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1. 发明申请

US20070296539A1 DOUBLY-ANCHORED THERMAL ACTUATOR HAVING VARYING FLEXURAL RIGIDITY 有权
标题翻译：具有变化的弯曲刚度的双重安装的致动器
公开(公告)号：US20070296539A1
公开(公告)日：2007-12-27
申请号：US11849378
申请日：2007-09-04
申请人： Antonio Cabal , Stephen Pond
发明人： Antonio Cabal , Stephen Pond
IPC分类号： H01H71/16 , B41J2/05
CPC分类号： H01H61/02 , H01H37/00 , H01H2061/006
摘要： A doubly-anchored thermal actuator for a micro-electromechanical device such as a liquid drop emitter or a fluid control microvalve is disclosed. The thermal actuator is comprised of a base element formed with a depression having opposing anchor. A deformable element, attached to the base element at the opposing anchor edges, is constructed as a planar lamination including a first layer of a first material having a low coefficient of thermal expansion and a second layer of a second material having a high coefficient of thermal expansion. The deformable element has anchor portions adjacent the anchor edges and a central portion between the anchor portions wherein the flexural rigidity of the anchor portions is substantially less than the flexural rigidity of the central portion. The doubly-anchored thermal actuator further comprises apparatus adapted to apply a heat pulse to the deformable element that causes a sudden rise in the temperature of the deformable element. The deformable element bows outward in a direction toward the second layer, and then relaxes to a residual shape as the temperature decreases. The doubly-anchored thermal actuator is configured with a liquid chamber having a nozzle or a fluid flow port to form a liquid drop emitter or a fluid control microvalve, or to activate an electrical microswitch. Heat pulses are applied to the deformable element by resistive heating or by light energy pulses.
摘要翻译：公开了一种用于诸如液滴发射器或流体控制微型阀的微机电装置的双重锚定的热致动器。热致动器包括形成有具有相对的锚的凹陷的基座元件。在相对的锚边缘处附接到基体元件的可变形元件被构造为平面层压，其包括具有低热膨胀系数的第一材料的第一层和具有高热系数的第二材料的第二层扩张。可变形元件具有邻近锚定边缘的锚固部分和锚固部分之间的中心部分，其中锚固部分的抗弯刚度基本上小于中心部分的弯曲刚度。双重锚固的热致动器还包括适于将热脉冲施加到可变形元件上的装置，其引起可变形元件的温度的突然上升。可变形元件在朝向第二层的方向上向外弯曲，然后随着温度降低而松弛至残留形状。双重锚固的热致动器配置有具有喷嘴或流体流动端口的液体室，以形成液滴发射器或流体控制微型阀，或者激活电微型开关。加热脉冲通过电阻加热或光能脉冲施加到可变形元件。

2. 发明申请

US20050046672A1 Thermally conductive thermal actuator and liquid drop emitter using same 有权
标题翻译：导热式热致动器和使用其的液滴式发射器
公开(公告)号：US20050046672A1
公开(公告)日：2005-03-03
申请号：US10650874
申请日：2003-08-28
申请人： Antonio Cabal , John Lebens , Stephen Pond
发明人： Antonio Cabal , John Lebens , Stephen Pond
IPC分类号： B41J2/14 , B41J2/04
CPC分类号： B41J2/14427 , B41J2202/03
摘要： A thermal actuator for a micro-electromechanical device, especially a liquid drop emitter for ink jet printing, is disclosed. The thermal actuator comprises a base element and a movable element extending from the base element and residing at a first position. The movable element includes a barrier layer constructed of a barrier material having low thermal conductivity material, bonded between a first layer and a second layer; wherein the first layer is constructed of a first material having a high coefficient of thermal expansion and the second layer is constructed of a second material having a high thermal conductivity and a high Young's modulus. An apparatus is provided adapted to apply a heat pulse directly to the first layer, causing a thermal expansion of the first layer relative to the second layer and deflection of the movable element to a second position, followed by relaxation of the movable element towards the first position as heat diffuses through the barrier layer to the second layer. Configurations of the movable element as a cantilever, doubly-anchored beam and clamped plate are disclosed. Diamond and silicon carbide materials are well suited for use as the second material. Titanium aluminide is a preferred material for the first material.
摘要翻译：公开了用于微机电装置的热致动器，特别是用于喷墨印刷的液滴发射器。热致动器包括基座元件和从基座元件延伸并位于第一位置的可移动元件。可移动元件包括由具有低导热性材料的阻挡材料构成的阻挡层，结合在第一层和第二层之间; 其中所述第一层由具有高热膨胀系数的第一材料构成，所述第二层由具有高热导率和高杨氏模量的第二材料构成。提供一种适于将加热脉冲直接施加到第一层的装置，引起第一层相对于第二层的热膨胀和可移动元件的偏转到第二位置，随后可移动元件朝向第一层松弛作为热的位置通过阻挡层扩散到第二层。公开了作为悬臂，双重锚定梁和夹紧板的可移动元件的构造。金刚石和碳化硅材料非常适合用作第二种材料。钛酸铝是第一种材料的优选材料。

