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    • 1. 发明专利
    • Ultraviolet sensor
    • 超声波传感器
    • JP2010133773A
    • 2010-06-17
    • JP2008308525
    • 2008-12-03
    • Alps Electric Co Ltdアルプス電気株式会社
    • TAMURA MANABUHATAUCHI TAKASHISASAKI YOSHITOBITO MITSUO
    • G01J1/02G01J1/42G01J3/42
    • PROBLEM TO BE SOLVED: To detect a plurality of ultraviolet rays with different wavelength bands by a single sensor element without upsizing a sensor as a whole.
      SOLUTION: The ultraviolet sensor 1 includes: a substrate 2; a first sensitive film 3 which is formed on the substrate 2 and changes its resistance value by a first ultraviolet ray having a first wavelength; a second sensitive film 5 which is formed on the substrate 2 and changes its resistance value by a second ultraviolet ray having a second wavelength which is different from the first wavelength; first and second individual electrodes 6, 7 which are formed on the first and second sensitive films 3, 5, respectively; and a common electrode 8 which is formed across the first and second sensitive films 3, 5. A change in the resistance value or the current value between the first and second individual electrodes 6, 7 and the common electrode 8 is detected.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:通过单个传感器元件检测不同波长带的多个紫外线,而不会使传感器整体上升。 < P>解决方案:紫外线传感器1包括:基板2; 第一敏感膜3,其形成在基板2上,并通过具有第一波长的第一紫外线改变其电阻值; 第二敏感膜5,其形成在基板2上,并且通过具有与第一波长不同的第二波长的第二紫外线改变其电阻值; 第一和第二单独电极6,7分别形成在第一和第二敏感膜3,5上; 以及形成在第一和第二敏感膜3,5上的公共电极8.检测第一和第二单独电极6,7和公共电极8之间的电阻值或电流值的变化。 版权所有(C)2010,JPO&INPIT
    • 2. 发明专利
    • Capacitance acceleration sensor
    • 电容加速传感器
    • JP2008039595A
    • 2008-02-21
    • JP2006214509
    • 2006-08-07
    • Alps Electric Co Ltdアルプス電気株式会社
    • TAMURA MANABU
    • G01P15/125G01P15/18
    • PROBLEM TO BE SOLVED: To provide a small and highly sensitive capacitance acceleration sensor.
      SOLUTION: In the capacitance acceleration sensor 1, a movable electrode 11a has a spindle section 11c and comb-teeth 11d, stretching from this spindle section 11c directed in the directions of Y. This spindle section 11c is connected to a silicon substrate 11 via spring sections 11f. The spring sections 11f are capable of expanding and contracting in the Y directions. The spindle section 11c and the-comb teeth 11d, connected to the silicon substrate 11 via the spring sections 11f, are movable in the monoaxial directions of Y. A fixed electrode 11b has comb-teeth 11e provided so as to face the comb-teeth 11d of the movable electrode 11a. The movable electrode 11a and the fixed electrode 11b are electrically connected to extraction electrodes 14a, 14b respectively via connections 11g that is integrally united with the silicon substrate 11.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种小而高灵敏度的电容加速度传感器。 解决方案:在电容加速度传感器1中,可动电极11a具有主轴部11c和梳齿11d,该主轴部11c从该主轴部11c向Y方向延伸。该主轴部11c与硅基板 11通过弹簧部分11f。 弹簧部分11f能够在Y方向上伸缩。 通过弹簧部分11f连接到硅基板11的主轴部分11c和梳齿11d可在Y的单轴方向上移动。固定电极11b具有梳齿11e, 11d。 可移动电极11a和固定电极11b分别经由与硅衬底11整体结合的连接件11g电连接到引出电极14a,14b。(C)2008,JPO&INPIT
    • 3. 发明专利
    • Capacitance-type physical quantity sensor and its manufacturing method
    • 电容式物理量传感器及其制造方法
    • JP2007198820A
    • 2007-08-09
    • JP2006015940
    • 2006-01-25
    • Alps Electric Co Ltdアルプス電気株式会社
    • TAMURA MANABUITO TAKUO
    • G01L9/00H01L29/84
    • PROBLEM TO BE SOLVED: To provide a capacitance-type physical quantity sensor of a plane-mounted type structure having an advantage in being mounted on a circuit substrate, with its contact resistance reduced.
