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1. 发明申请

WO2013062741A1 BACK CONTACT THROUGH-HOLES FORMATION PROCESS FOR SOLAR CELL FABRICATION 审中-公开
标题翻译：返回联系太阳能电池制造过程
公开(公告)号：WO2013062741A1
公开(公告)日：2013-05-02
申请号：PCT/US2012/059248
申请日：2012-10-08
申请人： APPLIED MATERIALS, INC. , STEWART, Michael P. , FRANKLIN, Jeffrey L.
发明人： STEWART, Michael P. , FRANKLIN, Jeffrey L.
IPC分类号： H01L31/042 , H01L31/0216 , H01L31/18
CPC分类号： H01L31/02167 , H01L31/022425 , H01L31/068 , Y02E10/547
摘要： Embodiments of the invention contemplate the formation of a high efficiency solar cell using a laser patterning process to form openings in a passivation layer on a surface of a solar cell substrate. In one embodiment, a method of forming an opening in a passivation layer on a solar cell substrate includes forming a passivation layer on a back surface of a substrate, the substrate having a first type of doping atom on the back surface of the substrate and a second type of doping atom on a front surface of the substrate, and providing a series of laser pulses to the passivation layer for between about 500 picoseconds and about 80 nanoseconds to form openings in the passivation layer.
摘要翻译：本发明的实施例考虑使用激光图案化工艺形成高效太阳能电池，以在太阳能电池基板的表面上的钝化层中形成开口。在一个实施例中，在太阳能电池基板上的钝化层中形成开口的方法包括在基板的背面上形成钝化层，所述基板在基板的背面上具有第一类型的掺杂原子，在衬底的前表面上的第二类掺杂原子，并且在钝化层中提供一系列激光脉冲至约500皮秒和约80纳秒之间以在钝化层中形成开口。

2. 发明申请

WO2013106225A1 METHODS OF MANUFACTURING SOLAR CELL DEVICES 审中-公开
标题翻译：制造太阳能电池器件的方法
公开(公告)号：WO2013106225A1
公开(公告)日：2013-07-18
申请号：PCT/US2013/020044
申请日：2013-01-03
申请人： APPLIED MATERIALS, INC. , STEWART, Michael P. , KUMAR, Prabhat , WIJEKOON, Kapila , ZHANG, Lin , PONNEKANTI, Hari K.
发明人： STEWART, Michael P. , KUMAR, Prabhat , WIJEKOON, Kapila , ZHANG, Lin , PONNEKANTI, Hari K.
IPC分类号： H01L31/042 , H01L31/18
CPC分类号： H01L31/022425 , H01L31/068 , H01L31/1804 , Y02E10/50 , Y02E10/547 , Y02P70/521
摘要： Embodiments of the present invention are directed to a process for making solar cells. Particularly, embodiments of the invention provide simultaneously co-firing (e.g., thermally processing) metal layers disposed both on a first and a second surface of a solar cell substrate to complete the metallization process in one step. By doing so, both the metal layers formed on the first and the second surfaces of the solar cell substrate are co-fired (e.g., simultaneously thermally processed), thereby eliminating manufacturing complexity, cycle time and cost to produce the solar cell device. Embodiments of the invention may also provide a method and solar cell structure that requires a reduced amount of a metallization paste on a rear surface of the substrate to form a rear surface contact structure and, thus, reduce the cost of the formed solar cell device.
摘要翻译：本发明的实施例涉及制造太阳能电池的方法。特别地，本发明的实施例同时提供同时在太阳能电池基板的第一和第二表面上同时共烧（例如热处理）金属层，以在一个步骤中完成金属化处理。通过这样做，形成在太阳能电池基板的第一表面和第二表面上的金属层被共烧（例如，同时热处理），从而消除了制造太阳能电池装置的制造复杂性，周期时间和成本。本发明的实施例还可以提供一种方法和太阳能电池结构，其需要在基板的后表面上减少金属化浆料的量以形成后表面接触结构，并因此降低形成的太阳能电池器件的成本。

