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    • 1. 发明专利
    • Plasma processing equipment and plasma processing system
    • 等离子体处理设备和等离子体处理系统
    • JP2003017414A
    • 2003-01-17
    • JP2001199900
    • 2001-06-29
    • Alps Electric Co LtdTadahiro OmiSeiko Epson Corpアルプス電気株式会社セイコーエプソン株式会社忠弘 大見
    • NAKANO AKIRAASUKE SHINTAROMIYASHITA TAKESHIOMI TADAHIRO
    • H05H1/46B01J19/08C23C16/505H01L21/205H01L21/302H01L21/3065
    • PROBLEM TO BE SOLVED: To reduce a feeding loss by reducing high-frequency resistance in a current returning section and suppressing changes in high frequency resistance with the passage of time.
      SOLUTION: A plasma processing equipment comprises a plasma processing chamber unit 75, which comprises a plasma processing chamber 60 provided with electrodes 4 and 8 for exciting plasma, a high-frequency power supply 1 for supplying high-frequency power, and a matching circuit 2A which has an input terminal and an output terminal PR, with the input terminal being connected by the high-frequency power supply 1 and the output terminal PR connected by the electrode 4 via a high-frequency power distributor 3, and which obtains impedance matching between the plasma processing chamber 60 and the high-frequency power supply 1. In a DC ground-side part from the electrode 8, a low resistance section RL, for reducing the electrical resistance, is provided on at least a part of the surface thereof.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:通过降低电流返回部分中的高频电阻来减少馈送损耗,并且随着时间的推移抑制高频阻抗的变化。 解决方案:等离子体处理设备包括等离子体处理室单元75,其包括设置有用于激发等离子体的电极4和8的等离子体处理室60,用于提供高频电力的高频电源1和匹配电路2A 其具有输入端子和输出端子PR,其输入端子由高频电源1和由电极4经由高频配电器3连接的输出端子PR连接,并获得 等离子体处理室60和高频电源1.在来自电极8的DC接地侧部分中,在其表面的至少一部分上设置有用于降低电阻的低电阻部RL。
    • 2. 发明专利
    • Plasma treatment device, plasma treatment system and its stabilization method
    • 等离子体处理装置,等离子体处理系统及其稳定方法
    • JP2003017299A
    • 2003-01-17
    • JP2001199901
    • 2001-06-29
    • Alps Electric Co LtdTadahiro OmiSeiko Epson Corpアルプス電気株式会社セイコーエプソン株式会社忠弘 大見
    • NAKANO AKIRAASUKE SHINTAROMIYASHITA TAKESHIOMI TADAHIRO
    • H05H1/46B01J19/08C23C16/505H01L21/205
    • PROBLEM TO BE SOLVED: To realize reduction in the inductance and the power supply loss and suppression of the change with the passage of time at the coaxial cable part.
      SOLUTION: The device comprises a plasma treatment chamber 60 having electrodes 4, 8 for exciting plasma, a high frequency power source 1 for supplying high frequency power, and a plasma treatment-chamber unit 75 which comprises an input terminal and an output terminal PR and in which the high frequency power source 1 is connected to the input terminal through a high frequency power feeder 1A and the electrode 4 is connected to the output terminal PR through a high frequency power distributor 3A, and which is equipped with a matching circuit 2A for obtaining impedance matching between the plasma treatment chamber 60 and the high frequency power source 1. The high frequency power feeder 1A or the high frequency power distributor 3A is fixed at the floor GF by the high frequency impedance adjusters B1, B1 so that the high frequency impedance A, B may not fluctuate.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:实现电感和电源损耗的降低以及在同轴电缆部分时随时间的变化的抑制。 解决方案:该装置包括具有用于激发等离子体的电极4,6等离子体处理室60,用于提供高频功率的高频电源1和等离子体处理室单元75,其包括输入端和输出端PR 其中高频电源1通过高频电力馈送器1A连接到输入端,并且电极4通过高频配电器3A连接到输出端PR,并且配备有匹配电路2A,用于 获得等离子体处理室60和高频电源1之间的阻抗匹配。高频电力馈送器1A或高频电力分配器3A通过高频阻抗调节器B1,B1固定在地板GF上,使得高频电源 阻抗A,B可能不会波动。
    • 3. 发明专利
    • Plasma treatment device and plasma treatment system
    • 等离子体处理装置和等离子体处理系统
    • JP2003017298A
    • 2003-01-17
    • JP2001199899
    • 2001-06-29
    • Alps Electric Co LtdTadahiro OmiSeiko Epson Corpアルプス電気株式会社セイコーエプソン株式会社忠弘 大見
    • NAKANO AKIRAASUKE SHINTAROMIYASHITA TAKESHIOMI TADAHIRO
    • H05H1/46C23C14/40C23C16/509H01L21/205H01L21/302H01L21/3065
    • PROBLEM TO BE SOLVED: To realize reduction in inductance, and high frequency resistance, and power supply loss, and to prevent drifting of high frequency current.
