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1. 发明申请

WO2018166619A1 MATERIAL DEPOSITION ARRANGEMENT, VACUUM DEPOSITION SYSTEM AND METHODS THEREFOR 审中-公开
公开(公告)号：WO2018166619A1
公开(公告)日：2018-09-20
申请号：PCT/EP2017/056377
申请日：2017-03-17
申请人： APPLIED MATERIALS, INC. , DIEGUEZ-CAMPO, Jose Manuel , WURSTER, Harald , SCHÜSSLER, Uwe
发明人： DIEGUEZ-CAMPO, Jose Manuel , WURSTER, Harald , SCHÜSSLER, Uwe
IPC分类号： C23C14/24
摘要： A material deposition arrangement (100) for depositing a material on a substrate in a vacuum deposition chamber is described. The material deposition arrangement (1 00) includes at least one material deposition source (105) having a crucible (110) configured to evaporate the material, a distribution assembly (120) configured for providing the evaporated material to the substrate, and a force application device (130) configured for applying a contact force at a connection (112) between the crucible (110) and the distribution assembly (120).

2. 发明申请

WO2016138964A1 NOZZLE FOR A MATERIAL SOURCE ARRANGEMENT USED IN VACUUM DEPOSITION 审中-公开
标题翻译：用于真空沉积中使用的材料源安装的喷嘴
公开(公告)号：WO2016138964A1
公开(公告)日：2016-09-09
申请号：PCT/EP2015/057235
申请日：2015-04-01
申请人： APPLIED MATERIALS, INC. , GEBELE, Thomas , LOPP, Andreas , DIEGUEZ-CAMPO, Jose Manuel , SCHÜSSLER, Uwe , HAAS, Dieter
发明人： GEBELE, Thomas , LOPP, Andreas , DIEGUEZ-CAMPO, Jose Manuel , SCHÜSSLER, Uwe , HAAS, Dieter
IPC分类号： C23C14/24 , C23C14/12 , C23C14/04
CPC分类号： C23C14/243 , C23C14/042 , C23C14/12
摘要： A nozzle (400) for being connected to a distribution pipe (106; 106a; 106b) for guiding evaporated material from a material source (102; 102a; 102b) into a vacuum chamber (110) is described. The nozzle includes a nozzle inlet (401) for receiving the evaporated material, a nozzle outlet (403) for releasing the evaporated material to the vacuum chamber (110), and a nozzle passage (402) between the nozzle inlet (401) and the nozzle outlet (403) along a length direction (460) of the nozzle (400). The nozzle passage (402) has a passage wall (404) surrounding a passage channel (405). Further, the nozzle (400) comprises at least two fins (406) extending into the passage channel (405). Further, a material source arrangement having such a nozzle, a vacuum deposition system with a material source arrangement, and a method for depositing evaporated material are provided.
摘要翻译：描述了用于连接到用于将蒸发的材料从材料源（102; 102a; 102b）引导到真空室（110）中的分配管（106; 106a; 106b）的喷嘴（400）。喷嘴包括用于接收蒸发的材料的喷嘴入口（401），用于将蒸发的材料释放到真空室（110）的喷嘴出口（403）和喷嘴入口（401）与喷嘴入口喷嘴出口（403）沿着喷嘴（400）的长度方向（460）。喷嘴通道（402）具有围绕通道（405）的通道壁（404）。此外，喷嘴（400）包括延伸到通道（405）中的至少两个散热片（406）。此外，提供了具有这种喷嘴的材料源装置，具有材料源装置的真空沉积系统和用于沉积蒸发材料的方法。