3. 发明申请

WO2012096699A1 INTEGRATED IN-LINE PROCESSING SYSTEM FOR SELECTIVE EMITTER SOLAR CELLS 审中-公开
标题翻译：用于选择性发射太阳能电池的集成在线处理系统
公开(公告)号：WO2012096699A1
公开(公告)日：2012-07-19
申请号：PCT/US2011/056518
申请日：2011-10-17
申请人： APPLIED MATERIALS, INC. , STEWART, Michael P.
发明人： STEWART, Michael P.
IPC分类号： H01L31/042 , H01L31/18
CPC分类号： H01L31/1804 , C23C8/42 , C23C8/62 , H01L21/67173 , H01L31/068 , Y02E10/547 , Y02P70/521
摘要： Embodiments of the present invention are directed to an in-line system and process for forming a selective emitter solar cell. A dopant material is applied to a silicon substrate. A laser is then used to drive the dopant atoms from the dopant material deep into the substrate to form highly doped regions. The substrate is then thermally processed to form a lightly doped emitter region and a shallow p-n junction in the remaining field region of the substrate. Conductive contacts are then deposited on the highly doped regions. The resulting field region has a highly resistive emitter region that absorbs minimal light so that an increased amount of light reaches the p-n junction for conversion into electrical current. The highly doped regions of the resulting solar cell have very low electrical resistance to provide a highly conductive path between the emitter region and the conductive contacts.
摘要翻译：本发明的实施例涉及用于形成选择性发射极太阳能电池的在线系统和工艺。将掺杂剂材料施加到硅衬底。然后使用激光器将掺杂剂原子从掺杂剂材料深深地驱动到衬底中以形成高掺杂区域。然后将衬底热处理以在衬底的剩余场区域中形成轻掺杂的发射极区域和浅的p-n结。然后在高掺杂区域上沉积导电触点。所得到的场区域具有吸收最小光的高电阻发射极区域，使得增加量的光到达p-n结以转换成电流。所得到的太阳能电池的高度掺杂区域具有非常低的电阻以在发射极区域和导电触点之间提供高导电性的路径。

4. 发明申请

WO2011140355A2 OXIDE NITRIDE STACK FOR BACKSIDE REFLECTOR OF SOLAR CELL 审中-公开
标题翻译：用于太阳能电池背反射器的氧化物氮化物堆叠
公开(公告)号：WO2011140355A2
公开(公告)日：2011-11-10
申请号：PCT/US2011/035380
申请日：2011-05-05
申请人： APPLIED MATERIALS, INC. , MUNGEKAR, Hemant , AGRAWAL, Mukul , STEWART, Michael P. , WEIDMAN, Timothy, W. , MISHRA, Rohit , PAAK, Sunhom
发明人： MUNGEKAR, Hemant , AGRAWAL, Mukul , STEWART, Michael P. , WEIDMAN, Timothy, W. , MISHRA, Rohit , PAAK, Sunhom
IPC分类号： H01L31/042 , H01L31/18
CPC分类号： H01L31/02168 , H01L31/056 , Y02E10/52
摘要： Embodiments of the invention generally provide methods for forming a multilayer rear surface passivation layer on a solar cell substrate. The method includes forming a silicon oxide sub-layer having a net charge density of less than or equal to 2.1 x 10 11 Coulombs/cm 2 on a rear surface of a p-type doped region formed in a substrate comprising semiconductor material, the rear surface opposite a light receiving surface of the substrate and forming a silicon nitride sub-layer on the silicon oxide sub-layer. Embodiments of the invention also include a solar cell device that may be manufactured according methods disclosed herein.
摘要翻译：本发明的实施例通常提供在太阳能电池基板上形成多层后表面钝化层的方法。该方法包括在形成于包含半导体材料的衬底的p型掺杂区域的后表面上形成净电荷密度小于或等于2.1×10 11库仑/ cm 2的氧化硅子层，所述衬底的光接收表面并在所述氧化硅子层上形成氮化硅子层。本发明的实施例还包括可以根据本文公开的方法制造的太阳能电池装置。

