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1. 发明授权

US08526575B1 Compound X-ray lens having multiple aligned zone plates 有权
标题翻译：具有多个对准区域板的复合X射线透镜
公开(公告)号：US08526575B1
公开(公告)日：2013-09-03
申请号：US12855463
申请日：2010-08-12
申请人： Alan Francis Lyon , Michael Feser , Wenbing Yun , Sharon Chen
发明人： Alan Francis Lyon , Michael Feser , Wenbing Yun , Sharon Chen
IPC分类号： G21K1/00
CPC分类号： G21K1/06 , G01N23/04 , G21K1/067 , G21K7/00
摘要： A compound zone plate comprising a first zone plate frame including a first zone plate, a second zone plate frame including a second zone plate, and a base frame to which the first zone plate frame and the second zone plate frame are bonded. In examples, two more zone plates are added to make a four element optic. In the assembly process, the microbeads are used to ensure the parallelism, dial in the distance precisely between the zone plates by selecting the microbead size, possibly in response to the width of the frames, and ensure low friction lateral movement enabling nanometer precision alignment of the zone plates with respect to each other prior to being fixed by the adhesive. That is, when the frames are pressed together to ensure parallelism, it is still possible to align them to each other since the microbead layer facilitates the inplane movement of the alignment process.
摘要翻译：一种复合区域板，包括第一区域板框架，该第一区域框架包括第一区域板，包括第二区域板的第二区域框架和第一区域板框架和第二区域框架结合到其上的基座框架。在示例中，添加另外两个区域板以制造四元件光学元件。在组装过程中，微珠用于确保平行度，通过选择微珠尺寸，可能是响应于框架的宽度，精确地在区域板之间拨出距离，并确保低摩擦横向运动，使纳米精度对准在通过粘合剂固定之前相对于彼此的区域板。也就是说，当框架被压在一起以确保平行时，仍然可以将它们彼此对准，因为微珠层有助于对准过程的内平面运动。

2. 发明授权

US07864426B2 High aspect-ratio X-ray diffractive structure stabilization methods and systems 有权
$High aspect-ratio X-ray diffractive structure stabilization methods and systems$
标题翻译：高纵横比X射线衍射结构稳定方法和系统
公开(公告)号：US07864426B2
公开(公告)日：2011-01-04
申请号：US11674532
申请日：2007-02-13
申请人： Wenbing Yun , Alan Francis Lyon , Yan Feng
发明人： Wenbing Yun , Alan Francis Lyon , Yan Feng
IPC分类号： G02B5/18
CPC分类号： G02B5/1876 , G02B5/1857 , G21K1/06
摘要： A method to stabilize planar nanostructures, for example grating and zone plate lenses that are typically used for directing or focusing x-ray radiation, includes the deposition of a top, stabilizing layer. The structures are typically made on a flat substrate, and therefore are only fixed at the bottom. At high aspect ratio, the stability can be poor since small forces such as electrostatic forces and van de Waals forces that are often present can alter the structure. The top coating of a metallic material such as titanium constrains the nanostructures at the top and at the same time eliminates electrostatic forces and reduces any thermal gradient that may be present across the device.
摘要翻译：稳定平面纳米结构的方法，例如通常用于引导或聚焦X射线辐射的光栅和区域透镜，包括顶部稳定层的沉积。这些结构通常制成在平坦的基底上，因此仅固定在底部。在高纵横比下，稳定性可能很差，因为通常存在的诸如静电力和范德瓦尔力的小力可能改变结构。诸如钛的金属材料的顶部涂层限制了顶部的纳米结构，同时消除了静电力并且减少了可能存在于该器件上的任何热梯度。

3. 发明申请

US20150110252A1 X-RAY SOURCES USING LINEAR ACCUMULATION 有权
标题翻译：使用线性累积的X射线源
公开(公告)号：US20150110252A1
公开(公告)日：2015-04-23
申请号：US14490672
申请日：2014-09-19
申请人： Wenbing Yun , Sylvia Jia Yun Lewis , Janos Kirz , Alan Francis Lyon
发明人： Wenbing Yun , Sylvia Jia Yun Lewis , Janos Kirz , Alan Francis Lyon
IPC分类号： H01J35/14 , H01J35/18
CPC分类号： H01J35/08 , G21K1/06 , H01J2235/081 , H01J2235/086
摘要： We disclose a compact source for high brightness x-ray generation. The higher brightness is achieved through electron beam bombardment of multiple regions aligned with each other to achieve a linear accumulation of x-rays. This may be achieved by aligning discrete x-ray sources, or through the use of novel x-ray targets that comprise a number of microstructures of x-ray generating materials fabricated in close thermal contact with a substrate with high thermal conductivity. This allows heat to be more efficiently drawn out of the x-ray generating material, and in turn allows bombardment of the x-ray generating material with higher electron density and/or higher energy electrons, leading to greater x-ray brightness.The orientation of the microstructures allows the use of an on-axis collection angle, allowing the accumulation of x-rays from several microstructures to be aligned to appear to have a single origin, also known as “zero-angle” x-ray emission.
摘要翻译：我们公开了一个紧凑的高亮度x射线产生源。通过彼此对准的多个区域的电子束轰击实现较高的亮度，以实现x射线的线性积累。这可以通过对准离散的x射线源或通过使用新的x射线靶来实现，所述X射线靶包括与具有高导热性的基底紧密热接触制造的x射线产生材料的多个微结构。这样可以更有效地将热量从X射线产生材料中拉出，并且进而允许以较高电子密度和/或更高能量的电子轰击x射线产生材料，导致更大的x射线亮度。微结构的方向允许使用轴上收集角，允许来自若干微结构的X射线的积聚被对准以看起来具有单个原点，也称为“零角”x射线发射。

