专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20110132884A1 LASER MODULES AND PROCESSES FOR THIN FILM SOLAR PANEL LASER SCRIBING 审中-公开
标题翻译：激光模块和薄膜太阳能电池板激光扫描的工艺
公开(公告)号：US20110132884A1
公开(公告)日：2011-06-09
申请号：US12851442
申请日：2010-08-05
申请人： Antoine P. Manens , Wei-Sheng Lei , Wei-Yung Hsu , Bassam Shamoun , Yan Wang
发明人： Antoine P. Manens , Wei-Sheng Lei , Wei-Yung Hsu , Bassam Shamoun , Yan Wang
IPC分类号： B23K26/00
CPC分类号： H01L31/18 , B23K26/0673 , B23K26/082 , B23K26/364
摘要： Laser systems for laser scribing are provided. The systems include a remote module coupled to a laser module through a cable. The remote module includes a controller and a chiller. The laser module has at least a laser source and a cooling plate. The laser module is operable to remove material from at least a portion of a workpiece. The systems also include a plurality of termination modules coupled to the laser module through a plurality of optical fibers. Each of the termination modules includes a mechanical interface. The mechanical interface is coupled to a respective optical fiber. The systems further include a plurality of scanning devices operable to control a position of the output from the laser. Each of the scanning devices is coupled to a respective mechanical interface.
摘要翻译：提供激光划线的激光系统。该系统包括通过电缆耦合到激光模块的远程模块。远程模块包括控制器和冷却器。激光模块至少具有激光源和冷却板。激光模块可操作以从工件的至少一部分去除材料。该系统还包括通过多根光纤耦合到激光模块的多个端接模块。每个终端模块包括机械接口。机械接口耦合到相应的光纤。该系统还包括可操作以控制来自激光器的输出位置的多个扫描装置。每个扫描装置耦合到相应的机械接口。

2. 发明申请

US20090255911A1 LASER SCRIBING PLATFORM AND HYBRID WRITING STRATEGY 审中-公开
标题翻译：激光扫描平台和混合写字策略
公开(公告)号：US20090255911A1
公开(公告)日：2009-10-15
申请号：US12422189
申请日：2009-04-10
申请人： Sriram Krishnaswami , Shinichi Kurita , Bassam Shamoun , Benjamin M. Johnston , John M. White , Jiafa Fan , Inchen Huang , Antoine P. Manens , Wei-Sheng Lei , Wei-Yung Hsu
发明人： Sriram Krishnaswami , Shinichi Kurita , Bassam Shamoun , Benjamin M. Johnston , John M. White , Jiafa Fan , Inchen Huang , Antoine P. Manens , Wei-Sheng Lei , Wei-Yung Hsu
IPC分类号： B23K26/38 , B23K26/02 , B23K26/067 , B23K26/08
CPC分类号： B23K26/067 , B23K26/0676 , B23K26/082 , B23K26/083 , B23K26/16 , B23K26/361 , B23K26/364 , B23K26/40 , B23K2101/34 , B23K2101/36 , B23K2103/16 , B23K2103/172
摘要： Laser scribing can be performed on a workpiece (104) such as substrates with layers formed thereon for use in a solar panel without need to rotate the workpiece (104) during the scribing process. A series of lasers (602, 622) can be used to concurrently remove material from multiple positions on the workpiece (104). Each laser (602, 622) can have at least one scanning device (614, 630, 632) positioned along a beam path thereof in order to adjust a position of the laser output relative to the workpiece (104). By adjusting the beam or pulse positions using the scanning devices (614, 630, 632) while translating the workpiece (104), substantially any pattern can be scribed into at least one layer of the workpiece (104) without the need for any rotation of the workpiece (104).
摘要翻译：可以对工件（104）进行激光划线，例如在其上形成有层的基板，用于太阳能电池板，而不需要在划线过程中旋转工件（104）。可以使用一系列激光器（602,622）来同时从工件（104）上的多个位置去除材料。每个激光器（602,622）可以具有沿其光束路径定位的至少一个扫描装置（614,630,632），以便调节激光输出相对于工件（104）的位置。通过在平移工件（104）的同时通过使用扫描装置（614,630,632）调节光束或脉冲位置，基本上任何图案都可以划分成工件（104）的至少一层，而不需要任何旋转工件（104）。

