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1. 发明授权

US07448763B2 Optical subassembly and projection objective in semiconductor lithography 有权
标题翻译：半导体光刻中的光学组件和投影物镜
公开(公告)号：US07448763B2
公开(公告)日：2008-11-11
申请号：US10573216
申请日：2003-12-03
申请人： Andreas Frommeyer , G Fraser Morrison , Wolfgang Keller , Yim-Bun Patrick Kwan , Harald Kirchner , Willi Heintel
发明人： Andreas Frommeyer , G Fraser Morrison , Wolfgang Keller , Yim-Bun Patrick Kwan , Harald Kirchner , Willi Heintel
IPC分类号： G02B5/08 , G02B7/02
CPC分类号： G03F7/70825 , G02B7/181 , G02B7/182
摘要： An optical subassembly with an optical element, for example a mirror element (7), has an optical surface (9) and bearing points (12) arranged on the circumference. The optical element (7) is connected to a mount (13) at the bearing points (12) via connecting elements (14, 15, 16, 17, 18). Stress-decoupling cutouts, for example curved slots (11), are provided between the optical surface (9) and the bearing points (12).
摘要翻译：具有光学元件（例如镜子元件）的光学子组件具有布置在圆周上的光学表面（9）和支承点（12）。光学元件（7）通过连接元件（14,15,16,17,18）在轴承点（12）处连接到安装件（13）。在光学表面（9）和支承点（12）之间设置有应力分离切口，例如弯曲槽（11）。

2. 发明授权

US07760327B2 Reflecting optical element with eccentric optical passageway 有权
标题翻译：用偏心光学通道反射光学元件
公开(公告)号：US07760327B2
公开(公告)日：2010-07-20
申请号：US11395719
申请日：2006-03-31
申请人： Hans-Jürgen Scherle , Yim-Bun Patrick Kwan , Stefan Xalter , Johannes Lippert , Ulrich Weber , Bernhard Geuppert , Bernhard Gellrich , Jens Kugler , Franz Sorg , Willi Heintel , Harald Kirchner , Wolfgang Keller , Andreas Frommeyer , Fraser G. Morrison
发明人： Hans-Jürgen Scherle , Yim-Bun Patrick Kwan , Stefan Xalter , Johannes Lippert , Ulrich Weber , Bernhard Geuppert , Bernhard Gellrich , Jens Kugler , Franz Sorg , Willi Heintel , Harald Kirchner , Wolfgang Keller , Andreas Frommeyer , Fraser G. Morrison
IPC分类号： G03B27/42 , G03B27/54 , G03B27/32 , G02B5/10
CPC分类号： G03F7/70225 , G02B17/0812
摘要： There is provided an optical element comprising an optical element body, a reflecting area and an optical passageway. The optical element body defines an axis of rotational symmetry. The reflecting area is disposed on the optical element body and adapted to be optically used in an exposure process. The optical passageway is arranged within the optical element body and allows light to pass the optical element body, the optical passageway being arranged eccentrically with respect to the axis of rotational symmetry.
摘要翻译：提供了一种包括光学元件主体，反射区域和光学通道的光学元件。光学元件主体限定旋转对称轴。反射区域设置在光学元件主体上并且适于在曝光过程中被光学地使用。光学通道布置在光学元件主体内并允许光通过光学元件主体，光学通道相对于旋转对称轴线偏心地布置。

