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1. 发明申请

WO2006116572A2 LINER-BASED LIQUID STORAGE AND DISPENSING SYSTEMS WITH EMPTY DETECTION CAPABILITY 审中-公开
标题翻译：基于液体的液体存储和分配系统具有空白检测能力
公开(公告)号：WO2006116572A2
公开(公告)日：2006-11-02
申请号：PCT/US2006/015964
申请日：2006-04-25
申请人： ADVANCED TECHNOLOGY MATERIALS, INC. , HOVINEN, Minna , KINGERY, John, R. , TOM, Glenn, M. , O'DOUGHERTY, Kevin, T. , MIKKELSEN, Kirk , WARE, Donald, D. , VAN BUSKIRK, Peter, C.
发明人： HOVINEN, Minna , KINGERY, John, R. , TOM, Glenn, M. , O'DOUGHERTY, Kevin, T. , MIKKELSEN, Kirk , WARE, Donald, D. , VAN BUSKIRK, Peter, C.
IPC分类号： B01J14/00
CPC分类号： B65D83/0061 , B01J4/02 , B01J2219/00065 , B01J2219/00067 , B01J2219/00069 , B01J2219/00164 , G01F23/18
摘要： Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.
摘要翻译：用于储存和分配化学试剂和组合物的流体供应系统，例如用于制造微电子器件产品的高纯度液体试剂和化学机械抛光组合物，具有在所含液体处于或等待时检测空或近空状态的能力，在分配操作期间接近耗尽。描述了使用空的检测装置的流体输送系统，包括压力传感器监测供应包装中间的分配材料和伺服液压分配泵，或监测在分配器中的分配器室补充时间，该分配器在循环调度中被补充以从分配器利用所分配的材料到下游工具。

2. 发明申请

WO2006133026A2 FLUID STORAGE AND DISPENSING SYSTEMS AND PROCESSES 审中-公开
标题翻译：流体储存和分配系统和流程
公开(公告)号：WO2006133026A2
公开(公告)日：2006-12-14
申请号：PCT/US2006/021622
申请日：2006-06-05
申请人： ADVANCED TECHNOLOGY MATERIALS, INC. , KINGERY, John, R. , BRESTOVANSKY, Dennis , O'DOUGHERTY, Kevin, T. , TOM, Glenn, M. , MIKKELSEN, Kirk , SMITH, Matthew , WARE, Donald, D. , NELSON, Greg , HAAPALA, Robert , OBERG, Russell , HOYT, Tim , GEROLD, Jason , NESDAHL, Kevin , JANCSEK, John
发明人： KINGERY, John, R. , BRESTOVANSKY, Dennis , O'DOUGHERTY, Kevin, T. , TOM, Glenn, M. , MIKKELSEN, Kirk , SMITH, Matthew , WARE, Donald, D. , NELSON, Greg , HAAPALA, Robert , OBERG, Russell , HOYT, Tim , GEROLD, Jason , NESDAHL, Kevin , JANCSEK, John
IPC分类号： B67D1/08
CPC分类号： B67D7/0288 , B67D7/0261 , B67D7/32 , B67D7/3227 , B67D7/3281 , B67D7/34 , B67D7/344 , F16K35/00 , F16K35/025 , F16L37/08 , Y10T29/49826 , Y10T29/53
摘要： Fluid storage and dispensing systems and processes involving various devices, structures and arrangements, as well as techniques and methods, for fluid storage and dispensing, including, without limitation, pre-connect verification couplings that are usefully employed in application to fluid storage and dispensing packages, to ensure proper coupling and avoid fluid contamination issues, empty detect systems that are usefully employed for fluid storage and dispensing packages incorporating liners that are pressure-compressed in the fluid dispensing operation, ergonomically enhanced structures for facilitating removal of a dispense connector from a capped vessel, cap integrity assurance systems for preventing misuse of vessel caps, and keycoding systems for ensuring coupling of proper dispense assemblies and vessels. Fluid storage and dispensing systems are described, which achieve zero or near-zero headspace character, and prevent or ameliorate solubilization effects in liquid dispensing from liners in overpack vessels.
摘要翻译：涉及用于流体储存和分配的各种装置，结构和布置以及技术和方法的流体存储和分配系统和方法，包括但不限于预先连接的验证联接器，其有效地用于流体储存和分配包装，以确保正确耦合并避免流体污染问题，空气检测系统有效地用于流体储存和分配包装，包括在流体分配操作中被压缩的衬垫，符合人体工程学的增强结构，便于将分配连接器从封盖船舶，船帽完整性保证系统，防止船只盖的误用，以及键盘系统，用于确保合适的分配组件和船只的连接。描述了流体存储和分配系统，其实现零或接近零的顶空特征，并且防止或改善在外包装容器中的衬垫中的液体分配中的增溶作用。