      SOLUTION: This capacitance-type physical quantity sensor comprises a fixed electrode 13 formed on a glass substrate 11, and a pressure-sensitive diaphragm 15a placed on a confronting position and serving as a movable electrode, and is suited to surface mounting since extraction parts 14a and 14b of the two electrodes are formed on an under surface 11b of the glass substrate. A silicon substrate 15 is joined to one principal plane 11a of the glass substrate 11, with the silicon substrate 15 having the pressure-sensitive diaphragm 15a and a second conductive part 15b of a protrusive shape. The conductive part 15b connected to the extraction part 14b passes therethrough and extends from the principal plane 11a side of the glass substrate 11 to the principal plane 11b side thereof without interposing a different member therebetween.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种具有安装在电路基板上的优点的平面安装型结构的电容型物理量传感器,其接触电阻降低。 解决方案:该电容型物理量传感器包括形成在玻璃基板11上的固定电极13和放置在相对位置并用作可动电极的压敏膜15a,并且适于表面安装 两个电极的提取部分14a和14b形成在玻璃基板的下表面11b上。 硅基板15与玻璃基板11的一个主面11a接合,硅基板15具有压敏膜15a,第二导电部15b是突出形状。 与提取部14b连接的导电部15b从玻璃基板11的主面11a侧延伸到主面11b侧而不在其间插入不同的部件。 版权所有(C)2007,JPO&INPIT
    • 4. 发明专利
    • Method of manufacturing silicone-embedded glass substrate
    • 制造硅胶嵌入玻璃基板的方法
    • JP2007163146A
    • 2007-06-28
    • JP2005355772
    • 2005-12-09
    • Alps Electric Co Ltdアルプス電気株式会社
    • TAMURA MANABUHATAUCHI TAKASHIMIHARA YUTAKAOHIRA FUMIKAZUHASHIGUCHI GENYOSHIMURA HIDENORIHOSOKI MASAYASU
    • G01L9/00H01L29/84
    • PROBLEM TO BE SOLVED: To provide a method of manufacturing silicon-embedded glass substrate excellent in shieldability in the case of used as a pressure sensor capable of surely performing electrical connection between up side and down side of the substrate through inside of the substrate and capable of easily manufacturing.
      SOLUTION: The method of manufacturing is composed of: the process for working a part of the silicon substrate 1 for making the protrudsion 1a; the process for inserting the protrusion 1a into the glass plate 2 by pressing the glass plate 2 onto the top of the protrusion 1a to hot press with silicon press board 3 over laid on the glass plate 2 which is heated until softening temperature; the process for cooling the glass plate 2 inserted with the protrusion 1a; and the process for removing the silicon press plate 3.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种制造硅嵌入式玻璃基板的方法,其在用作压力传感器的情况下具有优异的可屏蔽性,该压力传感器能够通过内部的内部可靠地执行基板的上下侧之间的电连接 基板,并且易于制造。 解决方案:制造方法包括:用于制造用于制造突起1a的硅衬底1的一部分的工艺; 通过将玻璃板2压在突起1a的顶部上,用加热到软化温度的玻璃板2上的硅压板3进行热压来将突起1a插入玻璃板2中的过程; 用于冷却插入有突起1a的玻璃板2的过程; 以及去除硅压板3的工序。(C)2007,JPO&INPIT
    • 5. 发明专利
    • Electrostatic capacity type mechanical quantity sensor
    • 静电容量型机械量传感器
    • JP2007064920A
    • 2007-03-15
    • JP2005254740
    • 2005-09-02
    • Alps Electric Co Ltdアルプス電気株式会社
    • TAMURA MANABUITO TAKUO
    • G01L9/00B60C23/04G01L17/00G01P15/08G01P15/125H01L29/84
    • PROBLEM TO BE SOLVED: To provide an electrostatic capacity type mechanical quantity sensor having a small number of electrodes and capable of simplifying wiring parts. SOLUTION: A fixed electrode 14a for a pressure sensor and a fixed electrode 14b for an acceleration sensor are formed on a principal surface 11a of a first glass substrate 11. A silicon substrate 16 is joined onto the first glass substrate 11 in such a way that a pressure-sensitive diaphragm 16a may be arranged above the fixed electrode 14b and that a rocking member 16b may be arranged above the fixed electrode 14b. A second glass substrate 18 is joined onto the silicon substrate 16 in such a way as to envelop the rocking member 16b. An electrode 13 serves as both an electrode for an electrically conductive movable part of the pressure sensor and an electrode for an electrically conductive movable part of the acceleration sensor and is a common electrode of the pressure sensor and the acceleration sensor. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供具有少量电极并且能够简化配线部件的静电电容式机械量传感器。 解决方案:在第一玻璃基板11的主表面11a上形成用于压力传感器的固定电极14a和用于加速度传感器的固定电极14b。硅基板16以这样的方式接合到第一玻璃基板11上 压敏膜16a可以布置在固定电极14b上方并且摇摆构件16b可以布置在固定电极14b上方的方式。 第二玻璃基板18以包围摆动构件16b的方式接合到硅基板16上。 电极13用作压力传感器的导电可移动部分的电极和用于加速度传感器的导电可移动部分的电极,并且是压力传感器和加速度传感器的公共电极。 版权所有(C)2007,JPO&INPIT
    • 6. 发明专利
    • Capacitance type dynamic quantity sensor
    • 电容型动态数量传感器
    • JP2006337141A
    • 2006-12-14
    • JP2005161263
    • 2005-06-01
    • Alps Electric Co Ltdアルプス電気株式会社
    • TAMURA MANABUHATAUCHI TAKASHIHEBIGUCHI HIROYUKI
    • G01L1/14G01P15/125H01L29/84
    • PROBLEM TO BE SOLVED: To provide a capacitance type dynamic quantity sensor for accurately measuring dynamic quantity by displaying stable device characteristics.