5. 发明申请

WO2011126660A3 METHOD OF FORMING A NEGATIVELY CHARGED PASSIVATION LAYER OVER A DIFFUSED P-TYPE REGION 审中-公开
公开(公告)号：WO2011126660A3
公开(公告)日：2011-10-13
申请号：PCT/US2011/027914
申请日：2011-03-10
申请人： APPLIED MATERIALS, INC. , STEWART, Michael P. , AGRAWAL, Mukul , MISHRA, Rohit , MUNGEKAR, Hemant , WEIDMAN, Timothy W.
发明人： STEWART, Michael P. , AGRAWAL, Mukul , MISHRA, Rohit , MUNGEKAR, Hemant , WEIDMAN, Timothy W.
IPC分类号： H01L31/042 , H01L31/18
摘要： The present invention generally provides a method of forming a high quality passivation layer over a p-type doped region to form a high efficiency solar cell device. Embodiments of the present invention may be especially useful for preparing a surface of a boron doped region formed in a silicon substrate. In one embodiment, the methods include exposing a surface of the solar cell substrate to a plasma to clean and modify the physical, chemical and/or electrical characteristics of the surface and then deposit a charged dielectric layer and passivation layer thereon.

6. 发明申请

WO2006102180A2 CONTACT METALLIZATION METHODS AND PROCESSES 审中-公开
标题翻译：接触金属化方法和工艺
公开(公告)号：WO2006102180A2
公开(公告)日：2006-09-28
申请号：PCT/US2006/009918
申请日：2006-03-20
申请人： APPLIED MATERIALS, INC. , WEIDMAN, Timothy W. , WIJEKOON, Kapila P. , ZHU, Zhize , GELATOS, Avgerinos V. (Jerry) , KHANDELWAL, Amit , SHANMUGASUNDRAM, Arulkumar , YANG, Michael X. , WANG, Yaxin , MEI, Fang , MOGHADAM, Farhad K. , STEWART, Michael P. , KRISHNA, Nety M. , KONECNI, Anthony , GANDIKOTA, Srinivas
发明人： WEIDMAN, Timothy W. , WIJEKOON, Kapila P. , ZHU, Zhize , GELATOS, Avgerinos V. (Jerry) , KHANDELWAL, Amit , SHANMUGASUNDRAM, Arulkumar , YANG, Michael X. , WANG, Yaxin , MEI, Fang , MOGHADAM, Farhad K. , STEWART, Michael P. , KRISHNA, Nety M. , KONECNI, Anthony , GANDIKOTA, Srinivas
IPC分类号： B28B19/00 , C23C18/34
CPC分类号： C23C18/1678 , B82Y30/00 , C23C16/0227 , C23C16/0281 , C23C16/045 , C23C16/14 , C23C18/1608 , C23C18/1651 , C23C18/1653 , C23C18/31 , C23C18/32 , C23C18/34 , C23C18/38 , C23C18/40 , C23C18/48 , C25D5/34 , H01L21/02063 , H01L21/02074 , H01L21/28518 , H01L21/28556 , H01L21/288 , H01L21/2885 , H01L21/76814 , H01L21/76843 , H01L21/76844 , H01L21/76846 , H01L21/76847 , H01L21/76849 , H01L21/76855 , H01L21/76856 , H01L21/76861 , H01L21/76862 , H01L21/76874 , H01L21/76877 , H01L21/76879 , H01L23/53238 , H01L2924/0002 , H01L2924/00
摘要： Embodiments of the invention generally provide methods of filling contact level features formed in a semiconductor device by depositing a barrier layer over the contact and then filing the contact using an PVD, CVD, ALD, electrochemical plating and/or electroless deposition processes. In one embodiment, the barrier layer contains catalytically active surface that allows the electroless deposition of a metal on the surface. In one aspect, the electrolessly deposited metal is copper or a copper alloy. In one embodiment, a method for depositing a material on a substrate includes positioning a substrate within a process chamber, exposing the substrate to at least one pretreatment step and filling the contact by an electroless deposition process. Embodiments of the invention provide a simplified method of filling contact level features formed in a semiconductor device, which include novel methods of forming a contact level feature that contains a silicide interface and a tungsten CVD deposited layer.
摘要翻译：本发明的实施例通常提供通过在接触件上沉积阻挡层然后使用PVD，CVD，ALD，电化学电镀和/或无电沉积工艺来填充接触来填充在半导体器件中形成的接触电平特征的方法。在一个实施方案中，阻挡层含有催化活性表面，其允许在表面上无电沉积金属。一方面，无电沉积金属是铜或铜合金。在一个实施例中，用于在衬底上沉积材料的方法包括将衬底定位在处理室内，将衬底暴露于至少一个预处理步骤，并通过无电镀沉积工艺填充接触。本发明的实施例提供了填充形成在半导体器件中的接触电平特征的简化方法，其包括形成包含硅化物界面和钨CVD沉积层的接触电平特征的新颖方法。

