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    • 2. 发明授权
    • Composition for cleaning semiconductor device
    • 用于清洁半导体器件的组合物
    • US07947638B2
    • 2011-05-24
    • US12216212
    • 2008-07-01
    • Atsushi TamuraYasuhiro Doi
    • Atsushi TamuraYasuhiro Doi
    • H01L21/02
    • G03F7/423C11D3/042C11D3/2082C11D3/361C11D7/08C11D7/265C11D7/36C11D11/0047H01L21/02071
    • A sulfur-containing detergent composition for cleaning a semiconductor device having an aluminum wire, wherein the sulfur-containing detergent composition is capable of forming a protective film containing a sulfur atom on a surface of an aluminum film in a protective film-forming test; a semiconductor device comprising a protective film containing a sulfur atom on a surface of an aluminum wire, wherein sulfur atom is contained within a region of at least 5 nm in its thickness direction from the surface of the protective film; and method for manufacturing a semiconductor device, comprising the step of contacting an aluminum wire of the semiconductor device with the sulfur-containing detergent composition as defined above, thereby forming a sulfur-containing protective film on the surface of the aluminum wire. The semiconductor device can be suitably used in the manufacture of electronic parts such as LCD, memory and CPU. Especially, the semiconductor device is suitably used in the manufacture of a highly integrated semiconductor with advanced scale-down.
    • 一种用于清洗具有铝线的半导体器件的含硫洗涤剂组合物,其中所述含硫洗涤剂组合物能够在保护膜形成试验中在铝膜的表面上形成含有硫原子的保护膜; 包含在铝线表面含有硫原子的保护膜的半导体器件,其中硫原子包含在距保护膜表面厚度方向至少5nm的区域内; 以及半导体装置的制造方法,其特征在于,包括使所述半导体装置的铝线与如上所述的含硫洗涤剂组合物接触的步骤,从而在所述铝线的表面上形成含硫保护膜。 半导体器件可以适用于LCD,存储器和CPU等电子零件的制造。 特别地,半导体器件适用于制造具有先进的缩小的高度集成的半导体。
    • 9. 发明授权
    • Power transmission device
    • 动力传动装置
    • US08262528B2
    • 2012-09-11
    • US12171419
    • 2008-07-11
    • Christian GaschIsao HirotaAtsushi TamuraShouji YoshidaSusumu Sasaki
    • Christian GaschIsao HirotaAtsushi TamuraShouji YoshidaSusumu Sasaki
    • F16H57/04
    • F16D27/115B60K17/35F16D27/004F16H57/0401F16H57/0441F16H57/0454F16H57/0471F16H57/0483
    • A power transmission device 1 includes a power transmitting mechanism 15 having a first casing 3, a speed change mechanism 13 and first oil and an intermittent mechanism 27 having a pair of rotating members 17, 19, an intermittent part 21, an actuator 23, a second casing 25 and second oil. The second casing 25 includes a first casing member 33 having a cylindrical part 29 and one end wall 31 and a second casing member 37 having another end wall 35 connected to the cylindrical part 29 integrally. The second casing 25 further includes a sealing member 39 arranged between the rotating member 19 and the end wall 31, another sealing member 41 arranged between the rotating member 19 and the other end wall 35 and an O ring arranged between the first casing 33 and the second casing 37, respectively. The second oil is enclosed in the second casing 25.
    • 动力传递装置1包括具有第一壳体3,变速机构13和第一油的动力传递机构15和具有一对旋转构件17,19的间歇机构27,间歇部21,致动器23, 第二壳体25和第二油。 第二壳体25包括具有圆柱形部分29和一个端壁31的第一壳体构件33和具有一体地连接到圆柱形部分29的另一端壁35的第二壳体构件37。 第二壳体25还包括设置在旋转构件19和端壁31之间的密封构件39,设置在旋转构件19和另一端壁35之间的另一个密封构件41以及设置在第一壳体33和第二壳体33之间的O形环。 第二壳体37。 第二个油被封闭在第二壳体25中。