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1. 发明申请

WO2006069341A3 CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE 审中-公开
标题翻译：用于处理基板的集群工具架构
公开(公告)号：WO2006069341A3
公开(公告)日：2006-10-12
申请号：PCT/US2005046877
申请日：2005-12-21
申请人： APPLIED MATERIALS INC , ISHIKAWA TETSUYA , ROBERTS RICK J , ARMER HELEN R , VOLFOVSKI LEON , PINSON JAY D , RICE MICHAEL , QUACH DAVID H , SALEK MOHSEN S , LOWRANCE ROBERT , BACKER JOHN A , WEAVER WILLIAM TYLER , CARLSON CHARLES , WANG CHONGYANG , HUDGENS JEFFREY , HERCHEN HARALD , LUE BRIAN
发明人： ISHIKAWA TETSUYA , ROBERTS RICK J , ARMER HELEN R , VOLFOVSKI LEON , PINSON JAY D , RICE MICHAEL , QUACH DAVID H , SALEK MOHSEN S , LOWRANCE ROBERT , BACKER JOHN A , WEAVER WILLIAM TYLER , CARLSON CHARLES , WANG CHONGYANG , HUDGENS JEFFREY , HERCHEN HARALD , LUE BRIAN
IPC分类号： H01L21/00
CPC分类号： H01L21/67167 , H01L21/67173 , H01L21/67178 , H01L21/67184 , H01L21/67742 , H01L21/67754 , H01L21/67766 , H01L21/67781
摘要： Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased throughput, increased reliability, substrates processed in the cluster tool have a more repeatable wafer history, and also has a smaller system footprint. In one embodiment of the cluster tool, the cost of ownership is reduced by grouping substrates together and transferring and processing the substrates in groups of two or more to improve system throughput, and reduces the number of moves a robot has to make to transfer a batch of substrates between the processing chambers, thus reducing wear on the robot and increasing system reliability. Embodiments also provide for a method and apparatus that are used to increase the reliability of the substrate transfer process to reduce system down time.
摘要翻译：实施例通常提供一种用于使用具有增加的吞吐量，增加的可靠性的多腔室处理系统（例如，集群工具）来处理衬底的装置和方法，在群集工具中处理的衬底具有更可重复的晶片历史，并且还具有较小的系统占用空间。在集群工具的一个实施例中，通过将基板分组在一起并以两个或更多个组的方式传送和处理基板来降低所有权成本，以提高系统吞吐量，并且减少机器人必须进行的转移批次的移动次数的处理室之间的基板，从而减少机器人的磨损并提高系统的可靠性。实施例还提供了用于增加衬底转移过程以减少系统停机时间的可靠性的方法和装置。

2. 发明申请

WO0204774A3 AUTOMATIC DOOR OPENER 审中-公开
标题翻译：自动开门器
公开(公告)号：WO0204774A3
公开(公告)日：2002-06-27
申请号：PCT/US0141237
申请日：2001-06-30
申请人： APPLIED MATERIALS INC , WEAVER WILLIAM TYLER
发明人： WEAVER WILLIAM TYLER
IPC分类号： H01L21/677 , H01L21/00
CPC分类号： H01L21/67772 , Y10S414/13
摘要： A wafer carrier opener is provided. The wafer carrier opener may eliminate the use of two separate actuators by using a four-bar linkage mechanism. The wafer carrier opener includes a wafer carrier door receiver, a horizontally stationary member, and a link coupled between the wafer carrier door receiver and the horizontally stationary member so as to allow horizontal movement of the wafer carrier door receiver.
摘要翻译：提供晶圆载具开启器。晶片载具开启器可以通过使用四连杆机构来消除使用两个单独的致动器。晶片载具开启器包括晶片载具门接收器，水平固定构件和连接在晶片载具门接收器和水平固定构件之间的连杆，以允许晶片载具门接收器水平移动。

3. 发明专利

AU7366601A Automatic door opener 未知
公开(公告)号：AU7366601A
公开(公告)日：2002-01-21
申请号：AU7366601
申请日：2001-06-30
申请人： APPLIED MATERIALS INC
发明人： WEAVER WILLIAM TYLER
IPC分类号： H01L21/677
摘要： A wafer carrier opener is provided. The wafer carrier opener may eliminate the use of two separate actuators by using a four-bar linkage mechanism. The wafer carrier opener includes a wafer carrier door receiver, a horizontally stationary member, and a link coupled between the wafer carrier door receiver and the horizontally stationary member so as to allow horizontal movement of the wafer carrier door receiver.

4. 发明申请

WO03005422A3 DATUM PLATE FOR USE IN INSTALLATIONS OF SUBSTRATE HANDLING SYSTEMS 审中-公开
标题翻译：用于安装基板处理系统的原料板
公开(公告)号：WO03005422A3
公开(公告)日：2003-09-25
申请号：PCT/US0220916
申请日：2002-06-29
申请人： APPLIED MATERIALS INC
发明人： WEAVER WILLIAM TYLER
IPC分类号： H01L21/677 , H01L21/00
CPC分类号： H01L21/67778 , H01L21/67766 , H01L21/67772 , H01L21/67775
摘要： A datum plate is provided for use in installations of substrate handling systems. The datum plate has a set of predetermined attachment locations adapted to couple the datum plate to a chamber; a set of predetermined attachment locations adapted to couple one or more automatic door opener platforms to the datum plate; and a set of predetermined attachment locations adapted to couple one or more substrate handlers contained within the chamber, to the datum plate. The attachment locations are positioned such that when the datum plate is coupled to the chamber, and the automatic door opener platform and the substrate handler are coupled to the datum plate, the substrate handler and automatic door opener platform are aligned for substrate transfer therebetween. Other apparatuses such as substrate storage locations, automation modules, substrate carrier handlers and/or shelves for storing substrate carriers may also be coupled to the datum plate, via sets of predetermined attachments locations. A substrate handling system that employs the datum plate, and a method for installing the substrate handling system are also provided. In one aspect the inventive datum plate may be coupled to a supporting frame rather than to a chamber. Numerous other aspects are provided.
摘要翻译：提供基准板用于基板搬运系统的安装。基准板具有一组预定的连接位置，其适于将基准板连接到室; 一组预定的连接位置，其适于将一个或多个自动开门器平台连接到基准板; 以及适于将包含在腔室内的一个或多个基板搬运器联接到基准板的一组预定附接位置。连接位置被定位成使得当基准板连接到腔室并且自动开门器平台和基板处理器连接到基准板时，基板处理器和自动门开启器平台被对准以用于其间的基板传送。诸如衬底存储位置，自动化模块，衬底载具处理器和/或用于存储衬底载具的架子的其它装置也可以经由预定附件位置组联接到基准板。还提供了采用基准板的基板搬运系统和用于安装基板搬运系统的方法。在一个方面，本发明的基准板可以连接到支撑框架而不是腔室。许多其他方面提供。

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