7. 发明申请

WO2009067475A1 CRYSTALLINE SOLAR CELL METALLIZATION METHODS 审中-公开
标题翻译：晶体太阳能电池金属化方法
公开(公告)号：WO2009067475A1
公开(公告)日：2009-05-28
申请号：PCT/US2008/083968
申请日：2008-11-19
申请人： APPLIED MATERIALS, INC. , WEIDMAN, Timothy W. , STEWART, Michael P. , WIJEKOON, Kapila P. , MISHRA, Rohit
发明人： WEIDMAN, Timothy W. , STEWART, Michael P. , WIJEKOON, Kapila P. , MISHRA, Rohit
IPC分类号： H02N6/00
CPC分类号： H01L31/022425 , Y02E10/50
摘要： Embodiments of the invention contemplate formation of a low cost solar cell using novel methods and apparatus to form a metal contact structure. The method generally uses a conductive contact layer that enables formation of a good electrical contact to the solar cell device. In one case, the contact layer is a nickel containing layer. Various deposition techniques may be used to form the metal contact structure.
摘要翻译：本发明的实施例考虑使用新颖的方法和装置形成金属接触结构来形成低成本太阳能电池。该方法通常使用能够形成与太阳能电池器件良好的电接触的导电接触层。在一种情况下，接触层是含镍层。可以使用各种沉积技术来形成金属接触结构。

8. 发明申请

WO2007121336A2 RELIABLE FUEL CELL ELECTRODE DESIGN 审中-公开
标题翻译：可靠的燃料电池电极设计
公开(公告)号：WO2007121336A2
公开(公告)日：2007-10-25
申请号：PCT/US2007/066596
申请日：2007-04-13
申请人： APPLIED MATERIALS, INC. , WEIDMAN, Timothy W. , ARMSTRONG, Karl J. , EAGLESHAM, David J. , KRISHNA, Nety , HOFMANN, Ralf , STEWART, Michael P.
发明人： WEIDMAN, Timothy W. , ARMSTRONG, Karl J. , EAGLESHAM, David J. , KRISHNA, Nety , HOFMANN, Ralf , STEWART, Michael P.
IPC分类号： H01M4/92 , H01M8/02 , H01M4/88
CPC分类号： H01M4/8867 , C23C28/321 , C23C28/322 , C23C28/34 , C23C28/3455 , H01M4/8817 , H01M4/92 , H01M8/0206 , H01M8/021 , H01M8/023 , H01M8/0236 , H01M8/0245 , H01M8/086 , H01M8/1004 , Y02P70/56
摘要： The present invention generally relates to the creation of fuel cell components and the method of forming the various fuel cell components that have an improved lifetime, lower production cost and improved process performance. The invention generally includes treating or conditioning a substrate surface by depositing a material layer, or layers, having good adhesion to the substrate, low electrical resistivity (high conductivity) and has good resistance to chemical attack during the operation of fuel cell. The substrate may be, for example, a fuel cell part, a conductive plate, a separator plate, a bipolar plate or an end plate, among others. In one embodiment, the substrate surface is treated or conditioned by exposing at least a portion of it to a gas or liquid comprising ruthenium tetroxide.
摘要翻译：本发明一般涉及燃料电池部件的制造和形成具有改善的寿命，降低生产成本和改进工艺性能的各种燃料电池部件的方法。本发明通常包括通过沉积对基材具有良好粘附性的材料层或低层电阻（高导电性）并且在燃料电池操作期间具有良好的抗化学侵蚀性能来处理或调理基材表面。基板可以是例如燃料电池部件，导电板，隔板，双极板或端板等。在一个实施方案中，通过将其至少一部分暴露于包含四氧化钌的气体或液体来处理或调理基底表面。