3. 发明申请

WO2006116428A3 APPARATUS AND PROCESS FOR STORAGE AND DISPENSING OF CHEMICAL REAGENTS AND COMPOSITIONS 审中-公开
公开(公告)号：WO2006116428A3
公开(公告)日：2006-11-02
申请号：PCT/US2006/015679
申请日：2006-04-25
申请人： ADVANCED TECHNOLOGY MATERIALS, INC. , WANG, Weihua , BERNHARD, David , BAUM, Thomas, H. , MIKKELSEN, Kirk , MLYNAR, Greg , HOVINEN, Minna , TOM, Glenn, M. , O'DOUGHERTY, Kevin, T. , YAN, Hongwei
发明人： WANG, Weihua , BERNHARD, David , BAUM, Thomas, H. , MIKKELSEN, Kirk , MLYNAR, Greg , HOVINEN, Minna , TOM, Glenn, M. , O'DOUGHERTY, Kevin, T. , YAN, Hongwei
IPC分类号： B65D35/22
摘要： A fluid storage and dispensing package, including a rigid overpack defining an interior volume, a liner disposed in the interior volume of the overpack to hold liquid medium, and a positional fixation structure arranged to restrain movement of the liner when holding liquid medium, wherein the positional fixation structure is not in contact with liquid medium when liquid medium is contained in the liner. Such package, and associated packaging method, preferably involves zero-headspace containment of the liquid or liquid-containing material, and is particularly advantageous in application to storage and dispensing of film-forming colloidal silica-based chemical mechanical polishing (CMP) compositions, with respect to suppressing the presence of microbubbles and unwanted particles.

4. 发明申请

WO2006116389A2 MATERIAL STORAGE AND DISPENSING PACKAGES AND METHODS 审中-公开
标题翻译：材料储存和分配包和方法
公开(公告)号：WO2006116389A2
公开(公告)日：2006-11-02
申请号：PCT/US2006/015605
申请日：2006-04-25
申请人： ADVANCED TECHNOLOGY MATERIALS, INC. , TOM, Glenn, M. , KINGERY, John, R. , O'DOUGHERTY, Kevin, T. , MIKKELSEN, Kirk , ALBERG, Michele , MENNING, Joseph , YAN, Hongwei
发明人： TOM, Glenn, M. , KINGERY, John, R. , O'DOUGHERTY, Kevin, T. , MIKKELSEN, Kirk , ALBERG, Michele , MENNING, Joseph , YAN, Hongwei
IPC分类号： B65B3/00
CPC分类号： B65D33/00 , B65B31/003 , B65D83/0061 , B65D83/62 , Y10T428/249981 , Y10T428/31757
摘要： Packages and methods for storage and dispensing of materials, e.g., high purity liquid reagents and chemical mechanical polishing compositions used in the manufacture of microelectronic device products, including containment structures and methods adapted for pressure-dispensing of high-purity liquids. Liner packaging of liquid or liquid-containing media is described, in which zero or near-zero head space conformations are employed to minimize adverse effects of particle generation, formation of bubbles and degradation of contained material.
摘要翻译：用于存储和分配材料的包装和方法，例如用于制造微电子器件产品的高纯度液体试剂和化学机械抛光组合物，包括适于压力分配高纯度液体的容纳结构和方法。描述了液体或含液体介质的衬里包装，其中使用零或近零零的顶部空间构象来最小化产生颗粒的不利影响，气泡的形成和所含材料的劣化。

