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    • 1. 发明授权
    • Miniaturized oxygen electrode
    • 小型氧电极
    • US5492611A
    • 1996-02-20
    • US307013
    • 1994-09-16
    • Akio SugamaHiroaki SuzukiNaomi Kojima
    • Akio SugamaHiroaki SuzukiNaomi Kojima
    • G01N27/26
    • G01N27/404
    • A miniaturized oxygen electrode comprising: an electrically insulating substrate; an electrolyte-containing material disposed on the substrate to form an electrolyte solution when water is introduced thereto; a set of component electrodes disposed on the substrate and connected with each other via the electrolyte-containing material; a gas-permeable membrane covering the electrolyte-containing material; the set of component electrodes including a cathode on which a reduction reaction of oxygen occurs and an anode as a counterpart of the cathode; the electrolyte-containing material being composed of a first layer and a second layer which are mutually connected, the first layer containing no electrolytes and being connected to the cathode and the second layer containing an electrolyte and being not connected to the cathode, the mutual connection of the first layer and the second layer being effected so that, during the water introduction and a subsequent holding, the electrolyte of the second layer diffuses to the first layer to form a single electrolyte solution layer.
    • 一种小型氧电极,包括:电绝缘基板; 当将水引入其中时,设置在所述基板上以形成电解质溶液的电解质材料; 一组部件电极,设置在基板上并通过含电解液的材料相互连接; 覆盖含电解质的材料的透气膜; 包括发生氧的还原反应的阴极和作为阴极的对应物的阳极的组件电极组; 所述含电解质的材料由相互连接的第一层和第二层构成,所述第一层不含电解质并且连接到所述阴极,所述第二层包含电解质并且不与阴极连接,所述相互连接 的第一层和第二层,使得在水引入和随后的保持期间,第二层的电解质扩散到第一层以形成单个电解质溶液层。
    • 2. 发明授权
    • Small glass electrode
    • 小玻璃电极
    • US5417837A
    • 1995-05-23
    • US803433
    • 1991-12-06
    • Hiroaki SuzukiAkio SugamaNaomi Kojima
    • Hiroaki SuzukiAkio SugamaNaomi Kojima
    • G01N27/36G01N27/403G01N27/414
    • G01N27/36G01N27/4035
    • A small glass electrode and process for preparation thereof are disclosed. This small glass electrode is characterized in that said glass electrode, which has a bonded structure comprises a reference electrode composed of silver/silver chloride, a glass substrate having a pad embedded therein, said pad being composed of gold or platinum and circuit-connected to the reference electrode, and a silicon substrate having a (100) plane selectively etched by the anisotropic etching technique and comprising a groove for injecting an electrolyte composed of an aqueous solution containing chlorine such as KCl, or HCl, at least one hole for holding the electrolyte and a glass film formed in a portion corresponding to the reference electrode. By this structure, the small glass electrode can be easily manufactured at a low cost.
    • 公开了一种小玻璃电极及其制备方法。 该小玻璃电极的特征在于,具有接合结构的所述玻璃电极包括由银/氯化银构成的参考电极,具有嵌入其中的焊盘的玻璃基板,所述焊盘由金或铂构成,并且电路连接到 参考电极和具有通过各向异性蚀刻技术选择性地蚀刻的(100)面的硅衬底,并且包括用于注入包含氯的水溶液如KCl或HCl的电解质的沟槽,至少一个用于保持 电解质和形成在与参考电极相对应的部分中的玻璃膜。 通过这种结构,可以以低成本容易地制造小玻璃电极。
    • 3. 发明授权
    • Oxygen electrode
    • 氧电极
    • US5358619A
    • 1994-10-25
    • US993486
    • 1992-12-17
    • Hiroaki SuzukiAkio SugamaNaomi Kojima
    • Hiroaki SuzukiAkio SugamaNaomi Kojima
    • G01N27/49G01N27/26
    • G01N27/404G01N27/3271Y10S435/817
    • A small oxygen electrode and a method of bonding a fluorine resin film are disclosed. This small oxygen electrode includes a flat electrode substrate having at least two electrodes (a working electrode and a counter electrode) formed thereon, and a container substrate having dents formed to confront the two electrodes and contain an electrolyte therein. The container substrate which is bonded to the flat electrode substrate, so that the dent confronting the electrode constituting the working electrode has a through hole extending to the side opposite to the flat electrode substrate and a gas-permeable film is formed to cover the through hole. By using this dent structure, the preparation of an oxygen electrode can be conducted while maintaining a wafer form throughout the process, and formation of an electrode pattern can be facilitated. The method of bonding the fluorine resin film includes treating the fluorine resin film with an agent containing metallic sodium, then treating the fluorine resin film with a silane coupling agent. The treated fluorine resin film is fusion bonded by heating, and if necessary, conducting subsequent treatments in vacuo. By adopting this method, the fluorine resin film can be bonded tightly to the substrate and peeling of the fluorine resin film from the substrate can be prevented.
