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1. 发明申请

WO2017005290A8 CARRIER FOR SUPPORTING AT LEAST ONE SUBSTRATE DURING A SPUTTER DEPOSITION PROCESS, APPARATUS FOR SPUTTER DEPOSITION ON AT LEAST ONE SUBSTRATE, AND METHOD FOR SPUTTER DEPOSITION ON AT LEAST ONE SUBSTRATE 审中-公开
标题翻译：用于在至少一个基板上支撑至少一个基板的载体，用于至少一个基板上的溅射沉积的设备以及用于在至少一个基板上溅射沉积的方法
公开(公告)号：WO2017005290A8
公开(公告)日：2017-01-12
申请号：PCT/EP2015/065366
申请日：2015-07-06
申请人： APPLIED MATERIALS, INC. , KELLER, Stefan , BRÜNING, Andre , SCHÜßLER, Uwe , ZILBAUER, Thomas Werner , BANGERT, Stefan
发明人： KELLER, Stefan , BRÜNING, Andre , SCHÜßLER, Uwe , ZILBAUER, Thomas Werner , BANGERT, Stefan
IPC分类号： C23C14/50 , C23C14/56 , H01J37/32 , C23C14/34
摘要： A carrier (100) for supporting at least one substrate during a sputter deposition process is provided. The carrier (100) includes a carrier body (102) and an insulating portion provided at the carrier body (102). The insulating portion provides a surface (103) of an electrically insulating material, wherein the surface (103) is configured to face one or more sputter deposition sources during the sputter deposition process.
摘要翻译：提供了用于在溅射沉积过程期间支撑至少一个衬底的载体（100）。载体（100）包括载体主体（102）和设置在载体主体（102）处的绝缘部分。绝缘部分提供电绝缘材料的表面（103），其中表面（103）被配置为在溅射沉积工艺期间面向一个或多个溅射沉积源。

2. 发明申请

WO2015074725A1 SUBSTRATE CARRIER FOR A REDUCED TRANSMISSION OF THERMAL ENERGY 审中-公开
标题翻译：用于减少热能传输的基板载体
公开(公告)号：WO2015074725A1
公开(公告)日：2015-05-28
申请号：PCT/EP2013/074604
申请日：2013-11-25
申请人： APPLIED MATERIALS, INC. , LOPP, Andreas Ewald , KELLER, Stefan , SCHÜßLER, Uwe , BANGERT, Stefan , GEBELE, Thomas , SPATZ, Norbert
发明人： LOPP, Andreas Ewald , KELLER, Stefan , SCHÜßLER, Uwe , BANGERT, Stefan , GEBELE, Thomas , SPATZ, Norbert
IPC分类号： H01L21/673
CPC分类号： H01J37/32724 , C23C14/50 , C23C16/4581 , H01J2237/3321 , H01J2237/3323 , H01L21/67316 , H01L21/67346 , H01L31/1876 , H01L31/1896
摘要： According to the present disclosure, a semiconductor substrate handling systems and substrate carrier is provided. The substrate carrier for holding a substrate to be processed and for transporting the substrate in or through a processing area with a transport device includes a main portion for holding the substrate; a first end portion adapted to be supported by the transport device; and at least one first intermediate portion connecting the main portion with the first end portion. The at least one first intermediate portion includes one or more cut-outs adapted to reduce thermal energy transfer between the main portion and the first end portion.
摘要翻译：根据本公开，提供了半导体衬底处理系统和衬底载体。用于保持待处理的基板和用于在输送装置中或通过处理区域传送基板的基板载体包括用于保持基板的主要部分; 适于由所述运送装置支撑的第一端部; 以及将主要部分与第一端部连接起来的至少一个第一中间部分。所述至少一个第一中间部分包括一个或多个切口，其适于减小主体部分和第一端部部分之间的热能传递。