3. 发明申请

US20060109309A1 Doubly-anchored thermal actuator having varying flexural rigidity 有权
公开(公告)号：US20060109309A1
公开(公告)日：2006-05-25
申请号：US10994686
申请日：2004-11-22
申请人： Antonio Cabal , Stephen Pond
发明人： Antonio Cabal , Stephen Pond
IPC分类号： B41J2/04
CPC分类号： B41J2/14427 , B41J2/1628 , B41J2/1629 , B41J2/1639 , B41J2/1646 , B41J2/1648 , B41J2/17596
摘要： A doubly-anchored thermal actuator for a micro-electromechanical device such as a liquid drop emitter or a fluid control microvalve is disclosed. The thermal actuator is comprised of a base element formed with a depression having opposing anchor. A deformable element, attached to the base element at the opposing anchor edges, is constructed as a planar lamination including a first layer of a first material having a low coefficient of thermal expansion and a second layer of a second material having a high coefficient of thermal expansion. The deformable element has anchor portions adjacent the anchor edges and a central portion between the anchor portions wherein the flexural rigidity of the anchor portions is substantially less than the flexural rigidity of the central portion. The doubly-anchored thermal actuator further comprises apparatus adapted to apply a heat pulse to the deformable element that causes a sudden rise in the temperature of the deformable element. The deformable element bows outward in a direction toward the second layer, and then relaxes to a residual shape as the temperature decreases. The doubly-anchored thermal actuator is configured with a liquid chamber having a nozzle or a fluid flow port to form a liquid drop emitter or a fluid control microvalve, or to activate an electrical microswitch. Heat pulses are applied to the deformable element by resistive heating or by light energy pulses.

4. 发明申请

US20050052498A1 Tapered multi-layer thermal actuator and method of operating same 失效
公开(公告)号：US20050052498A1
公开(公告)日：2005-03-10
申请号：US10953398
申请日：2004-09-29
申请人： Christopher Delametter , Edward Furlani , John Lebens , David Trauernicht , Antonio Cabal , David Ross , Stephen Pond
发明人： Christopher Delametter , Edward Furlani , John Lebens , David Trauernicht , Antonio Cabal , David Ross , Stephen Pond
IPC分类号： B41J2/045 , B05C5/00 , B41J2/055 , B41J2/14 , B41J2/16 , B81B3/00 , B41J2/04
CPC分类号： B41J2/14427 , B41J2/1628 , B41J2/1631 , B41J2/1648
摘要： An apparatus for and method of operating a thermal actuator for a micromechanical device, especially a liquid drop emitter such as an ink jet printhead, is disclosed. The disclosed thermal actuator comprises a base element and a cantilevered element including a thermo-mechanical bender portion extending from the base element to a free end tip. The thermo-mechanical bender portion includes a barrier layer constructed of a dielectric material having low thermal conductivity, a first deflector layer constructed of a first electrically resistive material having a large coefficient of thermal expansion, and a second deflector layer constructed of a second electrically resistive material having a large coefficient of thermal expansion wherein the barrier layer is bonded between the first and second deflector layers. The thermo-mechanical bender portion further has a base end and base end width, wb, adjacent the base element, and a free end and free end width, wf, adjacent the free end tip, wherein the base end width is substantially greater than the free end width. A first heater resistor is formed in the first deflector layer and adapted to apply heat energy having a first spatial thermal pattern which results in a first deflector layer base end temperature increase, ΔT1b, that is greater than a first deflector layer free end temperature increase, ΔT1f. A second heater resistor is formed in the second deflector layer and adapted to apply heat energy having a second spatial thermal pattern which results in a second deflector layer base end temperature increase, ΔT2b that is greater than a second deflector layer free end temperature increase, ΔT2f. Application of an electrical pulse to either the first or second heater resistors causes deflection of the cantilevered element, followed by restoration of the cantilevered element to an initial position as heat diffuses through the barrier layer and the cantilevered element reaches a uniform temperature. For liquid drop emitter embodiments, the thermal actuator resides in a liquid-filled chamber that includes a nozzle for ejecting liquid. Application of electrical pulses to the heater resistors is used to adjust the characteristics of liquid drop emission. The barrier layer exhibits a heat transfer time constant τB. The thermal actuator is activated by a heat pulses of duration τP wherein τP

