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1. 发明申请

WO2008067379A3 SYSTEM AND METHOD FOR DEPOSITING A GASEOUS MIXTURE ONTO A SUBSTRATE SURFACE USING A SHOWERHEAD APPARATUS 审中-公开
标题翻译：使用淋浴器将气体混合物沉积在基底表面上的系统和方法
公开(公告)号：WO2008067379A3
公开(公告)日：2008-12-31
申请号：PCT/US2007085763
申请日：2007-11-28
申请人： APPLIED MATERIALS INC , BOUR DAVID , WASHINGTON LORI , NIJHAWAN SANDEEP , STEVENS RONALD , SMITH JACOB , TAM ALEXANDER , MYO NYI O , PARK STEVE , TWIST ROSEMARY , KWONG GARRY , SU JIE
发明人： BOUR DAVID , WASHINGTON LORI , NIJHAWAN SANDEEP , STEVENS RONALD , SMITH JACOB , TAM ALEXANDER , MYO NYI O , PARK STEVE , TWIST ROSEMARY , KWONG GARRY , SU JIE
IPC分类号： C23C16/00 , C23C16/455 , H01L21/306
CPC分类号： C23C16/45565 , C23C16/45514 , C23C16/45572 , C23C16/45574
摘要： A gaseous mixture is deposited onto a substrate (135) surface using a showerhead (130). A first plenum (210) of the showerhead has a plurality of channels (235) fluidicly coupled with an interior of a processing chamber (105) A second plenum gas flows through a plurality of tubes (240) extending from a second plenum (215) of the showerhead through the channels (235) into the interior of the processing chamber. The diameter of the tubes is smaller than the diameter of the channels such that a first plenum gas flows into the interior of the processing chamber through a space defined between the outer surface of the tubes and the surface of the channels. The length and diameter of the tubes determine the level of distribution and the molar ratio of the first gas and the second gas in the gaseous mixture that is deposited on the surface of the substrate.
摘要翻译：使用喷头（130）将气体混合物沉积到基底（135）表面上。喷头的第一增压室（210）具有与处理室（105）的内部流体耦合的多个通道（235）。第二增压气体流过从第二增压室（215）延伸的多个管（240）的喷头通过通道（235）进入处理室的内部。管的直径小于通道的直径，使得第一增压气体通过限定在管的外表面和通道表面之间的空间流入处理室的内部。管的长度和直径确定沉积在基底表面上的气态混合物中的分布水平和第一气体与第二气体的摩尔比。

2. 发明申请

WO2008024874A3 METHOD FOR MEASURING PRECURSOR AMOUNTS IN BUBBLER SOURCES 审中-公开
标题翻译：用于测量啤酒来源中的前提物质的方法
公开(公告)号：WO2008024874A3
公开(公告)日：2008-07-03
申请号：PCT/US2007076570
申请日：2007-08-22
申请人： APPLIED MATERIALS INC , STEVENS RONALD , MCDOUGALL BRENDAN , SMITH JACOB , KWONG GARRY , NIJHAWAN SANDEEP , WASHINGTON LORI
发明人： STEVENS RONALD , MCDOUGALL BRENDAN , SMITH JACOB , KWONG GARRY , NIJHAWAN SANDEEP , WASHINGTON LORI
IPC分类号： G01F17/00 , G01F23/14
CPC分类号： C23C16/4482
摘要： Methods are disclosed of determining a fill level of a precursor in a bubbler. The bubbler is fluidicly coupled with a substrate processing chamber through a vapor-delivery system. The bubbler and vapor-delivery system are backfilled with a known dose of a backfill gas. A pressure and temperature of the backfill gas are determined, permitting a total volume for the backfill gas in the bubbler and vapor-delivery system to be determined by application of a gas law. The fill level of the precursor in the bubbler is determined as a difference between (1) a total volume of the bubbler and vapor-delivery system and (2) the determined total volume for the backfill gas.
摘要翻译：公开了确定起泡器中前体的填充水平的方法。起泡器通过蒸气输送系统与基底处理室流体耦合。起泡器和蒸气输送系统用已知剂量的回填气体回填。确定回填气体的压力和温度，允许通过应用气体定律确定起泡器和蒸气输送系统中回填气体的总体积。起泡器中的前体的填充水平被确定为（1）起泡器和蒸气输送系统的总体积和（2）确定的回填气体的总体积之间的差。

