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    • 2. 发明授权
    • Diffractive light modulator having continuously deformable surface
    • 衍射光调制器具有连续变形的表面
    • US07359106B1
    • 2008-04-15
    • US11230874
    • 2005-09-20
    • David T. AmmAlexander P. PayneJames A. Hunter
    • David T. AmmAlexander P. PayneJames A. Hunter
    • G02B26/00
    • G02B26/0808G02B26/0825
    • A light modulator and a method of manufacturing the same are provided having a continuously deformable optical surface. Generally, the modulator includes a substrate, a membrane disposed above and spaced apart from an upper surface of the substrate, the membrane having a continuously deformable light reflective surface formed on its upper side facing away from the upper surface of the substrate, and a means for deflecting the deformable surface relative to the substrate. Light reflected from different points of the deformable surface can interfere to modulate light reflected from the modulator in 0th order applications. In one embodiment, the membrane includes a static reflective surface surrounding the deformable surface. Light reflected from the static surface and the deformable surface can interfere to modulate light reflected from the modulator in non-0th order applications. Preferably, the static surface is substantially planar and the deformable surface are sized and shaped to define substantially equal areas. In one embodiment, the static surface circumscribes the deformable surface to define a parabolic reflector.
    • 光调制器及其制造方法具有连续变形的光学表面。 通常,调制器包括基板,设置在基板的上表面上方并与其间隔开的膜,所述膜具有形成在其远离基板的上表面的上侧上的可连续变形的光反射表面, 用于使可变形表面相对于基底偏转。 从可变形表面的不同点反射的光可能会干扰在第0级应用中调制从调制器反射的光。 在一个实施例中,膜包括围绕可变形表面的静态反射表面。 从静态表面和可变形表面反射的光可以干扰在非0级以上的应用中调制从调制器反射的光。 优选地,静态表面基本上是平面的,并且可变形表面的尺寸和形状被设计成限定基本相等的面积。 在一个实施例中,静态表面围绕可变形表面以限定抛物面反射器。
    • 3. 发明授权
    • Spatial light modulator with robust mirror substrate condition
    • 空间光调制器,具有鲁棒的镜面基板条件
    • US07085059B2
    • 2006-08-01
    • US11087230
    • 2005-03-23
    • Alexander P. PayneJames A. HunterDavid T. Amm
    • Alexander P. PayneJames A. HunterDavid T. Amm
    • G02B1/10
    • G02B26/0808
    • A light modulator and a method of manufacturing the same are provided having a substrate with reflectivity enhancing layers formed thereon. The layers include at least a top surface for receiving incident light, a first layer overlying the substrate, and a second layer between the top surface and the first layer, the second layer overlying and abutting the first layer. The second layer has a predetermined thickness selected in relation to an index of refraction of the second layer and to a wavelength of the incident light such that the light reflecting off an interface between the first and second layers constructively interferes with light reflected from the top surface. Preferably, the first layer also has a predetermined thickness selected such that the light reflecting off an interface between the first layer and the substrate constructively interferes with light reflected from the top surface.
    • 提供一种光调制器及其制造方法,具有在其上形成有反射增强层的基板。 这些层至少包括用于接收入射光的顶表面,覆盖衬底的第一层,以及顶表面和第一层之间的第二层,第二层覆盖并邻接第一层。 第二层具有相对于第二层的折射率和入射光的波长选择的预定厚度,使得从第一和第二层之间的界面反射的光建构性地干扰从顶表面反射的光 。 优选地,第一层还具有选择的预定厚度,使得从第一层和衬底之间的界面反射的光构造地干扰从顶表面反射的光。
    • 5. 发明授权
    • Adaptive bipolar operation of MEM device
    • MEM器件的自适应双极性操作
    • US06775047B1
    • 2004-08-10
    • US10225376
    • 2002-08-19
    • Omar S. LeungAkira TomitaDavid T. Amm
    • Omar S. LeungAkira TomitaDavid T. Amm
    • G02B2600
    • G02B26/0808
    • One embodiment disclosed relates to a method for adaptive bipolar operation of a micro electromechanical (MEM) device. The method includes driving the MEM device in a first polarity, determining when an offset passes a first threshold, and switching from the first polarity to a second polarity when the offset passes the first threshold. Another embodiment disclosed relates to an apparatus for adaptive bipolar operation of a MEM device. The apparatus includes a first look-up table (LUT) for use in driving the MEM device in a first polarity, a circuit for determining when an offset passes a first threshold, and a polarity switch for switching from the first polarity to a second polarity when the offset passes the first threshold.
    • 公开的一个实施例涉及一种用于微机电(MEM)装置的自适应双极性操作的方法。 该方法包括以第一极性驱动MEM器件,当偏移通过第一阈值时,确定偏移何时通过第一阈值,以及从第一极性切换到第二极性。 公开的另一实施例涉及用于MEM装置的自适应双极性操作的装置。 该装置包括用于以第一极性驱动MEM器件的第一查找表(LUT),用于确定偏移通过第一阈值的电路以及用于从第一极性切换到第二极性的极性开关 当偏移通过第一阈值时。