5. 发明申请

WO2007146892A2 LIQUID DISPENSING SYSTEMS ENCOMPASSING GAS REMOVAL 审中-公开
标题翻译：液体分配系统去除气体
公开(公告)号：WO2007146892A2
公开(公告)日：2007-12-21
申请号：PCT/US2007/070911
申请日：2007-06-11
申请人： ADVANCED TECHNOLOGY MATERIALS, INC. , WARE, Donald, D. , TOM, Glenn, M. , DATHE, Paul , KOLAND, Amy , GEROLD, Jason , MIKKELSEN, Kirk , O'DOUGHERTY, Kevin, T. , CISEWSKI, Michael, A.
发明人： WARE, Donald, D. , TOM, Glenn, M. , DATHE, Paul , KOLAND, Amy , GEROLD, Jason , MIKKELSEN, Kirk , O'DOUGHERTY, Kevin, T. , CISEWSKI, Michael, A.
IPC分类号： B67B7/00
CPC分类号： B67D7/763 , B65D83/62 , B67D7/0261 , Y10T137/313
摘要： Systems are described for delivery of a wide variety of materials in which liquid and gas or vapor states are concurrently present, from a package preferably including a fluid-containing collapsible liner. Headspace gas is removed from a pressure dispensing package prior to liquid dispensation therefrom, and ingress gas is removed thereafter during dispensation operation. At least one sensor senses presence of gas or a gas-liquid interface in a reservoir or gas-liquid separation region. A gas removal system including an integral reservoir, at least one sensor, and at least one flow control elements may be included within a connector adapted to mate with a pressure dispensing package, for highly efficient removal of gas from the liquid being dispensed from the container.
摘要翻译：描述了用于递送液体和气体或气体状态同时存在的各种材料的系统，优选地包括含有流体的可折叠衬垫。在从其分配液体之前，从压力分配包装中取出顶空气体，然后在分配操作期间移除入口气体。至少一个传感器感测储存器或气液分离区域中气体或气 - 液界面的存在。包括整体储存器，至少一个传感器和至少一个流量控制元件的气体去除系统可以包括在适于与压力分配包装件配合的连接器内，用于从容器中分配的液体高效地去除气体。

6. 发明申请

WO2007061967A2 MATERIAL STORAGE AND DISPENSING CONTAINERS AND SYSTEMS COMPRISING SAME 审中-公开
标题翻译：材料储存和分配容器及包含该容器的系统
公开(公告)号：WO2007061967A2
公开(公告)日：2007-05-31
申请号：PCT/US2006/044926
申请日：2006-11-20
申请人： ADVANCED TECHNOLOGY MATERIALS, INC. , KOLAND, Amy , GEROLD, Jason , MIKKELSEN, Kirk , BICKETT, Steve , TOM, Glenn, M. , O'DOUGHERTY, Kevin, T. , KUSZ, Matthew , WARE, Donald, D. , NELSON, Greg
发明人： KOLAND, Amy , GEROLD, Jason , MIKKELSEN, Kirk , BICKETT, Steve , TOM, Glenn, M. , O'DOUGHERTY, Kevin, T. , KUSZ, Matthew , WARE, Donald, D. , NELSON, Greg
IPC分类号： B67C3/22
CPC分类号： B67D7/0294 , B67D7/0272
摘要： A material supply system including a container defining an interior volume for holding the material, such container including a dispense opening therein, a dip tube for dispensing the material from the container, and a fitment mounted in the opening of the container. The fitment in one implementation includes at least two port openings therein, through one of which the dip tube extends into the interior volume of the container, and with another of the at least two port openings being adapted for one or more of (i) filling the container, (ii) venting the container, (iii) recirculation of material during dispensing and (iv) flow of a pressurized medium into the interior volume to assist the dispensing. The container can be of a bag-in-drum or a bag-in-can type. A liner with multiple fitments may be employed. The container in another implementation is fabricated with damping structure, e.g., vibrational damping structure, to reduce susceptibility of the container to adverse vibrational and resonant frequency effects.
摘要翻译：一种材料供应系统，包括限定用于保持材料的内部容积的容器，所述容器在其中包括分配开口，用于从容器分配材料的浸入管以及安装在容器的开口中的配件。在一个实施方案中的装配包括其中的至少两个端口开口，其中汲取管中的一个延伸到容器的内部容积中，并且所述至少两个端口开口中的另一个适于一个或多个（i）填充容器，（ii）排出容器，（iii）在分配期间再循环材料，以及（iv）将加压介质流入内部空间以帮助分配。容器可以是桶式包装或罐式罐型。可以使用具有多个配件的衬管。在另一实施例中的容器用阻尼结构（例如振动阻尼结构）制造，以减小容器对不利的振动和共振频率效应的敏感性。