5. 发明申请

US20060109314A1 Doubly-anchored thermal actuator having varying flexural rigidity 有权
公开(公告)号：US20060109314A1
公开(公告)日：2006-05-25
申请号：US10994952
申请日：2004-11-22
申请人： Antonio Cabal , Stephen Pond
发明人： Antonio Cabal , Stephen Pond
IPC分类号： B41J2/05
CPC分类号： B41J2/14 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1639 , B41J2/1646 , B41J2002/14346
摘要： A doubly-anchored thermal actuator for a micro-electromechanical device such as a liquid drop emitter or a fluid control microvalve is disclosed. The thermal actuator is comprised of a base element formed with a depression having opposing anchor. A deformable element, attached to the base element at the opposing anchor edges, is constructed as a planar lamination including a first layer of a first material having a low coefficient of thermal expansion and a second layer of a second material having a high coefficient of thermal expansion. The deformable element has anchor portions adjacent the anchor edges and a central portion between the anchor portions wherein the flexural rigidity of the anchor portions is substantially less than the flexural rigidity of the central portion. The doubly-anchored thermal actuator further comprises apparatus adapted to apply a heat pulse to the deformable element that causes a sudden rise in the temperature of the deformable element. The deformable element bows outward in a direction toward the second layer, and then relaxes to a residual shape as the temperature decreases. The doubly-anchored thermal actuator is configured with a liquid chamber having a nozzle or a fluid flow port to form a liquid drop emitter or a fluid control microvalve, or to activate an electrical microswitch. Heat pulses are applied to the deformable element by resistive heating or by light energy pulses.

6. 发明申请

US20060109075A1 Doubly-anchored thermal actuator having varying flexural rigidity 有权
公开(公告)号：US20060109075A1
公开(公告)日：2006-05-25
申请号：US10999645
申请日：2004-11-22
申请人： Antonio Cabal , Stephen Pond
发明人： Antonio Cabal , Stephen Pond
IPC分类号： H01H37/52
CPC分类号： H01H61/02 , H01H37/00 , H01H2061/006
摘要： A doubly-anchored thermal actuator for a micro-electromechanical device such as a liquid drop emitter or a fluid control microvalve is disclosed. The thermal actuator is comprised of a base element formed with a depression having opposing anchor. A deformable element, attached to the base element at the opposing anchor edges, is constructed as a planar lamination including a first layer of a first material having a low coefficient of thermal expansion and a second layer of a second material having a high coefficient of thermal expansion. The deformable element has anchor portions adjacent the anchor edges and a central portion between the anchor portions wherein the flexural rigidity of the anchor portions is substantially less than the flexural rigidity of the central portion. The doubly-anchored thermal actuator further comprises apparatus adapted to apply a heat pulse to the deformable element that causes a sudden rise in the temperature of the deformable element. The deformable element bows outward in a direction toward the second layer, and then relaxes to a residual shape as the temperature decreases. The doubly-anchored thermal actuator is configured with a liquid chamber having a nozzle or a fluid flow port to form a liquid drop emitter or a fluid control microvalve, or to activate an electrical microswitch. Heat pulses are applied to the deformable element by resistive heating or by light energy pulses.