3. 发明申请

WO2015086049A1 EVAPORATION SOURCE FOR ORGANIC MATERIAL, APPARATUS HAVING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL, SYSTEM HAVING AN EVAPORATION DEPOSITION APPARATUS WITH AN EVAPORATION SOURCE FOR ORGANIC MATERIALS, AND METHOD FOR OPERATING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL 审中-公开
标题翻译：有机材料的蒸发源，有机材料蒸发源的装置，有机材料蒸发源的蒸发沉积装置的系统，以及有机材料的蒸发源操作方法
公开(公告)号：WO2015086049A1
公开(公告)日：2015-06-18
申请号：PCT/EP2013/076120
申请日：2013-12-10
申请人： APPLIED MATERIALS, INC. , BANGERT, Stefan , SCHÜßLER, Uwe , DIEGUEZ-CAMPO, Jose Manuel , HAAS, Dieter
发明人： BANGERT, Stefan , SCHÜßLER, Uwe , DIEGUEZ-CAMPO, Jose Manuel , HAAS, Dieter
IPC分类号： C23C14/04 , C23C14/12 , C23C14/56 , C23C14/24 , B05D3/04 , B05D1/02 , B05D1/00 , H01L51/00 , H01L51/56 , C23C16/44
CPC分类号： C23C14/243 , C23C14/042 , C23C14/12 , C23C14/246 , C23C14/50 , C23C14/56 , C23C14/562 , C23C14/564 , C23C14/566 , H01L51/001 , H01L51/0011 , H01L51/56
摘要： An evaporation source for organic material is described. The evaporation source includes an evaporation crucible, wherein the evaporation crucible is configured to evaporate the organic material; a distribution pipe with one or more outlets, wherein the distribution pipe is in fluid communication with the evaporation crucible and wherein the distribution pipe is rotatable around an axis during evaporation; and a support for the distribution pipe, wherein the support is connectable to a first drive or includes the first drive, wherein the first drive is configured for a translational movement of the support and the distribution pipe.
摘要翻译：描述了有机材料的蒸发源。蒸发源包括蒸发坩埚，其中蒸发坩埚构造成蒸发有机材料; 具有一个或多个出口的分配管，其中所述分配管与所述蒸发坩埚流体连通，并且其中所述分配管可以在蒸发期间围绕轴线旋转; 以及对所述分配管的支撑件，其中所述支撑件可连接到第一驱动器或包括所述第一驱动器，其中所述第一驱动器构造成用于所述支撑件和所述分配管的平移运动。

4. 发明申请

WO2015082022A1 DEPOSITING ARRANGEMENT, DEPOSITION APPARATUS AND METHODS OF OPERATION THEREOF 审中-公开
标题翻译：沉积布置，沉积装置及其操作方法
公开(公告)号：WO2015082022A1
公开(公告)日：2015-06-11
申请号：PCT/EP2013/075850
申请日：2013-12-06
申请人： APPLIED MATERIALS, INC. , SCHÜßLER, Uwe , BANGERT, Stefan , KEIM, Karl-Albert , DIEGUEZ-CAMPO, Jose Manuel
发明人： SCHÜßLER, Uwe , BANGERT, Stefan , KEIM, Karl-Albert , DIEGUEZ-CAMPO, Jose Manuel
IPC分类号： C23C14/14 , C23C14/24 , C23C14/54 , B01D1/00
CPC分类号： C23C14/14 , B01D1/0064 , B01D1/0082 , C23C14/24 , C23C14/246 , C23C14/542 , C23C14/545
摘要： A depositing arrangement for evaporation of a material including an alkali metal or alkaline earth metal, and for deposition of the material on a substrate is described. The depositing arrangement includes a first chamber configured for liquefying the material, wherein the first chamber comprises a gas inlet configured for inlet of a gas in the first chamber, an evaporation zone configured for vaporizing the liquefied material, a line providing a fluid communication between the first chamber and the evaporation zone for the liquefied material, wherein the line includes a first portion defining a flow resistance of the line, a valve configured for controlling the flow rate of the gas in the first chamber for controlling a flow rate of the liquefied material through the line having said flow resistance, and one or more outlets for directing the vaporized material towards the substrate.
摘要翻译：描述了用于蒸发包括碱金属或碱土金属的材料并用于将材料沉积在基底上的沉积布置。沉积装置包括被配置用于液化材料的第一室，其中第一室包括构造成用于第一室中的气体入口的气体入口，被配置为蒸发液化材料的蒸发区，第一室和用于液化材料的蒸发区，其中所述管线包括限定管线的流动阻力的第一部分，被配置为控制第一室中的气体的流量以控制液化材料的流量的阀通过具有所述流动阻力的管线，以及用于将蒸发的材料引向衬底的一个或多个出口。