3. 发明申请

US20110198322A1 IN-LINE METROLOGY METHODS AND SYSTEMS FOR SOLAR CELL FABRICATION 审中-公开
标题翻译：用于太阳能电池制造的在线计量方法和系统
公开(公告)号：US20110198322A1
公开(公告)日：2011-08-18
申请号：US12851471
申请日：2010-08-05
申请人： Antoine P. Manens , Ting-Ruei Shiu , Bassam Shamoun , Wei-Yung Hsu , Manivannan Thothadri
发明人： Antoine P. Manens , Ting-Ruei Shiu , Bassam Shamoun , Wei-Yung Hsu , Manivannan Thothadri
IPC分类号： B23K26/00 , G01J1/42 , H04N7/18
CPC分类号： B23K26/048 , B23K26/032 , B23K26/0673 , B23K26/082 , B23K26/083 , B23K26/364 , B23K26/40 , B23K26/705 , B23K2103/172 , H01L31/046 , H01L31/0463 , Y02E10/50
摘要： In-line metrology methods and systems for use with laser-scribing systems used in solar-cell fabrication are disclosed. Such methods and systems can involve a variety of components, for example, a device for measuring the amount of power input to a laser, a power meter for measuring laser output power, a beam viewer for measuring aspects of a laser beam, a height sensor for measuring a workpiece height, a microscope for measuring workpiece features formed by the laser-scribing system, and a system for monitoring a laser-scribing system and annunciating a warning(s) and/or an error message(s) when operational limits are exceeded. In-line metrology methods can also include the processing of output beam reflections so as to track beam drift over time and/or provide for focusing of an imaging device.
摘要翻译：公开了用于太阳能电池制造中使用的激光划线系统的在线测量方法和系统。这样的方法和系统可以涉及各种部件，例如，用于测量激光输入功率的装置，用于测量激光输出功率的功率计，用于测量激光束的方面的光束观察器，高度传感器用于测量工件高度的显微镜，用于测量由激光划线系统形成的工件特征的显微镜，以及用于监视激光划线系统的系统，并且当操作限度为...时，发出警告和/或错误消息超过了在线测量方法还可以包括输出光束反射的处理，以便随时间跟踪光束漂移和/或提供成像装置的聚焦。

4. 发明申请

US20090314751A1 LASER SCRIBE INSPECTION METHODS AND SYSTEMS 审中-公开
标题翻译：激光扫描检测方法和系统
公开(公告)号：US20090314751A1
公开(公告)日：2009-12-24
申请号：US12422224
申请日：2009-04-10
申请人： Antoine P. Manens , Bassam Shamoun , Jeffrey S. Sullivan , John White , Michael Shirk
发明人： Antoine P. Manens , Bassam Shamoun , Jeffrey S. Sullivan , John White , Michael Shirk
IPC分类号： B23K26/00
CPC分类号： H01L31/03921 , H01L31/022425 , Y02E10/50
摘要： Methods and systems for use during laser-scribing of a workpiece are provided. Some of the methods and systems provided use an imaging device to control the formation of a laser-scribed feature so as to more closely align with a previously-formed feature. Some of the methods and systems provided use an imaging device for inspection of a laser-scribed feature and/or process control. Some of the methods and systems provided use an imaging device to detect and avoid a workpiece defect during the formation of a laser-scribed feature.
摘要翻译：提供了在工件的激光划线期间使用的方法和系统。提供的一些方法和系统使用成像装置来控制激光划线特征的形成，以便与先前形成的特征更紧密地对准。提供的一些方法和系统使用成像装置来检查激光划线特征和/或过程控制。提供的一些方法和系统使用成像装置来检测和避免在形成激光刻划特征期间的工件缺陷。

5. 发明授权

US07857413B2 Systems and methods for controlling and testing jetting stability in inkjet print heads 失效
标题翻译：用于控制和测试喷墨打印头喷射稳定性的系统和方法
公开(公告)号：US07857413B2
公开(公告)日：2010-12-28
申请号：US12041658
申请日：2008-03-03
申请人： Bassam Shamoun
发明人： Bassam Shamoun
IPC分类号： B41J29/393
CPC分类号： B41J2/04581 , B41J2/04541
摘要： The present invention provides systems, methods, and apparatus for monitoring and controlling a slew rate of a voltage signal provided to a PZT capacitor of a print head. The system includes a digital driver circuit adapted to generate a signal indicating a nominal slew rate, a probe circuit for measuring a firing pulse voltage signal provided to the capacitor, a comparator coupled to the digital driver and the probe circuit comparing a measured slew rate with the nominal slew rate generating a signal indicating a difference between the measured slew rate and the nominal slew rate, an analog driver circuit coupled to the comparator adapted to adjust the slew rate of the voltage signal in response to the difference signal, and an analog/digital converter adapted to sample the voltage signal output from the probe circuit and to provide an output for diagnostic purposes. Numerous other features and aspects are disclosed.
摘要翻译：本发明提供了用于监视和控制提供给打印头的PZT电容器的电压信号的转换速率的系统，方法和装置。该系统包括适于生成表示标称压摆率的信号的数字驱动器电路，用于测量提供给电容器的点火脉冲电压信号的探针电路，耦合到数字驱动器的比较器和探针电路，将测量的转换速率与所述标称转换速率产生指示所述测量的转换速率和所述标称转换速率之间的差的信号;耦合到所述比较器的模拟驱动器电路，所述模拟驱动器电路响应于所述差分信号而调整所述电压信号的转换速率;以及模拟/ 数字转换器，其适于对从探针电路输出的电压信号进行采样，并提供用于诊断目的的输出。公开了许多其他特征和方面。

