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1. 发明申请

US20110198602A1 ALUMINUM ALLOY FILM FOR DISPLAY DEVICE, DISPLAY DEVICE, AND SPUTTERING TARGET 审中-公开
标题翻译：用于显示器件的铝合金膜，显示器件和溅射靶
公开(公告)号：US20110198602A1
公开(公告)日：2011-08-18
申请号：US13122937
申请日：2009-11-05
申请人： Akira Nanbu , Hiroshi Goto , Aya Miki , Hiroyuki Okuno , Junichi Nakai , Tomoya Kishi , Toshiaki Takagi , Shigenobu Namba , Mamoru Nagao , Nobuhiro Kobayashi
发明人： Akira Nanbu , Hiroshi Goto , Aya Miki , Hiroyuki Okuno , Junichi Nakai , Tomoya Kishi , Toshiaki Takagi , Shigenobu Namba , Mamoru Nagao , Nobuhiro Kobayashi
IPC分类号： H01L33/08 , C22C21/00 , C23C14/34 , C22C21/12 , H01L33/16
CPC分类号： C23C14/18 , C23C14/3414 , G02F1/136227 , G02F1/1368 , H01L21/2855 , H01L23/53219 , H01L27/124 , H01L29/458 , H01L29/4908 , H01L2924/0002 , Y10T428/12014 , H01L2924/00
摘要： Disclosed is an Al alloy film which can be in direct contact with a transparent pixel electrode in a wiring structure of a thin film transistor substrate that is used in a display device, and which has improved corrosion resistance against an amine remover liquid that is used during the production process of the thin film transistor. Also disclosed is a display device using the Al alloy film. Specifically disclosed is an Al alloy film for a display device, said Al alloy film being directly connected with a transparent conductive film on a substrate of a display device, and containing 0.05-2.0 atom % of Ge, at least one element selected from among element group X (Ni, Ag, Co, Zn and Cu), and 0.02-2 atom % of at least one element selected from among element group Q consisting of the rare earth elements. A Ge-containing deposit and/or a Ge-concentrated part is present in the Al alloy film for a display device. Also specifically disclosed is a display device comprising the Al alloy film.
摘要翻译：公开了一种Al合金膜，其可以与用于显示装置的薄膜晶体管基板的布线结构中的透明像素电极直接接触，并且其对于在用于显示装置的胺去除剂液体下具有改善的耐腐蚀性薄膜晶体管的生产工艺。还公开了使用Al合金膜的显示装置。具体公开了一种用于显示装置的Al合金膜，所述Al合金膜与显示装置的基板上的透明导电膜直接连接，并含有0.05-2.0原子％的Ge，至少一种元素选自元素组X（Ni，Ag，Co，Zn和Cu）和0.02-2原子％的选自由稀土元素构成的元素组Q中的至少一种元素。在用于显示装置的Al合金膜中存在含Ge沉积物和/或Ge浓缩部分。还具体公开了包括Al合金膜的显示装置。

2. 发明申请

US20100328247A1 TOUCH PANEL SENSOR 审中-公开
标题翻译：触摸面板传感器
公开(公告)号：US20100328247A1
公开(公告)日：2010-12-30
申请号：US12918727
申请日：2009-02-20
申请人： Aya Miki , Hiroshi Goto , Hiroyuki Okuno , Tomoya Kishi , Akira Nanbu
发明人： Aya Miki , Hiroshi Goto , Hiroyuki Okuno , Tomoya Kishi , Akira Nanbu
IPC分类号： G06F3/041
CPC分类号： G06F3/041 , C22C21/00 , H05K1/09
摘要： Disclosed is a highly reliable touch panel sensor comprising a guiding wiring that is less likely to cause an increase in electrical resistance and disconnection with the elapse of time, has a low electrical resistance, can ensure electrical conduction to a transparent conductive film, and can be connected directly to the transparent conductive film. The touch panel sensor comprises a transparent conductive film and a guiding wiring made of an aluminum alloy film connected directly to the transparent conductive film. The aluminum alloy film comprises 0.2 to 10 atomic% in total of at least one element selected from an X group consisting of Ni and Co. The aluminum alloy film has a hardness of 2 to 15 GPa.
摘要翻译：公开了一种高度可靠的触摸面板传感器，其包括不太可能随时间推移而导致电阻和断开增加的引导布线，具有低电阻，可以确保对透明导电膜的导电，并且可以直接连接到透明导电膜。触摸面板传感器包括透明导电膜和由直接连接到透明导电膜的铝合金膜制成的引导布线。铝合金膜的总和为0.2〜10原子％，选自由Ni，Co组成的X族中的至少一种元素。铝合金膜的硬度为2〜15GPa。