7. 发明申请

US20050052496A1 Tapered multi-layer thermal actuator and method of operating same 失效
公开(公告)号：US20050052496A1
公开(公告)日：2005-03-10
申请号：US10953401
申请日：2004-09-29
申请人： Christopher Delametter , Edward Furlani , John Lebens , David Trauernicht , Antonio Cabal , David Ross , Stephen Pond
发明人： Christopher Delametter , Edward Furlani , John Lebens , David Trauernicht , Antonio Cabal , David Ross , Stephen Pond
IPC分类号： B41J2/045 , B05C5/00 , B41J2/055 , B41J2/14 , B41J2/16 , B81B3/00 , B41J2/04
CPC分类号： B41J2/14427 , B41J2/1628 , B41J2/1631 , B41J2/1648
摘要： An apparatus for and method of operating a thermal actuator for a micromechanical device, especially a liquid drop emitter such as an ink jet printhead, is disclosed. The disclosed thermal actuator comprises a base element and a cantilevered element including a thermo-mechanical bender portion extending from the base element to a free end tip. The thermo-mechanical bender portion includes a barrier layer constructed of a dielectric material having low thermal conductivity, a first deflector layer constructed of a first electrically resistive material having a large coefficient of thermal expansion, and a second deflector layer constructed of a second electrically resistive material having a large coefficient of thermal expansion wherein the barrier layer is bonded between the first and second deflector layers. The thermo-mechanical bender portion further has a base end and base end width, wb, adjacent the base element, and a free end and free end width, wf, adjacent the free end tip, wherein the base end width is substantially greater than the free end width. A first heater resistor is formed in the first deflector layer and adapted to apply heat energy having a first spatial thermal pattern which results in a first deflector layer base end temperature increase, ΔT1b, that is greater than a first deflector layer free end temperature increase, ΔT1f. A second heater resistor is formed in the second deflector layer and adapted to apply heat energy having a second spatial thermal pattern which results in a second deflector layer base end temperature increase, ΔT2b that is greater than a second deflector layer free end temperature increase, ΔT2f. Application of an electrical pulse to either the first or second heater resistors causes deflection of the cantilevered element, followed by restoration of the cantilevered element to an initial position as heat diffuses through the barrier layer and the cantilevered element reaches a uniform temperature. For liquid drop emitter embodiments, the thermal actuator resides in a liquid-filled chamber that includes a nozzle for ejecting liquid. Application of electrical pulses to the heater resistors is used to adjust the characteristics of liquid drop emission. The barrier layer exhibits a heat transfer time constant τB. The thermal actuator is activated by a heat pulses of duration τP wherein τP

8. 发明申请

US20050046671A1 Liquid drop emitter with reduced surface temperature actuator 失效
标题翻译：具有降低表面温度执行器的液滴发射器
公开(公告)号：US20050046671A1
公开(公告)日：2005-03-03
申请号：US10650873
申请日：2003-08-28
申请人： Antonio Cabal , John Lebens , Stephen Pond
发明人： Antonio Cabal , John Lebens , Stephen Pond
IPC分类号： B41J2/14 , B41J2/16 , B41J2/04
CPC分类号： B41J2/14427 , B41J2/1628 , B41J2/1639 , B41J2/1645 , B41J2/1646 , B41J2/1648
摘要： An apparatus for a liquid drop emitter, especially for use in an ink jet printhead, is disclosed. A chamber filled with a liquid, a nozzle and a thermo-mechanical actuator, extending into the chamber from at least one wall of the chamber is disclosed. A movable element of the thermo-mechanical actuator is configured with a bending portion which bends when heated. The bending portion comprises a first layer having first and second sides, constructed of a first material having a high coefficient of thermal expansion, a second layer, attached to the second side of the first layer, and a third layer, attached to the first side of the first layer, constructed of a third material having a low thermal conductivity and a low Young's modulus. Apparatus is adapted to apply heat pulses to the bending portion resulting in rapid deflection of the movable element, ejection of a liquid drop, without degradation or vaporization of the liquid. The third material may be an organic polymer having a Young's modulus less than 10 GPa and thermal conductivity less than 1 W/(m ° K), for example PTFE, teflon.
摘要翻译：公开了一种用于液滴发射器的装置，特别用于喷墨打印头。公开了一种充满液体，喷嘴和热机械致动器的室，其从室的至少一个壁延伸到室中。热机械致动器的可移动元件构造有弯曲部分，其在加热时弯曲。弯曲部分包括具有第一和第二侧面的第一层，由具有高热膨胀系数的第一材料构成，附接到第一层的第二侧的第二层和附着到第一层的第三层的第一层由具有低热导率和低杨氏模量的第三材料构成。设备适于将热脉冲施加到弯曲部分，导致可移动元件的快速偏转，液滴的喷射，而不会降低或蒸发液体。第三种材料可以是具有小于10GPa的杨氏模量和小于1W /（m°K）的热导率的有机聚合物，例如PTFE，特氟隆。

