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    • 1. 发明授权
    • Nanowire multispectral imaging array
    • 纳米线多光谱成像阵列
    • US07786440B2
    • 2010-08-31
    • US11977767
    • 2007-10-26
    • Andy M. PeczalskiBarrett E. Cole
    • Andy M. PeczalskiBarrett E. Cole
    • G01J5/02
    • G01J5/08B82Y20/00G01J3/36G01J5/02G01J5/024G01J5/0837G01J5/0853G01J5/0884G01J5/24G01J2005/0077H01L27/14669
    • A multispectral imaging array system and method of forming the same. A substrate and a group of antennas can be located with respect to one another on the substrate, such that respective gaps are formed between each antenna group and wherein different antenna sizes may be used for different spectral ranges. Additionally, one or more nanowires can be located within one or more gaps among the respective gaps, such that the nanowires in communication with the antennas and the substrate comprise a multispectral imaging system in which the use of the nanowire(s) decreases the thermal time constant and therefore the read out rate from the antennas while decreasing the ambient gas cooling speed relative to the read out rate to increase the manufacturability of the multispectral imaging array system.
    • 多光谱成像阵列系统及其形成方法。 衬底和一组天线可以在衬底上相对于彼此定位,使得在每个天线组之间形成相应的间隙,并且其中不同的天线尺寸可以用于不同的光谱范围。 另外,一个或多个纳米线可以位于相应间隙中的一个或多个间隙内,使得与天线和衬底连通的纳米线包括多光谱成像系统,其中使用纳米线降低热时间 并且因此相对于读出速率降低环境气体冷却速度,从而增加了多光谱成像阵列系统的可制造性,从天线读出速率。
    • 5. 发明授权
    • Multiple wavelength cavity ring down gas sensor
    • 多波长腔环形气体传感器
    • US08437000B2
    • 2013-05-07
    • US12825985
    • 2010-06-29
    • Barrett E. ColeTerry MartaJames Allen CoxFouad Nusseibeh
    • Barrett E. ColeTerry MartaJames Allen CoxFouad Nusseibeh
    • G01N21/00
    • G01N21/031G01N21/3151G01N21/3504G01N21/39
    • An illustrative cavity ring down gas sensor includes an optical cavity for receiving a gas to be detected and at least two electromagnetic radiation sources. The first electromagnetic radiation source may emit a first beam of light having a wavelength corresponding to an absorption wavelength of the gas to be detected, and the second electromagnetic radiation source may emit a second beam of light having a second wavelength that is off of an absorption wavelength of the gas to be detected. The first beam of light may detect a cavity ring down time decay, which is related to the concentration of the gas to be detected. The second beam of light may be used to detect a baseline cavity ring down time decay, which may be used to help increase the accuracy of the sensor by, for example, helping to compensate the concentration of the gas detected by the first beam of light for sensor variations caused by, for example, sensor age, temperature or pressure changes, and/or other conditions.
    • 示例性的空腔环形气体传感器包括用于接收要检测的气体和至少两个电磁辐射源的光学腔。 第一电磁辐射源可以发射具有对应于待检测气体的吸收波长的波长的第一光束,并且第二电磁辐射源可以发射具有不同于吸收的第二波长的第二光束 待检测气体的波长。 第一束光束可以检测到空腔环时间衰减,这与待检测气体的浓度有关。 第二光束可用于检测基线空腔衰减时间衰减,其可以用于通过例如有助于补偿由第一光束检测到的气体的浓度来增加传感器的精度 用于例如由传感器年龄,温度或压力变化引起的传感器变化和/或其他条件。
    • 6. 发明授权
    • Transducer-mirror structure
    • 传感器镜面结构
    • US08218215B2
    • 2012-07-10
    • US12144382
    • 2008-06-23
    • Barrett E. Cole
    • Barrett E. Cole
    • G02B26/08G02B26/10
    • G02B5/0808G01N21/0303G01N21/031
    • An approach for obtaining a transducer mirror structure made from silicon. The structure may have a center portion and a perimeter portion that have an attachment between them which is made flexible after certain etching between the two portions. The attachment may be a web of links or legs. A force applied to the center portion at one end of the structure may cause the center portion to move relative to the perimeter portion. A piezo electric transducer or actuator may be attached to apply the force. An oxide layer, a thin layer of silicon and a mirror may be formed on the other end of the structure. The web of links or legs between the center and the perimeter portions may be established with an RIE etch of gaps through the structure to the oxide layer and an undercutting of the gaps with a KOH etch.