3. 发明申请

US20110019350A1 AL ALLOY FILM FOR DISPLAY DEVICE, DISPLAY DEVICE, AND SPUTTERING TARGET 有权
标题翻译：用于显示装置的AL合金膜，显示装置和喷射目标
公开(公告)号：US20110019350A1
公开(公告)日：2011-01-27
申请号：US12922965
申请日：2009-04-23
申请人： Junichi Nakai , Akira Nanbu , Hiroshi Goto , Hiroyuki Okuno , Aya Miki
发明人： Junichi Nakai , Akira Nanbu , Hiroshi Goto , Hiroyuki Okuno , Aya Miki
IPC分类号： H05K7/00 , C22C21/00 , C23C14/14
CPC分类号： H01L23/53219 , C23C14/185 , G02F2001/136295 , H01L27/124 , H01L29/458 , H01L29/4908 , H01L2924/0002 , H01L2924/00
摘要： Disclosed is an Al alloy film for a display device that, even when low-temperature heat treatment is applied, can realize satisfactorily low electric resistance, can realize a satisfactory reduction in contact resistance between the Al alloy film and a transparent pixel electrode connected directly to the Al alloy film, and has excellent corrosion resistance. The Al alloy film is connected directly to a transparent electroconductive film on the substrate in the display device. The Al alloy film comprises 0.05 to 0.5 atomic % of Co and 0.2 to 1.0 atomic % of Ge and satisfies the requirement that the content of Co and the content of Ge in the Al alloy film have a relationship represented by formula (1): [Ge]≧−0.25×[Co]+0.2 (1) In formula (1), [Ge] represents the content of Ge in the Al alloy film, atomic %; and [Co] represents the content of Co in the Al alloy film, atomic %.
摘要翻译：公开了一种用于显示装置的Al合金膜，即使应用低温热处理也能够实现令人满意的低电阻，可以实现Al合金膜与直接连接的Al透明像素电极之间的接触电阻的令人满意的降低 Al合金膜，并具有优异的耐腐蚀性。 Al合金膜直接连接到显示装置中的基板上的透明导电膜。 Al合金膜包含0.05〜0.5原子％的Co和0.2〜1.0原子％的Ge，并且满足Al合金膜中的Co含量和Ge含量具有由式（1）表示的关系的要求：[ Ge]≥0.25×[Co] +0.2（1）式（1）中，[Ge]表示Al合金膜中Ge的含量，原子％ [Co]表示Al合金膜中Co的含量，原子％。

4. 发明申请

US20110008640A1 DISPLAY DEVICE, PROCESS FOR PRODUCING THE DISPLAY DEVICE, AND SPUTTERING TARGET 审中-公开
标题翻译：显示装置，用于制造显示装置的方法和喷射目标
公开(公告)号：US20110008640A1
公开(公告)日：2011-01-13
申请号：US12922764
申请日：2009-03-31
申请人： Hiroshi Goto , Akira Nanbu , Junichi Nakai , Hiroyuki Okuno , Mototaka Ochi , Aya Miki
发明人： Hiroshi Goto , Akira Nanbu , Junichi Nakai , Hiroyuki Okuno , Mototaka Ochi , Aya Miki
IPC分类号： G02F1/1343 , C09K19/00 , C22F1/04 , C23C14/14
CPC分类号： H01L29/458 , C22C21/00 , C22C21/10 , C23C14/3414 , H01L27/12 , H01L27/124 , H01L29/4908 , Y10T428/12049
摘要： Disclosed is a display device comprising an aluminum alloy film. In a wiring structure of a thin-film transistor substrate for use in display devices, the aluminum alloy film can realize direct contact between a thin film of an aluminum alloy and a transparent pixel electrode, can simultaneously realize low electric resistance and heat resistance, and can improve resistance to corrosion by an amine-based peeling liquid and an alkaline developing solution used in a thin-film transistor production process. In the display device, an oxide electroconductive film is in direct contact with an Al alloy film and at least a part of the Al alloy component is precipitated on the contact surface of the Al alloy film. The Al alloy film comprises at least one element (element X1) selected from the group consisting of Ni, Ag, Zn, and Co and at least one element (element X2) which, together with the element X1, can form an intermetallic compound. An intermetallic compound, which has a maximum diameter of not more than 150 nm and is represented by at least one of X1—X2 and Al—X1—X2, is formed in the Al alloy film.
摘要翻译：公开了一种包括铝合金膜的显示装置。在用于显示装置的薄膜晶体管基板的布线结构中，铝合金膜可以实现铝合金薄膜和透明像素电极之间的直接接触，同时可以实现低电阻和耐热性，并且可以通过在薄膜晶体管制造方法中使用的胺系剥离液和碱性显影液来提高耐腐蚀性。在显示装置中，氧化物导电膜与Al合金膜直接接触，Al合金成分的至少一部分析出在Al合金膜的接触面上。 Al合金膜包括选自Ni，Ag，Zn和Co中的至少一种元素（元素X1）和与元素X1一起可以形成金属间化合物的至少一种元素（元素X2）。在Al合金膜中形成具有最大直径不大于150nm并由至少一个X1-X2和Al-X1-X2表示的金属间化合物。