9. 发明申请

WO2013154796A1 STATIC DEPOSITION PROFILE MODULATION FOR LINEAR PLASMA SOURCE 审中-公开
标题翻译：线性等离子体源的静态沉积剖面调制
公开(公告)号：WO2013154796A1
公开(公告)日：2013-10-17
申请号：PCT/US2013/033093
申请日：2013-03-20
申请人： APPLIED MATERIALS, INC. , VELLAIKAL, Manoj , COX, Michael S. , MUNGEKAR, Hemant P. , WANG, Chikuang C. , ZHANG, Lin , PONNEKANTI, Hari K. , STEWART, Michael P. , HAMMOND, Edward P., IV , POLYAK, Alexander S.
发明人： VELLAIKAL, Manoj , COX, Michael S. , MUNGEKAR, Hemant P. , WANG, Chikuang C. , ZHANG, Lin , PONNEKANTI, Hari K. , STEWART, Michael P. , HAMMOND, Edward P., IV , POLYAK, Alexander S.
IPC分类号： H01L21/205 , H05H1/46 , C23C16/50
CPC分类号： C23C16/45565 , C23C16/45589 , C23C16/50 , C23C16/54
摘要： Methods and apparatus for controlling film deposition using a linear plasma source are described herein. The apparatus include a showerhead having openings therein for flowing a gas therethrough, a conveyor to support one or more substrates thereon disposed adjacent to the showerhead, and a power source for ionizing the gas. The ionized gas can be a source gas used to deposit a material on the substrate. The deposition profile of the material on the substrate can be adjusted, for example, using a gas-shaping device included in the apparatus. Additionally or alternatively, the deposition profile may be adjusted by using an actuatable showerhead. The method includes exposing a substrate to an ionized gas to deposit a film on the substrate, wherein the ionized gas is influenced with a gas-shaping device to uniformly deposit the film on the substrate as the substrate is conveyed proximate to the showerhead.
摘要翻译：本文描述了使用线性等离子体源来控制膜沉积的方法和装置。该装置包括：喷嘴，其中具有用于使气体流过其中的开口;输送机，用于支撑邻近喷头的一个或多个基板;以及用于使气体离子化的电源。电离气体可以是用于在衬底上沉积材料的源气体。可以例如使用包括在该装置中的气体成形装置来调整衬底上的材料的沉积轮廓。另外或替代地，沉积轮廓可以通过使用可启动喷头来调节。该方法包括将衬底暴露于离子化气体以在衬底上沉积膜，其中当衬底被输送到靠近喷头时，电离气体受到气体整形装置的影响，以将膜均匀地沉积在衬底上。

10. 发明申请

WO2010025262A2 BACK CONTACT SOLAR CELLS USING PRINTED DIELECTRIC BARRIER 审中-公开
标题翻译：返回联系使用印刷电介质的太阳能电池
公开(公告)号：WO2010025262A2
公开(公告)日：2010-03-04
申请号：PCT/US2009/055211
申请日：2009-08-27
申请人： APPLIED MATERIALS, INC. , WEIDMAN, Timothy W. , MISHRA, Rohit , STEWART, Michael P. , WIJEKOON, Kapila P. , CHA, Yonghwa Chris , HOLTAM, Tristan , SHAH, Vinay
发明人： WEIDMAN, Timothy W. , MISHRA, Rohit , STEWART, Michael P. , WIJEKOON, Kapila P. , CHA, Yonghwa Chris , HOLTAM, Tristan , SHAH, Vinay
IPC分类号： H01L31/042
CPC分类号： H01L21/67034 , G01T1/2018 , H01L21/225 , H01L21/306 , H01L21/308 , H01L21/67727 , H01L21/67736 , H01L21/67745 , H01L21/6776 , H01L31/022441 , H01L31/0516 , H01L31/0682 , H01L31/1804 , Y02E10/547 , Y02P70/521
摘要： Embodiments of the invention contemplate the formation of a high efficiency solar cell using novel methods to form the active doped region(s) and the metal contact structure of the solar cell device. In one embodiment, the methods include the steps of depositing a dielectric material that is used to define the boundaries of the active regions and/or contact structure of a solar cell device. Various techniques may be used to form the active regions of the solar cell and the metal contact structure.
摘要翻译：本发明的实施例考虑使用新的方法形成高效太阳能电池，以形成太阳能电池器件的有源掺杂区域和金属接触结构。在一个实施例中，所述方法包括沉积用于限定太阳能电池器件的有源区域和/或接触结构的边界的介电材料的步骤。可以使用各种技术来形成太阳能电池的有源区域和金属接触结构。

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