3. 发明申请

WO2017194098A1 METHODS OF OPERATING A DEPOSITION APPARATUS, AND DEPOSITION APPARATUS 审中-公开
标题翻译：操作沉积设备的方法和沉积设备
公开(公告)号：WO2017194098A1
公开(公告)日：2017-11-16
申请号：PCT/EP2016/060440
申请日：2016-05-10
申请人： APPLIED MATERIALS, INC. , DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan , LOPP, Andreas , WURSTER, Harald , HAAS, Dieter
发明人： DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan , LOPP, Andreas , WURSTER, Harald , HAAS, Dieter
IPC分类号： C23C14/12 , C23C14/24 , C23C14/04 , C23C16/44 , C23C16/455 , C23C14/56 , H01L51/56
摘要： A method of operating a deposition apparatus is provided. The method comprises: Deposition of an evaporated source material on a substrate (10) by guiding the evaporated source material from one or more outlets (22) of an evaporation source (20) toward the substrate (10), wherein part of the evaporated source material is blocked by and attaches to a shielding device (30) arranged between the one or more outlets (22) and the substrate (10), followed by a cleaning of the shielding device (30) by at least locally heating the shielding device (30) for releasing at least part of the attached source material from the shielding device (30). According to a further aspect, a deposition apparatus is provided that can be operated according to the described methods.
摘要翻译：提供了一种操作沉积装置的方法。该方法包括：通过将蒸发源材料从蒸发源（20）的一个或多个出口（22）引向衬底（10）而将蒸发源材料沉积在衬底（10）上，其中部分蒸发源材料被设置在一个或多个出口（22）和衬底（10）之间的防护装置（30）阻挡并附接到防护装置（30），接着通过至少局部加热防护装置（30）来清洁防护装置（30）用于从所述防护装置（30）释放至少部分所附着的源材料。根据另一方面，提供了一种可根据所述方法操作的沉积设备。

4. 发明申请

WO2018108266A1 DEPOSITION SYSTEM 审中-公开
公开(公告)号：WO2018108266A1
公开(公告)日：2018-06-21
申请号：PCT/EP2016/081027
申请日：2016-12-14
申请人： APPLIED MATERIALS, INC. , HAAS, Dieter , SCHÜSSLER, Uwe , DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan
发明人： HAAS, Dieter , SCHÜSSLER, Uwe , DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan
IPC分类号： C23C14/24 , C23C14/50 , C23C14/56 , C23C14/04 , C03C17/02
摘要： According to the present disclosure, a processing system (100) for depositing one or more layers on a substrate supported by a carrier is provided. The processing system includes: a load lock chamber (110) for loading a substrate; a routing module (410) for transporting the substrate; a first vacuum swing module (131); and a process module (510) including a deposition source for depositing material; a service module (610); an unload lock chamber (116) for unloading the substrate; a further routing module (412); a mask carrier magazine (320) configured for storing and transporting masks employed during operation of the processing system; a further vacuum swing module (132); and a transportation system (710) configured for transporting the carrier between the first vacuum swing module (131) and the further vacuum swing module (132).

5. 发明申请

WO2015139776A1 EVAPORATION SOURCE FOR ORGANIC MATERIAL 审中-公开
标题翻译：有机材料蒸发源
公开(公告)号：WO2015139776A1
公开(公告)日：2015-09-24
申请号：PCT/EP2014/055741
申请日：2014-03-21
申请人： APPLIED MATERIALS, INC. , BANGERT, Stefan , DIEGUEZ-CAMPO, Jose Manuel , SCHÜSSLER, Uwe , LOPP, Andreas
发明人： BANGERT, Stefan , DIEGUEZ-CAMPO, Jose Manuel , SCHÜSSLER, Uwe , LOPP, Andreas
IPC分类号： C23C14/24 , C23C14/04
CPC分类号： H01L51/56 , C23C14/042 , C23C14/243 , C23C14/26 , H01L51/001 , H01L51/0011 , H01L51/0012
摘要： An evaporation source for organic material is described. The evaporation source includes an evaporation crucible, wherein the evaporation crucible is configured to evaporate the organic material, a distribution pipe with one or more outlets provided along the length of the distribution pipe, wherein the distribution pipe is in fluid communication with the evaporation crucible, and wherein the distribution pipe has a cross-section perpendicular to the length of the distribution pipe, which is non-circular, and which includes: an outlet side at which the one or more outlets are provided, wherein the width of the outlet side of the cross-section is 30% or less of the maximum dimension of the cross-section.
摘要翻译：描述了有机材料的蒸发源。蒸发源包括蒸发坩埚，其中蒸发坩埚被配置为蒸发有机材料，分配管具有沿着分配管的长度设置的一个或多个出口，其中分配管与蒸发坩埚流体连通，并且其中所述分配管具有垂直于所述分配管的长度的横截面，所述分布管是非圆形的，并且包括：设置所述一个或多个出口的出口侧，其中出口侧的宽度横截面为横截面最大尺寸的30％以下。

