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1. 发明申请

WO2008008737A3 VARIABLE LOT SIZE LOAD PORT 审中-公开
公开(公告)号：WO2008008737A3
公开(公告)日：2008-01-17
申请号：PCT/US2007/073085
申请日：2007-07-09
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , KROLAK, Michael , HINE, Roger, G. , ROGERS, Theodore, W.
发明人： BONORA, Anthony, C. , KROLAK, Michael , HINE, Roger, G. , ROGERS, Theodore, W.
IPC分类号： B65G49/07
摘要： A variable lot size load port assembly includes a tool interface, an advance plate, and a seal plate. The tool interface extends generally in a vertical dimension and has a front surface, a back surface generally parallel to the front surface, and an aperture. An advance plate is positioned to the front of the tool interface below the aperture. The advance plate extends generally horizontally and is configured to support a front opening unified pod (FOUP). The advance plate translates between a retracted position and an advanced position. The advanced position is proximate the tool interface and the retracted position is spaced from the tool interface. The seal plate has an upper end secured to the tool interface and a lower end covering a portion of the aperture to form a reduced aperture. The seal plate is shaped to form a proximity seal with a front flange of a FOUP of a selected capacity mounted to the advance plate and brought to the advanced position.

2. 发明申请

WO2007008736A1 STOCKER 审中-公开
公开(公告)号：WO2007008736A1
公开(公告)日：2007-01-18
申请号：PCT/US2006/026642
申请日：2006-07-07
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , HINE, Roger, G. , KROLAK, Michael
发明人： BONORA, Anthony, C. , HINE, Roger, G. , KROLAK, Michael
IPC分类号： H01L21/00
CPC分类号： H01L21/67769 , H01L21/67161
摘要： The present invention comprises a stocker for managing containers within a fabrication facility having a ceiling-based interbay material handling system a floor-based intrabay material handling system. In one embodiment, the stocker comprises a container storage area for storing at least one container, a ceiling-based input conveyor, a floor- based conveyor and a robotic mechanism. The ceiling-based input conveyor receives containers from the ceiling based interbay material handling system. The stocker' s floor- based conveyor may comprise an output conveyor, an input conveyor or both, and moves containers between the stocker' s container storage area and the floor-based intrabay material handling system. A robotic mechanism moves containers between the ceiling- based input conveyor, the container storage area and the floor-based conveyor.
摘要翻译：本发明包括一个用于管理制造设备内的容器的储料器，其具有一个基于天花板的间隔物料处理系统，一个基于楼层的垃圾处理系统。在一个实施例中，储料器包括用于存储至少一个容器，天花板输入输送机，基于地板的输送机和机器人机构的容器存储区域。基于天花板的输入输送机从天花板间隔物料处理系统接收容器。贮存者地板输送机可以包括输出输送机，输入输送机或两者，并且在储料器的容器储存区域和地板间的内部材料处理系统之间移动容器。机器人机构将容器移动到基于天花板的输入输送机，容器存储区域和基于地板的输送机之间。

3. 发明申请

WO2006124683A2 MODULAR TERMINAL FOR HIGH-THROUGHPUT AMHS 审中-公开
标题翻译：用于高通量AMAM的模块化端子
公开(公告)号：WO2006124683A2
公开(公告)日：2006-11-23
申请号：PCT/US2006/018568
申请日：2006-05-15
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , KROLAK, Michael , HINE, Roger, G.
发明人： BONORA, Anthony, C. , KROLAK, Michael , HINE, Roger, G.
IPC分类号： H01L21/67
CPC分类号： H01L21/67715 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67766 , H01L21/67769 , H01L21/67775 , Y10S414/14
摘要： The present invention generally comprises an apparatus for transporting containers between a first transport system and a second transport system. In one embodiment, the first transport system comprises a ceiling-based conveyor and the second transport system comprises a floor-based conveyor. The present invention may further include storage shelves, preferably substantially horizontally aligned about a common vertical plane with a section of one of the transport systems. The transport system may be located either directly above the uppermost storage shelf or beneath the lowermost storage shelf in order to add storage capacity within the fab. A vertical module transports containers between the transport systems and the at least one storage shelf.
摘要翻译：本发明通常包括用于在第一输送系统和第二输送系统之间输送容器的装置。在一个实施例中，第一输送系统包括基于天花板的输送机，第二输送系统包括基于地板的输送机。本发明还可以包括存储架，优选地基本上水平地围绕共同的垂直平面与一个传送系统的一部分对准。运输系统可以位于最上面的储物架的正上方，或者位于最下面的储物架之下，以便增加储存容量。垂直模块在运输系统和至少一个存储架之间运输容器。