3. 发明申请

WO2008024932A3 HOTWALL REACTOR AND METHOD FOR REDUCING PARTICLE FORMATION IN GAN MOCVD 审中-公开
标题翻译：热壁反应器和用于减少GAN MOCVD中的颗粒形成的方法
公开(公告)号：WO2008024932A3
公开(公告)日：2008-04-17
申请号：PCT/US2007076678
申请日：2007-08-23
申请人： APPLIED MATERIALS INC , BOUR DAVID , SMITH JACOB , NIJHAWAN SANDEEP , WASHINGTON LORI
发明人： BOUR DAVID , SMITH JACOB , NIJHAWAN SANDEEP , WASHINGTON LORI
IPC分类号： H01L21/336 , H01L51/40
CPC分类号： C30B25/02 , C23C16/303 , C30B25/10 , C30B29/403 , C30B29/406 , H01L21/02378 , H01L21/02381 , H01L21/02403 , H01L21/0242 , H01L21/02458 , H01L21/0254 , H01L21/0262 , H01L21/67109 , H01L21/67115
摘要： Systems and methods to suppress the formation of parasitic particles during the deposition of a III- V nitride film with, e.g., metal-organic chemical vapor deposition (MOCVD) are described. In accordance with certain aspects of the invention, a hotwall reactor design and methods associated therewith, with wall temperatures similar to process temperatures, so as to create a substantially isothermal reaction chamber, may generally suppress parasitic particle formation and improve deposition performance.
摘要翻译：描述了用例如金属有机化学气相沉积（MOCVD）沉积III-V族氮化物膜期间抑制寄生颗粒形成的系统和方法。根据本发明的某些方面，与墙壁温度类似于处理温度的热壁反应器设计和与之相关联的方法以便形成基本等温的反应室，通常可以抑制寄生颗粒形成并改善沉积性能。

4. 发明申请

WO2007127670A2 BUFFER-LAYER TREATMENT OF MOCVD-GROWN NITRIDE STRUCTURES 审中-公开
标题翻译：缓冲层处理MOCVD-GROWN硝酸盐结构
公开(公告)号：WO2007127670A2
公开(公告)日：2007-11-08
申请号：PCT/US2007067003
申请日：2007-04-19
申请人： APPLIED MATERIALS INC , BOUR DAVID , SMITH JACOB , NIJHAWAN SANDEEP
发明人： BOUR DAVID , SMITH JACOB , NIJHAWAN SANDEEP
IPC分类号： H01L21/20 , H01L21/36
CPC分类号： H01L21/02513 , H01L21/0242 , H01L21/02458 , H01L21/0254 , H01L21/0262
摘要： Methods are disclosed for fabricating a compound nitride semiconductor structure. An amorphous buffer layer that includes nitrogen and a group-III element is formed over a substrate disposed within a substrate processing chamber at a first temperature. The temperature within the chamber is increased to a second temperature at which the amorphous buffer layer coalesces into crystallites over the substrate. The substrate is exposed to a corrosive agent to destroy at least some of the crystallites. A crystalline nitride layer is formed over the substrate at a third temperature using the crystallites remaining after exposure to the corrosive agent as seed crystals. The third temperature is greater than the first temperature. The crystalline nitride layer also includes nitrogen and a group-III element.
摘要翻译：公开了用于制造复合氮化物半导体结构的方法。在第一温度下，在设置在基板处理室内的基板上形成包含氮和III族元素的非晶缓冲层。室内的温度增加到非晶缓冲层在衬底上聚结成微晶的第二温度。将基底暴露于腐蚀剂以破坏至少一些微晶。在第三温度下使用在作为晶种暴露于腐蚀剂之后残留的微晶，在衬底上形成结晶氮化物层。第三温度大于第一温度。结晶氮化物层还包括氮和III族元素。

5. 发明申请

WO2006132878A3 SUBSTRATE SUPPORT 审中-公开
标题翻译：基板支持
公开(公告)号：WO2006132878A3
公开(公告)日：2007-11-29
申请号：PCT/US2006021077
申请日：2006-05-31
申请人： APPLIED MATERIALS INC , SMITH JACOB , TAM ALEXANDER , IYER R SURYANARAYANAN , SEUTTER SEAN , TRAN BINH , MERRY NIR , BRAILOVE ADAM , SHYDO JR ROBERT , ANDREWS ROBERT , ROBERTS FRANK , SMICK THEODORE , RYDING GEOFFREY
发明人： SMITH JACOB , TAM ALEXANDER , IYER R SURYANARAYANAN , SEUTTER SEAN , TRAN BINH , MERRY NIR , BRAILOVE ADAM , SHYDO JR ROBERT , ANDREWS ROBERT , ROBERTS FRANK , SMICK THEODORE , RYDING GEOFFREY
IPC分类号： C23C16/458 , H01L21/00
CPC分类号： H01L21/68792 , C23C16/4584 , H01L21/67126 , H01L21/68742
摘要： A method and apparatus for processing a substrate utilizing a rotating substrate support are disclosed herein. In one embodiment, an apparatus for processing a substrate includes a chamber having a substrate support assembly disposed within the chamber. The substrate support assembly includes a substrate support having a support surface and a heater disposed beneath the support surface. A shaft is coupled to the substrate support and a motor is coupled to the shaft through a rotor to provide rotary movement to the substrate support. A seal block is disposed around the rotor and forms a seal therewith. The seal block has at least one seal and at least one channel disposed along the interface between the seal block and the shaft. A port is coupled to each channel for connecting to a pump. A lift mechanism is coupled to the shaft for raising and lowering the substrate support.
摘要翻译：本文公开了一种利用旋转衬底支撑件来处理衬底的方法和装置。在一个实施例中，用于处理衬底的装置包括具有设置在腔室内的衬底支撑组件的室。衬底支撑组件包括具有支撑表面的衬底支撑件和设置在支撑表面下方的加热器。轴连接到基板支撑件，并且电机通过转子联接到轴，以向基板支撑件提供旋转运动。密封块设置在转子周围并与其形成密封。密封块具有至少一个密封件和沿密封块和轴之间的界面设置的至少一个通道。端口连接到每个通道以连接到泵。升降机构联接到轴上以升高和降低基板支撑。

