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    • 3. 发明申请
    • METHOD OF FORMING PATTERN AND METHOD OF PRODUCING ELECTRONIC ELEMENT
    • 形成图案的方法和生产电子元件的方法
    • US20100221413A1
    • 2010-09-02
    • US12593841
    • 2007-12-21
    • Toshio FukudaAkihiro Nomoto
    • Toshio FukudaAkihiro Nomoto
    • B05D5/12B05D3/12
    • H05K3/046H01L29/41733H01L51/0022H01L51/0023H01L51/0545H01L51/102H05K3/207H05K2203/0108H05K2203/0528H05K2203/0783H05K2203/1105
    • A method of forming a pattern and a method of producing an electronic element are characterized by including a first step of forming an electrically conductive film (D) by applying a liquid composition onto a first plate (10), and heating the first plate (10); a second step of forming an electrically conductive pattern (D′) on the first plate (10) by pressing a second plate (20) having a projection-and-recess pattern on a surface side thereof onto a surface side of the first plate (10), on which the electrically conductive film (D) is formed, to transfer an unwanted pattern of the electrically conductive film (D) to top faces of projections (20a) of the second plate (20), thereby removing the unwanted pattern; and a third step of transferring the electrically conductive pattern (D′) to a surface of a transfer-receiving substrate (30) by pressing the surface side of the first plate (10), on which the electrically conductive pattern (D′) is formed, onto the surface of the transfer-receiving substrate (30), wherein the liquid composition contains a solvent having a vapor pressure of 133 Pa or less at a surface temperature of the heated first plate (10). These methods provide a method of forming a pattern and a method of producing an electronic element in which a state of a liquid-composition coating film is stabilized and a fine and precise pattern can be stably formed with good reproducibility.
    • 形成图案的方法和电子元件的制造方法的特征在于包括:通过将液体组合物施加到第一板(10)上形成导电膜(D)的第一步骤,并且将第一板(10) ); 在第一板(10)上形成导电图案(D')的第二步骤是通过将其表面侧上具有突出凹槽图案的第二板(20)压在第一板的表面侧上 10),其上形成有导电膜(D),以将导电膜(D)的不需要的图案转移到第二板(20)的突起(20a)的顶面,从而去除不需要的图案; 以及第三步骤,通过按压导电图案(D')的第一板(10)的表面侧将导电图案(D')转印到转印接收基板(30)的表面, 形成在转印接收基板(30)的表面上,其中液体组合物在加热的第一板(10)的表面温度下含有蒸气压为133Pa以下的溶剂。 这些方法提供了形成图案的方法和制造其中液体组合物涂膜的状态稳定的电子元件的方法,并且可以以良好的再现性稳定地形成精细和精确的图案。
    • 4. 发明授权
    • Method of forming pattern and method of producing electronic element
    • 形成图案的方法和电子元件的制造方法
    • US08361372B2
    • 2013-01-29
    • US12593846
    • 2008-01-10
    • Toshio FukudaAkihiro Nomoto
    • Toshio FukudaAkihiro Nomoto
    • B29C41/46
    • H05K3/207H01L51/0022H01L51/0541H01L51/0545H01L51/102H05K3/046H05K2203/0108
    • A method of forming a pattern and a method of producing an electronic element with which a fine and precise pattern is stably formed are provided. Each of the method of forming a pattern and the method of producing an electronic element includes a step of forming an electrically conductive film D by applying a liquid composition onto a first plate 10; a step of forming an electrically conductive pattern D′ on the first plate 10 by pressing a second plate 20 onto a surface side of the first plate 10, on which the electrically conductive film D is formed, to transfer an unwanted pattern of the electrically conductive film D to top faces of projections 20a of the second plate 20, thereby removing the unwanted pattern; and a step of transferring the electrically conductive pattern D′ by pressing the surface side of the first plate 10, on which the electrically conductive pattern D′ is formed, onto a surface of a transfer-receiving substrate, wherein when a surface tension of the surface of the first plate 10, onto which the liquid composition is applied, is represented by α, a dynamic surface tension of the liquid composition at 100 msec measured by a maximum bubble pressure method is represented by β, and a surface tension of the top faces of the projections 20a of the second plate 20 is represented by γ, the composition of the liquid composition or a material of the surface of the first plate 10 or the second plate 20 is set so as to satisfy γ>α≧β.