4. 发明申请

WO2008008739A3 VARIABLE LOT SIZE LOAD PORT 审中-公开
公开(公告)号：WO2008008739A3
公开(公告)日：2008-01-17
申请号：PCT/US2007/073088
申请日：2007-07-09
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , KROLAK, Michael , HINE, Roger, G. , ROGERS, Theodore, W.
发明人： BONORA, Anthony, C. , KROLAK, Michael , HINE, Roger, G. , ROGERS, Theodore, W.
IPC分类号： B65B21/02
摘要： A variable lot size load port assembly (600) is described having a tool interface, a port door (626), a latch key (632), an advance plate (612), and an elevator (610). The tool interface extends generally in a vertical dimension and has an aperture (604). The port door has a closed position wherein the port door (626) at least partially occludes the aperture. The latch key (632) extends from the port door (626) and is configured to mate with a latch key receptacle of a door (42) of a front opening unified pod (FOUP) (40). The advance plate (612) is configured to support a front opening unified pod (FOUP) and translate between a retracted position and an advanced position. The elevator (610) raises and lowers the advance plate (612) to bring the latch key receptacle of the door (42) of the FOUP into alignment with the latch key (632) of the port door (626).

5. 发明申请

WO2008008738A2 VARIABLE LOT SIZE LOAD PORT 审中-公开
标题翻译：可变大尺寸负载端口
公开(公告)号：WO2008008738A2
公开(公告)日：2008-01-17
申请号：PCT/US2007/073086
申请日：2007-07-09
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , KROLAK, Michael , HINE, Roger, G. , ROGERS, Theodore, W.
发明人： BONORA, Anthony, C. , KROLAK, Michael , HINE, Roger, G. , ROGERS, Theodore, W.
IPC分类号： H01L21/677
CPC分类号： H01L21/67772
摘要： A variable lot size load port assembly includes a tool interface, a port door, an advance plate, and first and second latch keys. The tool interface extends generally in a vertical dimension and has an aperture. The port door has a closed position wherein the port door at least partially occludes the aperture. The advance plate is configured to support a front opening unified pod (FOUP) and translate between a retracted position and an advanced position. The first latch key is disposed on the port door at a first elevation configured to selectively engage a corresponding latch key receptacle of a FOUP having a first selected FOUP capacity and the second latch key is disposed on the port door at a second elevation configured to selectively engage a corresponding latch key receptacle of another FOUP having a second selected FOUP capacity.
摘要翻译：可变批量装载端口组件包括工具接口，端口门，前进板以及第一和第二闩锁键。工具界面通常在垂直方向上延伸并具有孔径。端口门具有关闭位置，其中端口门至少部分地封闭孔。前进板被构造成支撑前开口统一舱（FOUP）并且在缩回位置和前进位置之间平移。第一闩锁键以第一高度设置在端口门上，第一高度被构造成选择性地接合具有第一选择的FOUP容量的FOUP的对应的闩锁钥匙插座，并且第二闩锁键以第二高度设置在端口门上，第二高度被配置为选择性地接合具有第二选择的FOUP容量的另一FOUP的对应的闩锁键插座。