5. 发明公开

EP3080327A1 EVAPORATION SOURCE FOR ORGANIC MATERIAL, APPARATUS HAVING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL, SYSTEM HAVING AN EVAPORATION DEPOSITION APPARATUS WITH AN EVAPORATION SOURCE FOR ORGANIC MATERIALS, AND METHOD FOR OPERATING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL 审中-公开
标题翻译：有机材料的蒸发源，用一个膨胀源用于操作有机材料的蒸发源有机材料和方法通过扩展分离装置有机材料系统的扩展源设备
公开(公告)号：EP3080327A1
公开(公告)日：2016-10-19
申请号：EP13802641.4
申请日：2013-12-10
申请人： Applied Materials, Inc.
发明人： BANGERT, Stefan , SCHÜßLER, Uwe , DIEGUEZ-CAMPO, Jose Manuel , HAAS, Dieter
IPC分类号： C23C14/04 , C23C14/12 , C23C14/56 , C23C14/24 , B05D3/04 , B05D1/02 , B05D1/00 , H01L51/00 , H01L51/56 , C23C16/44
CPC分类号： C23C14/243 , C23C14/042 , C23C14/12 , C23C14/246 , C23C14/50 , C23C14/56 , C23C14/562 , C23C14/564 , C23C14/566 , H01L51/001 , H01L51/0011 , H01L51/56
摘要： An evaporation source for organic material is described. The evaporation source includes an evaporation crucible, wherein the evaporation crucible is configured to evaporate the organic material; a distribution pipe with one or more outlets, wherein the distribution pipe is in fluid communication with the evaporation crucible and wherein the distribution pipe is rotatable around an axis during evaporation; and a support for the distribution pipe, wherein the support is connectable to a first drive or includes the first drive, wherein the first drive is configured for a translational movement of the support and the distribution pipe.
摘要翻译：对于有机材料的蒸发源进行说明。蒸发源包括在蒸发坩锅，worin所述蒸发坩锅是被配置为蒸发有机材料; 与一个或多个出口的分配管，worin分配管与所述蒸发坩锅流体连通，并且worin分配管是蒸发期间围绕可旋转的基座上轴; 和用于分配管的支撑件，worin支承可连接到第一驱动器或包括所述第一驱动器，worin第一驱动器被配置为支撑的平移运动和分配管。

6. 发明公开

EP3320125A1 CARRIER FOR SUPPORTING AT LEAST ONE SUBSTRATE DURING A SPUTTER DEPOSITION PROCESS, APPARATUS FOR SPUTTER DEPOSITION ON AT LEAST ONE SUBSTRATE, AND METHOD FOR SPUTTER DEPOSITION ON AT LEAST ONE SUBSTRATE 审中-公开
标题翻译：用于在至少一个基板上支撑至少一个基板的载体，用于至少一个基板上的溅射沉积的设备以及用于在至少一个基板上溅射沉积的方法
公开(公告)号：EP3320125A1
公开(公告)日：2018-05-16
申请号：EP15739534.4
申请日：2015-07-06
申请人： Applied Materials, Inc.
发明人： KELLER, Stefan , BRÜNING, Andre , SCHÜßLER, Uwe , ZILBAUER, Thomas Werner , BANGERT, Stefan
IPC分类号： C23C14/50 , C23C14/56 , H01J37/32 , C23C14/34
CPC分类号： C23C14/50 , C23C14/34 , C23C14/562 , C23C14/564 , H01J37/32715 , H01J37/34 , H01M10/052 , H01M10/0562
摘要： A carrier for supporting at least one substrate during a sputter deposition process is provided. The carrier includes a carrier body and an insulating portion provided at the carrier body. The insulating portion provides a surface of an electrically insulating material, wherein the surface is configured to face one or more sputter deposition sources during the sputter deposition process.

7. 发明公开

EP3187618A1 EVAPORATION SOURCE FOR ORGANIC MATERIAL, DEPOSITION APPARATUS FOR DEPOSITING ORGANIC MATERIALS IN A VACUUM CHAMBER HAVING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL, AND METHOD FOR EVAPORATING ORGANIC MATERIAL 审中-公开
标题翻译：用于有机材料蒸发源，用于在具有有机材料蒸发源的真空室中沉积有机材料的沉积设备以及用于蒸发有机材料的方法
公开(公告)号：EP3187618A1
公开(公告)日：2017-07-05
申请号：EP17150278.4
申请日：2013-12-10
申请人： Applied Materials, Inc.
发明人： BANGERT, Stefan , SCHÜßLER, Uwe , DIEGUEZ-CAMPO, Jose Manuel , HAAS, Dieter
IPC分类号： C23C14/04 , C23C14/12 , C23C14/56 , C23C14/24 , B05D3/04 , B05D1/02 , B05D1/00 , H01L51/00 , H01L51/56 , C23C16/44
CPC分类号： C23C14/243 , C23C14/042 , C23C14/12 , C23C14/246 , C23C14/50 , C23C14/56 , C23C14/562 , C23C14/564 , C23C14/566 , H01L51/001 , H01L51/0011 , H01L51/56
摘要： An evaporation source for organic material is described. The evaporation source includes an evaporation crucible, wherein the evaporation crucible is configured to evaporate the organic material; a distribution pipe with one or more outlets, wherein the distribution pipe is in fluid communication with the evaporation crucible and wherein the distribution pipe is rotatable around an axis during evaporation; and at least one side shield for shielding the organic material.
摘要翻译：描述了有机材料的蒸发源。蒸发源包括蒸发坩埚，其中蒸发坩埚配置为蒸发有机材料; 具有一个或多个出口的分配管，其中分配管与蒸发坩埚流体连通，并且其中分配管在蒸发期间可围绕轴旋转; 以及用于屏蔽有机材料的至少一个侧屏蔽。

