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1. 发明申请

US20180021918A1 RETAINING RING FOR CMP 审中-公开
公开(公告)号：US20180021918A1
公开(公告)日：2018-01-25
申请号：US15658294
申请日：2017-07-24
申请人： Andrew J. Nagengast , Christopher Heung-Gyun Lee , Thomas Li , Anand N. Iyer , Jie Diao , Huanbo Zhang , Erik S. Rondum , Wei-Cheng Lee , Jeonghoon Oh
发明人： Andrew J. Nagengast , Christopher Heung-Gyun Lee , Thomas Li , Anand N. Iyer , Jie Diao , Huanbo Zhang , Erik S. Rondum , Wei-Cheng Lee , Jeonghoon Oh
IPC分类号： B24B37/32 , H01L21/67 , H01L21/687 , H01L21/306
CPC分类号： B24B37/32 , H01L21/30625 , H01L21/67063 , H01L21/67092 , H01L21/68735
摘要： A retaining ring includes a generally annular body having an inner surface to constrain a substrate and a bottom surface, the bottom surface having a plurality of channels extending from an outer surface to the inner surface, and a plurality of islands separated by the channels and providing a contact area to contact a polishing pad, wherein the contact area is about 15-40% of a plan area of the bottom surface.

2. 发明授权

US06835649B2 Tungsten plug with conductor capping layer 有权
标题翻译：钨丝塞带导体盖层
公开(公告)号：US06835649B2
公开(公告)日：2004-12-28
申请号：US10161570
申请日：2002-06-03
申请人： Wei-Cheng Lee , Wen-Chen Chien , Yu-Da Fan , Kuo-Yen Liu , Yu-Ching Chang
发明人： Wei-Cheng Lee , Wen-Chen Chien , Yu-Da Fan , Kuo-Yen Liu , Yu-Ching Chang
IPC分类号： H01L214763
CPC分类号： H01L21/76877
摘要： Within a method for forming a microelectronic fabrication there is provided a substrate having formed thereover a patterned dielectric layer which defines a via. There is also formed within a lower portion of the via a tungsten stud layer having a recess thereabove within the via. There is also formed within the recess a patterned conductor capping layer formed of a conductor material other than tungsten. The patterned conductor capping layer may seal a void formed within the tungsten stud layer.
摘要翻译：在用于形成微电子制造的方法中，提供了在其上形成限定通孔的图案化电介质层的衬底。在通孔的下部还形成有在其内部具有通孔内的凹部的钨螺柱层。在凹部内还形成有由钨以外的导体材料形成的图案化导体封盖层。图案化的导体封盖层可以密封形成在钨钉层内的空隙。

3. 发明授权

US06637458B1 Floating plug valve apparatus for storing and dispensing high purity liquid 有权
标题翻译：用于储存和分配高纯度液体的浮动旋塞阀装置
公开(公告)号：US06637458B1
公开(公告)日：2003-10-28
申请号：US09553302
申请日：2000-04-20
申请人： Wei-Cheng Lee , Biing-Huang Yang , Long-Chun Tsai , Ming-Tzung Hsu
发明人： Wei-Cheng Lee , Biing-Huang Yang , Long-Chun Tsai , Ming-Tzung Hsu
IPC分类号： F16K2400
CPC分类号： F16K24/046 , F16K24/06 , Y10T137/778 , Y10T137/86324
摘要： Within an apparatus for storing a liquid, there is first included a storage tank. The storage tank has formed integral thereto and in fluid communication therewith a liquid inlet port and a liquid outlet port. The storage tank also has formed integral thereto and in fluid communication therewith a gas inlet port and a gas outlet port. Finally, the gas outlet port has connected thereto and in fluid communication therewith a floating plug valve. The floating plug valve comprises a first plug movably positioned over and sealing a first aperture within the floating plug valve such that a first weight of the first plug and a first area of the first aperture define an upper operating pressure of a gas introduced into the storage tank through the gas inlet port. The apparatus of the present invention also contemplates a floating plug valve employed within the apparatus of the present invention.
摘要翻译：在用于储存液体的设备中，首先包括储罐。储罐形成为一体，并与其一起流体连通液体入口和液体出口。储罐也与其形成一体，并与其形成流体连通的气体入口和气体出口。最后，气体出口连接到其上并与其一起流动连接浮动旋塞阀。浮动旋塞阀包括可移动地定位在浮动旋塞阀内并密封浮动旋塞阀内的第一孔的第一塞子，使得第一塞子的第一重量和第一孔口的第一区域限定引入储存器的气体的上部操作压力油箱通过进气口。本发明的装置还考虑了在本发明的装置内采用的浮动式旋塞阀。

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