6. 发明授权

US07517437B2 RF powered target for increasing deposition uniformity in sputtering systems 失效
标题翻译： RF功率靶，用于增加溅射系统中的沉积均匀性
公开(公告)号：US07517437B2
公开(公告)日：2009-04-14
申请号：US11392026
申请日：2006-03-29
申请人： Bassam Shamoun
发明人： Bassam Shamoun
IPC分类号： C23C14/54
CPC分类号： C23C14/345 , H01J37/34 , H01J37/3444
摘要： A method and apparatus for sputter depositing a film on a substrate is disclosed. By providing a superimposed RF bias over a DC bias, plasma ionization is increased. In order to increase the resistive load across the substrate, an impedance circuit is provided between the substrate and the susceptor. The impedance circuit allows an insulating substrate to effectively function as an anode and connect to ground.
摘要翻译：公开了一种在衬底上溅射沉积膜的方法和装置。通过在DC偏置上提供叠加的RF偏压，等离子体电离增加。为了增加跨衬底的电阻性负载，在衬底和基座之间提供阻抗电路。阻抗电路允许绝缘基板有效地用作阳极并连接到地。

7. 发明申请

US20130167769A1 TARGETED TEMPERATURE COMPENSATION IN CHEMICAL VAPOR DEPOSITION SYSTEMS 审中-公开
标题翻译：化学蒸气沉积系统中的目标温度补偿
公开(公告)号：US20130167769A1
公开(公告)日：2013-07-04
申请号：US13340226
申请日：2011-12-29
申请人： Bassam Shamoun
发明人： Bassam Shamoun
IPC分类号： C30B25/10 , C30B25/16
CPC分类号： C30B25/10 , C30B25/16
摘要： Targeted temperature compensation for use with a chemical vapor deposition (CVD) apparatus. A localized temperature monitoring system is configured to provide localized temperature information representing surface temperatures of portions of the one or more wafers on a wafer carrier while the wafer carrier is rotating in a CVD process. A temperature profiling system is configured to generate a temperature profile that is indicative of localized cold spots on a surface of the one or more wafers. The temperature profile is based on the localized temperature information. A targeted heating system is configured to selectively apply localized heat to the localized cold spots dynamically based on the temperature profile such that a thermal distribution of the surface of the one or more wafers is made more uniform while a CVD process is carried out on the CVD apparatus.
摘要翻译：用于化学气相沉积（CVD）设备的目标温度补偿。局部温度监测系统被配置为提供局部温度信息，其表示晶片载体在CVD工艺中旋转时晶片载体上的一个或多个晶片的部分的表面温度。温度分布系统被配置为产生指示一个或多个晶片的表面上的局部冷点的温度分布。温度曲线基于局部温度信息。目标加热系统被配置为基于温度分布动态地选择性地将局部热量施加到局部冷点，使得一个或多个晶片的表面的热分布更加均匀，同时对CVD进行CVD工艺仪器。

8. 发明授权

US07637587B2 System and method for reliability testing and troubleshooting inkjet printers 失效
标题翻译：喷墨打印机的可靠性测试和故障排除的系统和方法
公开(公告)号：US07637587B2
公开(公告)日：2009-12-29
申请号：US11846770
申请日：2007-08-29
申请人： Bassam Shamoun
发明人： Bassam Shamoun
IPC分类号： B41J29/393
CPC分类号： B41J29/393 , B41J2/0451 , B41J2/04555 , B41J2/04581
摘要： Systems, methods and apparatus are provided for reliability testing an inkjet printing system. The invention includes a testing interface, a print head coupled to the testing interface, printer control electronics coupled to the testing interface and coupled to the print head via the testing interface, the printer control electronics adapted to transmit a firing voltage signal through the testing interface to the print head, and a measurement apparatus coupled to the testing interface. The testing interface includes an input path for receiving the firing voltage signal from the printer control electronics, the input path splitting into a first path coupled to the print head and a second path coupled to the measurement apparatus. Numerous other aspects are disclosed.
摘要翻译：提供了用于可靠性测试喷墨打印系统的系统，方法和装置。本发明包括测试接口，耦合到测试接口的打印头，耦合到测试接口的打印机控制电子器件，以及经由测试接口耦合到打印头的打印机控制电子器件，适于通过测试接口传送点火电压信号到打印头，以及耦合到测试界面的测量装置。测试接口包括用于接收来自打印机控制电子装置的点火电压信号的输入路径，输入路径分为耦合到打印头的第一路径和耦合到测量装置的第二路径。公开了许多其他方面。