      SOLUTION: The device comprises a plasma treatment chamber 60 having electrodes 4, 8 for exciting plasma, a high frequency power source 1 for supplying a high frequency power, and a plasma treatment chamber unit 75 which comprises an input terminal and an output terminal PR and in which the high frequency power source 1 is connected to the input terminal and the electrode 4 is connected to the output terminal PR through a high frequency power distributor 3 and comprises a matching circuit 2A for obtaining impedance matching between the plasma treatment chamber 60 and the high frequency power source 1. In the high frequency power distributor 3, the mean density per unit volume of the high frequency power supplied by the high frequency power source 1 is set to become coarse from the output terminal PR side toward the electrode 4 side.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:实现电感降低,高频阻抗和电源损耗,并防止高频电流漂移。 解决方案:该装置包括具有用于激发等离子体的电极4,6等离子体处理室60,用于提供高频功率的高频电源1和等离子体处理室单元75,其包括输入端和输出端PR 其中高频电源1连接到输入端,并且电极4通过高频配电器3连接到输出端PR,并且包括用于获得等离子体处理室60和等离子体处理室60之间的阻抗匹配的匹配电路2A 在高频电力分配器3中,由高频电源1供给的高频电力的每单位体积的平均密度被设定为从输出端子PR侧向电极4侧变粗。
    • 5. 发明专利
    • Bonding method, electronic element, oscillator, electronic apparatus and mobile
    • 接合方法,电子元件,振荡器,电子设备和手机
    • JP2014175428A
    • 2014-09-22
    • JP2013046016
    • 2013-03-07
    • Seiko Epson Corpセイコーエプソン株式会社
    • MIYASHITA TAKESHI
    • H01L23/02H03H3/02H03H9/02H03H9/19
    • PROBLEM TO BE SOLVED: To provide a bonding method for bonding two members by a bonding film having suitable melting point and characteristics, and to provide an electronic element, an oscillator, an electronic apparatus and a mobile manufactured using this bonding method.SOLUTION: A bonding method includes a first step for arranging, between a base substrate 2 and a first lid 31, a metal film 90 including a first metal layer 91 composed of a first metal 910, and a second metal layer 92 provided in contact with the first metal layer 91, and composed of a second metal 920 that can be alloyed with the first metal 910 and has a melting point higher than that of the first metal 910, and a second step for alloying the first metal 910 and second metal 920, by heating and melting the metal film 90. In the first step, the first and second metal layers 91, 92 are arranged side by side in the in-plane direction of the metal film 90.
    • 要解决的问题:提供一种通过具有合适的熔点和特性的接合膜将两个构件接合的接合方法,并提供使用该接合方法制造的电子元件,振荡器,电子设备和移动体。解决方案:A 接合方法包括:第一步骤,在基底基板2和第一盖31之间布置金属膜90,金属膜90包括由第一金属910构成的第一金属层91和第二金属层92,第二金属层92与第一金属 层91,并且由可与第一金属910合金化并且具有比第一金属910的熔点高的熔点的第二金属920和通过加热合金化第一金属910和第二金属920的第二步骤 并熔化金属膜90.在第一步骤中,第一和第二金属层91,92在金属膜90的面内方向上并排设置。
    • 6. 发明专利
    • Liquid crystal device and electronic apparatus
    • 液晶装置和电子装置
    • JP2009223137A
    • 2009-10-01
    • JP2008069223
    • 2008-03-18
    • Seiko Epson Corpセイコーエプソン株式会社
    • NAGAE NOBUKAZUMIYASHITA TAKESHI
    • G02F1/1337
    • G02F1/133734G02F1/133723G02F2001/13373G02F2001/133746Y10T428/1018Y10T428/1023
    • PROBLEM TO BE SOLVED: To provide a liquid crystal device which has excellent contrast characteristics by preventing a display defect such as disclination, and is reduced in cost, and to provide an electronic apparatus. SOLUTION: The liquid crystal device includes a circuit board 10, an opposite substrate 20 disposed opposite the circuit board 10, a liquid crystal layer 58 sandwiched between the circuit board 10 and opposite substrate 20 and has liquid crystal molecules vertically aligned, a first alignment film 22 formed on the opposite substrate 20 on the side of the liquid crystal layer 58 through a coating process and having vertical aligning capability, and a second alignment film 11 formed on the circuit board 10 on the side of the liquid crystal layer 58 through a vacuum process and having a pretilt. COPYRIGHT: (C)2010,JPO&INPIT
    • 解决的问题:提供一种通过防止诸如旋错的显示缺陷并降低成本并提供电子设备而具有优异的对比度特性的液晶装置。 解决方案:液晶装置包括电路板10,与电路板10相对设置的相对基板20,夹在电路板10和相对基板20之间并具有垂直对准的液晶分子的液晶层58, 通过涂布工艺形成在液晶层58一侧的相对基板20上并具有垂直取向能力的第一取向膜22以及在液晶层58一侧形成在电路板10上的第二取向膜11 通过真空过程并具有预倾斜。 版权所有(C)2010,JPO&INPIT
    • 7. 发明专利
    • Liquid crystal device and manufacturing method thereof, electronic equipment
    • 液晶装置及其制造方法,电子设备
    • JP2008233860A
    • 2008-10-02
    • JP2007307604
    • 2007-11-28
    • Seiko Epson Corpセイコーエプソン株式会社
    • NAGAE NOBUKAZUMIYASHITA TAKESHIKUROSAWA RYUICHI
    • G02F1/1337
    • G02F1/133711G02F1/133512G02F1/133753G02F2001/13373G02F2001/133738G02F2001/133742G02F2001/133757
    • PROBLEM TO BE SOLVED: To provide a liquid crystal device which has excellent contrast characteristics and is prevented from performing defective display, and a manufacturing method thereof.