6. 发明申请

WO2007008944A1 BELT CONVEYOR FOR USE WITH SEMICONDUCTOR CONTAINERS 审中-公开
标题翻译：带式输送机用于半导体容器
公开(公告)号：WO2007008944A1
公开(公告)日：2007-01-18
申请号：PCT/US2006/026978
申请日：2006-07-10
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , HINE, Roger, G. , KROLAK, Michael
发明人： BONORA, Anthony, C. , HINE, Roger, G. , KROLAK, Michael
IPC分类号： B65G15/12 , B65G47/26 , B65G43/10 , H01L21/677
CPC分类号： H01L21/67763 , B65G15/12 , B65G43/10 , B65G47/268 , B65G2201/0297 , H01L21/67706 , H01L21/6773
摘要： The present invention comprises a conveyor (100) for moving a semiconductor containers (2) throughout a fabrication facility. In one embodiment, the conveyor comprises a plurality of individually controlled conveyor zones (Z). Each conveyor zone includes a first belt (110), a second belt (112), a drive assembly (138) for rotating the first belt and the second belt at substantially the same speed. The first belt and the second belt are driven at substantially the same speed and movably support the container's bottom plate as the container moves along the conveyor. In another embodiment, the conveyor includes sensors (200) to determine, among other things, the position of the container.
摘要翻译：本发明包括用于在整个制造设施中移动半导体容器（2）的输送机（100）。在一个实施例中，输送机包括多个单独控制的传送带（Z）。每个传送带包括第一带（110），第二带（112），用于以基本上相同的速度旋转第一带和第二带的驱动组件（138）。第一带和第二带以大致相同的速度驱动，并且随着容器沿着输送机移动，可移动地支撑容器的底板。在另一个实施例中，输送机包括用于确定容器位置的传感器（200）。

7. 发明申请

WO2006124982A1 INTERFACE BETWEEN CONVEYOR AND SEMICONDUCTOR PROCESS TOOL LOAD PORT 审中-公开
标题翻译：输送机和半导体工艺工具负载端口之间的接口
公开(公告)号：WO2006124982A1
公开(公告)日：2006-11-23
申请号：PCT/US2006/019056
申请日：2006-05-16
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , KROLAK, Michael , HINE, Roger, G.
发明人： BONORA, Anthony, C. , KROLAK, Michael , HINE, Roger, G.
IPC分类号： H01L21/677
CPC分类号： H01L21/67766 , H01L21/67736 , H01L21/67769 , H01L21/67775 , Y10S414/14 , Y10T74/20305
摘要： The present invention generally comprises a tool load device for transferring a container between a container transport system and a processing tool. The tool load device may service a single load port or multiple load ports. Regardless, the tool load device is preferably located between the load port of the processing tool and the section of the container transport system passing the processing tool. The tool load device provides an improved method of moving containers between a conventional load port and, for example, a conveyor. In another embodiment, the tool load device is coupled with an x- drive assembly that moves the tool load device along a path that is substantially parallel to the container transport system passing in front of the load port - allowing the tool load device to service multiple load ports.
摘要翻译：本发明通常包括用于在容器运输系统和加工工具之间转运容器的工具装载装置。工具装载设备可以服务于单个装载端口或多个装载端口。无论如何，工具装载装置优选地位于处理工具的装载端口和通过处理工具的容器运输系统的部分之间。工具装载装置提供了一种在常规负载端口和例如输送机之间移动容器的改进方法。在另一个实施例中，工具负载装置与x驱动组件联接，该组件使得工具装载装置沿着基本上平行于通过装载口前面的容器运输系统的路径移动 - 允许工具装载装置服务多个加载端口。

8. 发明申请

WO2008008834A2 METHOD AND APPARATUS FOR VERTICAL WAFER TRANSPORT, BUFFER AND STORAGE 审中-公开
标题翻译：垂直波浪运输，缓冲和储存的方法和装置
公开(公告)号：WO2008008834A2
公开(公告)日：2008-01-17
申请号：PCT/US2007/073256
申请日：2007-07-11
申请人： ASYST TECHNOLOGIES, INC. , KROLAK, Michael , HINE, Roger, G. , BONORA, Anthony, C.
发明人： KROLAK, Michael , HINE, Roger, G. , BONORA, Anthony, C.
IPC分类号： B65G1/00 , B65G65/02 , B65G65/32 , B65G65/38
CPC分类号： H01L21/67379 , H01L21/67017 , H01L21/67386 , H01L21/67769 , H01L21/67772 , H01L21/68707
摘要： A substrate support and transport system for substrates to be processed is provided. The system includes a container supporting a plurality of substrates in a substantially vertical orientation, where the container has an access door surrounded by a flange defined on a top surface. The system includes a conveying system supporting a bottom surface of the container opposing the top surface. The conveying system is configured to enable removal of the container from the conveying system to a processing tool while the plurality of substrates is in the substantially vertical orientation. The system further includes a receiving module for a processing tool configured to accept the container from the conveying system. The receiving module is configured to move the container in a two dimensional plane defined within the receiving module. A container holding the substrates in a substantially vertical orientation and a method for transporting and storing substrates is provided.
摘要翻译：提供了一种用于待处理衬底的衬底支撑和输送系统。该系统包括支撑基本垂直取向的多个基板的容器，其中容器具有由限定在顶表面上的凸缘包围的通道门。该系统包括支撑与顶表面相对的容器的底表面的输送系统。输送系统被构造成使得容器从输送系统移除到处理工具，同时多个基板处于基本垂直的方向。该系统还包括用于处理工具的接收模块，该接收模块被配置为从输送系统接收容器。接收模块被配置为在容纳模块内定义的二维平面内移动容器。提供了将基板保持为大致垂直取向的容器以及用于输送和存储基板的方法。