3. 发明申请

US20070014037A1 Optical subassembly and projection objective in semiconductor lithography 有权
标题翻译：半导体光刻中的光学组件和投影物镜
公开(公告)号：US20070014037A1
公开(公告)日：2007-01-18
申请号：US10573216
申请日：2003-12-03
申请人： Andreas Frommeyer , G. Morrison , Wolfgang Keller , Yim-Bun Kwan , Harald Kirchner , Willi Heintel
发明人： Andreas Frommeyer , G. Morrison , Wolfgang Keller , Yim-Bun Kwan , Harald Kirchner , Willi Heintel
IPC分类号： G02B7/02
CPC分类号： G03F7/70825 , G02B7/181 , G02B7/182
摘要： An optical subassembly with an optical element, for example a mirror element (7), has an optical surface (9) and bearing points (12) arranged on the circumference. The optical element (7) is connected to a mount (13) at the bearing points (12) via connecting elements (14, 15, 16, 17, 18). Stress-decoupling cutouts, for example curved slots (11), are provided between the optical surface (9) and the bearing points (12).
摘要翻译：具有光学元件（例如镜子元件）的光学子组件具有布置在圆周上的光学表面（9）和支承点（12）。光学元件（7）通过连接元件（14,15,16,17,18）在轴承点（12）处连接到安装件（13）。在光学表面（9）和支承点（12）之间设置有应力分离切口，例如弯曲槽（11）。

4. 发明申请

US20060262704A1 Reflecting optical element with eccentric optical passageway 有权
标题翻译：用偏心光学通道反射光学元件
公开(公告)号：US20060262704A1
公开(公告)日：2006-11-23
申请号：US11395719
申请日：2006-03-31
申请人： Hans-Jurgen Scherle , Yim-Bun Kwan , Stefan Xalter , Johannes Lippert , Ulrich Weber , Bernhard Geuppert , Bernhard Gellrich , Jens Kugler , Franz Sorg , Willi Heintel , Harald Kirchner , Wolfgang Keller , Andreas Frommeyer , Fraser Morrison
发明人： Hans-Jurgen Scherle , Yim-Bun Kwan , Stefan Xalter , Johannes Lippert , Ulrich Weber , Bernhard Geuppert , Bernhard Gellrich , Jens Kugler , Franz Sorg , Willi Heintel , Harald Kirchner , Wolfgang Keller , Andreas Frommeyer , Fraser Morrison
IPC分类号： G11B7/135
CPC分类号： G03F7/70225 , G02B17/0812
摘要： There is provided an optical element comprising an optical element body, a reflecting area and an optical passageway. The optical element body defines an axis of rotational symmetry. The reflecting area is disposed on the optical element body and adapted to be optically used in an exposure process. The optical passageway is arranged within the optical element body and allows light to pass the optical element body, the optical passageway being arranged eccentrically with respect to the axis of rotational symmetry.
摘要翻译：提供了一种包括光学元件主体，反射区域和光学通道的光学元件。光学元件主体限定旋转对称轴。反射区域设置在光学元件主体上并且适于在曝光过程中被光学地使用。光学通道布置在光学元件主体内并允许光通过光学元件主体，光学通道相对于旋转对称轴线偏心地布置。

5. 发明授权

US08181368B2 Steam iron with tank including overpressure safety device 有权
标题翻译：蒸汽熨斗带罐，包括超压安全装置
公开(公告)号：US08181368B2
公开(公告)日：2012-05-22
申请号：US12530718
申请日：2008-02-28
申请人： Dierk Spatz , Wolfgang Keller , Jochen Weber
发明人： Dierk Spatz , Wolfgang Keller , Jochen Weber
IPC分类号： D06F75/24 , D06F75/22
CPC分类号： D06F75/14 , D06F75/18
摘要： The invention relates to a steam iron that comprises a housing including a tank (5) above a heating body and a safety device that protects the tank (5) against overpressure, the heating body (3) comprising a vaporization chamber supplied with liquid from the tank (5) by a supply circuit, characterized in that said supply circuit includes a member (93) extending inside the tank (5) and having an opening (12) blocked by a valve (94A), said valve (94A) opening a passage through said opening (12) when the pressure inside the tank (5) reaches a predetermined value.
摘要翻译：本发明涉及一种蒸汽熨斗，其包括壳体，该壳体包括在加热体上方的罐（5）和保护罐（5）免受过压的安全装置，所述加热体（3）包括从所述蒸发室供应液体罐（5），其特征在于，所述供应回路包括在罐（5）内部延伸并具有由阀（94A）阻挡的开口（12）的构件（93），所述阀（94A）打开当罐（5）内的压力达到预定值时，通过所述开口（12）。

