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1. 发明申请

WO2009032021A2 ELECTROPLATING ON ROLL-TO-ROLL FLEXIBLE SOLAR CELL SUBSTRATES 审中-公开
标题翻译：在滚动到滚动的柔性太阳能电池基板上进行电镀
公开(公告)号：WO2009032021A2
公开(公告)日：2009-03-12
申请号：PCT/US2007/085959
申请日：2007-11-29
申请人： APPLIED MATERIALS, INC. , LOPATIN, Sergey , EAGLESHAM, David , GAY, Charles
发明人： LOPATIN, Sergey , EAGLESHAM, David , GAY, Charles
IPC分类号： C23C14/00 , H01L31/042
CPC分类号： C25D5/022 , C25D5/18 , C25D7/08 , C25D17/00 , C25D17/001 , H01L31/022425 , H01L31/02245 , H01L31/022466 , H01L31/03926 , H01L31/0465 , H01L31/0508 , H01L31/0512 , H01L31/0516 , H01L31/188 , Y02E10/50
摘要： Embodiments of the invention contemplate the formation of a low cost flexible solar cell using a novel electroplating method and apparatus to form a metal contact structure. The apparatus and methods described herein remove the need to perform one or more high temperature screen printing processes to form conductive features on the surface of a solar cell substrate. The resistance of interconnects formed in a solar cell device greatly affects the efficiency of the solar cell. Solar cell substrates that may benefit from the invention include flexible substrates may have an active region that contains organic material, single crystal silicon, multi-crystalline silicon, polycrystalline silicon, germanium, and gallium arsenide, cadmium telluride, cadmium sulfide, copper indium gallium selenide, copper indium selenide, gallilium indium phosphide, as well as heterojunction cells that are used to convert sunlight to electrical power. The flexible substrates may have a flexible base that is adapted to support the active region of the solar cell device.
摘要翻译：本发明的实施例考虑使用新颖的电镀方法和装置形成金属接触结构来形成低成本的柔性太阳能电池。本文所述的装置和方法消除了执行一个或多个高温丝网印刷工艺以在太阳能电池基板的表面上形成导电特征的需要。在太阳能电池器件中形成的互连的电阻极大地影响太阳能电池的效率。可以受益于本发明的太阳能电池基板包括柔性基板可以具有含有有机材料，单晶硅，多晶硅，多晶硅，锗和砷化镓，碲化镉，硫化镉，铜铟镓硒的有源区，硒化铜铟锡，磷化铟镓，以及用于将阳光转换成电力的异质结电池。柔性基板可以具有适于支撑太阳能电池装置的有源区域的柔性基座。

2. 发明申请

WO2008070568A2 APPARATUS AND METHOD FOR ELECTROPLATING ON A SOLAR CELL SUBSTRATE 审中-公开
标题翻译：用于在太阳能电池基板上电镀的装置和方法
公开(公告)号：WO2008070568A2
公开(公告)日：2008-06-12
申请号：PCT/US2007/086145
申请日：2007-11-30
申请人： APPLIED MATERIALS, INC. , LOPATIN, Sergey , KOVARSKY, Nicolay Y. , EAGLESHAM, David , DUKOVIC, John O. , GAY, Charles
发明人： LOPATIN, Sergey , KOVARSKY, Nicolay Y. , EAGLESHAM, David , DUKOVIC, John O. , GAY, Charles
IPC分类号： C25D5/10 , C25D5/12 , H01L31/00
CPC分类号： H01L31/022425 , C23C28/021 , C23C28/023 , C23C28/025 , C23C28/028 , C23C28/321 , C23C28/322 , C23C28/3225 , C23C28/34 , C23C28/36 , C25D5/022 , C25D5/08 , C25D5/50 , C25D17/00 , C25D17/001 , C25D17/02 , C25D17/06 , Y02E10/50
摘要： Embodiments of the invention contemplate the formation of a low cost solar cell using a novel method and apparatus to form a metal contact structure having selectively formed metal lines using an electrochemical plating process. The apparatus and methods described herein remove the need to perform one or more high temperature screen printing processes to form conductive features on the surface of a solar cell substrate. The resistance of interconnects formed in a solar cell device greatly affects the efficiency of the solar cell. It is thus desirable to form a solar cell device that has a low resistance connection that is reliable and cost effective. Therefore, one or more embodiments of the invention described herein are adapted to form a low cost and reliable interconnecting layer using an electrochemical plating process containing a common metal, such as copper.
摘要翻译：本发明的实施例考虑使用新颖的方法和设备形成使用电化学电镀工艺形成具有选择性形成的金属线的金属接触结构的低成本太阳能电池。本文描述的设备和方法消除了执行一个或多个高温丝网印刷工艺以在太阳能电池基板的表面上形成导电特征的需要。在太阳能电池器件中形成的互连的电阻极大地影响了太阳能电池的效率。因此期望形成具有可靠且成本有效的低电阻连接的太阳能电池装置。因此，这里描述的本发明的一个或多个实施例适于使用包含诸如铜的常见金属的电化学电镀工艺形成低成本且可靠的互连层。

