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1. 发明申请

WO2017209802A1 EFFECTIVE AND NOVEL DESIGN FOR LOWER PARTICLE COUNT AND BETTER WAFER QUALITY BY DIFFUSING THE FLOW INSIDE THE CHAMBER 审中-公开
标题翻译：通过在房间内扩散流动来有效和新颖地设计下颗粒计数和更好的晶粒质量
公开(公告)号：WO2017209802A1
公开(公告)日：2017-12-07
申请号：PCT/US2017/014864
申请日：2017-01-25
申请人： APPLIED MATERIALS, INC.
发明人： PANDEY, Vishwas Kumar , SHAH, Kartik , TONG, Edric , VASUDEVA, Prashanth
IPC分类号： H01L21/02 , H01L21/67
摘要： Embodiments described herein generally relate to a processing chamber having one or more gas inlet ports located at a bottom of the processing chamber. Gas flowing into the processing chamber via the one or more gas inlet ports is directed along a lower side wall of the processing chamber by a plate located over each of the one or more gas inlet ports or by an angled opening of each of the one or more gas inlet ports. The one or more gas inlet ports and the plates may be located at one end of the processing chamber, and the gas flow is directed towards an exhaust port located at the opposite end of the processing chamber by the plates or the angled openings. Thus, more gas can be flowed into the processing chamber without dislodging particles from a lid of the processing chamber.
摘要翻译：这里描述的实施例总体上涉及具有位于处理室的底部的一个或多个气体入口的处理室。通过一个或多个气体入口端口流入处理腔室的气体通过位于每个所述一个或多个气体入口端口上的板或通过一个或多个气体入口端口中的每一个的成角度开口沿处理腔室的下侧壁引导，更多的进气口。一个或多个气体入口和板可位于处理室的一端，并且气流通过板或成角度的开口被引向位于处理室的相对端的排气口。因此，更多的气体可以流入处理室而不会从处理室的盖子中移出颗粒。

2. 发明申请

WO2014149351A1 COMPACT DEVICE FOR ENHANCING THE MIXING OF GASEOUS SPECIES 审中-公开
标题翻译：用于增强气候物种混合的紧凑装置
公开(公告)号：WO2014149351A1
公开(公告)日：2014-09-25
申请号：PCT/US2014/017577
申请日：2014-02-21
申请人： APPLIED MATERIALS, INC.
发明人： LANE, John W. , DARAN, Berrin , GUNTURI, Ramachandra Murthy , GREGOR, Mariusch , MANJUNATH, Bhaswan , VASUDEVA, Prashanth
IPC分类号： H01L21/02
CPC分类号： B01F5/0077 , B01F3/028 , B01F5/0689 , B01F15/0429 , B01F2215/0096
摘要： Apparatus and system for mixing gas comprising a first valve coupled to a first conduit controlling flow of a first gas, a second valve coupled to a second conduit controlling flow of a second gas, a controller controlling the valves, a base block with a first gas input coupled to the first conduit, a second gas input coupled to the second conduit and an output opening, a mixing chamber formed within the base block, wherein the mixing chamber is coupled to the first gas input and the second gas input to receive input gases, an inner block disposed within the mixing chamber, the inner block including a body with an inner volume and one or more perimeter holes formed through the body coupling the mixing chamber to the inner volume of the inner block; and a gas outlet configured to flow gas through the output opening of the base block.
摘要翻译：用于混合气体的设备和系统，包括联接到控制第一气体流的第一导管的第一阀，连接到控制第二气体的流动的第二导管的第二阀，控制阀的控制器，具有第一气体的基座输入，其耦合到第一导管，耦合到第二导管的第二气体输入口和输出开口，形成在基座块内的混合室，其中混合室与第一气体输入端相连，而第二气体输入端接收输入气体设置在所述混合室内的内部块，所述内部块包括具有内部容积的主体和通过将所述混合室连接到所述内部块的内部容积的本体形成的一个或多个周边孔; 以及气体出口，其构造成使气体流过所述基座的输出开口。

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