6. 发明授权

US07382220B2 Ignition coil for an internal combustion engine 失效
标题翻译：内燃机点火线圈
公开(公告)号：US07382220B2
公开(公告)日：2008-06-03
申请号：US11644417
申请日：2006-12-22
申请人： Wolfgang Keller
发明人： Wolfgang Keller
IPC分类号： H01F27/02
CPC分类号： H01F38/12 , H01F27/022 , H01F27/306 , H01F2038/122
摘要： An ignition coil for an internal combustion engine has a rod-shaped magnetic core, which collaborates with a cushioning element in the axial direction. The magnetic core and the cushioning element are furthermore inserted into a secondary coil shell. Moreover, the coil shell has an ignition coil housing, which is filled at least partially with an epoxy resin. In order to avoid that the epoxy resin gets into the gap between the coating and the magnetic core, the cushioning element is developed as a sealing element at the same time. At the same time, the secondary coil shell has a coating on its inner wall for the accommodation of radial stresses. The ignition coil thus designed is developed to be relatively compact, and has good thermomechanical properties.
摘要翻译：用于内燃机的点火线圈具有杆状磁芯，其与轴向的缓冲元件协作。磁芯和缓冲元件进一步插入到次级线圈壳中。此外，线圈壳体具有至少部分填充有环氧树脂的点火线圈壳体。为了避免环氧树脂进入涂层和磁芯之间的间隙，缓冲元件同时被显影为密封元件。同时，次级线圈壳体在其内壁上具有用于适应径向应力的涂层。这样设计的点火线圈被开发成相对紧凑，并且具有良好的热机械性能。

7. 发明授权

US4579719A Apparatus for crucible-free floating-zone melting a semiconductor rod, particularly of silicon 失效
标题翻译：用于无坩埚浮区熔化半导体棒，特别是硅的装置
公开(公告)号：US4579719A
公开(公告)日：1986-04-01
申请号：US521384
申请日：1983-08-08
申请人： Wolfgang Keller
发明人： Wolfgang Keller
IPC分类号： H05B6/30 , C30B13/20 , H01L21/208 , H05B6/36
CPC分类号： C30B13/20 , Y10S117/90 , Y10T117/1088
摘要： Apparatus for crucible-free zone melting an end-supported semiconductor rod, including an RF generator having a resonant circuit for determining the generator frequency, the resonant circuit having connected therein a tank-circuit coil and a tank-circuit capacitor, and an induction heating coil fed by the RF generator and annularly surrounding the semiconductor rod, the tank-circuit coil being formed as a primary winding to the induction heating coil acting as a secondary winding, both the tank circuit coil and the induction heating coil forming a structural unit having a fixed magnetic coupling.
摘要翻译：用于无坩埚区域熔化末端支撑半导体棒的装置，包括具有用于确定发生器频率的谐振电路的RF发生器，其中连接有电路电路线圈和谐振电路电容器的谐振电路以及感应加热线圈由RF发生器馈电并且环绕半导体棒，所述槽回路线圈形成为作为次级绕组的感应加热线圈的初级绕组，所述槽电路线圈和所述感应加热线圈都形成具有固定磁耦合。

