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1. 发明授权

US06572744B1 Dual collimated deposition apparatus and method of use 失效
标题翻译：双准直沉积装置及其使用方法
公开(公告)号：US06572744B1
公开(公告)日：2003-06-03
申请号：US09767576
申请日：2001-01-22
申请人： Ajit Paranjpe , Peter Schwartz , Jacques Kools , Kang Song , Dorian Heimanson , Mehrdad Moslehi
发明人： Ajit Paranjpe , Peter Schwartz , Jacques Kools , Kang Song , Dorian Heimanson , Mehrdad Moslehi
IPC分类号： C23C1434
CPC分类号： H01J37/3447 , C23C14/046 , C23C14/221 , C23C14/34 , G11B5/3163 , H01J37/34
摘要： A dual collimation deposition apparatus and method are disclosed in which the dual collimation apparatus includes at least a long-throw collimator in combination with one or more physical collimators. A new physical collimator and shield design are also disclosed for improved process uniformity and increased equipment productivity.
摘要翻译：公开了一种双准直沉积装置和方法，其中双准直装置包括与一个或多个物理准直器组合的至少一个长投射准直仪。还公开了一种新的物理准直器和屏蔽设计，以改善工艺均匀性并提高设备生产率。

2. 发明授权

US06592728B1 Dual collimated deposition apparatus and method of use 失效
公开(公告)号：US06592728B1
公开(公告)日：2003-07-15
申请号：US09130527
申请日：1998-08-04
申请人： Ajit Paranjpe , Peter Schwartz , Jacques Kools , Kang Song , Dorian Heimanson , Mehrdad Moslehi
发明人： Ajit Paranjpe , Peter Schwartz , Jacques Kools , Kang Song , Dorian Heimanson , Mehrdad Moslehi
IPC分类号： C23C1434
CPC分类号： H01J37/3447 , C23C14/046 , C23C14/221 , C23C14/34 , G11B5/3163 , H01J37/34
摘要： A dual collimation deposition apparatus and method are disclosed in which the dual collimation apparatus includes at least a long-throw collimator in combination with one or more physical collimators. A new physical collimator and shield design are also disclosed for improved process uniformity and increased equipment productivity.

3. 发明申请

US20080289684A1 PYRAMIDAL THREE-DIMENSIONAL THIN-FILM SOLAR CELLS 有权
标题翻译： PYRAMIDAL三维薄膜太阳能电池
公开(公告)号：US20080289684A1
公开(公告)日：2008-11-27
申请号：US11868493
申请日：2007-10-06
申请人： Mehrdad Moslehi
发明人： Mehrdad Moslehi
IPC分类号： H01L31/00
CPC分类号： H01L31/00 , H01L31/022425 , H01L31/035281 , H01L31/046 , H01L31/048 , H01L31/0504 , H01L31/0547 , H01L31/056 , H01L31/1896 , Y02B10/12 , Y02E10/52
摘要： A pyramidal three-dimensional thin-film solar cell, comprising a pyramidal three-dimensional thin-film solar cell substrate comprising a plurality of pyramid-shaped unit cells with emitter junction regions and doped base regions, emitter metallization regions and base metallization regions. Optionally, the pyramidal three-dimensional thin-film solar cell may be mounted on a rear mirror for improved light trapping and conversion efficiency.
摘要翻译：一种金字塔形三维薄膜太阳能电池，包括具有多个具有发射极结区域和掺杂基极区域的金字塔形单元电池的金字塔形三维薄膜太阳能电池基板，发射极金属化区域和基底金属化区域。可选地，金字塔形三维薄膜太阳能电池可以安装在后视镜上，以提高光捕获和转换效率。