3. 发明申请

WO2008118222A2 SELECTIVE ELECTROLESS DEPOSITION FOR SOLAR CELLS 审中-公开
标题翻译：太阳能电池的选择性化学沉积
公开(公告)号：WO2008118222A2
公开(公告)日：2008-10-02
申请号：PCT/US2007/085873
申请日：2007-11-29
申请人： APPLIED MATERIALS, INC. , LOPATIN, Sergey , SHANMUGASUNDRAM, Arulkumar , BACHRACH, Robert, Z. , GAY, Charles , EAGLESHAM, David
发明人： LOPATIN, Sergey , SHANMUGASUNDRAM, Arulkumar , BACHRACH, Robert, Z. , GAY, Charles , EAGLESHAM, David
IPC分类号： H01L31/00
CPC分类号： H01L31/022425 , H01L31/022433 , H01L31/02245 , Y02E10/50
摘要： A metal contact structure of a solar cell substrate includes a contact with a conductive layer or a capping layer that is formed using an electroless plating process. The contact may be disposed within a hole formed through the solar cell substrate or on a non-light-receiving surface of the solar cell substrate. The electroless plating process for the conductive layer uses a seed layer that includes an activation layer for electroless plating.
摘要翻译：太阳能电池基板的金属接触结构包括与使用无电电镀工艺形成的导电层或覆盖层的接触。接触件可以设置在穿过太阳能电池基板形成的孔内或太阳能电池基板的非光接收表面上。用于导电层的化学镀工艺使用包括用于化学镀的活化层的晶种层。

