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1. 发明申请

WO2016108935A8 MANUFACTURING CARBON MOLECULAR SIEVE MEMBRANES USING A PYROLYSIS ATMOSPHERE COMPRISING SULFUR-CONTAINING COMPOUNDS 审中-公开
标题翻译：使用包含含硫化合物的热解气氛制造碳分子筛膜
公开(公告)号：WO2016108935A8
公开(公告)日：2017-07-06
申请号：PCT/US2015000408
申请日：2015-12-24
申请人： AIR LIQUIDE , CHEVREL HENRI , JURCIK BENJAMIN J JR , COIGNET PHILIPPE A , SWAIDAN RAJA , KRATZER DEAN W
发明人： CHEVREL HENRI , JURCIK BENJAMIN J JR , COIGNET PHILIPPE A , SWAIDAN RAJA , KRATZER DEAN W
IPC分类号： B01D67/00 , B01D53/22 , B01D69/08 , B01D71/02
CPC分类号： B01D67/0067 , B01D53/228 , B01D69/08 , B01D71/021 , B01D2256/12 , B01D2256/16 , B01D2256/245 , B01D2257/102 , B01D2323/10 , B01D2325/10
摘要： A carbon molecular sieve (CMS) membrane is made by pyrolyzing a polymeric precursor membrane in a pyrolysis atmosphere containing a sulfur-containing compound.
摘要翻译：碳分子筛（CMS）膜通过在含有含硫化合物的热解气氛中热解聚合前体膜来制备。

2. 发明专利

JP2000039141A METHOD FOR CONTROLLING LIQUID FUEL BURNER AND MONITORING DEVICE FOR LIQUID FUEL COMBUSTION 失效
公开(公告)号：JP2000039141A
公开(公告)日：2000-02-08
申请号：JP17989199
申请日：1999-06-25
申请人： AIR LIQUIDE
发明人： VON DRASEK WILLIAM , BODELIN PIERRE , JURCIK BENJAMIN J JR
IPC分类号： F23D11/10 , F23N1/02 , F23N5/08
摘要： PROBLEM TO BE SOLVED: To monitor the state of an oil burner, by observing the radiation from a flame formed when liquid fuel is burnt and correlating the observed flame radiation with the operating state of the burner by optical processing the radiation, and then, generating an electric signal based on the operating state of the burner. SOLUTION: An optical coupling member 2 having a high-temperature fiber optic system is integrally provided with an oil burner 1 and the radiation from a flame formed when liquid fuel, such as the hydrocarbon oil, etc., is burnt by means of an oxidizing agent using means provided to the burner 1 is observed by means of the coupling member 2. An optical processor 3 forms an optical signal from the observed flame radiation and transmits the optical signal to a signal processor 4. The processor 4 relates the optical signal to the operating state of the burner 1, and makes an electric signal to be generated based on the operating state of the burner 1.

3. 发明专利

JPH09203707A ROOM FLOWOUT OBJECT MONITORING SYSTEM, SEMICONDUCTOR PROCESSING SYSTEM WITH ADSORPTIVE SPECTROMETRY, AND ITS USAGE 失效
公开(公告)号：JPH09203707A
公开(公告)日：1997-08-05
申请号：JP26734496
申请日：1996-10-08
申请人： AIR LIQUIDE
发明人： MCANDREW JAMES , WANG HWA-CHI , JURCIK BENJAMIN J JR
IPC分类号： C23C16/44 , G01J3/433 , G01N21/03 , G01N21/35 , G01N21/39 , H01L21/02
摘要： PROBLEM TO BE SOLVED: To establish a method for detecting a minute amount of substance in the gas phase existing in a semiconductor processing system. SOLUTION: A system 1 is equipped with a chamber coupled with an exhaust line 7, which has a specimen division 11, and all gas-phase flowout objects are admitted to pass through. The system 1 is equipped with an adsorptive spectroscopic measuring system which can detect a minute amount of gas-phase flowout object. The measuring system is equipped with a light source 9, main sensor 10 in optical communication with the specimen division 11, and a photo- transmissive window 13, and the main sensor 10 is actuated by the light beam 12 which passes through the division 11 and is emitted from the window 13. The system 1 is applied to sensing of a minute amount of flowout gaseous impurities existing in a semiconductor processing device.

4. 发明专利

CA2591692A1 OXIDIZING OXYGEN-FUEL BURNER FIRING FOR REDUCING NOX EMISSIONS FROM HIGH TEMPERATURE FURNACES 未知
公开(公告)号：CA2591692A1
公开(公告)日：1999-08-26
申请号：CA2591692
申请日：1999-02-11
申请人： AIR LIQUIDE
发明人： SIMON JEAN-FRANCOIS , JURCIK BENJAMIN J JR , JOSHI MAHENDRA L
IPC分类号： F23D23/00 , F23C5/08 , F23D14/32 , F23D14/58