4. 发明申请

US20080047601A1 High Efficiency Solar Cells and Manufacturing Methods 有权
标题翻译：高效太阳能电池和制造方法
公开(公告)号：US20080047601A1
公开(公告)日：2008-02-28
申请号：US11841629
申请日：2007-08-20
申请人： Somnath Nag , Mehrdad Moslehi
发明人： Somnath Nag , Mehrdad Moslehi
IPC分类号： H01L31/04 , H01L21/00
CPC分类号： H01L31/03529 , H01L31/07 , Y02E10/50
摘要： A Schottky contact photovoltaic energy conversion cell. The Schottky contact photovoltaic energy conversion cell comprises a flexible substrate and a first array of a plurality of closely-spaced microscale pillars connected to a first electrical cell contact. The pillars and the contact are formed of (or having a top) layer of a first Schottky metal material with a work function selected for efficiently collecting photogenerated electrons. The Schottky contact photovoltaic energy conversion cell further comprises a second array of a plurality of closely-spaced microscale pillars connected to a second electrical cell contact. The pillars and the contact are formed of (or having a top) layer of a second Schottky metal material with a work function selected for efficiently collecting photogenerated holes. The Schottky contact photovoltaic energy conversion cell further comprises a semiconductor absorber thin-film layer covering the first and second contacts and filling spaces among all the pillars, for creating photogenerated electrons and holes.
摘要翻译：肖特基接触光伏能量转换电池。肖特基接触光伏能量转换单元包括柔性基板和连接到第一电单元接触件的多个紧密间隔的微米柱的第一阵列。柱和接触由具有选择用于有效收集光生电子的功函数的第一肖特基金属材料（或具有顶部）层形成。肖特基接触光伏能量转换单元还包括连接到第二电池触点的多个紧密间隔的微小柱的第二阵列。支柱和接触由具有选择用于有效收集光生孔的功函数的（或具有顶部）第二肖特基金属材料层形成。肖特基接触光伏能量转换单元还包括覆盖所有第一和第二触点和填充空间的半导体吸收体薄膜层，用于产生光生电子和空穴。

5. 发明授权

US08278192B2 Trench formation method for releasing a thin-film substrate from a reusable semiconductor template 有权
标题翻译：用于从可重复使用的半导体模板中释放薄膜基板的沟槽形成方法
公开(公告)号：US08278192B2
公开(公告)日：2012-10-02
申请号：US12702187
申请日：2010-02-08
申请人： David Xuan-Qi Wang , Mehrdad Moslehi
发明人： David Xuan-Qi Wang , Mehrdad Moslehi
IPC分类号： H01L21/46 , H01L21/76
CPC分类号： H01L31/035281 , H01L21/76229 , H01L21/76232 , H01L31/03529 , H01L31/1804 , Y02E10/547 , Y02P70/521
摘要： A method is provided for fabricating a thin-film semiconductor substrate by forming a porous semiconductor layer conformally on a reusable semiconductor template and then forming a thin-film semiconductor substrate conformally on the porous semiconductor layer. An inner trench having a depth less than the thickness of the thin-film semiconductor substrate is formed on the thin-film semiconductor substrate. An outer trench providing access to the porous semiconductor layer is formed on the thin-film semiconductor substrate and is positioned between the inner trench and the edge of the thin-film semiconductor substrate. The thin-film semiconductor substrate is then released from the reusable semiconductor template.
摘要翻译：提供了一种用于通过在可重复使用的半导体模板上保形地形成多孔半导体层然后在多孔半导体层上保形地形成薄膜半导体衬底来制造薄膜半导体衬底的方法。在薄膜半导体衬底上形成深度小于薄膜半导体衬底厚度的内沟槽。提供对多孔半导体层的访问的外部沟槽形成在薄膜半导体衬底上并且位于内部沟槽和薄膜半导体衬底的边缘之间。然后从可重复使用的半导体模板中释放薄膜半导体衬底。