5. 发明授权

US08422207B2 Al alloy film for display device, display device, and sputtering target 有权
标题翻译：铝合金薄膜，显示装置，溅射靶
公开(公告)号：US08422207B2
公开(公告)日：2013-04-16
申请号：US12922965
申请日：2009-04-23
申请人： Junichi Nakai , Akira Nanbu , Hiroshi Goto , Hiroyuki Okuno , Aya Miki
发明人： Junichi Nakai , Akira Nanbu , Hiroshi Goto , Hiroyuki Okuno , Aya Miki
IPC分类号： G06F1/16
CPC分类号： H01L23/53219 , C23C14/185 , G02F2001/136295 , H01L27/124 , H01L29/458 , H01L29/4908 , H01L2924/0002 , H01L2924/00
摘要： Disclosed is an Al alloy film for a display device that, even when low-temperature heat treatment is applied, can realize satisfactorily low electric resistance, can realize a satisfactory reduction in contact resistance between the Al alloy film and a transparent pixel electrode connected directly to the Al alloy film, and has excellent corrosion resistance. The Al alloy film is connected directly to a transparent electroconductive film on the substrate in the display device. The Al alloy film comprises 0.05 to 0.5 atomic % of Co and 0.2 to 1.0 atomic % of Ge and satisfies the requirement that the content of Co and the content of Ge in the Al alloy film have a relationship represented by formula (1): [Ge]≧−0.25×[Co]+0.2 (1) In formula (1), [Ge] represents the content of Ge in the Al alloy film, atomic %; and [Co] represents the content of Co in the Al alloy film, atomic %.
摘要翻译：公开了一种用于显示装置的Al合金膜，即使应用低温热处理，也能够实现令人满意的低电阻，可以实现Al合金膜和直接连接到Al合金膜的透明像素电极之间的接触电阻的令人满意的降低 Al合金膜，并具有优异的耐腐蚀性。 Al合金膜直接连接到显示装置中的基板上的透明导电膜。 Al合金膜包含0.05〜0.5原子％的Co和0.2〜1.0原子％的Ge，并且满足Al合金膜中的Co含量和Ge含量具有由式（1）表示的关系的要求：[ Ge]≥0.25×[Co] +0.2（1）式（1）中，[Ge]表示Al合金膜中Ge的含量，原子％ [Co]表示Al合金膜中Co的含量，原子％。

6. 发明申请

US20090242394A1 AL-BASED ALLOY SPUTTERING TARGET AND MANUFACTURING METHOD THEREOF 审中-公开
标题翻译：基于AL的合金喷射目标及其制造方法
公开(公告)号：US20090242394A1
公开(公告)日：2009-10-01
申请号：US12414877
申请日：2009-03-31
申请人： Katsutoshi Takagi , Yuki Iwasaki , Masaya Ehira , Hiroshi Goto , Aya Miki , Hiroyuki Okuno , Mototaka Ochi , Tomoya Kishi
发明人： Katsutoshi Takagi , Yuki Iwasaki , Masaya Ehira , Hiroshi Goto , Aya Miki , Hiroyuki Okuno , Mototaka Ochi , Tomoya Kishi
IPC分类号： C23C14/34 , C21D1/00
CPC分类号： C23C14/3414 , C22C21/00 , C22F1/04
摘要： The present invention provides an Al—(Ni, Co)—(Cu, Ge)—(La, Gd, Nd) alloy sputtering target capable of decreasing a generation of splashing in an initial stage of using the sputtering target, preventing defects caused thereby in interconnection films or the like and improving a yield and operation performance of an FPD, as well as a manufacturing method thereof. The invention relates to an Al-based alloy sputtering target which is an Al—(Ni, Co)—(Cu, Ge)—(La, Gd, Nd) alloy sputtering target comprising at least one member selected from the group A (Ni, Co), at least one member selected from the group B (Cu, Ge), and at least one member selected from the group C (La, Gd, Nd) wherein a Vickers hardness (HV) thereof is 35 or more.
摘要翻译：本发明提供能够在使用溅射靶的初始阶段减少飞溅产生的Al-（Ni，Co） - （Cu，Ge） - （La，Gd，Nd）合金溅射靶，从而防止由此引起的缺陷在互连膜等中，提高FPD的成品率和操作性能，以及其制造方法。本发明涉及一种Al基合金溅射靶，它是Al-（Ni，Co） - （Cu，Ge） - （La，Gd，Nd）合金溅射靶，其包含至少一种选自A ，Co），选自B族（Cu，Ge）中的至少一种以及选自维氏硬度（HV）为35以上的C（La，Gd，Nd）中的至少一种。

