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    • 4. 发明申请
    • LATERAL AVALANCHE PHOTODIODE DEVICE AND METHOD OF PRODUCTION
    • 横向AVALANCHE光电设备及其生产方法
    • WO2013068227A1
    • 2013-05-16
    • PCT/EP2012/070884
    • 2012-10-22
    • AMS AG
    • JONAK-AUER, IngridTEVA, Jordi
    • H01L31/107H01L31/0352H01L31/18H01L27/146
    • H01L31/107H01L27/14609H01L27/14634H01L27/14689H01L31/03529H01L31/18H01L31/1804Y02E10/547
    • A lateral avalanche photodiode device comprises a semiconductor substrate (1) having a trench (4) with side walls (5) extending from a main surface (2) to a rear surface (3). A first doped region (11) is present at the side walls of the trench, and a second doped region (12) is arranged at a distance from the first doped region. A third doped region (13) is located adjacent to the first doped region, extends through the substrate from the main surface to the rear surface, and is arranged between the first doped region and the second doped region. The third doped region (13) is the avalanche multiplication region of the photodiode structure. The second doped region and the third doped region have a first type of conductivity, and the first doped region has a second type of conductivity which is opposite to the first type of conductivity. The region of the substrate that is between the first doped region and the second doped region is of the first type of conductivity.
    • 横向雪崩光电二极管装置包括具有沟槽(4)的半导体衬底(1),侧壁(5)从主表面(2)延伸到后表面(3)。 第一掺杂区域(11)存在于沟槽的侧壁处,并且第二掺杂区域(12)被布置在离第一掺杂区域一定距离处。 第三掺杂区域(13)位于第一掺杂区域附近,从主表面延伸穿过衬底到后表面,并且布置在第一掺杂区域和第二掺杂区域之间。 第三掺杂区域(13)是光电二极管结构的雪崩倍增区域。 第二掺杂区域和第三掺杂区域具有第一类型的导电性,并且第一掺杂区域具有与第一类型导电性相反的第二类型的导电性。 位于第一掺杂区域和第二掺杂区域之间的衬底的区域是第一类型的导电性。