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    • 2. 发明申请
    • NANOFABRICATION METHOD
    • 南方法
    • WO2010096363A2
    • 2010-08-26
    • PCT/US2010/024248
    • 2010-02-16
    • ARKEMA INC.PAPAKONSTANTOPOULOS, George J.OLSEN, AdamDESPOTOPOULOU, MarinaJUHASZ, Nikola
    • PAPAKONSTANTOPOULOS, George J.OLSEN, AdamDESPOTOPOULOU, MarinaJUHASZ, Nikola
    • G01N30/16
    • B81C1/00031B81C2201/0149
    • The invention relates to a new nanofabrication method especially useful for patterns of two or more different sizes, shapes and/or heights. The method is especially useful for compositions containing block copolymers. The method involves coating the composition onto a multi-patterned substrate, with self-assembly of the polymer components to match the pattern, and the selective removal of the polymer components. A complementary technique is described where a polymer composition comprising domains of different chemical/physical properties can be used to create/change a structure after the application of a stimulus; where the polymeric composition is in bulk form, as a film, or as a coating on an unpatterned or patterned substrate. This structure can be dynamically controlled via the application of the stimulus. The invention is especially useful in the field of integrated circuits, and relates to a means of reducing transistor size and spacing. In addition, this invention can find applications in specialty coatings with antireflective, dirt resistance, controlled adhesion, and piezoelectric properties, and in photovoltaics, energy generation and sensor applications, among others.
    • 本发明涉及对两种或更多种不同尺寸,形状和/或高度的图案特别有用的新的纳米制造方法。 该方法对于含有嵌段共聚物的组合物是特别有用的。 该方法包括将组合物涂布到多图案化基底上,聚合物组分的自组装以匹配图案,以及选择性去除聚合物组分。 描述了补充技术,其中包含不同化学/物理性质的畴的聚合物组合物可用于在施加刺激之后产生/改变结构; 其中聚合物组合物为体积形式,作为膜,或作为未图案化或图案化基底上的涂层。 可以通过应用刺激来动态地控制该结构。 本发明在集成电路领域中特别有用,并且涉及减小晶体管尺寸和间隔的手段。 此外,本发明可以应用于具有抗反射,耐污性,受控粘附和压电性能的特种涂料中,以及在光伏,能量产生和传感器应用中的应用。