7. 发明申请

US20130249571A1 TOUCH PANEL SENSOR 审中-公开
标题翻译：触摸面板传感器
公开(公告)号：US20130249571A1
公开(公告)日：2013-09-26
申请号：US13990981
申请日：2011-11-30
申请人： Hiroyuki Okuno , Aya Miki , Toshihiro Kugimiya
发明人： Hiroyuki Okuno , Aya Miki , Toshihiro Kugimiya
IPC分类号： G01R1/04
CPC分类号： G01R1/04 , G06F3/044
摘要： Provided is a touch panel sensor which has excellent durability particularly in a longitudinal direction as in the case in which an indentation load is imposed, rarely undergoes the increase in electrical resistivity which may be caused by the disconnection of a wire or as elapse of time, has high reliability and high glossiness, and also has an excellent color-displaying capability. This touch panel sensor comprises a transparent conductive film and a wiring that is connected to the transparent conductive film, wherein the wiring comprises a refractory metal film, an Al alloy film and a high-melting-point metal film in this order when observed from the side of a substrate, and wherein the Al alloy film contains a rare earth element in an amount of 0.05-5 atomic %. It is preferred for the touch panel sensor that the hardness is 2-3.5 GPa and the density of grain boundary triple junctions in the Al alloy structure is 2×108 /mm2 or more. It is also preferred for the touch panel sensor that the Young's modulus is 80-200 GPa and the maximum value of the unidirectional tangential diameter (Feret diameter) of grain boundary is 100-350 nm. It is also preferred for the touch panel sensor that the glossiness is 800% or higher.
摘要翻译：提供了一种触摸面板传感器，其特别是在纵向方向上具有优异的耐久性，如在施加压痕负荷的情况下，很少会由于电线断开或时间的流逝而导致的电阻率增加，具有高可靠性和高光泽度，并且还具有出色的显色能力。该触摸面板传感器包括透明导电膜和连接到透明导电膜的布线，其中当从该透明导电膜观察时，该布线依次包括耐火金属膜，Al合金膜和高熔点金属膜并且其中Al合金膜含有0.05-5原子％的稀土元素。触摸面板传感器优选硬度为2-3.5GPa，Al合金结构中的晶界三重结合密度为2×10 8 / mm 2以上。触摸面板传感器也优选杨氏模量为80-200GPa，晶界的单向切向直径（Feret直径）的最大值为100-350nm。触摸面板传感器也优选光泽度为800％以上。

8. 发明申请

US20140131688A1 INTERCONNECTION STRUCTURE INCLUDING REFLECTIVE ANODE ELECTRODE FOR ORGANIC EL DISPLAYS 审中-公开
标题翻译：互连结构包括有机EL显示器的反射阳极电极
公开(公告)号：US20140131688A1
公开(公告)日：2014-05-15
申请号：US14115264
申请日：2012-05-18
申请人： Hiroyuki Okuno , Aya Miki , Toshihiro Kugimiya
发明人： Hiroyuki Okuno , Aya Miki , Toshihiro Kugimiya
IPC分类号： H01L27/32
CPC分类号： H01L27/3276 , C22C21/00 , H01L27/3248 , H01L51/5218
摘要： Provided is an interconnection structure comprising a reflective anode electrode for organic EL displays, which is provided with an Al alloy film that has excellent durability and is capable of assuring stable light emission characteristics even in cases where an Al reflective film is directly connected with an organic layer, while achieving high yield. The present invention is related to an interconnection structure which comprises, on a substrate, an Al alloy film that constitutes a reflective anode electrode for organic EL displays and an organic layer that contains a light-emitting layer. In the interconnection structure, the Al alloy film contains a specific rare earth element in an amount of 0.05-5% by atom and the organic layer is directly connected onto the Al alloy film.
摘要翻译：提供了一种互连结构，其包括用于有机EL显示器的反射性阳极电极，其具有优异的耐久性并且即使在Al反射膜与有机EL直接连接的情况下也能够确保稳定的发光特性的Al合金膜层，同时实现高产量。本发明涉及一种互连结构，该互连结构在基板上包括构成有机EL显示器的反射性阳极的Al合金膜和含有发光层的有机层。在互连结构中，Al合金膜含有0.05-5原子％的特定稀土元素，有机层直接连接在Al合金膜上。