8. 发明授权

US4331827A Method of producing current lead-ins having coaxial construction 失效
标题翻译：生产具有同轴结构的电流引线的方法
公开(公告)号：US4331827A
公开(公告)日：1982-05-25
申请号：US42142
申请日：1979-05-24
申请人： Wolfgang Keller
发明人： Wolfgang Keller
IPC分类号： H05B6/32 , C30B13/20 , B01J17/08 , H05B5/08
CPC分类号： C30B13/20
摘要： Method of producing current lead-ins having a coaxial construction which includes applying to the outer surface of a first conductor tube of given outer diameter a layer of resilient vulcanized silicone rubber having an outwardly flaring conical sealing portion at one end of the tube and pressing the first conductor tube and a second conductor tube having an inner diameter greater than the outer diameter of the first conductor tube and formed with an outwardly flaring conical end portion into one another so as to form a seal and stop against the outside at the conical portions thereof.
摘要翻译：制造具有同轴结构的电流引线的方法，该方法包括向具有给定外径的第一导体管的外表面施加一层弹性硫化硅橡胶，该层具有在管的一端的向外扩张的锥形密封部分，第一导体管和第二导体管，其内径大于第一导体管的外径，并且形成有彼此相对的向外扩张的锥形端部，以便在其锥形部分形成密封并抵靠外部。

9. 发明授权

US4035600A Apparatus for crucible-free zone processing of a semiconductor rod 失效
标题翻译：用于半导体棒的无坩埚区处理的设备
公开(公告)号：US4035600A
公开(公告)日：1977-07-12
申请号：US596519
申请日：1975-07-16
申请人： Wolfgang Keller , Hans Stut
发明人： Wolfgang Keller , Hans Stut
IPC分类号： C30B13/22 , C30B13/20 , H01L21/208 , H05B5/02
CPC分类号： C30B13/20
摘要： An apparatus for a floating zone melt processing of a semiconductor rod including a heating circuit comprised of an annular induction heating coil adapted to annularly encompass a zone of the semiconductor rod and upon activation to produce an annular melt zone on such rod, a plurality of ceramic capacitors positioned within a fluid-impermeable housing filled with a low viscosity dielectric cooling fluid, such as a transformer oil, and connected in parallel with the heating coil and hollow electric current conduits coupling the heating coil and the capacitors to the output circuit of a high frequency generator and to a hydraulic heat-exchange circuit.
摘要翻译：一种用于半导体棒的浮动区域熔融加工的装置，包括加热回路，所述加热回路由环形感应加热线圈组成，环形感应加热线圈适于环形地包围半导体棒的区域，并且在激活时在这种棒上产生环形熔融区，多个陶瓷位于流体不可渗透的外壳内的电容器，其填充有诸如变压器油的低粘度介质冷却流体，并且与加热线圈并联连接并将加热线圈和电容器耦合到高电平的输出电路的空心电流导管频率发生器和液压热交换电路。

10. 发明授权

US4027051A Method of producing homogeneously doped n-type Si monocrystals and adjusting dopant concentration therein by thermal neutron radiation 失效
标题翻译：制造均匀掺杂的n型Si单晶并通过热中子辐射调节掺杂剂浓度的方法
公开(公告)号：US4027051A
公开(公告)日：1977-05-31
申请号：US530347
申请日：1974-12-06
申请人： Konrad Reuschel , Manfred Schnoeller , Alfred Muehlbauer , Eberhard Spenke , Wolfgang Keller
发明人： Konrad Reuschel , Manfred Schnoeller , Alfred Muehlbauer , Eberhard Spenke , Wolfgang Keller
IPC分类号： C30B31/20 , G21G1/06 , H01L21/261 , B05D3/06
CPC分类号： C30B31/20 , H01L21/261 , Y10S148/165
摘要： Homogeneously doped Si monocrystals of the n-type are produced from p- or n-type Si crystals having a random dopant concentration in radial and axial directions of the crystal and the dopant concentration within such crystals is adjusted by subjecting such crystals to controlled thermal neutron radiation.
摘要翻译： n型的均匀掺杂的Si单晶由在晶体的径向和轴向方向上具有随机掺杂剂浓度的p型或n型Si晶体产生，并且通过使这种晶体受控于热中子来调节这种晶体内的掺杂剂浓度辐射。

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