4. 发明申请

WO2008070528A2 PRECISION PRINTING ELECTROPLATING THROUGH PLATING MASK ON A SOLAR CELL SUBSTRATE 审中-公开
标题翻译：精密印刷通过太阳能电池基板上的电镀掩模进行电镀
公开(公告)号：WO2008070528A2
公开(公告)日：2008-06-12
申请号：PCT/US2007/085963
申请日：2007-11-29
申请人： APPLIED MATERIALS, INC. , LOPATIN, Sergey , DUKOVIC, John O. , EAGLESHAM, David , KOVARSKY, Nicolay Y. , BACHRACH, Robert , BUSCH, John , GAY, Charles
发明人： LOPATIN, Sergey , DUKOVIC, John O. , EAGLESHAM, David , KOVARSKY, Nicolay Y. , BACHRACH, Robert , BUSCH, John , GAY, Charles
IPC分类号： B05C13/02 , H01L21/469
CPC分类号： H01L31/022425 , H01L31/02008 , Y02E10/50
摘要： Embodiments of the invention contemplate the formation of a low cost solar cell using a novel electroplating apparatus and method to form a metal contact structure having metal lines formed using an electrochemical plating process. The apparatus and methods described herein remove the need to perform the often costly processing steps of performing a mask preparation and formation steps, such as screen printing, lithographic steps and inkjet printing steps, to form a contact structure. The resistance of interconnects formed in a solar cell device greatly affects the efficiency of the solar cell. It is thus desirable to form a solar cell device that has a low resistance connection that is reliable and cost effective. Therefore, one or more embodiments of the invention described herein are adapted to form a low cost and reliable interconnecting layer using an electrochemical plating process containing a common metal, such as copper. Embodiments of the invention may provide an apparatus and method of forming a solar cell device that utilizes a reusable masking device during one or more electrochemical deposition steps.
摘要翻译：本发明的实施例考虑使用新型电镀设备和方法形成低成本太阳能电池，以形成具有使用电化学电镀工艺形成的金属线的金属接触结构。本文描述的装置和方法不需要执行经常昂贵的处理步骤来执行掩模准备和形成步骤，例如丝网印刷，光刻步骤和喷墨印刷步骤，以形成接触结构。在太阳能电池器件中形成的互连的电阻极大地影响太阳能电池的效率。因此，希望形成具有可靠和成本有效的低电阻连接的太阳能电池装置。因此，本文描述的本发明的一个或多个实施例适用于使用包含普通金属（例如铜）的电化学电镀工艺形成低成本且可靠的互连层。本发明的实施例可以提供一种形成在一个或多个电化学沉积步骤期间利用可重复使用的掩模装置的太阳能电池装置的装置和方法。

5. 发明申请

WO2008070290A1 PULSE PLATING OF A LOW STRESS FILM ON A SOLAR CELL SUBSTRATE 审中-公开
标题翻译：在太阳能电池基板上的低应力膜的脉冲电镀
公开(公告)号：WO2008070290A1
公开(公告)日：2008-06-12
申请号：PCT/US2007/081530
申请日：2007-10-16
申请人： APPLIED MATERIALS, INC. , LOPATIN, Sergey , GAY, Charles , EAGLESHAM, David , DUKOVIC, John O. , KOVARSKY, Nicolay Y.
发明人： LOPATIN, Sergey , GAY, Charles , EAGLESHAM, David , DUKOVIC, John O. , KOVARSKY, Nicolay Y.
IPC分类号： H01L31/00
CPC分类号： H01L31/022425 , H01L31/02245 , Y02E10/50
摘要： Embodiments of the invention contemplate the formation of a low cost solar cell metal contact structure that has improved electrical and mechanical properties through the use of an electrochemical plating process. The resistance of interconnects formed in a solar cell device greatly affects the efficiency of the solar cell. It is thus desirable to form a solar cell device that has a low resistance connections that is reliable and cost effective. One or more embodiments of the invention described herein are adapted to form a low cost and reliable interconnecting layer using an electrochemical plating process containing common metal, such as copper. However, generally the electroplated portions of the interconnecting layer may contain a substantially pure metal or a metal alloy layer. Methods are discussed herein that are used to form a solar cell containing conductive metal interconnect layer(s) that have a low intrinsic stress.
摘要翻译：本发明的实施例考虑到通过使用电化学电镀工艺形成具有改善的电气和机械性能的低成本太阳能电池金属接触结构。在太阳能电池器件中形成的互连的电阻极大地影响太阳能电池的效率。因此，希望形成具有可靠和成本有效的低电阻连接的太阳能电池装置。使用本文所述的本发明的一个或多个实施例适用于使用包含普通金属（例如铜）的电化学电镀工艺形成低成本且可靠的互连层。然而，通常互连层的电镀部分可以包含基本上纯的金属或金属合金层。本文讨论了用于形成含有具有低固有应力的导电金属互连层的太阳能电池的方法。