      SOLUTION: Island-like bodies 12a and 12b composed of silicon are buried in a glass substrate 11. The island-like bodies 12a and 12b are conduction parts with fixed electrodes divided, respectively. Electrodes 13a and 13b are formed on a principal plane 11a of the glass substrate 11 so as to be electrically connected to the island-like bodies 12a and 12b. The fixed electrodes 14a and 14b are formed on a principal plane 11b of the glass substrate 11 so as to be electrically connected to the island-like bodies 12a and 12b. Since a signal of change in capacitance detected between a pressure sensitive diaphragm 15a and the fixed electrodes 14a and 14b is acquired from the electrodes 13a and 13b through the island-like bodies 12a and 12b, a measuring pressure is calculated on the basis of the signal (serial composition capacity).
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种用于通过显示稳定的装置特性来精确地测量动态量的电容式动态量传感器。 解决方案:由硅组成的岛状体12a和12b被埋在玻璃基板11中。岛状体12a和12b分别是具有分开的固定电极的导电部分。 电极13a和13b形成在玻璃基板11的主平面11a上,以与岛状体12a和12b电连接。 固定电极14a和14b形成在玻璃基板11的主平面11b上,从而与岛状体12a和12b电连接。 由于通过岛状体12a和12b从电极13a和13b获取在压敏膜15a和固定电极14a和14b之间检测到的电容变化的信号,所以基于信号计算测量压力 (串联组合容量)。 版权所有(C)2007,JPO&INPIT
    • 8. 发明专利
    • Potential difference measuring device
    • 潜在差异测量装置
    • JP2011072452A
    • 2011-04-14
    • JP2009225809
    • 2009-09-30
    • Alps Electric Co Ltdアルプス電気株式会社
    • TAMURA MANABUHEBIGUCHI HIROYUKI
    • A61B5/0428A61B5/0404A61B5/0452
    • PROBLEM TO BE SOLVED: To provide a potential difference measuring device which measures a potential difference between two separated measurement positions without limiting the measurement position in a subject to be measured. SOLUTION: The potential difference measuring device includes electrodes 12a, 12b on a human body side which are brought into contact with or are capacitively coupled to a part of a human body 2, ground electrodes 13a, 13b facing a ground side, and a pair of measurement parts 3a, 3b for transmitting measurement results of the potential of the electrodes 12a, 12b in a wireless manner by using the potential of the ground electrodes 13a, 13b as the reference and is configured to measure a heart rate based on the measurement result of the pair of measurement parts 3a, 3b. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供一种电位差测量装置,其测量两个分开的测量位置之间的电位差而不限制待测对象中的测量位置。 解决方案:电位差测量装置包括人体侧的电极12a,12b,其与人体2的一部分接触或电容耦合,面对地侧的接地电极13a,13b,以及 一对测量部件3a,3b,用于以接地电极13a,13b的电位为基准以无线方式传送电极12a,12b的电位的测量结果,并且被配置为基于 一对测量部分3a,3b的测量结果。 版权所有(C)2011,JPO&INPIT
    • 10. 发明专利
    • Electrostatic capacitance type physical quantity sensor
    • 静电电容式物理量传感器
    • JP2008157674A
    • 2008-07-10
    • JP2006344418
    • 2006-12-21
    • Alps Electric Co Ltdアルプス電気株式会社
    • TAMURA MANABU
    • G01P15/125
    • PROBLEM TO BE SOLVED: To provide an electrostatic capacitance type physical quantity sensor capable of exhibiting excellent impact resistance while keeping sensitivity for a force, in a physical quantity sensor of a type combined with a torsion beam and a weight.
      SOLUTION: This capacitance type physical quantity sensor is constituted mainly of a glass substrate 11 having fixed electrodes 13a, 13b, and a silicon substrate 12 having a weight part 12a arranged opposedly to the fixed electrodes 13a, 13b, swung by applying the G and for forming a capacitance of a measuring object with respect to the fixed electrodes 13a, 13b. A beam part 12b for supporting the weight part 12a by both ends has a curved face curved toward an inner side on at least one cross section cut by a plane in parallel to an axis of the beam.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种静电电容型物理量传感器,其能够在与扭力梁和重量组合的物理量传感器中保持对力的灵敏度显示出优异的抗冲击性。 解决方案:该电容式物理量传感器主要由具有固定电极13a,13b的硅玻璃基板11和具有与固定电极13a,13b相对配置的重量部分12a的硅基板12构成, G并且用于相对于固定电极13a,13b形成测量对象的电容。 用于通过两端支撑配重部分12a的梁部分12b具有在平行于梁的轴线的平面切割的至少一个横截面上朝向内侧弯曲的弯曲面。 版权所有(C)2008,JPO&INPIT