    • 提供一种形成图案的方法和制造精细且精确图案稳定地形成的电子元件的方法。 形成图案的方法和电子元件的制造方法中的每一个包括通过将液体组合物涂布在第一板10上而形成导电膜D的步骤; 通过将第二板20压在其上形成有导电膜D的第一板10的表面侧上以在第一板10上形成导电图案D'以转移不需要的导电图案的步骤 膜D到第二板20的突起20a的顶面,从而去除不想要的图案; 以及通过将形成有导电图案D'的第一板10的表面侧按压在转印接收基板的表面上来转印导电图案D'的步骤,其中当转印接收基板的表面张力 其上施加液体组合物的第一板10的表面由α表示,用最大气泡压力法测量的100毫秒时液体组合物的动态表面张力由&bgr表示,表面张力 第二板20的突起20a的顶面由γ表示,液体组成的组成或第一板10或第二板20的表面的材料的设定为满足γ>α≥bgr; 。
    • 5. 发明授权
    • Method of forming pattern and method of producing electronic element
    • 形成图案的方法和电子元件的制造方法
    • US08048725B2
    • 2011-11-01
    • US12593841
    • 2007-12-21
    • Toshio FukudaAkihiro Nomoto
    • Toshio FukudaAkihiro Nomoto
    • H01L21/84
    • H05K3/046H01L29/41733H01L51/0022H01L51/0023H01L51/0545H01L51/102H05K3/207H05K2203/0108H05K2203/0528H05K2203/0783H05K2203/1105
    • A method of forming a pattern and a method of producing an electronic element are characterized by including a first step of forming an electrically conductive film (D) by applying a liquid composition onto a first plate (10), and heating the first plate (10); a second step of forming an electrically conductive pattern (D′) on the first plate (10) by pressing a second plate (20) having a projection-and-recess pattern on a surface side thereof onto a surface side of the first plate (10), on which the electrically conductive film (D) is formed, to transfer an unwanted pattern of the electrically conductive film (D) to top faces of projections (20a) of the second plate (20), thereby removing the unwanted pattern; and a third step of transferring the electrically conductive pattern (D′) to a surface of a transfer-receiving substrate (30) by pressing the surface side of the first plate (10), on which the electrically conductive pattern (D′) is formed, onto the surface of the transfer-receiving substrate (30), wherein the liquid composition contains a solvent having a vapor pressure of 133 Pa or less at a surface temperature of the heated first plate (10). These methods provide a method of forming a pattern and a method of producing an electronic element in which a state of a liquid-composition coating film is stabilized and a fine and precise pattern can be stably formed with good reproducibility.
    • 形成图案的方法和电子元件的制造方法的特征在于包括:通过将液体组合物施加到第一板(10)上形成导电膜(D)的第一步骤,并且将第一板(10) ); 在第一板(10)上形成导电图案(D')的第二步骤是通过将其表面侧上具有突出凹槽图案的第二板(20)压在第一板的表面侧上 10),其上形成有导电膜(D),以将导电膜(D)的不需要的图案转移到第二板(20)的突起(20a)的顶面,从而去除不需要的图案; 以及第三步骤,通过按压导电图案(D')的第一板(10)的表面侧将导电图案(D')转印到转印接收基板(30)的表面, 形成在转印接收基板(30)的表面上,其中液体组合物在加热的第一板(10)的表面温度下含有蒸气压为133Pa以下的溶剂。 这些方法提供了形成图案的方法和制造其中液体组合物涂膜的状态稳定的电子元件的方法,并且可以以良好的再现性稳定地形成精细和精确的图案。
    • 6. 发明申请
    • METHOD OF FORMING PATTERN AND METHOD OF PRODUCING ELECTRONIC ELEMENT
    • 形成图案的方法和生产电子元件的方法
    • US20100044905A1
    • 2010-02-25
    • US12593846
    • 2008-01-10
    • Toshio FukudaAkihiro Nomoto
    • Toshio FukudaAkihiro Nomoto
    • B28B3/00
    • H05K3/207H01L51/0022H01L51/0541H01L51/0545H01L51/102H05K3/046H05K2203/0108
    • A method of forming a pattern and a method of producing an electronic element with which a fine and precise pattern is stably formed are provided. Each of the method of forming a pattern and the method of producing an electronic element includes a step of forming an electrically conductive film D by applying a liquid composition onto a first plate 10; a step of forming an electrically conductive pattern D′ on the first plate 10 by pressing a second plate 20 onto a surface side of the first plate 10, on which the electrically conductive film D is formed, to transfer an unwanted pattern of the electrically conductive film D to top faces of projections 20a of the second plate 20, thereby removing the unwanted pattern; and a step of transferring the electrically conductive pattern D′ by pressing the surface side of the first plate 10, on which the electrically conductive pattern D′ is formed, onto a surface of a transfer-receiving substrate, wherein when a surface tension of the surface of the first plate 10, onto which the liquid composition is applied, is represented by α, a dynamic surface tension of the liquid composition at 100 msec measured by a maximum bubble pressure method is represented by β, and a surface tension of the top faces of the projections 20a of the second plate 20 is represented by γ, the composition of the liquid composition or a material of the surface of the first plate 10 or the second plate 20 is set so as to satisfy γ>α≧β.
    • 提供一种形成图案的方法和制造精细且精确图案稳定地形成的电子元件的方法。 形成图案的方法和电子元件的制造方法中的每一个包括通过将液体组合物涂布在第一板10上而形成导电膜D的步骤; 通过将第二板20压在其上形成有导电膜D的第一板10的表面侧上以在第一板10上形成导电图案D'以转移不需要的导电图案的步骤 膜D到第二板20的突起20a的顶面,从而去除不想要的图案; 以及通过将形成有导电图案D'的第一板10的表面侧按压在转印接收基板的表面上来转印导电图案D'的步骤,其中当转印接收基板的表面张力 其上施加液体组合物的第一板10的表面由α表示,用最大气泡压力法测量的100毫秒时液体组合物的动态表面张力由&bgr表示,表面张力 第二板20的突起20a的顶面由γ表示,液体组成的组成或第一板10或第二板20的表面的材料的设定为满足γ>α≥bgr; 。