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1. 发明专利

JPH06181031A MANUFACTURE OF METAL FOIL MADE PART OF PROBE 失效
公开(公告)号：JPH06181031A
公开(公告)日：1994-06-28
申请号：JP19244392
申请日：1992-07-20
申请人： ALPHA ELECTRONICS , YOKOGAWA ELECTRIC CORP
发明人： ZAMA MATSUO , SUMA HIDEYUKI , OYA AKIRA , NANKO TOMOAKI
IPC分类号： G01B21/30 , G01N37/00 , G01Q60/04 , G01Q60/10 , G01Q60/16 , G01Q60/24 , G01Q60/38 , G01Q60/40 , H01J9/02 , H01J9/14 , H01J37/28
摘要： PURPOSE:To stabilize the detection of tunnel current, to improve the performance of AFM operation and at the same time facilitate handling and the like, at a low price, by making metal foil of specific mum in each of thickness and length into cantilever-like parts of a probe and fixing a metallic block thereto. CONSTITUTION:A bonding agent 2 is applied to a ceramic substrate 1 and then is semi-dried, and platinum foil 3 of several mum in thickness is overlapped thereupon and pressed from top and bottoms with metal plates 4 to be made flat, and then photoresist is applied to the upper surface of the foil 3. Next, a plurality of patterns are exposed to light and then developed to form a masking layer 5, and after platinum foil 3a is formed by etching, the substrate 1 is cut. Successively, the foil 3a and a metal block 7 are soldered together, and then a layer 2a of a bonding agent is dissolved in an organic solvent 9 to separate the foil 3a from a substrate 1a and the foil 3a is drawn up to clean up the solvent 9 with substitution of alcohol and then the foil 3a is dried for completion, thereby making it feasible to stably detect tunnel current and to improve the performance of AFM operation, so that the parts of a probe which facilitate handling and the like may be obtained.

2. 发明专利

JPH07218515A METAL FOIL PROCESSED PROBE PART AND MANUFACTURE THEREOF 失效
公开(公告)号：JPH07218515A
公开(公告)日：1995-08-18
申请号：JP32189892
申请日：1992-12-01
申请人： ALPHA ELECTRONICS , YOKOGAWA ELECTRIC CORP
发明人： ZAMA MATSUO , SUMA HIDEYUKI , NANKO TOMOAKI , OYA AKIRA
IPC分类号： G01B21/30 , G01N37/00 , G01Q60/16 , G01Q60/38 , G01Q70/10 , H01J37/28
摘要： PURPOSE:To reduce wrinkling in a metal block fixing part and manufacture a good-quality metal foil probe part. CONSTITUTION:A metal foil part is processed with metal foil used for a probe scan-type microscope, etc., manufactured by means of an adhesive applying process for applying adhesive to a board such as ceramic with its flat surface, a metal foil bonding process for flatly laminating thin metal foils of several mum or less in thickness, a masking layer forming process comprising the application of a photoresist and the light exposure and development of a plurality of desired patterns, an etching process for processing a plurality of metal foils in their desired shapes, a cutting process for cutting the boards one by one, a metal block fixing process for fixing the etched metal foils, and an adhesive stripping process for stripping the probe part by melting the adhesive between the board and the metal foils by means of organic solvent. The metal foil makes the thickness of the fixing part to the metal block thicker by some mum, the thickness of the probe part thicker by approximately 1mum, and the thickness of the metal block fixing part thicker than that of the probe part.

3. 发明专利

DE735350T1 未知
公开(公告)号：DE735350T1
公开(公告)日：1997-04-30
申请号：DE96104986
申请日：1996-03-28
申请人： YOKOGAWA ELECTRIC CORP
发明人： NANKO TOMOAKI , TANAAMI TAKEO , MURATA AKIHIRO
IPC分类号： G01J3/45 , G01J3/453 , G01J3/42
摘要： This is a spectroscope in which an optical fiber is placed in an outgoing-light path to a sample chamber, a light beam output from the above optical fiber is divided into two using an optical coupler, and the two divided light beams are incident on measurement and reference optical fibers respectively. This arrangement allows accurate measurement of the spectral characteristics of samples because the outgoing light is incident on measurement and reference optical fibers in common even if the outgoing light becomes non-uniform due to environmental changes on the light source side of the spectroscope.

