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1. 发明专利

BRPI0814731A2 未知
公开(公告)号：BRPI0814731A2
公开(公告)日：2015-02-24
申请号：BRPI0814731
申请日：2008-06-22
申请人： ADVANCED TECH MATERIALS
发明人： CARRUTHERS J DONALD , BOGGS KARL , WANG LUPING , WILSON SHAUN , ARNO JOSE I , MARGANSKI PAUL J , BILODEAU STEVEN M , ZOU PENG , BOBITA BRIAN , SWEENEY JOSEPH D , EDWARDS DOUGLAS
IPC分类号： F25B17/08 , F25B30/04 , F25B35/04

2. 发明专利

AU5699701A Apparatus and process for the abatement of semiconductor manufacturing effluentscontaining fluorine gas 未知
公开(公告)号：AU5699701A
公开(公告)日：2001-10-30
申请号：AU5699701
申请日：2001-04-09
申请人： ADVANCED TECH MATERIALS
发明人： ARNO JOSE I
IPC分类号： B01D53/34 , B01D53/68 , C23F4/00 , B01D53/70
摘要： Apparatus and process for the abatement of fluorine and fluorine-containing compounds from gases containing same, such as effluent gas streams from semiconductor manufacturing operations, wherein a fluorocompound abatement medium is injected into the fluorocompound-containing gas. The fluorocompound abatement medium comprises at least one of steam, methane and hydrogen, with the proviso that when the fluorocompound abatement medium contains methane and/or hydrogen, the injection of the fluorocompound abatement medium is conducted under non-combustion conditions.

3. 发明专利

SG10201401164RA RECTANGULAR PARALLELEPIPED FLUID STORAGE AND DISPENSING VESSEL 未知
公开(公告)号：SG10201401164RA
公开(公告)日：2014-07-30
申请号：SG10201401164R
申请日：2003-11-25
申请人： ADVANCED TECH MATERIALS
发明人： BRESTOVANSKY DENNIS , WODJENSKI MICHAEL J , ARNO JOSE I , CARRUTHERS DONALD J , PHILIP A MOROCO
IPC分类号： B01D20060101 , B01D53/02 , B01D53/04 , B01D59/26 , B67D7/74 , B67D99/00 , F17C11/00
摘要： A vessel having a drawn seamless tube closed at one end to define an interior volume holding a monolithic carbon adsorbent that is confonned in size and shape to the interior volume of the drawn seamless tube and occupies at least 60% of said interior volume is described. The drawn seamless tube having an opposite end to which a top plate member is welded, with a fluid dispensing assembly secured to the top plate member. By the use of the adsorbent media, a gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.

4. 发明专利

SG156669A1 NOVEL METHODS FOR CLEANING ION IMPLANTER COMPONENTS 未知
公开(公告)号：SG156669A1
公开(公告)日：2009-11-26
申请号：SG2009070137
申请日：2005-10-21
申请人： ADVANCED TECH MATERIALS
发明人： DIMEO FRANK JR , DIETZ JAMES , OLANDER W KARL , KAIM ROBERT , BISHOP STEVEN E , NEUNER JEFFREY W , ARNO JOSE I
摘要： A method and apparatus for cleaning residue from components of the vacuum chamber and beamline of an ion implanter used in the fabrication of microelectronic devices. To effectively remove residue, the components are contacted with a gas-phase reactive halide composition for sufficient time and under sufficient conditions to at least partially remove the residue. The gas-phase reactive halide composition is chosen to react selectively with the residue, while not reacting with the components of the ion source region of the vacuum chamber.