6. 发明申请

WO2012068559A2 FACTORY LEVEL PROCESS AND FINAL PRODUCT PERFORMANCE CONTROL SYSTEM 审中-公开
标题翻译：工厂级工艺和最终产品性能控制系统
公开(公告)号：WO2012068559A2
公开(公告)日：2012-05-24
申请号：PCT/US2011/061549
申请日：2011-11-18
申请人： APPLIED MATERIALS, INC. , PARIKH, Suketu, Arun , SCHWARM, Alexander, T. , MITTAL, Sanjiv , GAY, Charles
发明人： PARIKH, Suketu, Arun , SCHWARM, Alexander, T. , MITTAL, Sanjiv , GAY, Charles
IPC分类号： G05B19/418
CPC分类号： G05B19/41875 , G05B2219/32182 , Y02P90/12 , Y02P90/18 , Y02P90/22
摘要： A factory control server stores module configuration data for a plurality of modules. The plurality of modules comprises processes for producing a final product and has corresponding module requirements. The factory control server analyzes in real-time actual product output data that is generated by a final product tester after a factory produces at least one final product to determine whether the actual product output data meets an expected product output. The factory control server analyzes actual module data in real-time to determine a new module requirement to cause new actual product output data for a subsequent final product to meet the expected product output in response to a determination that the actual product output data does not meet the expected product output. The factory control server notifies a module controller in real-time of the new module requirement, wherein the module controller changes parameters in real-time to manufacture the subsequent final product using the new module requirement.
摘要翻译：工厂控制服务器存储多个模块的模块配置数据。多个模块包括用于生产最终产品的过程并且具有相应的模块要求。工厂控制服务器在工厂生产至少一个最终产品之后分析由最终产品测试者生成的实时实际产品输出数据，以确定实际产品输出数据是否满足预期的产品输出。工厂控制服务器实时分析实际的模块数据，以确定新的模块要求，以便随后的最终产品产生新的实际产品输出数据以满足预期的产品输出以响应确定实际的产品输出数据不符合预期产品产量。工厂控制服务器实时通知模块控制器新模块要求，其中模块控制器实时更改参数，以使用新的模块要求制造后续最终产品。

7. 发明申请

WO2010144551A3 CARBON NANOTUBE-BASED SOLAR CELLS 审中-公开
公开(公告)号：WO2010144551A3
公开(公告)日：2010-12-16
申请号：PCT/US2010/037937
申请日：2010-06-09
申请人： APPLIED MATERIALS, INC. , NALAMASU, Omkaram , GAY, Charles , PUSHPARAJ, Victor L. , SINGH, Kaushal K. , VISSER, Robert J. , FOAD, Majeed A. , HOFMANN, Ralf
发明人： NALAMASU, Omkaram , GAY, Charles , PUSHPARAJ, Victor L. , SINGH, Kaushal K. , VISSER, Robert J. , FOAD, Majeed A. , HOFMANN, Ralf
IPC分类号： H01L31/042
摘要： Solar cells are provided with carbon nanotubes (CNTs) which are used: to define a micron/sub-micron geometry of the solar cells; and/or as charge transporters for efficiently removing charge carriers from the absorber layer to reduce the rate of electron-hole recombination in the absorber layer. A solar cell may comprise: a substrate; a multiplicity of areas of metal catalyst on the surface of the substrate; a multiplicity of carbon nanotube bundles formed on the multiplicity of areas of metal catalyst, each bundle including carbon nanotubes aligned roughly perpendicular to the surface of the substrate; and a photoactive solar cell layer formed over the carbon nanotube bundles and exposed surfaces of the substrate, wherein the photoactive solar cell layer is continuous over the carbon nanotube bundles and the exposed surfaces of the substrate. The photoactive solar cell layer may be comprised of amorphous silicon p/i/n thin films; although, concepts of the present invention are also applicable to solar cells with absorber layers of microcrystalline silicon, SiGe, carbon doped microcrystalline silicon, CIS, CIGS, CISSe and various p-type II-VI binary compounds and ternary and quaternary compounds.