    • 公开了一种小氧电极和氟树脂膜的接合方法。 该小氧电极包括具有形成在其上的至少两个电极(工作电极和对电极)的平坦电极基板和具有凹陷以形成为与两个电极对置并容纳电解质的容器基板。 与扁平电极基板接合的容器基板,使构成工作电极的电极的凹槽具有延伸到与平面电极基板相反的一侧的通孔,并且形成透气膜以覆盖通孔 。 通过使用该凹陷结构,可以在整个工艺中保持晶片形状的同时进行氧电极的制备,并且可以促进电极图案的形成。 氟树脂膜的接合方法包括用含有金属钠的试剂处理氟树脂膜,然后用硅烷偶联剂处理氟树脂膜。 经处理的氟树脂膜通过加热熔合,如果需要,在真空中进行后续处理。 通过采用该方法,可以将氟树脂膜紧密地粘合到基板上,并且可以防止氟树脂膜从基板剥离。
    • 4. 发明授权
    • Small glass electrode
    • 小玻璃电极
    • US5837113A
    • 1998-11-17
    • US598287
    • 1996-02-08
    • Hiroaki SuzukiAkio SugamaNaomi Kojima
    • Hiroaki SuzukiAkio SugamaNaomi Kojima
    • G01N27/36
    • G01N27/36
    • A small glass electrode and process for preparation thereof, the small glass electrode having a bonded structure and comprising a reference electrode composed of silver/silver chloride, a glass substrate having a pad embedded therein, the pad being composed of gold or platinum and circuit-connected to the reference electrode, and a silicon substrate having a (100) plane selectively etched by the anisotropic etching technique and comprising a groove for injecting an electrolyte composed of an aqueous solution containing chlorine such as KCA, or HCA, at least one hole for holding the electrolyte and a glass film formed in a portion corresponding to the reference electrode. The structure of the small glass electrode may be produced by the disclosed process easily and at low cost. Additionally, the small glass electrode, in differing embodiments, may include a reference electrode and a temperature sensor.
    • 一种小玻璃电极及其制备方法,该小玻璃电极具有接合结构,并且包括由银/氯化银构成的参比电极,具有嵌入其中的焊盘的玻璃基板,该焊盘由金或铂构成, 连接到参考电极,以及具有通过各向异性蚀刻技术选择性地蚀刻的(100)面的硅衬底,并且包括用于注入包含氯的水溶液如KCA或HCA的电解槽,用于至少一个用于 保持电解质和形成在与参考电极相对应的部分中的玻璃膜。 小玻璃电极的结构可以通过公开的方法容易且低成本地制造。 另外,在不同实施例中,小玻璃电极可以包括参考电极和温度传感器。
    • 5. 发明授权
    • Miniaturized oxygen electrode and process of producing same
    • 小型氧电极及其制造方法
    • US5573649A
    • 1996-11-12
    • US430318
    • 1995-04-28
    • Akio SugamaHiroaki SuzukiNaomi Kojima
    • Akio SugamaHiroaki SuzukiNaomi Kojima
    • G01N27/26
    • G01N27/404G01N27/3271Y10S435/817
    • The miniaturized oxygen electrode having a small size exceeding the limit of miniaturization of the prior art electrode comprises an insulating substrate 21, 31 and, provided thereon, a pair of electrode patterns 22, 23 each comprising an active section 22A, 23A, a terminal section 22C, 23C for external connection, and a lead wire portion 22B, 23B for the connection thereof, the active sections 22A, 23A being mutually connected through an electrolyte-containing material 24, the electrolyte-containing material 24 being covered with an oxygen-permeable membrane 28, the lead wire portion 22B of at least one 22 of the electrode patterns extending below the active section 23A of at least one of other electrode patterns, 23, with an insulating layer 29 intervening between the lead wire portion 22B and the active section 23A.