    • 用于获得由硅制成的传感器镜面结构的方法。 该结构可以具有在它们之间具有附接的中心部分和周边部分,其在两个部分之间的某些蚀刻之后被制成是柔性的。 附件可以是链接或腿的网。 在结构的一端处施加到中心部分的力可能导致中心部分相对于周边部分移动。 可以附接压电换能器或致动器以施加力。 可以在结构的另一端上形成氧化物层,薄的硅层和反射镜。 中心和周边部分之间的连接或腿的腹板可以通过RIE蚀刻通过结构到氧化物层的间隙和用KOH蚀刻的间隙的底切来建立。
    • 7. 发明申请
    • HIGH PERFORMANCE DETECTION PIXEL
    • 高性能检测像素
    • US20110267322A1
    • 2011-11-03
    • US12769097
    • 2010-04-28
    • Barrett E. ColeRobert Higashi
    • Barrett E. ColeRobert Higashi
    • G09G5/00
    • G01J5/20G01J5/046G01J5/0809G01J5/0853
    • A pixel having a reflector situated on a substrate. A temperature sensitive resistor may be situated over at least a portion of the reflector. An insulator may be situated on the resistor. The resistor and insulator may effectively be very thin films. A flat metal mesh or grid may be situated on the insulator. The grid, insulator and resistor may be supported by two or more posts at approximately one-fourth of a wavelength from the reflector. The wavelength may be that of the radiation to be sensed by the pixel. The thermal mass of the combination of the temperature sensitive resistor, insulator and grid may be less than several times the thermal mass of the grid. Since the grid may be so thin for low noise performance and high sensitivity, the grid can have a flatness assured to a desired extent with stiffeners attached to portions of it.
    • 具有位于基板上的反射器的像素。 温度敏感电阻器可以位于反射器的至少一部分上方。 绝缘体可以位于电阻器上。 电阻和绝缘体可能有效地是非常薄的薄膜。 平面金属网或栅格可以位于绝缘体上。 栅格,绝缘体和电阻器可以由距离反射器大约四分之一波长的两个或更多个柱支撑。 波长可以是由像素感测的辐射的波长。 温度敏感电阻,绝缘体和电网组合的热质量可能小于电网热质量的几倍。 由于栅格可能如此薄以使低噪声性能和高灵敏度,因此栅格可以具有平坦度,并将其保持在希望的程度上,并具有附着于其部分的加强件。
    • 10. 发明授权
    • Spectroscopy method and apparatus for detecting low concentration gases
    • 用于检测低浓度气体的光谱法和设备
    • US07612885B2
    • 2009-11-03
    • US11615617
    • 2006-12-22
    • Barrett E. ColeJames Allen CoxYuandong GuRodney H. Thorland
    • Barrett E. ColeJames Allen CoxYuandong GuRodney H. Thorland
    • G01N21/00
    • G01J3/02G01J3/021G01J3/027G01J3/0286G01J3/42G01N21/15G01N21/39G01N2021/151G01N2021/391
    • The invention is a method and apparatus capable of detecting constituents of a gas at extremely low concentrations comprising providing a medium that is absorbent of at least a first particular gas under a first environmental condition and desorbent of the particular gas under a second environmental condition, exposing the medium to a sample gas for a first period of time under the first environmental condition, during a second period of time after the first period of time, exposing the medium to the second environmental condition to cause the medium to desorb gas into an optical cavity of a cavity ring down spectrometer and introducing electromagnetic radiation into the cavity, during a third period of time after the second period of time, ceasing introduction of the electromagnetic radiation into the cavity and detecting the decay of the electromagnetic radiation in the cavity, and analyzing the decay of the light in the cavity to obtain a spectral analysis of the sample gas.
    • 本发明是能够以非常低的浓度检测气体的成分的方法和装置,其包括在第一环境条件下提供至少第一特定气体的吸收剂的介质和在第二环境条件下特定气体的解吸附剂 在第一环境条件下在第一时间段内的样品气体的介质,在第一时间段之后的第二时间段内,将介质暴露于第二环境条件,以使介质将气体解吸到光腔中 的腔环下光谱仪,并在第二时间段内的第三个时间段内将电磁辐射引入空腔,停止将电磁辐射引入空腔中,并检测腔内电磁辐射的衰减,并分析 在空腔中的光的衰减以获得样品气体的光谱分析。