6. 发明申请

US20090301549A1 SOLAR MODULE STRUCTURES AND ASSEMBLY METHODS FOR THREE-DIMENSIONAL THIN-FILM SOLAR CELLS 有权
标题翻译：太阳能模块结构和三维薄膜太阳能电池的组装方法
公开(公告)号：US20090301549A1
公开(公告)日：2009-12-10
申请号：US11868491
申请日：2007-10-06
申请人： Mehrdad Moslehi
发明人： Mehrdad Moslehi
IPC分类号： H01L31/048 , H01L31/042 , H01L31/18
CPC分类号： H01L31/0504 , H01L31/042 , H01L31/046 , H01L31/0463 , H01L31/048 , H01L31/05 , H01L31/056 , H01L31/18 , Y02B10/12 , Y02E10/50
摘要： Solar module structures 210 and 270 and methods for assembling solar module structures. The solar module structures 210 and 270 comprise three-dimensional thin-film solar cells 110 arranged in solar module structures 210 and 270. The three-dimensional thin-film solar cell comprises a three-dimensional thin-film solar cell substrate (124 and 122, respectively) with emitter junction regions 1352 and doped base regions 1360. The three-dimensional thin-film solar cell further includes emitter metallization regions and base metallization regions. The 3-D TFSC substrate comprises a plurality of single-aperture or dual-aperture unit cells. The solar module structures 270 using three-dimensional thin-film solar cells comprising three-dimensional thin-film solar cell substrates with a plurality of dual-aperture unit cells may be used in solar glass applications. The solar module structures 210 using three-dimensional thin-film solar cells comprising three-dimensional thin-film solar cell substrates with a plurality of single-aperture unit cells may be used in building façade and rooftop installation applications as well as for centralized solar electricity generation.
摘要翻译：太阳能模块结构210和270以及用于组装太阳能模块结构的方法。太阳能模块结构210和270包括布置在太阳能模块结构210和270中的三维薄膜太阳能电池110.三维薄膜太阳能电池包括三维薄膜太阳能电池基板（124和122 ，分别具有发射极结区域1352和掺杂基极区域1360.三维薄膜太阳能电池还包括发射极金属化区域和基底金属化区域。 3-D TFSC基板包括多个单孔或双孔单元电池。使用包括具有多个双孔单元电池的三维薄膜太阳能电池基板的三维薄膜太阳能电池的太阳能模块结构270可以用于太阳能玻璃应用中。使用包括具有多个单孔单元电池的三维薄膜太阳能电池基板的三维薄膜太阳能电池的太阳能模块结构210可以用于建筑立面和屋顶安装应用以及集中式太阳能发电代。

7. 发明授权

US5322809A Self-aligned silicide process 失效
标题翻译：自对准硅化物工艺
公开(公告)号：US5322809A
公开(公告)日：1994-06-21
申请号：US60774
申请日：1993-05-11
申请人： Mehrdad Moslehi
发明人： Mehrdad Moslehi
IPC分类号： H01L21/28 , H01L21/285 , H01L21/336 , H01L29/78 , H01L21/283
CPC分类号： H01L29/66507 , H01L21/28518 , H01L29/6659 , H01L29/66545 , Y10S148/019 , Y10S148/147
摘要： A self-aligned silicide process that enables different silicide thicknesses for polysilicon gates and source/drain junction regions. Semiconductor body (10) includes a doped well (14) formed in substrate (12). Field insulating region (18) is located above channel stop region (16) in doped well (14). Implanted within doped well (14) are source/drain junctions (34). Source/drain junctions (34) are shallow heavily doped regions. The surfaces of source/drain junctions (34) are silicided. Silicide gate (44) is separated from the surface of doped well (14) by gate insulator layer (20) and contains a silicide layer (40) and a doped polysilicon layer (22). The thickness of silicide layer (40) is not limited by the thickness of the silicided surfaces of source/drain junctions (34) or the amount of silicon consumed over these junctions. Silicon nitride sidewall spacers (32) separate the sidewall edges of silicide gate (44) and the transistor channel region from the source/drain junction silicide layer 41.
摘要翻译：自对准硅化物工艺，其能够实现多晶硅栅极和源极/漏极结区域的不同硅化物厚度。半导体本体（10）包括形成在衬底（12）中的掺杂阱（14）。场绝缘区域（18）位于掺杂阱（14）中的通道停止区域（16）的上方。掺杂在掺杂阱（14）内的是源极/漏极结（34）。源极/漏极结（34）是浅重掺杂区域。源极/漏极结（34）的表面被硅化。硅化物栅极（44）通过栅极绝缘体层（20）与掺杂阱（14）的表面分离，并且包含硅化物层（40）和掺杂多晶硅层（22）。硅化物层（40）的厚度不受源极/漏极结（34）的硅化物表面的厚度或在这些结上消耗的硅的量的限制。氮化硅侧壁间隔件（32）将硅化物栅极（44）的侧壁边缘和晶体管沟道区域与源极/漏极结硅化物层41分离。