4. 发明专利

DE10050802B4 未知
公开(公告)号：DE10050802B4
公开(公告)日：2007-12-13
申请号：DE10050802
申请日：2000-10-13
申请人： YOKOGAWA ELECTRIC CORP
发明人： NANKO TOMOAKI , HAYASHI HISANORI , OTSUBO MINORU , ISOZAKI KATSUMI
IPC分类号： G01B9/02 , G01D11/02 , G02B7/182
摘要： A moving mirror support device for use with photo-interferometers having first leaf springs arranged in parallel with one end thereof being fixed to a base; a coupling plate fixed to the other ends of the first leaf springs; and second leaf springs arranged in parallel with each of the first springs with one end thereof being fixed to the coupling plate and the other end being fixed to the moving mirror, whereby longitudinal and transverse displacements of the moving mirror can be more accurately controlled.

5. 发明专利

DE69619010T2 未知
公开(公告)号：DE69619010T2
公开(公告)日：2003-01-30
申请号：DE69619010
申请日：1996-03-28
申请人： YOKOGAWA ELECTRIC CORP
发明人： NANKO TOMOAKI , TANAAMI TAKEO , MURATA AKIHIRO
IPC分类号： G01J3/45 , G01J3/453 , G01J3/42
摘要： This is a spectroscope in which an optical fiber is placed in an outgoing-light path to a sample chamber, a light beam output from the above optical fiber is divided into two using an optical coupler, and the two divided light beams are incident on measurement and reference optical fibers respectively. This arrangement allows accurate measurement of the spectral characteristics of samples because the outgoing light is incident on measurement and reference optical fibers in common even if the outgoing light becomes non-uniform due to environmental changes on the light source side of the spectroscope.

6. 发明专利

DE10050802A1 Movable mirror holder for use in photointerferometer used in measuring instruments, has coupling plate fitted with ends of both springs connected with movable mirror and base respectively at their other ends 未知
公开(公告)号：DE10050802A1
公开(公告)日：2001-05-23
申请号：DE10050802
申请日：2000-10-13
申请人： YOKOGAWA ELECTRIC CORP
发明人： NANKO TOMOAKI , HAYASHI HISANORI , OTSUBO MINORU , ISOZAKI KATSUMI
IPC分类号： G01B9/02 , G01D11/02 , G02B7/182
摘要： Several springs (11a,11b) are arranged in parallel with predefined gap inbetween, on the base (10). A coupling plate (12) is fitted with one end of both springs. Other ends of the springs (11b) are connected to the movable mirror (4). Other ends of springs (11a) are connected to the base. Effective length (L) of springs (11a,11b) which are arranged in parallel, is same. A damping element regulates movement of coupling plate. A pair of position detectors detect vibration of coupling plates. Based on the output of the position detectors, control unit controls and regulates vibration of coupling plate.

7. 发明专利

GB2419666B Infrared gas analyzer and infrared gas analysis method 未知
公开(公告)号：GB2419666B
公开(公告)日：2010-04-28
申请号：GB0520647
申请日：2005-10-11
申请人： YOKOGAWA ELECTRIC CORP
发明人： NANKO TOMOAKI , YAMAGISHI HIDEAKI , MATSUMURA SHIGERU
IPC分类号： G01N21/37 , G01N21/01
摘要： There are provided an infrared gas analyzer of a simple configuration, capable of taking measurements with high precision when using an infrared light source excellent in thermal responsiveness, and capable of ON/OFF operations at high speed, and an infrared gas analysis method using the same. The infrared gas analyzer having a sample cell into which a sample gas is distributed, for detecting concentration of a measuring target component of the sample gas by taking advantage of variation in absorption amount of infrared rays having passed through the sample cell, comprising a first infrared light source for irradiating the sample cell with first infrared rays, a second infrared light source having a response characteristic equal to that of the first infrared light source, a detector for detecting a difference between the first infrared rays emitted from the first infrared light source, and having passed through the sample cell, and second infrared rays emitted from the second infrared light source, a light source drive controller for synchronously driving the first and second infrared light sources, respectively, and a measurement controller for providing the light source drive controller with instructions for respective drive amounts of the first and second infrared light sources while receiving an output signal from the detector, thereby generating a measurement output corresponding to the concentration of the measuring target component of the sample gas.

