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    • 5. 发明申请
    • ULTRASONIC HORN ACTUATED MICROPROBES BASED SELF-CALIBRATING VISCOSITY SENSOR
    • 基于超声波激光微孔的自校准粘度传感器
    • US20130205875A1
    • 2013-08-15
    • US13810648
    • 2011-07-14
    • Amit LalRamkumar Abhishek
    • Amit LalRamkumar Abhishek
    • G01N11/16
    • G01N11/16G01N29/036G01N29/2437G01N2291/02818
    • An ultrasonic or acoustic viscosity sensor or viscometer is provided that can be used to accurately measure viscosity for fluid samples of less than 1 μl in volume. Methods for measuring viscosity for fluid samples of less than 1 μl in volume are also provided. The viscosity sensor and methods based thereon enable simultaneous measurement of bulk and dynamic (shear-rate dependent) viscosity of a non-Newtonian fluid. Bulk and dynamic viscosity of the non-Newtonian fluid can be measured simultaneously without separating constituents of the fluid, and thus distinguishing the effect of constituents on the viscosity. Dynamic viscosity of the non-Newtonian fluid can be estimated at varying shear rates, to study the deformability of the constituents of the fluid as a function of shear rate.
    • 提供超声或声学粘度传感器或粘度计,可用于精确测量体积小于1ul的流体样品的粘度。 还提供了用于测量体积小于1ul的流体样品的粘度的方法。 粘度传感器和其上的方法能够同时测量非牛顿流体的体积和动态(剪切速率依赖)粘度。 可以同时测量非牛顿流体的体积和动态粘度,而不会分离流体的成分,从而区分组分对粘度的影响。 可以以不同的剪切速率估计非牛顿流体的动态粘度,以研究作为剪切速率的函数的流体成分的变形性。
    • 7. 发明授权
    • Self-powered environmental sensor with wake-up circuitry
    • 具有唤醒电路的自供电环境传感器
    • US08309942B2
    • 2012-11-13
    • US12441832
    • 2007-09-18
    • Amit LalRajesh DuggiralaMvs Chandrasekhar
    • Amit LalRajesh DuggiralaMvs Chandrasekhar
    • G21G4/00
    • G21H5/00G01T1/2018G01T3/06G01T7/00
    • A self-powered sensor (e.g., 100, 180, 220, 400) can wake-up systems requiring a trigger signal to wake-up circuits or systems in power-sleep mode, conserving the battery power for emergency computations and communications. In a humidity sensor embodiment 100, radioisotope generated voltage biases are employed to power sensor capacitors to realize self-powered sensors. A first self-powered capacitor biasing architecture 160 is based on changes in the leakage resistance of the polymer capacitor 110, and a second self-powered capacitor biasing architecture 140 uses changes in the capacitance of the polymer capacitor. Another sensor embodiment uses changes in the capacitance or leakage resistance of the sensor capacitor to modulate conductance of a MOSFET 114, realizing an easily readable electronic output signal. A temperature sensor embodiment 180 and a MEMS cantilever structure based fissile material proximity sensor embodiment 400 are also disclosed.
    • 自供电传感器(例如,100,180,220,400)可以唤醒需要触发信号的系统以唤醒电源或电源睡眠模式下的系统,从而节省用于紧急计算和通信的电池电力。 在湿度传感器实施例100中,使用放射性同位素产生的电压偏压来为传感器电容器供电以实现自供电传感器。 第一自供电电容器偏置架构160基于聚合物电容器110的耐漏电流的变化,第二自供电电容器偏置架构140使用聚合物电容器的电容的变化。 另一传感器实施例使用传感器电容器的电容或漏电阻的变化来调制MOSFET 114的电导,实现易于读取的电子输出信号。 还公开了温度传感器实施例180和基于MEMS悬臂结构的裂变材料接近传感器实施例400。
    • 9. 发明申请
    • OPTICAL GRID FOR HIGH PRECISION AND HIGH RESOLUTION METHOD OF WAFER-SCALE NANOFABRICATION
    • 高精度光栅和高分辨率NANOFABRICATION的高分辨率方法
    • US20110249275A1
    • 2011-10-13
    • US13062832
    • 2009-09-09
    • Amit LalNorimasa Yoshimizu
    • Amit LalNorimasa Yoshimizu
    • G01B11/14B82Y40/00
    • G01B11/25G01B11/2518G01Q40/02G01Q80/00G03F7/70383G03F7/7085
    • A wafer-scale nano-metrology system (10) for sensing position of a nanofabrication element (16) when illuminated by a patterned optical projection defining a grid or position measuring gauge includes a frequency stabilized laser emitter (12) configured to generate a laser emission at a selected frequency, where the laser emission forms a diverging beam configured to illuminate a selected area occupied by a target fabrication object (18) having a proximal surface. An optical pattern generator (14) is illuminated by laser (12) and generates a patterned optical projection grid or gauge for projection upon the target fabrication object (18). A movable tool or nanofabrication element (16) carries an optical sensor array (50), and the sensor array detect at least a portion of the optical projection grid, and, in response to that detection, generates grid position data for use in controlling the position of the tool (16).
    • 用于感测纳米加工元件(16)的位置的晶片级纳米测量系统(10)当被限定网格或位置测量计的图案化光学投影仪照射时,包括频率稳定的激光发射器(12),其被配置为产生激光发射 在选定的频率处,其中激光发射形成发散光束,其被配置为照亮由具有近端表面的目标制造物体(18)占据的选定区域。 光学图案发生器(14)被激光(12)照射,并且产生用于在目标制造对象(18)上投影的图案化的光学投影栅格或量规。 可移动工具或纳米制造元件(16)承载光学传感器阵列(50),并且传感器阵列检测光学投影栅格的至少一部分,并且响应于该检测,生成栅格位置数据以用于控制 工具(16)的位置。