9. 发明申请

US20100163877A1 DISPLAY DEVICE 有权
标题翻译：显示设备
公开(公告)号：US20100163877A1
公开(公告)日：2010-07-01
申请号：US12376863
申请日：2007-09-13
申请人： Aya Hino , Hiroshi Gotou , Hiroyuki Okuno , Junichi Nakai
发明人： Aya Hino , Hiroshi Gotou , Hiroyuki Okuno , Junichi Nakai
IPC分类号： H01L33/42 , H01L33/16
CPC分类号： G02F1/136286 , H01L23/53219 , H01L23/53223 , H01L27/124 , H01L29/458 , H01L29/4908 , H01L2924/0002 , H01L2924/00
摘要： A display has a glass substrate provided with a transparent conducting film, thin-film transistors, and an aluminum alloy wiring film electrically connecting the thin-film transistors to the transparent conducting film. The aluminum alloy wiring film is a layered structure having a first layer (X) of an aluminum alloy comprising at least one element selected from the specific element group Q including Ni and Ag, and at least one element selected from the specific element group R including rare-earth elements and Mg in a content in the specific range, and a second layer (Y) of an aluminum alloy containing having a resistivity lower than that of the first layer (X). The first layer (X) is in direct contact with the transparent conducting film.
摘要翻译：显示器具有设置有透明导电膜，薄膜晶体管和将薄膜晶体管电连接到透明导电膜的铝合金布线膜的玻璃基板。铝合金布线膜是具有铝合金的第一层（X）的层叠结构，所述第一层（X）包含选自包含Ni和Ag的特定元素组Q中的至少一种元素，以及选自特定元素基团R中的至少一种元素，包括含量在特定范围内的稀土元素和Mg，以及含有比第一层（X）的电阻率低的铝合金的第二层（Y）。第一层（X）与透明导电膜直接接触。

10. 发明授权

US08044399B2 Display device 有权
标题翻译：显示设备
公开(公告)号：US08044399B2
公开(公告)日：2011-10-25
申请号：US12376863
申请日：2007-09-13
申请人： Aya Hino , Hiroshi Gotou , Hiroyuki Okuno , Junichi Nakai
发明人： Aya Hino , Hiroshi Gotou , Hiroyuki Okuno , Junichi Nakai
IPC分类号： H01L29/04 , H01L31/036 , H01L31/0376 , H01L31/20
CPC分类号： G02F1/136286 , H01L23/53219 , H01L23/53223 , H01L27/124 , H01L29/458 , H01L29/4908 , H01L2924/0002 , H01L2924/00
摘要： A display has a glass substrate provided with a transparent conducting film, thin-film transistors, and an aluminum alloy wiring film electrically connecting the thin-film transistors to the transparent conducting film. The aluminum alloy wiring film is a layered structure having a first layer (X) of an aluminum alloy comprising at least one element selected from the specific element group Q including Ni and Ag, and at least one element selected from the specific element group R including rare-earth elements and Mg in a content in the specific range, and a second layer (Y) of an aluminum alloy containing having a resistivity lower than that of the first layer (X). The first layer (X) is in direct contact with the transparent conducting film.
摘要翻译：显示器具有设置有透明导电膜，薄膜晶体管和将薄膜晶体管电连接到透明导电膜的铝合金布线膜的玻璃基板。铝合金布线膜是具有铝合金的第一层（X）的层叠结构，所述第一层（X）包含选自包含Ni和Ag的特定元素组Q中的至少一种元素，以及选自特定元素基团R中的至少一种元素，包括含量在特定范围内的稀土元素和Mg，以及含有比第一层（X）的电阻率低的铝合金的第二层（Y）。第一层（X）与透明导电膜直接接触。

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