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1. 发明申请

US20070251516A1 Precision slicing of large work pieces 审中-公开
标题翻译：大型工件精密切片
公开(公告)号：US20070251516A1
公开(公告)日：2007-11-01
申请号：US11413679
申请日：2006-04-28
申请人： Albert Nieber , Charles Darcangelo , Jeffrey Clark , William Angell
发明人： Albert Nieber , Charles Darcangelo , Jeffrey Clark , William Angell
IPC分类号： B28D1/08
CPC分类号： B23D57/0023 , B23D61/185 , B28D1/08 , B28D5/045
摘要： Disclosed is a process capable of precision slicing substrates with a dimension in the linear direction of at least I meter, comprising the following steps: (I) affixing the work piece to a stage; (11) providing multiple essentially parallel, essentially straight wires having a diameter in the range from about 100 μm to about 600 μm, and allowing the multiple wires to contact the surface of the work piece; (III) allowing the multiple wires to travel in linear directions, optionally with cutting slurry dispensed thereon; and (IV) allowing the multiple wires to move in the slicing directions relative to the work piece; wherein in step (IV), the multiple wires maintain essentially straight and essentially parallel to each other. The process can be used for slicing silica glass substrates having a diameter large than 2 meters in producing slices thereof with a high surface flatness and a low thickness variation.
摘要翻译：公开了一种能够将直径至少为1米的尺寸进行精密切片的方法，其包括以下步骤：（I）将工件固定在台面上; （11）提供多个基本上平行的，基本上直的导线，其直径在约100μm至约600μm之间，并且允许多个线接触工件的表面; （III），允许多根线材在线性方向上行进，任选地切割分配在其上的浆料; 和（IV）允许多条线相对于工件在切片方向上移动; 其中在步骤（IV）中，所述多条丝基本上保持基本上是直的并且基本上彼此平行。该方法可用于切割直径大于2米的石英玻璃基板，以高表面平整度和低厚度变化制造切片。

2. 发明申请

US20050259247A1 Apparatus and process for detecting inclusions 失效
标题翻译：用于检测夹杂物的装置和工艺
公开(公告)号：US20050259247A1
公开(公告)日：2005-11-24
申请号：US11133889
申请日：2005-05-20
申请人： David Cyr , Christopher Daigler , David Fladd , David Jenne , Albert Nieber , Nikki Russo , Paul Shustack
发明人： David Cyr , Christopher Daigler , David Fladd , David Jenne , Albert Nieber , Nikki Russo , Paul Shustack
IPC分类号： G01N21/88 , G01N21/958
CPC分类号： G01N21/958 , G01N21/8803
摘要： Disclosed are process and apparatus for inspecting internal inclusions in internally transmissive substrates. The process involves applying a black coating to one major surface of the substrate, submerging the substrate in a refractive index-matching fluid, and scanning the substrate with a collimated light beam. The scattered light signals produced by the inclusions can be detected by the human eye or by using a light detector. By the use of index-matching fluid and the black coating, the signal-to-noise ratio of the process and apparatus are enhanced. A preferred black coating is one cured from an electron beam or photo polymerizable coating composition applied to the major surface. The process and apparatus are particularly suitable for inspecting internal inclusions in an internally transmissive substrate having considerable amount of surface defects or contoured surface that prevent it from inspection in a gas medium.
摘要翻译：公开了用于检查内部透射性基板中的内部夹杂物的工艺和装置。该方法包括将黑色涂层施加到基底的一个主表面，将基底浸没在折射率匹配流体中，并用准直光束扫描基底。由夹杂物产生的散射光信号可以由人眼或使用光检测器检测。通过使用折射率匹配流体和黑色涂层，可以提高工艺和装置的信噪比。优选的黑色涂层是从施加到主表面的电子束或光聚合涂层组合物固化的。该方法和装置特别适用于检查内部透射基底中的内部夹杂物，其具有相当大量的表面缺陷或轮廓表面，从而阻止其在气体介质中检查。

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