7. 发明申请

WO2005019797A2 COLORIMETRIC GAS DETECTOR AND WINDOWED PROCESS CHAMBER 审中-公开
标题翻译：比色气体检测器和窗式加工室
公开(公告)号：WO2005019797A2
公开(公告)日：2005-03-03
申请号：PCT/US2004/025339
申请日：2004-08-05
申请人： ADVANCED TECHNOLOGY MATERIALS, INC. , MARGANSKI, Paul, J. , SWEENEY, Joseph, D. , TOM, Glenn, M. , ARNO, Jose, I. , BAUM, Thomas, H. , ROEDER, Jeffrey, F. , HILLS, James, R.
发明人： MARGANSKI, Paul, J. , SWEENEY, Joseph, D. , TOM, Glenn, M. , ARNO, Jose, I. , BAUM, Thomas, H. , ROEDER, Jeffrey, F. , HILLS, James, R.
IPC分类号： G01N
CPC分类号： G01N21/783
摘要： A windowed chamber, e.g., a semiconductor manufacturing process chamber such as a scrubber, deposition chamber, thermal reactor, or the like, including a port with a radiation-transmissive window therein. Interiorly disposed within the chamber is (i) a disposable film on an interior surface of the window and/or (ii) a colorimetric medium disposed in viewable relationship to the window, so that a colorimetric change is perceivable through the window, e.g., visually or by optical sensing device, when the colorimetric medium is exposed to target gas species. Also disclosed is a gas detection article including a polymeric material that is colorimetrically responsive to the presence of at least one target gas species, in exposure thereto.
摘要翻译：窗式腔室，例如半导体制造处理腔室，例如洗涤器，沉积腔室，热反应器等，其包括其中具有辐射透射窗口的端口。内部布置在腔室内的是（i）在窗户内表面上的一次性薄膜和/或（ii）以与窗户可视关系布置的比色介质，使得可以通过窗户感知比色变化，例如视觉上或者通过光学传感装置，当比色介质暴露于目标气体物质时。还公开了一种气体检测制品，其包括对暴露于其中的至少一种目标气体物质的存在进行比色响应的聚合物材料。

8. 发明申请

WO2005111592A2 ELECTROCHEMICAL DRIVE CIRCUITRY AND METHOD 审中-公开
标题翻译：电化学驱动电路和方法
公开(公告)号：WO2005111592A2
公开(公告)日：2005-11-24
申请号：PCT/US2005/013772
申请日：2005-04-22
申请人： ADVANCED TECHNOLOGY MATERIALS, INC. , TOM, Glenn, M. , LURCOTT, Steven
发明人： TOM, Glenn, M. , LURCOTT, Steven
IPC分类号： G01N27/26
CPC分类号： G01N27/42
摘要： An electrochemical drive circuitry and method, such as may be employed in electroplating bath chemical monitoring. A microcontroller can be utilized to selectively apply galvanostatic or potentiostatic conditions on the electrochemical cell, for measurement of response of the electrochemical cell to such conditions, with the microcontroller arranged to generate an offset potential to control potential across the electrochemical cell within a range of potential accommodated by a unipolar power supply, and/or a CMOS analog switch can be employed in combination with individual digital-to-analog converters for each of the current-controlled and potential-controlled conditions, to provide high-speed, dual mode operating capability.
摘要翻译：电化学驱动电路和方法，例如可用于电镀浴化学监测。可以使用微控制器来选择性地对电化学电池施加恒电流或恒电势条件，用于测量电化学电池对这种条件的响应，微控制器被布置成产生在电势范围内跨越电化学电池的电位来控制电位通过单极电源容纳的和/或CMOS模拟开关可以与各个数模转换器结合使用，用于每个电流控制和电位控制条件，以提供高速双模操作能力。

