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    • 2. 发明公开
    • Process for preparing metal coatings from liquid solutions utilizing cold plasma
    • 一种用于通过冷等离子体的装置产生从液体溶液的金属涂层的方法
    • EP1323846A2
    • 2003-07-02
    • EP02258609.3
    • 2002-12-13
    • AMT Holdings, Inc.
    • Conover, Stephen P.Sharma, Ashok K.
    • C23C18/14
    • C23C18/08C23C18/14
    • A method for depositing metals, metal blends and alloys onto substrate surfaces, including microporous substrates utilizing a plasma operation undertaken at room temperature. In the process, a liquid solution of a monomer or comonomer precursor having a metallic component is utilized to wet the surface of the substrate, with the solvent portion thereafter being removed to leave the substrate surface coated with a dry deposit. The coated substrate is then introduced into a plasma reaction chamber with RF energy being applied across spaced electrodes to create a plasma glow along with the introduction of a plasma supporting gas. The substrate is exposed to the plasma glow for conversion of the precursor to dissociated form to create a deposit consisting essentially of the metallic component in elemental form as a cohesive film on the substrate surface. Preferred metals include such noble metals as platinum, gold and silver, as well as other metals. Preferred precursors include platinum hexafluoro-acetylacetonate, (trimethyl) methylcyclopentadienyl platinum, dimethyl (acetylacetonate) gold, and trimethyl phosphine (hexafluoroacetyl acetonate) silver.
    • 一种用于沉积金属,金属合金和共混物在基材上的表面,包括微孔基材利用在室温下采取操作等离子体法。 在这个过程中,单体或具有金属组分共聚单体前体的液体溶液被用于润湿基材的表面,并在此后被去除以留下涂覆有干沉积物基板表面部分溶剂。 然后将涂覆的基片被引入到RF能量的等离子反应室跨越间隔的电极被施加以产生等离子体辉光地连同引入等离子体助燃气体的。 衬底被暴露于前体解离形式的转换的等离子体辉光创建存款单质形式本质上金属部件由......组成为粘结电影基板表面上。 优选的金属包括寻求贵金属如铂,金,银,以及其它金属。 优选的前体包括铂六氟乙酰丙酮化物,(三甲基)甲基环戊二烯基铂,二甲基(乙酰丙酮)黄金,和三甲基膦(六氟乙酰丙酮化物)银。