9. 发明申请

WO2006091593A2 DIRECT TOOL LOADING 审中-公开
标题翻译：直接工具装载
公开(公告)号：WO2006091593A2
公开(公告)日：2006-08-31
申请号：PCT/US2006/006103
申请日：2006-02-17
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , KROLAK, Michael , HINE, Roger, G.
发明人： BONORA, Anthony, C. , KROLAK, Michael , HINE, Roger, G.
IPC分类号： H01L21/00
CPC分类号： H01L21/67775 , H01L21/67736 , Y10S414/14
摘要： The present invention comprises a container transport and loading system. The system generally comprises a load port for presenting articles to a tool and a container transport system. In one embodiment, the load port includes a vertically movable FOUP advance plate assembly that is adapted to load and unload a FOUP from a conveyor that passes by the load port and move the FOUP horizontally. In another embodiment, the load port includes a vertically movable support structure that is adapted to load and unload a container from a shuttle that passes by the load port. The various embodiments of the load port and container transport system are improvements over conventional container transport systems. The present invention also includes a shuttle for simultaneously transporting multiple containers that a load port may load or unload a container from.
摘要翻译：本发明包括一个集装箱运输和装载系统。该系统通常包括用于将物品呈现给工具的装载端口和容器运输系统。在一个实施例中，负载端口包括可垂直移动的FOUP提前板组件，其适于从通过负载端口的传送器加载和卸载FOUP并水平移动FOUP。在另一个实施例中，负载端口包括可垂直移动的支撑结构，其适于从穿过负载端口的梭子加载和卸载容器。负载端口和集装箱运输系统的各种实施例是相对于常规集装箱运输系统的改进。本发明还包括用于同时运送多个容器的梭子，负载口可装载或卸载容器。

10. 发明申请

WO2009154789A1 DIRECT LOADING TO AND FROM A CONVEYOR SYSTEM 审中-公开
标题翻译：直接装载到输送机系统
公开(公告)号：WO2009154789A1
公开(公告)日：2009-12-23
申请号：PCT/US2009/003686
申请日：2009-06-19
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , FATULA, Joseph, John, III , DEYANOV, Roumen, I. , ITO, Hiroshi , HINE, Roger, G.
发明人： BONORA, Anthony, C. , FATULA, Joseph, John, III , DEYANOV, Roumen, I. , ITO, Hiroshi , HINE, Roger, G.
IPC分类号： H01L21/677
CPC分类号： H01L21/67706 , H01L21/6773 , H01L21/67736 , H01L21/67775
摘要： A direct load system includes a load port for moving containers in a vertical orientation between a lower position near a conveyor and up to an upper position proximate to a load port door. The load port includes a single arm that moves a support in a vertical configuration, such that moving the single arm allows for the support to be lowered to the conveyor in a nested location between beams of the conveyor. The conveyor includes a single slot in a beam that allows the single arm to pass. The single arm raises up from the nested location, off of the conveyor, and to the load port door. The single arm and interface with the conveyor slot can be used by other tools, such as stockers or tools that need to directly access a conveyor used to transport containers (e g, wafers, etc ) to locations/tools of a fabrication facility.
摘要翻译：直接负载系统包括用于在垂直方向上移动容器的装载端口，其位于靠近输送机的下部位置和靠近装载端口门的上部位置之间。负载端口包括单个臂，其以垂直构造移动支撑件，使得移动单臂允许支撑件在输送机的梁之间的嵌套位置中降低到输送机。输送机包括允许单臂通过的梁中的单个槽。单臂从嵌套位置抬起，离开传送带，并到达装载端口门。单臂和输送槽的接口可以被其他工具使用，例如储存器或工具，其需要直接接近用于将容器（例如，晶片等）运送到制造设施的位置/工具的输送机。

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