    • 具有超过现有技术电极的小型化的小尺寸的小型氧电极包括绝缘基板21,31,并且在其上设置有一对电极图案22,23,每个电极图案包括有源部分22A,23A,端子部分 22C,23C用于外部连接,以及用于连接的引线部分22B,23B,有源部分22A,23A通过含电解质的材料24相互连接,含电解质的材料24被透氧的 薄膜28,至少一个22个电极图案的引线部分22B延伸到至少一个其它电极图案23的有源部分23A下方,绝缘层29介于导线部分22B和有源部分之间 23A。
    • 6. 发明授权
    • Miniaturized oxygen electrode
    • 小型氧电极
    • US5326450A
    • 1994-07-05
    • US987163
    • 1992-12-08
    • Akio SugamaHiroaki SuzukiNaomi Kojima
    • Akio SugamaHiroaki SuzukiNaomi Kojima
    • G01N27/49G01N27/26
    • G01N27/404G01N27/3272
    • A miniaturized oxygen electrode which comprises: an electrically insulating substrate; an electrolyte-containing material disposed on the substrate and capable of serving as an electrolytic solution when supplied with water; a set of component electrodes disposed on the substrate and composed of a first component electrode on which a reduction reaction of oxygen dissolved in the electrolytic solution occurs when the miniaturized oxygen electrode is operated and one or more second component electrodes other than the first component electrode, the first component electrode being interconnected with the second component electrodes through the electrolyte-containing material; an oxygen gas-permeable membrane covering the electrolyte-containing material; and the electrolyte-containing material having a length for providing a sufficient distance along the interconnection between the first and second component electrodes such that any electroactive substances, formed on one of the first and second component electrodes during the operation of the miniaturized oxygen electrode, are prevented from reaching the other of the first and second component electrodes when diffusing along the length of the electrolytic solution.
    • 一种小型氧电极,包括:电绝缘基板; 含有电解质的材料,其设置在所述基板上,并且当供应水时能够用作电解液; 设置在基板上的一组部件电极,其中,当操作小型化的氧电极时,发生溶解在电解液中的氧的还原反应的第一成分电极和除了第一成分电极以外的一个以上的第二成分电极, 所述第一部件电极通过所述含电解质的材料与所述第二部件电极互连; 覆盖含电解质的材料的氧气透过膜; 和含电解质的材料具有长度,用于沿着第一和第二组分电极之间的互连提供足够的距离,使得在小型化氧电极的操作期间形成在第一和第二组分电极中的一个上的任何电活性物质是 当沿着电解液的长度扩散时,防止其到达第一和第二部件电极中的另一个。
    • 8. 发明授权
    • Process for preparation of small glass electrode
    • 小玻璃电极的制备工艺
    • US5660741A
    • 1997-08-26
    • US463925
    • 1995-06-05
    • Hiroaki SuzukiAkio SugamaNaomi Kojima
    • Hiroaki SuzukiAkio SugamaNaomi Kojima
    • G01N27/36G01N27/403G01N27/414H01L21/00
    • G01N27/36G01N27/4035
    • A small glass electrode and process for preparation thereof are disclosed. This small glass electrode is characterized in that said glass electrode, which has a bonded structure comprises a reference electrode composed of silver/silver chloride, a glass substrate having a pad embedded therein, said pad being composed of gold or platinum and circuit-connected to the reference electrode, and a silicon substrate having a (100) plane selectively etched by the anisotropic etching technique and comprising a groove for injecting an electrolyte composed of an aqueous solution containing chlorine such as KCl, or HCl, at least one hole for holding the electrolyte and a glass film formed in a portion corresponding to the reference electrode. By this structure, the small glass electrode can be easily manufactured at a low cost.
    • 公开了一种小玻璃电极及其制备方法。 该小玻璃电极的特征在于,具有接合结构的所述玻璃电极包括由银/氯化银构成的参考电极,具有嵌入其中的焊盘的玻璃基板,所述焊盘由金或铂构成,并且电路连接到 参考电极和具有通过各向异性蚀刻技术选择性地蚀刻的(100)面的硅衬底,并且包括用于注入包含氯的水溶液如KCl或HCl的电解质的沟槽,至少一个用于保持 电解质和形成在与参考电极相对应的部分中的玻璃膜。 通过这种结构,可以以低成本容易地制造小玻璃电极。