8. 发明申请

WO2011143449A2 METHOD OF MANUFACTURING CRYSTALLINE SILICON SOLAR CELLS USING EPITAXIAL DEPOSITION 审中-公开
标题翻译：使用外延沉积法制造晶体硅太阳能电池的方法
公开(公告)号：WO2011143449A2
公开(公告)日：2011-11-17
申请号：PCT/US2011/036279
申请日：2011-05-12
申请人： APPLIED MATERIALS, INC. , GEE, James M. , GAY, Charles , PATIBANDLA, Nag B. , NALAMASU, Omkaram , SINGH, Kaushal K.
发明人： GEE, James M. , GAY, Charles , PATIBANDLA, Nag B. , NALAMASU, Omkaram , SINGH, Kaushal K.
IPC分类号： H01L31/042 , H01L31/18 , H01L31/0236
CPC分类号： H01L31/1804 , H01L31/022441 , H01L31/0682 , H01L31/1892 , Y02E10/547 , Y02P70/521
摘要： Embodiments of the invention provide a thin single crystalline silicon film solar cell and methods of forming the same. The method includes forming a thin single crystalline silicon layer on a silicon growth substrate, followed by forming front or rear solar cell structures on and/or in the thin single crystalline silicon film. The method also includes attaching the thin single crystalline silicon film to a mechanical carrier and then separating the growth substrate from the thin single crystalline silicon film along a cleavage plane formed between the growth substrate and the thin single crystalline silicon film. Front or rear solar cell structures are then formed on and/or in the thin single crystalline silicon film opposite the mechanical carrier to complete formation of the solar cell.
摘要翻译：本发明的实施例提供一种薄单晶硅膜太阳能电池及其形成方法。该方法包括在硅生长衬底上形成薄的单晶硅层，随后在薄的单晶硅膜上和/或上形成前或后太阳能电池结构。该方法还包括将薄单晶硅膜附着到机械载体上，然后沿生长衬底和薄单晶硅膜之间形成的解理平面从薄单晶硅膜分离生长衬底。然后在与机械载体相对的薄单晶硅膜上和/或上形成正面或背面的太阳能电池结构，以完成太阳能电池的形成。