      SOLUTION: The liquid crystal device (transmissive liquid crystal device) 1 has a first substrate 10, a second substrate 20 opposed thereto, and a liquid crystal layer 50 between them, the liquid crystal layer 50 being formed of liquid crystal which is initially aligned in a vertical direction and has negative dielectric anisotropy. The liquid crystal display device has pixel regions P at positions corresponding to pixel electrodes 9 and non-display region BM between pixel regions P, and peripheral edges 9b of the pixel electrodes 9 protrude to the non-display regions BM. A first area A1 where liquid crystal 51 is vertically aligned is formed in a region including the whole pixel region P and not extending beyond the pixel electrode 9, and a second area A2 where liquid crystal 51 is horizontally aligned is formed in the non-display region BM, the second area A2 being formed on the peripheral edge 9b protruding to the non-display region BM of the pixel electrode 9.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 解决的问题:提供一种具有优异的对比度特性并且防止进行不良显示的液晶装置及其制造方法。 解决方案:液晶装置(透射型液晶装置)1具有第一基板10,与其相对的第二基板20和它们之间的液晶层50,液晶层50由液晶形成, 初始在垂直方向上排列并具有负的介电各向异性。 液晶显示装置在与像素电极9对应的位置处具有像素区域P,在像素区域P之间具有非显示区域BM,并且像素电极9的外围边缘9b突出到非显示区域BM。 在包括整个像素区域P并且不延伸超过像素电极9的区域中形成液晶51垂直排列的第一区域A1,并且在非显示器中形成液晶51水平对准的第二区域A2 区域BM,第二区域A2形成在突出到像素电极9的非显示区域BM的外围边缘9b上。版权所有(C)2009,JPO&INPIT
    • 8. 发明专利
    • Printing device and print control method
    • 打印设备和打印控制方法
    • JP2007125726A
    • 2007-05-24
    • JP2005318331
    • 2005-11-01
    • Seiko Epson Corpセイコーエプソン株式会社
    • MIYASHITA TAKESHI
    • B41J21/00G06F3/12
    • PROBLEM TO BE SOLVED: To provide a printing device which carries out printing based on image data recorded in a portable recording device, wherein the print device can produce an easily viewable output result without forcing the user to set a layout direction of the image data. SOLUTION: The printing device is formed of: an image file reading means for reading an image file form the portable recording medium in which the image file is recorded; a receiving means for receiving selection of the image file and setting of the number of allocated images, from the user; a layout means for determining a print paper direction and the layout location of each image, based on the received setting of the number of the allocated images; and a printing execution means for printing the images, based on the selected image file, according to the determined layout location. Herein the layout means arranges the image as it is if the image to be arranged is horizontally oriented, whereas the layout means rotates the image 90° clockwise if the image to be arranged is vertically oriented. Further a character string concerning the corresponding image file is arranged in the vicinity of a lower left location of each arranged image. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种基于记录在便携式记录装置中的图像数据进行打印的打印装置,其中打印装置可以产生容易观看的输出结果,而不强制用户设置 图像数据。 解决方案:打印设备由以下部分组成:图像文件读取装置,用于从其中记录图像文件的便携式记录介质读取图像文件; 接收装置,用于从用户接收图像文件的选择和分配图像的数量的设置; 用于基于所接收的所分配图像的数量的设置来确定每个图像的打印纸方向和布局位置的布局装置; 以及打印执行装置,用于根据所确定的布局位置,基于所选择的图像文件打印图像。 这里,如果要布置的图像是水平定向的,布局方式就是将图像原样排列,而如果要布置的图像是垂直取向的,则布局装置顺时针旋转图像90°。 此外,关于相应图像文件的字符串被布置在每个布置图像的左下位置附近。 版权所有(C)2007,JPO&INPIT