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1. 发明授权

US07256132B2 Substrate centering apparatus and method 失效
标题翻译：基板定心装置及方法
公开(公告)号：US07256132B2
公开(公告)日：2007-08-14
申请号：US10631650
申请日：2003-07-31
申请人： Alexander Lerner , Avi Tepman , Donald Olgato
发明人： Alexander Lerner , Avi Tepman , Donald Olgato
IPC分类号： H01L21/302 , H01L21/461
CPC分类号： H01L21/68
摘要： A semiconductor substrate centering mechanism includes a plurality of substrate support pins, each pin having a top surface. The top surfaces of the pins define a plane in which the substrate is supported. Each pin has a tab mounted eccentrically at the top surface of the pin. The tabs extend upwardly relative to the top surfaces of the pins. The centering mechanism further includes a pin rotation mechanism adapted to rotate each pin. The pin rotation mechanism rotates the pins between a first position in which the tabs define an envelope that is larger than a circumference of the substrate and a second position in which the tabs define a centered position for the substrate. A telescoping arrangement of nesting shield segments may also be provided for each pin to prevent processing fluid from reaching a shaft of the pin. In one aspect the centering mechanism is coupled to a substrate support of a substrate processing location, and thus allows a substrate to be centered as it is lowered to the processing location.
摘要翻译：半导体基板定心机构包括多个基板支撑销，每个销具有顶面。销的顶表面限定了其中衬底被支撑的平面。每个销具有偏心地安装在销的顶表面处的突片。凸片相对于销的顶部表面向上延伸。定心机构还包括适于旋转每个销的销旋转机构。销旋转机构使销在第一位置和第二位置之间旋转，在第一位置中，突片限定了大于衬底周长的外壳，其中突片限定了衬底的居中位置。也可以为每个销提供嵌套屏蔽段的伸缩布置，以防止处理流体到达销的轴。在一个方面，定心机构耦合到衬底处理位置的衬底支撑件，并且因此允许衬底在被降低到处理位置时居中。

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