9. 发明申请

WO2003040882A2 METHOD AND APPARATUS FOR MONITORING CONTROL AND ANALYSIS OF INDEPENDENT SYSTEMS IN A MANUFACTURING FACILITY 审中-公开
标题翻译：用于监控制造设备中独立系统的控制和分析的方法和装置
公开(公告)号：WO2003040882A2
公开(公告)日：2003-05-15
申请号：PCT/US2002/035415
申请日：2002-11-05
申请人： ADVANCED TECHNOLOGY MATERIALS, INC. , LURCOTT, Steven, M. , TOM, Glenn, M. , DUBOIS, Ray , DIETZ, James, A. , ZITZMANN, Oliver, A.
发明人： LURCOTT, Steven, M. , TOM, Glenn, M. , DUBOIS, Ray , DIETZ, James, A. , ZITZMANN, Oliver, A.
IPC分类号： G06F
CPC分类号： G05B21/02 , G05B2219/13 , G05B2219/25204 , G05B2219/31457 , Y02P80/40 , Y02P90/86
摘要： A method and apparatus are provided for remotely configuring, operating and monitoring equipment in a manufacturing facility. An interface is provided that allows a remote user to establish a connection with desired equipment in order to configure, operate or monitor the equipment. The disclosed interface performs any required translation between the diverse equipment and protocols of different equipment manufacturers. A web-based connection to remote equipment allows a variety of diverse equipment systems to be accessed and controlled in a uniform manner. Historical data can be analyzed following a failure using pattern recognition techniques to identify data patterns that suggest an imminent failure. The remote monitoring of ancillary equipment from a number of vendors in a semiconductor factory allows a multipoint failure to be analyzed and a root cause to be identified.
摘要翻译：提供了用于在制造设施中远程配置，操作和监视设备的方法和装置。提供了一个接口，允许远程用户建立与所需设备的连接，以配置，操作或监视设备。所公开的接口在不同设备制造商的不同设备和协议之间执行任何所需的转换。与远程设备的基于Web的连接允许以统一的方式访问和控制各种各样的设备系统。历史数据可以在故障之后使用模式识别技术进行分析，以识别提示即将发生故障的数据模式。半导体工厂的多家供应商对辅助设备的远程监控允许对多点故障进行分析，并确定根本原因。

10. 发明申请

WO2007027496A3 PERMEABLE GAS ASSEMBLY FOR GAS DELIVERY 审中-公开
公开(公告)号：WO2007027496A3
公开(公告)日：2007-03-08
申请号：PCT/US2006/033044
申请日：2006-08-24
申请人： ADVANCED TECHNOLOGY MATERIALS, INC. , TOM, Glenn, M.
发明人： TOM, Glenn, M.
IPC分类号： F16K31/12
摘要： A valve assembly. for controlling gas delivery from a higher pressure fluid source to a lower pressure processing tool. The valve assembly includes a valve poppet movingly engageable with a valve seating member and a fluid permeable insert positioned between the valve poppet and the valve seating member that is unexposed to flowing fluid when the valve poppet is in a closed position thereby preventing fluid flow through the valve assembly and providing a diffusional path for transfer of all flowing fluid when the valve poppet is in an open position. The permeable insert can be inserted into the sealable and engageable surface of either the valve seat member or the valve poppet.

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