6. 发明专利

AU2017203328B1 An intraoral orthosis for mandibular advancement for snoring and obstructive sleep apnoea 未知
公开(公告)号：AU2017203328B1
公开(公告)日：2017-07-27
申请号：AU2017203328
申请日：2017-05-18
申请人： SMITH JACOB
发明人： SMITH JACOB
IPC分类号： A61F5/56
摘要： Abstract Intraoral orthosis comprising: a maxilla retainer; a mandibular retainer; a pair of lateral retention straps coupling the maxilla retainer to the mandibular retainer, each retention strap spanning between an interior canine region of the maxilla retainer to a posterior molar region of the mandibular retainer and each retention strap comprising an elongate portion wherein: the maxilla and mandibular retainers comprise respectively abutting pairs of planar maxilla and mandibular retainer occlusal faces facilitating at least lateral sliding of the mandibular retainer against the maxilla retainer; and the retainers are coupled to the retention straps by couplings at opposing distal ends thereof wherein each coupling comprises: a lateral retainer buttress comprising an opening to a semi-spherical socket therein; a medial retention strap ball engagement, the ball engagement comprising: a medial rod extending substantially perpendicularly to the elongate portion and terminating in a medial semispherical ball head, the ball head configured for insertion through the buttress opening for engagement and rotatable coupling within the semispherical socket.

7. 发明专利

CA107600A CHAIN SAW 未知
公开(公告)号：CA107600A
公开(公告)日：1907-09-24
申请号：CA107600D
申请日：1907-08-26
申请人： SMITH JACOB , SMITH GEORGE W
发明人： SMITH JACOB

8. 发明专利

AU2019101015A4 An intraoral titration adjustable orthosis for mandibular advancement for snoring and obstructive sleep apnoea and methods of adjustment thereof 未知
公开(公告)号：AU2019101015A4
公开(公告)日：2019-10-10
申请号：AU2019101015
申请日：2019-09-06
申请人： SMITH JACOB
发明人： SMITH JACOB
IPC分类号： A61F5/56
摘要： Abstract Titration adjustable intraoral orthosis comprises a maxilla retainer and a mandibular retainer, the mandibular retainer comprising a pair of lateral dorsal wings each defining a posterior wing abutment face, the maxilla retainer comprising a pair of lateral sockets, each socket defining an anterior socket edge having an anterior opening accessing an interior therein, a pair of spacer elements for each respective socket, each spacer element having an insertion portion configured for selective engagement within a respective socket interior and a spacer portion having an posterior spacer portion edge which engages against the anterior socket edge and an anterior spacer element face for bearing against a respective posterior wing abutment face. 109-- -- - - - --1107 - - f~ 10 12 1 p i \t- 120 Figure 1 'A 4 104 \ - - - - - - - - - - Figure 2

9. 发明专利

GB121201A Improvements in or relating to Casting Ingots. 未知
公开(公告)号：GB121201A
公开(公告)日：1918-12-12
申请号：GB1874317
申请日：1917-12-17
申请人： LUMSDEN THOMAS , SMITH JACOB
发明人： LUMSDEN THOMAS , SMITH JACOB
IPC分类号： B22D27/08
摘要： 121,201. Lumsden, T., and Smith, J. Dec. 17, 1917. Casting-machines.-Ingots are jarred during solidification, to prevent piping and accelerate cooling, by mounting the mould j by a flange k on a ring g pivoted to a table b revolving on rollers, and providing the ring g with means such as a roller h engaging a fixed circular stepped cam f, and buffer stops m to give the ingot a jarring motion at intervals.

10. 发明专利

CA65659A SNOOD FISHING HOOK KEEPER 未知
公开(公告)号：CA65659A
公开(公告)日：1900-01-05
申请号：CA65659D
申请日：1899-11-06
申请人： SMITH JACOB , CAMPBELL JOHN HART
发明人： SMITH JACOB , CAMPBELL JOHN HART

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