6. 发明申请

WO2016095997A1 MATERIAL DEPOSITION ARRANGEMENT, A VACUUM DEPOSITION SYSTEM AND METHOD FOR DEPOSITING MATERIAL 审中-公开
标题翻译：材料沉积安排，真空沉积系统和沉积材料的方法
公开(公告)号：WO2016095997A1
公开(公告)日：2016-06-23
申请号：PCT/EP2014/078299
申请日：2014-12-17
申请人： APPLIED MATERIALS, INC. , GEBELE, Thomas , SCHÜSSLER, Uwe , DIEGUEZ-CAMPO, Jose Manuel , LOPP, Andreas
发明人： GEBELE, Thomas , SCHÜSSLER, Uwe , DIEGUEZ-CAMPO, Jose Manuel , LOPP, Andreas
IPC分类号： C23C14/12 , C23C14/24
CPC分类号： C23C14/243 , C23C14/042 , C23C14/12 , C23C14/24 , H01L51/001 , H01L51/0011
摘要： A material deposition arrangement (100) for depositing evaporated material on a substrate (121) in a vacuum chamber (110) is described. The material deposition arrangement includes a crucible (102; 102a; 102b) for providing material to be evaporated; a linear distribution pipe (106; 106a; 106b) being in fluid communication with the crucible (102; 102a; 102b); and a plurality of nozzles in the distribution pipe (106; 106a; 106b) for guiding the evaporated material into the vacuum chamber (110). Each nozzle (400) may have a nozzle inlet (401) for receiving the evaporated material, a nozzle outlet (403) for releasing the evaporated material to the vacuum chamber, and a nozzle passage (402) between the nozzle inlet (401) and the nozzle outlet (403). The nozzle passage (402) of at least one of the plurality of nozzles includes a first section (410) having a first section length (412) and a first section size (411), and a second section (420) having a second section length (421) and a second section size (421). The ratio of the second section size (421) to the first section size (411) is between 2 and 10.
摘要翻译：描述了用于在真空室（110）中的衬底（121）上沉积蒸发材料的材料沉积装置（100）。材料沉积装置包括用于提供待蒸发的材料的坩埚（102; 102a; 102b）与坩埚（102; 102a; 102b）流体连通的线性分配管（106; 106a; 106b）; 以及分配管道（106; 106a; 106b）中的多个喷嘴，用于将蒸发的材料引导到真空室（110）中。每个喷嘴（400）可以具有用于接收蒸发的材料的喷嘴入口（401），用于将蒸发的材料释放到真空室的喷嘴出口（403）和喷嘴入口（401）和喷嘴出口（403）。多个喷嘴中的至少一个喷嘴的喷嘴通道（402）包括具有第一部分长度（412）和第一部分尺寸（411）的第一部分（410）和具有第二部分长度（421）和第二部分尺寸（421）。第二部分尺寸（421）与第一部分尺寸（411）的比率在2和10之间。

