croix , Armen Avoyan , Duane Outka , Catherine Zhou , Hong Shih
IPC分类号： H01J1/94
CPC分类号： H01J37/32532 , H01J37/32431
摘要： In accordance with one embodiment of the present disclosure, an electrode carrier assembly is provided including an electrode carrying annulus and a plurality of electrode mounting members. The electrode carrying annulus includes an electrode containment sidewall that forms an inner or outer radius of the electrode carrying annulus. The electrode carrying annulus further includes a plurality of radial sidewall projections that project radially away from the electrode containment sidewall. The radial sidewall projections each include an upward-facing tapered spacer including an upward-facing micro-mesa. The electrode mounting members each include a downward-facing tapered spacer including a downward-facing micro-mesa. The electrode mounting members are rotatably engaged with the electrode carrying annulus, and are configured to rotate between a free position and a bracketed position.
摘要翻译：根据本公开的一个实施例，提供了一种电极载体组件，其包括承载环的电极和多个电极安装构件。承载电极的电极包括形成电极承载环的内部或外部半径的电极容纳侧壁。承载电极的电极还包括多个径向侧壁突起，其径向突出远离电极容纳侧壁。径向侧壁突起各自包括面向上的微型台面的向上的锥形间隔件。电极安装构件各自包括面向下的微型台面的朝下的锥形间隔件。电极安装构件可旋转地与电极承载环形接合，并且构造成在空闲位置和支架位置之间旋转。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式