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    • 5. 发明申请
    • PHOTOELECTRIC CONVERSION DEVICE, FABRICATION METHOD FOR THE SAME, AND SOLID STATE IMAGING DEVICE
    • 光电转换装置,其制造方法和固态成像装置
    • US20110024859A1
    • 2011-02-03
    • US12937013
    • 2009-03-30
    • Kenichi MiyazakiOsamu MatsushimaShigeru NikiKeiichiro SakuraiShogo Ishizuka
    • Kenichi MiyazakiOsamu MatsushimaShigeru NikiKeiichiro SakuraiShogo Ishizuka
    • H01L31/0232H01L27/146H01L31/18
    • H01L27/14645H01L31/0322
    • A photoelectric conversion device has a high S/N ratio and can increase the detection efficiency even under a low luminance. The photoelectric conversion device generates an increased electric charge by impact ionization in a photoelectric conversion unit formed from a chalcopyrite type semiconductor, so as to improve dark current characteristic. The photoelectric conversion device includes: a lower electrode layer; a compound semiconductor thin film of chalcopyrite structure disposed on the lower electrode layer and having a high resistivity layer on a surface; and a transparent electrode layer disposed on the compound semiconductor thin film, wherein the lower electrode layer, the compound semiconductor thin film, and the transparent electrode layer are laminated one after another, and a reverse bias voltage is applied between the transparent electrode layer and the lower electrode layer, and the multiplication by the impact ionization of the electric charge generated by photoelectric conversion is generated within the compound semiconductor thin film. It is also possible to provide a fabrication method for such photoelectric conversion device, and a solid state imaging device using the photoelectric conversion device.
    • 光电转换装置的S / N比高,即使在低亮度下也能够提高检测效率。 光电转换装置通过由黄铜矿型半导体形成的光电转换单元中的冲击电离产生增加的电荷,从而改善暗电流特性。 光电转换装置包括:下电极层; 黄铜矿结构的化合物半导体薄膜设置在下电极层上并且在表面上具有高电阻率层; 以及设置在化合物半导体薄膜上的透明电极层,其中下电极层,化合物半导体薄膜和透明电极层依次层叠,并且在透明电极层和透明电极层之间施加反向偏置电压 并且在化合物半导体薄膜内产生通过光电转换产生的电荷的冲击电离的乘积。 也可以提供这种光电转换装置的制造方法和使用该光电转换装置的固态成像装置。
    • 8. 发明授权
    • Photoelectric conversion device, fabrication method for the same, and solid state imaging device
    • 光电转换装置及其制造方法以及固态成像装置
    • US08592933B2
    • 2013-11-26
    • US12937013
    • 2009-03-30
    • Kenichi MiyazakiOsamu MatsushimaShigeru NikiKeiichiro SakuraiShogo Ishizuka
    • Kenichi MiyazakiOsamu MatsushimaShigeru NikiKeiichiro SakuraiShogo Ishizuka
    • H01L31/00
    • H01L27/14645H01L31/0322
    • A photoelectric conversion device has a high S/N ratio and can increase the detection efficiency even under a low luminance. The photoelectric conversion device generates an increased electric charge by impact ionization in a photoelectric conversion unit formed from a chalcopyrite type semiconductor, so as to improve dark current characteristic. The photoelectric conversion device includes: a lower electrode layer; a compound semiconductor thin film of chalcopyrite structure disposed on the lower electrode layer and having a high resistivity layer on a surface; and a transparent electrode layer disposed on the compound semiconductor thin film , wherein the lower electrode layer, the compound semiconductor thin film, and the transparent electrode layer are laminated one after another, and a reverse bias voltage is applied between the transparent electrode layer and the lower electrode layer, and the multiplication by the impact ionization of the electric charge generated by photoelectric conversion is generated within the compound semiconductor thin film. It is also possible to provide a fabrication method for such photoelectric conversion device, and a solid state imaging device using the photoelectric conversion device.
    • 光电转换装置的S / N比高,即使在低亮度下也能够提高检测效率。 光电转换装置通过由黄铜矿型半导体形成的光电转换单元中的冲击电离产生增加的电荷,从而改善暗电流特性。 光电转换装置包括:下电极层; 黄铜矿结构的化合物半导体薄膜设置在下电极层上并且在表面上具有高电阻率层; 以及设置在化合物半导体薄膜上的透明电极层,其中下电极层,化合物半导体薄膜和透明电极层依次层叠,并且在透明电极层和透明电极层之间施加反向偏置电压 并且在化合物半导体薄膜内产生通过光电转换产生的电荷的冲击电离的乘积。 也可以提供这种光电转换装置的制造方法和使用该光电转换装置的固态成像装置。