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    • 2. 发明授权
    • Thermal microphotonic sensor and sensor array
    • 热敏微传感器和传感器阵列
    • US07667200B1
    • 2010-02-23
    • US11950821
    • 2007-12-05
    • Michael R. WattsMichael J. ShawGregory N. NielsonAnthony L. Lentine
    • Michael R. WattsMichael J. ShawGregory N. NielsonAnthony L. Lentine
    • G01J5/00
    • G01J5/44G01J5/08G01J5/0821
    • A thermal microphotonic sensor is disclosed for detecting infrared radiation using heat generated by the infrared radiation to shift the resonant frequency of an optical resonator (e.g. a ring resonator) to which the heat is coupled. The shift in the resonant frequency can be determined from light in an optical waveguide which is evanescently coupled to the optical resonator. An infrared absorber can be provided on the optical waveguide either as a coating or as a plate to aid in absorption of the infrared radiation. In some cases, a vertical resonant cavity can be formed about the infrared absorber to further increase the absorption of the infrared radiation. The sensor can be formed as a single device, or as an array for imaging the infrared radiation.
    • 公开了一种用于利用由红外线辐射产生的热量来检测红外辐射的热微振子传感器,以移动热耦合到的光谐振器(例如,环形谐振器)的谐振频率。 谐振频率的偏移可以通过ev逝耦合到光学谐振器的光波导中的光来确定。 可以在光波导上设置红外线吸收器作为涂层或板,以帮助吸收红外辐射。 在一些情况下,可以围绕红外线吸收体形成垂直谐振腔,以进一步增加红外辐射的吸收。 传感器可以形成为单个装置,或者形成用于对红外线辐射进行成像的阵列。