4. 发明授权

US07974379B1 Metrology and registration system and method for laminography and tomography 有权
标题翻译：计量和注册系统和方法进行层析和层析成像
公开(公告)号：US07974379B1
公开(公告)日：2011-07-05
申请号：US12556341
申请日：2009-09-09
申请人： Thomas A. Case , Wenbing Yun , Alan Francis Lyon
发明人： Thomas A. Case , Wenbing Yun , Alan Francis Lyon
IPC分类号： G01N23/04
CPC分类号： G01N23/044 , G01N2223/419
摘要： A metrology system that uses an imaging system to monitor alignment features on the sample or sample holder of an X-ray laminography or tomography system. the metrology system has the capability to provide both sample shift and sample rotation movement data to a data acquisition system. These shift and rotation data can be used in alignment routines to produce 3D reconstructions from the X-ray images/projections. The metrology system is based on an imaging and focusing measurement of intrinsic feature of the sample or artificial features fabricated on the sample or sample holder.
摘要翻译：一种使用成像系统来监测X射线层析成像系统的样品或样品架上的对准特征的计量系统。测量系统具有将采样位移和采样旋转运动数据提供给数据采集系统的能力。这些移位和旋转数据可用于对准程序，以从X射线图像/投影产生3D重建。测量系统基于对样品或样品架上制作的样品或人造特征的固有特征的成像和聚焦测量。

5. 发明申请

US20080192347A1 High Aspect-Ratio X-Ray Diffractive Structure Stabilization Methods and Systems 有权
$High Aspect-Ratio X-Ray Diffractive Structure Stabilization Methods and Systems$
标题翻译：高纵横比X射线衍射结构稳定方法与系统
公开(公告)号：US20080192347A1
公开(公告)日：2008-08-14
申请号：US11674532
申请日：2007-02-13
申请人： Wenbing Yun , Alan Francis Lyon , Yan Feng
发明人： Wenbing Yun , Alan Francis Lyon , Yan Feng
IPC分类号： G02B5/18 , G21K1/06
CPC分类号： G02B5/1876 , G02B5/1857 , G21K1/06
摘要： A method to stabilize planar nanostructures, for example grating and zone plate lenses that are typically used for directing or focusing x-ray radiation, includes the deposition of a top, stabilizing layer. The structures are typically made on a flat substrate, and therefore are only fixed at the bottom. At high aspect ratio, the stability can be poor since small forces such as electrostatic forces and van de Waals forces that are often present can alter the structure. The top coating of a metallic material such as titanium constrains the nanostructures at the top and at the same time eliminates electrostatic forces and reduces any thermal gradient that may be present across the device
摘要翻译：稳定平面纳米结构的方法，例如通常用于引导或聚焦X射线辐射的光栅和区域透镜，包括顶部稳定层的沉积。这些结构通常制成在平坦的基底上，因此仅固定在底部。在高纵横比下，稳定性可能很差，因为通常存在的诸如静电力和范德瓦尔力的小力可能改变结构。金属材料如钛的顶部涂层限制了顶部的纳米结构，同时消除静电力并减少可能存在于该装置上的任何热梯度

6. 发明申请

US20160268094A1 X-ray sources using linear accumulation 有权
标题翻译： X射线源使用线性积分
公开(公告)号：US20160268094A1
公开(公告)日：2016-09-15
申请号：US14999147
申请日：2016-04-01
申请人： Wenbing Yun , Sylvia Jia Yun Lewis , Janos Kirz , Alan Francis Lyon
发明人： Wenbing Yun , Sylvia Jia Yun Lewis , Janos Kirz , Alan Francis Lyon
IPC分类号： H01J35/10 , H01J35/14 , H01J35/18
CPC分类号： H01J35/106 , G21K1/06 , H01J35/08 , H01J35/12 , H01J35/14 , H01J35/18 , H01J2235/081 , H01J2235/086 , H01J2235/1204 , H01J2235/1291
摘要： A compact source for high brightness x-ray generation is disclosed. The higher brightness is achieved through electron beam bombardment of multiple regions aligned with each other to achieve a linear accumulation of x-rays. This may be achieved by aligning discrete x-ray sub-sources, or through the use of x-ray targets that comprise microstructures of x-ray generating materials fabricated in close thermal contact with a substrate with high thermal conductivity. This allows heat to be more efficiently drawn out of the x-ray generating material, and in turn allows bombardment of the x-ray generating material with higher electron density and/or higher energy electrons, leading to greater x-ray brightness.The orientation of the microstructures allows the use of an on-axis collection angle, allowing the accumulation of x-rays from several microstructures to be aligned to appear to have a single origin, also known as “zero-angle” x-ray radiation.
摘要翻译：微结构的方向允许使用轴上收集角，允许来自若干微结构的X射线的聚集被对准以看起来具有单个原点，也称为“零角”x射线辐射。

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