9. 发明授权

US07637580B2 Methods and apparatus for a high resolution inkjet fire pulse generator 失效
标题翻译：高分辨率喷墨式脉冲发生器的方法和装置
公开(公告)号：US07637580B2
公开(公告)日：2009-12-29
申请号：US11238637
申请日：2005-09-29
申请人： Bassam Shamoun , Eugene Mirro , Janusz Jozwiak , Quanyuan Shang , Shinichi Kurita , John M. White
发明人： Bassam Shamoun , Eugene Mirro , Janusz Jozwiak , Quanyuan Shang , Shinichi Kurita , John M. White
IPC分类号： B41J29/38
CPC分类号： B41J3/407 , B41J2/04505 , B41J2/04541 , B41J2/04581 , B41J2/04588 , B41J2/0459 , B41J2/04593 , B41J2/125 , B41J3/28 , B41J3/543 , B41J25/001 , B41J25/003 , B41J25/005 , B41J29/15 , B41J29/393
摘要： The invention provides methods, systems, and drivers for controlling an inkjet printing system. The driver may include logic including a processor, memory coupled to the logic, and a fire pulse generator circuit coupled to the logic. The fire pulse generator may include a connector to facilitate coupling the driver to a print head. The fire pulse generator circuit may also include a fixed current source circuit adapted to generate a fire pulse with a constant slew rate that facilitates easy adjustment of ink drop size. The logic is adapted to receive an image and to convert the image to an image data file. The image data file is adapted to be used by the driver to trigger the print head to deposit ink into pixel wells on a substrate as the substrate is moved in a print direction. Numerous other aspects are disclosed.
摘要翻译：本发明提供了用于控制喷墨打印系统的方法，系统和驱动程序。驱动器可以包括逻辑，其包括处理器，耦合到逻辑的存储器和耦合到逻辑的触发脉冲发生器电路。火脉冲发生器可以包括用于便于将驱动器连接到打印头的连接器。火脉冲发生器电路还可以包括固定电流源电路，其适于产生具有恒定压摆率的发射脉冲，其有利于容易地调节墨滴尺寸。该逻辑适于接收图像并将图像转换为图像数据文件。图像数据文件适于由驱动器使用，以在基板沿着打印方向移动时触发打印头将墨水沉积在基板上的像素孔中。公开了许多其他方面。

10. 发明授权

US07611217B2 Methods and systems for inkjet drop positioning 失效
标题翻译：喷墨定位方法和系统
公开(公告)号：US07611217B2
公开(公告)日：2009-11-03
申请号：US11238636
申请日：2005-09-29
申请人： Bassam Shamoun , Janusz Jozwiak , Eugene Mirro , Quanyuan Shang , Shinichi Kurita , John M. White
发明人： Bassam Shamoun , Janusz Jozwiak , Eugene Mirro , Quanyuan Shang , Shinichi Kurita , John M. White
IPC分类号： B41J29/38
CPC分类号： B41J29/393
摘要： Methods and apparatus for inkjet inkjet drop positioning are provided. A first method includes determining an intended deposition location of an ink drop on a substrate, depositing the ink drop on the substrate using an inkjet printing system, detecting a deposited location of the deposited ink drop on the substrate, comparing the deposited location to the intended location, determining a difference between the deposited location and the intended location, and compensating for the difference between the deposited location and the intended location by adjusting a parameter of an inkjet printing system. Numerous other aspects are provided.
摘要翻译：提供喷墨喷墨滴定位的方法和装置。第一种方法包括确定墨滴在基底上的预期沉积位置，使用喷墨印刷系统将墨滴沉积在基底上，检测沉积的墨滴在基底上的沉积位置，将沉积位置与预期的位置进行比较确定存放位置与预期位置之间的差异，以及通过调整喷墨打印系统的参数来补偿存放位置与预期位置之间的差异。提供了许多其他方面。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式