8. 发明专利

DE102005049175B4 未知
公开(公告)号：DE102005049175B4
公开(公告)日：2009-01-29
申请号：DE102005049175
申请日：2005-10-14
申请人： YOKOGAWA ELECTRIC CORP
发明人： NANKO TOMOAKI , YAMAGISHI HIDEAKI , MATSUMURA SHIGERU
IPC分类号： G01N21/01 , G01N21/37 , G01N21/61
摘要： There are provided an infrared gas analyzer of a simple configuration, capable of taking measurements with high precision when using an infrared light source excellent in thermal responsiveness, and capable of ON/OFF operations at high speed, and an infrared gas analysis method using the same. The infrared gas analyzer having a sample cell into which a sample gas is distributed, for detecting concentration of a measuring target component of the sample gas by taking advantage of variation in absorption amount of infrared rays having passed through the sample cell, comprising a first infrared light source for irradiating the sample cell with first infrared rays, a second infrared light source having a response characteristic equal to that of the first infrared light source, a detector for detecting a difference between the first infrared rays emitted from the first infrared light source, and having passed through the sample cell, and second infrared rays emitted from the second infrared light source, a light source drive controller for synchronously driving the first and second infrared light sources, respectively, and a measurement controller for providing the light source drive controller with instructions for respective drive amounts of the first and second infrared light sources while receiving an output signal from the detector, thereby generating a measurement output corresponding to the concentration of the measuring target component of the sample gas.

9. 发明专利

DE102005049175A1 未知
公开(公告)号：DE102005049175A1
公开(公告)日：2006-04-27
申请号：DE102005049175
申请日：2005-10-14
申请人： YOKOGAWA ELECTRIC CORP
发明人： NANKO TOMOAKI , YAMAGISHI HIDEAKI , MATSUMURA SHIGERU
IPC分类号： G01N21/01 , G01N21/37
摘要： There are provided an infrared gas analyzer of a simple configuration, capable of taking measurements with high precision when using an infrared light source excellent in thermal responsiveness, and capable of ON/OFF operations at high speed, and an infrared gas analysis method using the same. The infrared gas analyzer having a sample cell into which a sample gas is distributed, for detecting concentration of a measuring target component of the sample gas by taking advantage of variation in absorption amount of infrared rays having passed through the sample cell, comprising a first infrared light source for irradiating the sample cell with first infrared rays, a second infrared light source having a response characteristic equal to that of the first infrared light source, a detector for detecting a difference between the first infrared rays emitted from the first infrared light source, and having passed through the sample cell, and second infrared rays emitted from the second infrared light source, a light source drive controller for synchronously driving the first and second infrared light sources, respectively, and a measurement controller for providing the light source drive controller with instructions for respective drive amounts of the first and second infrared light sources while receiving an output signal from the detector, thereby generating a measurement output corresponding to the concentration of the measuring target component of the sample gas.

10. 发明专利

DE69416813T2 未知
公开(公告)号：DE69416813T2
公开(公告)日：1999-10-07
申请号：DE69416813
申请日：1994-12-15
申请人： YOKOGAWA ELECTRIC CORP
发明人： NANKO TOMOAKI , TANAAMI TAKEO , MIKURIYA KENTA
IPC分类号： G01J3/45 , G01J3/453
摘要： An interference spectrometer in which a vibration-proofing of a moving mirror is enhanced and which consumes less power is realized. The interference spectrometer which causes an interference by dividing an output light from a light source into two optical paths and by changing a length of each optical path comprises a moving mirror for changing the optical path lengths, position detecting means for detecting a position of the moving mirror and driving control means for controlling the position of the moving mirror based on an output of the position detecting means.

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