5. 发明申请

WO2009002893A2 COMPONENT FOR SOLAR ADSORPTION REFRIGERATION SYSTEM AND METHOD OF MAKING SUCH COMPONENT 审中-公开
标题翻译：太阳能吸附制冷系统的组件和制造这种组件的方法
公开(公告)号：WO2009002893A2
公开(公告)日：2008-12-31
申请号：PCT/US2008067824
申请日：2008-06-22
申请人： ADVANCED TECH MATERIALS , CARRUTHERS J DONALD , BOGGS KARL , WANG LUPING , WILSON SHAUN , ARNO JOSE I , MARGANSKI PAUL J , BILODEAU STEVEN M , ZOU PENG , BOBITA BRIAN , SWEENEY JOSEPH D , EDWARDS DOUGLAS
发明人： CARRUTHERS J DONALD , BOGGS KARL , WANG LUPING , WILSON SHAUN , ARNO JOSE I , MARGANSKI PAUL J , BILODEAU STEVEN M , ZOU PENG , BOBITA BRIAN , SWEENEY JOSEPH D , EDWARDS DOUGLAS
IPC分类号： F25B17/08 , F25B30/04 , F25B35/04
CPC分类号： B01J20/26 , B01J20/20 , B01J20/28054 , B01J20/28092 , B01J20/30 , B01J20/305 , B01J20/3078 , B01J2220/445 , C09K5/047 , F25B17/08 , F25B27/007 , F25B35/04 , F25B37/00 , F25B2500/01
摘要： An adsorption structure is described that includes at least one adsorbent member formed of an adsorbent material and at least one porous member provided in contact with a portion of the adsorbent member to allow gas to enter and exit the portion of the adsorbent member. Such adsorption structure is usefully employed in adsorbent-based refrigeration systems. A method also is described for producing an adsorbent material, in which a first polymeric material is provided having a first density and a second polymeric material is provided having a second density, in which the second polymeric material is in contact with the first polymeric material to form a structure. The structure is pyrolyzed to form a porous adsorbent material including a first region corresponding to the first polymeric material and a second region corresponding to the second polymeric material, in which at least one of the pore sizes and the pore distribution differs between the first region and the second region.
摘要翻译：描述了吸附结构，其包括由吸附剂材料形成的至少一个吸附构件和与吸附构件的一部分接触设置的至少一个多孔构件，以允许气体进入和离开吸附构件的该部分。这种吸附结构在吸附剂型制冷系统中有用。描述了一种用于生产吸附材料的方法，其中提供具有第一密度的第一聚合物材料，并且提供具有第二密度的第二聚合物材料，其中第二聚合物材料与第一聚合物材料接触，形成一个结构。该结构被热解以形成多孔吸附材料，其包括对应于第一聚合物材料的第一区域和对应于第二聚合物材料的第二区域，其中孔径和孔分布中的至少一个在第一区域和第第二个地区。

6. 发明申请

WO2007134183A3 CHEMICAL REAGENT DELIVERY SYSTEM UTILIZING IONIC LIQUID STORAGE MEDIUM 审中-公开
标题翻译：化学试剂输送系统利用离子液体储存介质
公开(公告)号：WO2007134183A3
公开(公告)日：2008-01-17
申请号：PCT/US2007068693
申请日：2007-05-10
申请人： ADVANCED TECH MATERIALS , ARNO JOSE I , WANG LUPING , COOPER EMANUEL I
发明人： ARNO JOSE I , WANG LUPING , COOPER EMANUEL I
IPC分类号： B01J8/02 , B01J35/02
CPC分类号： F17C11/00
摘要： A system (10) including a reagent supply container (12) in which a vessel (14) holds a composition including a chemical reagent dissolved or dispersed in a storage liquid (18) that is reversibly interactive with the chemical reagent to store the chemical reagent therein, and an ultrasonic energy source (19, 32, 34) adapted to introduce ultrasonic energy into the composition to liberate the chemical reagent therefrom for dispensing from the vessel of the reagent supply container. The ultrasonic energy source can be internally provided in the container, or may be provided as part of an external ultrasonic energy impingement unit (112), in which the stored chemical reagent, e.g., a microelectronic device manufacturing reagent, is extracted from the liquid storage medium for transport to a reagent-utilizing process or facility (38). The liquid storage medium may for example include an ionic liquid with which the chemical reagent is reversibly taken up, and subsequently released under ultrasonic energy exposure dispensing conditions.
摘要翻译：一种系统（10），包括试剂供应容器（12），其中容器（14）保持包含溶解或分散在与化学试剂可逆地相互作用的储存液体（18）中的化学试剂的组合物，以储存化学试剂和超声能量源（19,32,34），其适于将超声能量引入所述组合物中以释放其中的化学试剂，用于从所述试剂供应容器的容器分配。超声能量源可以内部设置在容器中，或者可以作为外部超声波能量冲击单元（112）的一部分提供，其中存储的化学试剂例如微电子器件制造试剂从液体存储器用于运送到试剂利用过程或设施（38）的介质。液体存储介质可以例如包括离子液体，化学试剂可以通过该离子液体被可逆地吸收，并且随后在超声能量曝光分配条件下释放。