9. 发明申请

WO2009029902A1 PHOTOVOLTAIC PRODUCTION LINE 审中-公开
标题翻译：光伏生产线
公开(公告)号：WO2009029902A1
公开(公告)日：2009-03-05
申请号：PCT/US2008/074931
申请日：2008-08-29
申请人： APPLIED MATERIALS, INC. , BACHRACH, Robert Z. , CHAE, Yong-Kee , CHOI, Soo Young , DE VRIES, Nicholas G. J. , ELGAR, Yacov , ENGLHARDT, Eric A. , FREI, Michel R. , GAY, Charles , HAWKINS, Parris , HO, Choi , HUNTER, James Craig , KANKANALA, Penchala N. , LI, Liwei , LO, Wing Hoo , LU, Danny Cam Toan , MEI, Fang , MURPHY, Stephen P. , PATEL, Srujal , SAUNDERS, Matthew J. B. , SCHLEZINGER, Asaf , SHENG, Shuran , SU, Tzay-Fa , SULLIVAN, Jeffrey S. , TANNER, David , TROWBRIDGE, Teresa , WALKER, Brice , WHITE, John M. , WON, Tae K.
发明人： BACHRACH, Robert Z. , CHAE, Yong-Kee , CHOI, Soo Young , DE VRIES, Nicholas G. J. , ELGAR, Yacov , ENGLHARDT, Eric A. , FREI, Michel R. , GAY, Charles , HAWKINS, Parris , HO, Choi , HUNTER, James Craig , KANKANALA, Penchala N. , LI, Liwei , LO, Wing Hoo , LU, Danny Cam Toan , MEI, Fang , MURPHY, Stephen P. , PATEL, Srujal , SAUNDERS, Matthew J. B. , SCHLEZINGER, Asaf , SHENG, Shuran , SU, Tzay-Fa , SULLIVAN, Jeffrey S. , TANNER, David , TROWBRIDGE, Teresa , WALKER, Brice , WHITE, John M. , WON, Tae K.
IPC分类号： G06F7/10 , H01L31/06 , H01L21/4763
CPC分类号： H01L21/67236 , B23K26/364 , B26F3/002 , B26F3/004 , B65G49/064 , B65G2249/02 , B65G2249/04 , C03B33/03 , C03B33/033 , H01L21/67132 , H01L21/67712 , H01L21/67715 , H01L21/67721 , H01L21/67727 , H01L21/6776 , H01L31/022425 , H01L31/03921 , H01L31/0504 , H01L31/075 , H02S50/00 , H02S50/10 , Y02E10/548 , Y02P40/57 , Y10T29/49002 , Y10T29/49355 , Y10T29/5196 , Y10T29/53113 , Y10T29/5313 , Y10T29/5317 , Y10T29/53187 , Y10T29/53365 , Y10T29/53417 , Y10T225/10 , Y10T225/325 , Y10T225/329
摘要： The present invention relates to a system that can be used to form a photovoltaic device using processing modules that are adapted to perform steps in the solar cell formation process The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.
摘要翻译：本发明涉及一种可用于使用处理模块来形成光伏器件的系统，所述处理模块适于在太阳能电池形成过程中执行步骤。自动化太阳能电池制造厂通常是自动化处理模块和用于形成太阳能电池器件的自动化设备。因此，自动化太阳能加工厂通常将包括适于接纳衬底的衬底接收模块，具有至少一个处理室的一个或多个吸收层沉积群集工具，该处理室适于在衬底的表面上沉积含硅层，一个或多个背接触沉积室，一个或多个材料去除室，太阳能电池封装装置，高压灭菌器模块，自动化接线盒附接模块，以及一个或多个质量保证模块，其适于测试和限定完全形成太阳能电池装置。

10. 发明申请

WO2010025269A1 BACK CONTACT SOLAR CELL MODULES 审中-公开
标题翻译：返回联系太阳能电池模块
公开(公告)号：WO2010025269A1
公开(公告)日：2010-03-04
申请号：PCT/US2009/055218
申请日：2009-08-27
申请人： APPLIED MATERIALS, INC. , WEIDMAN, Timothy W. , GAY, Charles , GUO, Hsiu-Wu , MISHRA, Rohit , WIJEKOON, Kapila P. , MUNGEKAR, Hemant P.
发明人： WEIDMAN, Timothy W. , GAY, Charles , GUO, Hsiu-Wu , MISHRA, Rohit , WIJEKOON, Kapila P. , MUNGEKAR, Hemant P.
IPC分类号： H01L31/042
CPC分类号： H01L31/022441 , H01L31/02245 , H01L31/0516 , H01L31/0682 , Y02E10/547
摘要： Embodiments of the invention contemplate the formation of a high efficiency solar cell using a novel processing sequence to form a solar cell device. Methods of forming the high efficiency solar cell may include the use of a pre-fabricated back plane that is bonded to the metalized solar cell device to form an interconnected solar cell module. Solar cells most likely to benefit from the invention including those having active regions comprising single or multicrystalline silicon with both positive and negative contacts on the rear side of the cell.
摘要翻译：本发明的实施例考虑使用新颖的处理顺序形成高效太阳能电池来形成太阳能电池装置。形成高效率太阳能电池的方法可以包括使用结合到金属化太阳能电池器件的预制背板来形成互连的太阳能电池模块。最有可能受益于本发明的太阳能电池，包括那些具有活性区域的太阳能电池，所述活性区域包括在电池背面具有正触点和负极的单晶硅或多晶硅。

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