8. 发明公开

EP3215650A1 MATERIAL SOURCE ARRANGMENT AND NOZZLE FOR VACUUM DEPOSITION 审中-公开
标题翻译：用于真空沉积的材料源布置和喷嘴
公开(公告)号：EP3215650A1
公开(公告)日：2017-09-13
申请号：EP14796078.5
申请日：2014-11-07
申请人： Applied Materials, Inc.
发明人： BANGERT, Stefan , SCHÜßLER, Uwe , DIEGUEZ-CAMPO, Jose Manuel
IPC分类号： C23C14/12 , C23C14/56 , C23C16/455 , C23C14/24
CPC分类号： C23C14/24 , C23C14/12 , C23C14/562 , C23C16/45578
摘要： A material source arrangement for depositing a material on a substrate in a vacuum deposition chamber is described. The material source arrangement includes a distribution pipe being configured to be in fluid communication with a material source providing the material to the distribution pipe; and at least one nozzle configured for guiding the material provided in the distribution pipe to the vacuum deposition chamber. The nozzle includes a thread for repeatedly connecting and disconnecting the nozzle to the distribution pipe. Further, a deposition apparatus for depositing material on a substrate including a material source arrangement, a nozzle for a material source arrangement, and a method for providing a distribution pipe and a nozzle for a material source arrangement are described.
摘要翻译：描述了用于在真空沉积室（110）中的基底（121）上沉积材料的材料源装置（100）。所述材料源装置包括分配管（106），所述分配管（106）被构造成与将所述材料提供到所述分配管（106）的材料源（102）流体连通; 和至少一个喷嘴（200; 712），所述喷嘴被构造成用于将设置在分配管（106）中的材料引导至真空沉积室（110）。喷嘴（200; 712）包括用于重复地将喷嘴连接到分配管和将喷嘴与分配管断开的螺纹。此外，用于在包括材料源装置，用于材料源装置的喷嘴以及用于提供分配管（106）和喷嘴（200; 712）的方法的基板（121）上沉积材料的沉积装置（300）描述了材料源装置（100）。

9. 发明公开

EP3077567A1 DEPOSITING ARRANGEMENT, DEPOSITION APPARATUS AND METHODS OF OPERATION THEREOF 有权
标题翻译： VERDAMPFUNGSANORDNUNG，ABSCHEIDUNGSVORRICHTUNG UND VERFAHREN ZUM BETRIEB DAVON
公开(公告)号：EP3077567A1
公开(公告)日：2016-10-12
申请号：EP13814860.6
申请日：2013-12-06
申请人： Applied Materials, Inc.
发明人： SCHÜßLER, Uwe , BANGERT, Stefan , KEIM, Karl-Albert , DIEGUEZ-CAMPO, Jose Manuel
IPC分类号： C23C14/14 , C23C14/24 , C23C14/54 , B01D1/00
CPC分类号： C23C14/14 , B01D1/0064 , B01D1/0082 , C23C14/24 , C23C14/246 , C23C14/542 , C23C14/545
摘要： A depositing arrangement for evaporation of a material including an alkali metal or alkaline earth metal, and for deposition of the material on a substrate is described. The depositing arrangement includes a first chamber configured for liquefying the material, wherein the first chamber comprises a gas inlet configured for inlet of a gas in the first chamber, an evaporation zone configured for vaporizing the liquefied material, a line providing a fluid communication between the first chamber and the evaporation zone for the liquefied material, wherein the line includes a first portion defining a flow resistance of the line, a valve configured for controlling the flow rate of the gas in the first chamber for controlling a flow rate of the liquefied material through the line having said flow resistance, and one or more outlets for directing the vaporized material towards the substrate.
摘要翻译：描述了用于蒸发包括碱金属或碱土金属的材料并用于将材料沉积在基底上的沉积布置。沉积装置包括被配置用于液化材料的第一室，其中第一室包括构造成用于第一室中的气体入口的气体入口，被配置为蒸发液化材料的蒸发区，第一室和用于液化材料的蒸发区，其中所述管线包括限定管线的流动阻力的第一部分，构造成用于控制第一室中的气体的流量以控制液化材料的流量的阀通过具有所述流动阻力的管线，以及一个或多个用于将蒸发的材料引向衬底的出口。

10. 发明授权

EP3066679B1 RADIO FREQUENCY (RF) - SPUTTER DEPOSITION SOURCE, DEPOSITION APPARATUS AND METHOD OF ASSEMBLING THEREOF 有权
公开(公告)号：EP3066679B1
公开(公告)日：2020-04-15
申请号：EP13789244.4
申请日：2013-11-05
申请人： Applied Materials, Inc.
发明人： KELLER, Stefan , SCHÜßLER, Uwe , HAAS, Dieter , BANGERT, Stefan
IPC分类号： H01J37/32 , H01J37/34

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