7. 发明申请

WO2015086168A1 A PROCESSING APPARATUS FOR PROCESSING DEVICES, PARTICULARLY DEVICES INCLUDING ORGANIC MATERIALS THEREIN, AND METHOD FOR TRANSFERRING AN EVAPORATION SOURCE FROM A PROCESSING VACUUM CHAMBER TO A MAINTENANCE VACUUM CHAMBER OR FROM THE MAINTENANCE VACUUM CHAMBER TO THE PROCESSING VACUUM CHAMBER 审中-公开
标题翻译：用于处理装置的处理装置，包括其中的有机材料的特定装置以及将蒸发源从处理真空室传送到维护真空室或从维护真空室转移到处理真空室的方法
公开(公告)号：WO2015086168A1
公开(公告)日：2015-06-18
申请号：PCT/EP2014/067673
申请日：2014-08-19
申请人： APPLIED MATERIALS, INC. , DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan , SCHÜSSLER, Uwe , HAAS, Dieter
发明人： DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan , SCHÜSSLER, Uwe , HAAS, Dieter
IPC分类号： C23C14/04 , C23C14/12 , C23C14/56 , C23C14/24 , B05D3/04 , B05D1/02 , B05D1/00 , H01L51/00 , H01L51/56 , C23C16/44
CPC分类号： C23C14/243 , C23C14/042 , C23C14/12 , C23C14/246 , C23C14/50 , C23C14/56 , C23C14/562 , C23C14/564 , C23C14/566 , H01L51/001 , H01L51/0011 , H01L51/56
摘要： A processing apparatus for processing devices, particularly devices including organic materials therein, is described. The processing apparatus includes a processing vacuum chamber; at least one evaporation source for organic material, wherein the at least one evaporation source includes at least one evaporation crucible, wherein the at least one evaporation crucible is configured to evaporate the organic material, and at least one distribution pipe with one or more outlets, wherein the at least one distribution pipe is in fluid communication with the at least one evaporation crucible; and a maintenance vacuum chamber connected with the processing vacuum chamber, wherein the at least one evaporation source can be transferred from the processing vacuum chamber to the maintenance vacuum chamber and from the maintenance vacuum chamber to the processing vacuum chamber.
摘要翻译：描述了用于处理装置的处理装置，特别是包括其中的有机材料的装置。处理装置包括处理真空室; 用于有机材料的至少一个蒸发源，其中所述至少一个蒸发源包括至少一个蒸发坩埚，其中所述至少一个蒸发坩埚被配置为蒸发所述有机材料，以及至少一个具有一个或多个出口的分配管，其中所述至少一个分配管与所述至少一个蒸发坩埚流体连通; 以及与所述处理真空室连接的维护真空室，其中所述至少一个蒸发源可以从处理真空室转移到维护真空室，并且从维护真空室转移到处理真空室。

8. 发明申请

WO2014096302A1 EVAPORATOR, DEPOSITION ARRANGEMENT, DEPOSITION APPARATUS AND METHODS OF OPERATION THEREOF 审中-公开
标题翻译：蒸发器，沉积装置，沉积装置及其操作方法
公开(公告)号：WO2014096302A1
公开(公告)日：2014-06-26
申请号：PCT/EP2013/077569
申请日：2013-12-20
申请人： APPLIED MATERIALS, INC. , KELLER, Stefan , SCHÜSSLER, Uwe , DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan , KWAK BYUNG-SUNG, Leo
发明人： KELLER, Stefan , SCHÜSSLER, Uwe , DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan , KWAK BYUNG-SUNG, Leo
IPC分类号： C23C14/24
CPC分类号： C23C16/4485 , C23C14/246 , C23C16/06 , C23C16/45519 , C23C16/45561 , C23C16/45565 , C23C16/4557 , C23C16/52
摘要： A depositing arrangement for evaporation of a material including an alkali metal or alkaline earth metal, and for deposition of the material on a substrate (4) is described. The arrangement a first chamber (110) configured for liquefying the material, a valve (130) being in fluid communication with the first chamber, and being downstream of the first chamber, wherein the valve is configured for control of the flow rate of the liquefied material through the valve, an evaporation zone (114) being in fluid communication with the valve, and being downstream of the valve, wherein the evaporation zone is configured for vaporizing the liquefied material, and one or more outlets (116) for directing the vaporized material towards the substrate.
摘要翻译：描述了用于蒸发包括碱金属或碱土金属的材料并用于将材料沉积在基板（4）上的沉积布置。该装置构造成用于液化材料的第一室（110），与第一室流体连通并且位于第一室的下游的阀（130），其中阀构造成用于控制液化的流速材料通过阀，蒸发区（114）与阀流体连通并且位于阀的下游，其中蒸发区被配置为蒸发液化材料，以及一个或多个出口（116），用于引导蒸发的材料朝向基板。