8. 发明申请

US20120174860A1 TEMPLATE FOR THREE-DIMENSIONAL THIN-FILM SOLAR CELL MANUFACTURING AND METHODS OF USE 审中-公开
标题翻译：三维薄膜太阳能电池制造方法及其使用方法
公开(公告)号：US20120174860A1
公开(公告)日：2012-07-12
申请号：US13345861
申请日：2012-01-09
申请人： Mehrdad Moslehi
发明人： Mehrdad Moslehi
IPC分类号： C30B11/00 , B29C35/08 , C03B11/08 , B44C1/22
CPC分类号： H01L31/046 , G03G21/203 , H01L31/022425 , H01L31/02363 , H01L31/02366 , H01L31/03529 , H01L31/048 , H01L31/056 , H01L31/068 , H01L31/182 , H01L31/1896 , H02S40/36 , Y02B10/12 , Y02E10/52 , Y02E10/546 , Y02E10/547 , Y02P70/521 , Y10T117/1092
摘要： A template 100 for three-dimensional thin-film solar cell substrate formation for use in three-dimensional thin-film solar cells. The template 100 comprises a substrate which comprises a plurality of posts 102 and a plurality of trenches 104 between said plurality of posts 102. The template 100 forms an environment for three-dimensional thin-film solar cell substrate formation.
摘要翻译：用于三维薄膜太阳能电池的三维薄膜太阳能电池基板形成模板100。模板100包括在多个柱102之间包括多个柱102和多个沟槽104的衬底。模板100形成用于三维薄膜太阳能电池衬底形成的环境。

9. 发明申请

US20110265867A1 TEMPLATE FOR THREE-DIMENSIONAL THIN-FILM SOLAR CELL MANUFACTURING AND METHODS OF USE 审中-公开
标题翻译：三维薄膜太阳能电池制造方法及其使用方法
公开(公告)号：US20110265867A1
公开(公告)日：2011-11-03
申请号：US13099837
申请日：2011-05-03
申请人： Mehrdad Moslehi
发明人： Mehrdad Moslehi
IPC分类号： H01L31/06 , H01L31/18
CPC分类号： H01L31/18 , H01L31/042 , H01L31/046 , H01L31/0463 , H01L31/048 , H01L31/05 , H01L31/056 , Y02E10/50
摘要： A template for three-dimensional thin-film solar cell substrate formation for use in three-dimensional thin-film solar cells. The template comprises a substrate which comprises a plurality of posts and a plurality of trenches between said plurality of posts. The template forms an environment for three-dimensional thin-film solar cell substrate formation.
摘要翻译：用于三维薄膜太阳能电池的三维薄膜太阳能电池基板形成模板。该模板包括基底，该基底包括多个柱和在所述多个柱之间的多个沟槽。该模板形成三维薄膜太阳能电池基板形成的环境。

10. 发明授权

US08035027B2 Solar module structures and assembly methods for pyramidal three-dimensional thin-film solar cells 有权
标题翻译：太阳能模块结构和金字塔形三维薄膜太阳能电池组装方法
公开(公告)号：US08035027B2
公开(公告)日：2011-10-11
申请号：US11868494
申请日：2007-10-06
申请人： Mehrdad Moslehi
发明人： Mehrdad Moslehi
IPC分类号： H02N6/00 , H01L31/042 , H01L31/00
CPC分类号： H01L31/046 , G03G21/203 , H01L31/022425 , H01L31/022458 , H01L31/02363 , H01L31/02366 , H01L31/0352 , H01L31/035281 , H01L31/03529 , H01L31/042 , H01L31/048 , H01L31/0488 , H01L31/049 , H01L31/05 , H01L31/0504 , H01L31/0547 , H01L31/056 , H01L31/068 , H01L31/18 , H01L31/182 , H01L31/1896 , H02S40/36 , Y02B10/12 , Y02E10/52 , Y02E10/546 , Y02E10/547 , Y02P70/521 , Y10T117/1092
摘要： Solar module structures and methods for assembling solar module structures. The solar module structures comprise pyramidal three-dimensional thin-film solar cells arranged in solar module structures. The pyramidal three-dimensional thin-film solar cell comprises a pyramidal three-dimensional thin-film solar cell substrate with emitter junction regions and doped base regions. The three-dimensional thin-film solar cell further includes emitter metallization regions and base metallization regions. The three-dimensional thin-film solar cell substrate comprises a plurality of pyramid-shaped unit cells. The solar module structures may be used in solar glass applications, building facade applications, rooftop installation applications as well as for centralized solar electricity generation.
摘要翻译：太阳能组件结构和组装太阳能组件结构的方法。太阳能模块结构包括布置在太阳能模块结构中的金字塔形三维薄膜太阳能电池。金字塔三维薄膜太阳能电池包括具有发射极结区域和掺杂基极区域的金字塔形三维薄膜太阳能电池基板。三维薄膜太阳能电池还包括发射极金属化区域和基底金属化区域。三维薄膜太阳能电池基板包括多个棱锥形的单元电池。太阳能模块结构可用于太阳能玻璃应用，建筑立面应用，屋顶安装应用以及集中式太阳能发电。

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