5. 发明专利

CA2261454C OXIDIZING OXYGEN-FUEL BURNER FIRING FOR REDUCING NOX EMISSIONS FROM HIGH TEMPERATURE FURNACES 未知
公开(公告)号：CA2261454C
公开(公告)日：2008-10-07
申请号：CA2261454
申请日：1999-02-11
申请人： AIR LIQUIDE
发明人： JOSHI MAHENDRA L , SIMON JEAN-FRANCOIS , JURCIK BENJAMIN J JR
IPC分类号： F23D23/00 , C03B5/235 , F23C5/08 , F23C99/00 , F23D14/22 , F23D14/24 , F23D14/32 , F23D14/58 , F23M5/02
摘要： Burner firing method and device are presented where an oxidizing oxygen--fuel burner is fired at an angle to the reducing air-fuel burner flame to reduce overall NOx emissions from high temperature furnaces. The oxidizing oxy-fuel burner stoichiometric equivalence ratio (oxygen/fuel) is maintained in the range of about 1.5 to about 12.5. The reducing air-fuel burner is fired at an equivalence ratio of 0.6 to 1.00 to reduce the availability of oxygen in the flame and reducing NOx emissions. The oxidizing flame from the oxy-fuel burner is oriented such that the oxidizing flame gas stream intersects the reducing air-fuel flame gas stream at or near the tail section of the air-fuel flame. The inventive methods improve furnace temperature control and thermal efficiency by eliminating some nitrogen and provide an effective burnout of CO and other hydrocarbons using the higher mixing ability of the oxidizing flame combustion products. The simultaneous air-fuel and oxy-fuel burner firing can reduce NOx emissions anywhere from 30% to 70% depending on the air-fuel burner stoichiometric ratio.

6. 发明专利

CA2261454A1 OXIDIZING OXYGEN-FUEL BURNER FIRING FOR REDUCING NOX EMISSIONS FROM HIGH TEMPERATURE FURNACES 未知
公开(公告)号：CA2261454A1
公开(公告)日：1999-08-26
申请号：CA2261454
申请日：1999-02-11
申请人： AIR LIQUIDE
发明人： SIMON JEAN-FRANCOIS , JURCIK BENJAMIN J JR , JOSHI MAHENDRA L
IPC分类号： C03B5/235 , F23C5/08 , F23C99/00 , F23D14/24 , F23D14/32 , F23M5/02 , F23D23/00 , F23D14/22 , F23D14/58 , F23N5/00
摘要： Burner firing method and device are presented where an oxidizing oxygen-fuel burner is fired at an angle to the reducing air-fuel burner flame to reduce overall NOx emissions from high temperature furnaces. The oxidizing oxy-fuel burner stoichiometric equivalence ratio (oxygen/fuel) is maintained in the range of about 1.5 to about 12.5. The reducing air-fuel burner is fired at an equivalence ratio of 0.6 to 1.00 to reduce the availability of oxygen in the flame and reducing NOx emissions. The oxidizing flame from the oxy-fuel burner is oriented such that the oxidizing flame gas stream intersects the reducing air-fuel flame gas stream at or near the tail section of the air-fuel flame. The inventive methods improve furnace temperature control and thermal efficiency by eliminating some nitrogen and provide an effective burnout of CO and other hydrocarbons using the higher mixing ability of the oxidizing flame combustion products. The simultaneous air-fuel and oxy-fuel burner firing can reduce NOx emissions anywhere from 30% to 70% depending on the air-fuel burner stoichiometric ratio.

7. 发明专利

DE69628623T2 未知
公开(公告)号：DE69628623T2
公开(公告)日：2004-04-29
申请号：DE69628623
申请日：1996-10-07
申请人： AIR LIQUIDE
发明人： MCANDREW JAMES , WANG HWA-CHI , JURCIK BENJAMIN J JR
IPC分类号： C23C16/44 , G01J3/433 , G01N21/03 , G01N21/35 , G01N21/39 , H01L21/02
摘要： Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample region. The system further comprises an absorption spectroscopy measurement system for detecting a gas phase molecular species. The measurement system comprises a light source and a main detector in optical communication with the sample region through one or more light transmissive window. The light source directs a light beam into the sample region through one of the one or more light transmissive window. The light beam passes through the sample region and exits the sample region through one of the one or more light transmissive window. The main detector responds to the light beam exiting the sample region. The system allows for in situ measurement of molecular gas impurities in a chamber effluent, and in particular, in the effluent from a semiconductor processing chamber. Particular applicability is found in semiconductor manufacturing process control and hazardous gas leak detection.

8. 发明专利

DE69628623D1 未知
公开(公告)号：DE69628623D1
公开(公告)日：2003-07-17
申请号：DE69628623
申请日：1996-10-07
申请人： AIR LIQUIDE
发明人： MCANDREW JAMES , WANG HWA-CHI , JURCIK BENJAMIN J JR
IPC分类号： C23C16/44 , G01J3/433 , G01N21/03 , G01N21/35 , G01N21/39 , H01L21/02
摘要： Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample region. The system further comprises an absorption spectroscopy measurement system for detecting a gas phase molecular species. The measurement system comprises a light source and a main detector in optical communication with the sample region through one or more light transmissive window. The light source directs a light beam into the sample region through one of the one or more light transmissive window. The light beam passes through the sample region and exits the sample region through one of the one or more light transmissive window. The main detector responds to the light beam exiting the sample region. The system allows for in situ measurement of molecular gas impurities in a chamber effluent, and in particular, in the effluent from a semiconductor processing chamber. Particular applicability is found in semiconductor manufacturing process control and hazardous gas leak detection.

9. 发明专利

BR9911534A 未知
公开(公告)号：BR9911534A
公开(公告)日：2001-03-13
申请号：BR9911534
申请日：1999-02-24
申请人： AIR LIQUIDE
发明人： JOSHI MAHENDRA L , JURCIK BENJAMIN J JR , SIMON JEAN-FRANCOIS
IPC分类号： C03B5/235 , F23C5/08 , F23C99/00 , F23D14/24 , F23D14/32 , F23M5/02 , F23D14/00

10. 发明专利

SG48477A1 Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system and methods of use 未知
公开(公告)号：SG48477A1
公开(公告)日：1998-04-17
申请号：SG1996010797
申请日：1996-10-04
申请人： AIR LIQUIDE
发明人： MCANDREW JAMES , WANG HWA-CHI , JURCIK BENJAMIN J JR
IPC分类号： G01N21/31 , G01N21/39 , H01L21/00

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