9. 发明申请

WO2016082874A1 CRUCIBLE ASSEMBLY FOR EVAPORATION PURPOSES 审中-公开
标题翻译：用于蒸发目的的大会
公开(公告)号：WO2016082874A1
公开(公告)日：2016-06-02
申请号：PCT/EP2014/075686
申请日：2014-11-26
申请人： APPLIED MATERIALS, INC. , SCHÜSSLER, Uwe , BANGERT, Stefan , DIEGUEZ-CAMPO, Jose Manuel , LOPP, Andreas
发明人： SCHÜSSLER, Uwe , BANGERT, Stefan , DIEGUEZ-CAMPO, Jose Manuel , LOPP, Andreas
IPC分类号： C23C14/24 , C23C14/12 , C23C14/54 , F27B14/10 , F27B14/00
CPC分类号： C23C14/243 , C23C14/12 , C23C14/542 , F27D5/0037
摘要： In general, the present disclosure relates to systems, apparatuses and methods for depositing materials. In particular, the present disclosure relates to a crucible for evaporating a source material. The crucible has a wall with an inner surface surrounding an inner volume for receiving the source material and one or more heat transfer elements arranged within the inner volume of the crucible.
摘要翻译：通常，本公开涉及用于沉积材料的系统，装置和方法。特别地，本公开涉及用于蒸发源材料的坩埚。坩埚具有壁，内壁包围着用于容纳源材料的内部容积和布置在坩埚的内部容积内的一个或多个传热元件。

10. 发明申请

WO2016070942A1 MATERIAL DEPOSITION ARRANGEMENT AND MATERIAL DISTRIBUTION ARRANGEMENT FOR VACUUM DEPOSITION 审中-公开
标题翻译：真空沉积物的材料沉积布置和材料分配布置
公开(公告)号：WO2016070942A1
公开(公告)日：2016-05-12
申请号：PCT/EP2014/074089
申请日：2014-11-07
申请人： APPLIED MATERIALS, INC. , BANGERT, Stefan , LOPP, Andreas , GEBELE, Thomas , SCHÜSSLER, Uwe , DIEGUEZ-CAMPO, Jose Manuel
发明人： BANGERT, Stefan , LOPP, Andreas , GEBELE, Thomas , SCHÜSSLER, Uwe , DIEGUEZ-CAMPO, Jose Manuel
IPC分类号： C23C14/12 , C23C14/24 , C23C16/455 , C23C14/04 , H05B33/10
CPC分类号： C23C14/12 , C23C14/042 , C23C14/24 , C23C16/45578
摘要： A material deposition arrangement (100) for depositing evaporated materials on a substrate (121) in a vacuum chamber (110) is described. The material deposition arrangement includes two material deposition sources (100a, 100b), each having a distribution pipe (106a, 106b) and one or more nozzles (712). Further, a vacuum deposition chamber including a material deposition arrangement and a method for depositing an evaporated material on a substrate in a vacuum deposition chamber is described.
摘要翻译：描述了用于在真空室（110）中的衬底（121）上沉积蒸发材料的材料沉积装置（100）。材料沉积装置包括两个材料沉积源（100a，100b），每个具有分配管（106a，106b）和一个或多个喷嘴（712）。此外，描述了包括材料沉积装置的真空沉积室和用于在真空沉积室中在基板上沉积蒸发材料的方法。

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