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    • 2. 发明授权
    • Universal wafer carrier for wafer level die burn-in
    • 用于晶圆级模具老化的通用晶圆载体
    • US07511520B2
    • 2009-03-31
    • US11841566
    • 2007-08-20
    • Alan G. WoodTim J. CorbettWarren M. Farnworth
    • Alan G. WoodTim J. CorbettWarren M. Farnworth
    • G01R31/02G01R31/28
    • G01R31/2863
    • A reusable burn-in/test fixture for testing unsingulated dice on a semiconductor wafer consisting of two halves. The first half of the test fixture is a wafer cavity plate for receiving the wafer, and the second half establishes electrical communication between the wafer and electrical testing equipment. A rigid substrate has conductors thereon which establish electrical contact with the wafer. The test fixture need not be opened until the burn-in and electrical testing are completed. After burn-in stress and electrical testing, it is possible to establish interconnection between the single die or separate and package dice into discrete parts, arrays or clusters, either as singulated parts or as arrays.
    • 一个可重复使用的老化/测试夹具,用于测试由半个半部组成的半导体晶圆上的无引脚骰子。 测试夹具的前半部分是用于接收晶片的晶片腔板,第二半部分在晶片和电气测试设备之间建立电气连通。 刚性基板在其上具有与晶片电接触的导体。 在老化和电气测试完成之前,测试夹具不需要打开。 在老化应力和电气测试之后,可以将单个裸片或单独的封装裸片与封装裸片之间建立互为独立部件,阵列或簇的互连,或者作为单个部分或阵列。