9. 发明申请

US20070064068A1 Continuous ink jet apparatus with integrated drop action devices and control circuitry 有权
标题翻译：连续喷墨装置具有集成的落料装置和控制电路
公开(公告)号：US20070064068A1
公开(公告)日：2007-03-22
申请号：US11229263
申请日：2005-09-16
申请人： Michael Piatt , Stephen Pond
发明人： Michael Piatt , Stephen Pond
IPC分类号： B41J2/02 , B41J2/125
CPC分类号： B41J2/03 , B41J2002/022 , B41J2002/033 , B41J2202/12 , B41J2202/13 , B41J2202/16
摘要： A continuous liquid drop emission apparatus is provided. The liquid drop emission apparatus is comprised of a liquid chamber containing a positively pressurized liquid in flow communication with at least one nozzle for emitting a continuous stream of liquid and a jet stimulation apparatus adapted to transfer pulses of energy to the liquid in flow communication with the at least one nozzle sufficient to cause the break-off of the at least one continuous stream of liquid into a stream of drops of predetermined volumes. The continuous liquid drop emission apparatus further comprises a semiconductor substrate including integrated circuitry formed therein for performing and controlling a plurality of actions on the drops of predetermined volumes. The plurality of actions may include drop charging, drop sensing, drop deflection and drop capturing. Drop action apparatus adapted to perform these functions and integrated circuitry to control the drop action apparatus are formed in the semiconductor substrate. Jet stimulation apparatus comprised of a plurality of transducers including resistive heaters, electromechanical vibrators or thermomechanical vibrators, together with integrated control circuitry, may also be integrated on the semiconductor substrate. Silicon is a preferred material for the semiconductor substrate and CMOS and NMOS designs and fabrication processes are preferred for the integrated circuitry.
摘要翻译：提供连续液滴发射装置。液滴发射装置包括液体室，该液体室含有与至少一个用于发射连续液体流的喷嘴流动连通的正压液体，以及喷射刺激装置，其适于将能量脉冲转移到与液体流动连通的液体至少一个喷嘴，其足以使所述至少一个连续的液体流分解成预定体积的液滴流。连续液滴发射装置还包括半导体衬底，其包括形成在其中的集成电路，用于执行和控制对预定体积的液滴的多个动作。多个动作可以包括液滴充电，液滴感测，液滴偏转和液滴捕获。在半导体衬底中形成适于执行这些功能的放置动作装置和集成电路来控制液滴动作装置。包括电阻加热器，机电振动器或热机械振动器的多个换能器以及集成控制电路的射流刺激装置也可以集成在半导体衬底上。硅是半导体衬底的优选材料，并且CMOS和NMOS设计和制造工艺对于集成电路是优选的。

10. 发明申请

US20070064037A1 Ink jet break-off length measurement apparatus and method 有权
标题翻译：喷墨断裂长度测量装置和方法
公开(公告)号：US20070064037A1
公开(公告)日：2007-03-22
申请号：US11229454
申请日：2005-09-16
申请人： Gilbert Hawkins , Michael Piatt , John Brazas , Stephen Pond
发明人： Gilbert Hawkins , Michael Piatt , John Brazas , Stephen Pond
IPC分类号： B41J29/393
CPC分类号： B41J2/03 , B41J2002/022 , B41J2002/033 , B41J2202/13 , B41J2202/16
摘要： A jet break-off length measurement apparatus for a continuous liquid drop emission system is provided. The jet break-off length measurement apparatus comprises a liquid drop emitter containing a positively pressurized liquid in flow communication with at least one nozzle for emitting a continuous stream of liquid. Heater resistor apparatus is adapted to transfer pulses of thermal energy to the liquid in flow communication with the at least one nozzle sufficient to cause the break-off of the at least one continuous stream of liquid into a stream of drops of predetermined volumes. A sensing apparatus adapted to detect the stream of drops of predetermined volumes is provided. A control apparatus is adapted to determine a characteristic of the stream of drops of predetermined volumes that is related to the break-off length. Further apparatus is adapted to inductively charge at least one drop and to cause electric field deflection of charged drops. Jet stimulation apparatus comprising a plurality of transducers corresponding to the plurality of nozzles and adapted to transfer pulses of energy to the liquid sufficient to cause the break-off of the plurality of continuous streams of liquid into a plurality of streams of drops of predetermined volumes is also disclosed. Methods of measuring the jet break-off length using phase sensitive amplification circuitry are disclosed.
摘要翻译：提供一种用于连续液滴发射系统的射流断裂长度测量装置。射流断裂长度测量装置包括液滴发射器，其包含与至少一个喷嘴流动连通的正压液体，用于发射连续的液体流。加热器电阻器装置适于将热能的脉冲传送到与至少一个喷嘴流动连通的液体，足以使至少一个连续的液体流分解成预定体积的液滴流。提供了适于检测预定体积的液滴流的感测装置。控制装置适于确定与断裂长度相关的预定体积的液滴流的特性。进一步的装置适于对至少一滴进行电感充电并引起带电液滴的电场偏转。喷射刺激装置包括对应于多个喷嘴的多个换能器并且适于将足够的能量脉冲转移到液体，以使多个连续的液体流分解成多个预定体积的液滴流，也披露。公开了使用相位敏感放大电路测量射流断裂长度的方法。

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