7. 发明申请

WO2007027965A2 DELIVERY OF LOW PRESSURE DOPANT GAS TO A HIGH VOLTAGE ION SOURCE 审中-公开
标题翻译：将低压多孔气体输送到高压离子源
公开(公告)号：WO2007027965A2
公开(公告)日：2007-03-08
申请号：PCT/US2006034135
申请日：2006-08-29
申请人： ADVANCED TECH MATERIALS , ARNO JOSE I , OLANDER W KARL , KAIM ROBERT
发明人： ARNO JOSE I , OLANDER W KARL , KAIM ROBERT
IPC分类号： B05D3/00
CPC分类号： H01J37/08 , H01J27/02 , H01J37/3172 , H01J2237/0203
摘要： A system for delivery of low-pressure dopant gas to a high-voltage ion source in the doping of semiconductor substrates, in which undesired ionization of the gas is suppressed prior to entry into the high-voltage ion source, by modulating electron energy upstream of the high-voltage ion source so that electron acceleration effects are reduced to below a level supporting an electronic ionization cascade. The gas delivery system in a specific application includes a gas flow passage, a voltage generator electrically coupled with at least a portion of the gas flow passage to impose an electric field thereon, and an obstructive structure that is deployed to modulate acceleration length of electrons of the low-pressure gas in relation to ionization potential of the gas, to suppress ionization in the gas flow passage.
摘要翻译：一种用于在半导体衬底的掺杂中向高电压离子源传送低压掺杂气体的系统，其中在进入高压离子源之前，气体的不期望的电离被抑制，通过调制高电压离子源，使得电子加速效应降低到低于支持电子离子化级联的水平。具体应用中的气体输送系统包括气体流动通道，与气体流动通道的至少一部分电耦合以在其上施加电场的电压发生器，以及阻塞结构，其被展开以调制电子的加速度长度相对于气体的电离电位的低压气体，抑制气体流路中的电离。

8. 发明申请

WO2004052487A3 RECTANGULAR PARALLELEPIPED FLUID STORAGE AND DISPENSING VESSEL 审中-公开
标题翻译：矩形平行流体储存和分配容器
公开(公告)号：WO2004052487A3
公开(公告)日：2005-04-28
申请号：PCT/US0337719
申请日：2003-11-25
申请人： ADVANCED TECH MATERIALS
发明人： BRESTOVANSKY DENNIS , WODJENSKI MICHAEL J , ARNO JOSE I , CARRUTHERS J DONALD
IPC分类号： B01D20060101 , B01D53/02 , B01D53/04 , B01D59/26 , B67D7/74 , B67D99/00 , F17C11/00
CPC分类号： B01D53/053 , B01D53/0407 , B01D2253/102 , B01D2253/304 , B01D2253/342 , B01D2257/40 , B01D2257/704 , B01D2257/706 , B01D2257/93 , B01D2258/0216 , B01D2259/4525 , F17C11/00 , F17C13/084 , F17C2201/0157 , F17C2205/0103 , F17C2205/0338 , F17C2205/0391 , F17C2270/0518 , Y02E60/321 , Y10T137/0318
摘要： A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
摘要翻译：液体储存和分配设备包括具有长方体形状的流体储存和分配容器，以及在通风气体柜中包括这种流体存储和分配装置和/或使用点的通气气体洗涤器的集成气体柜组件。通过使用物理吸附剂和化学吸附剂介质，可以提高气柜的操作安全性，例如，从气柜提供的工艺气体具有有毒或其他危险性质。

9. 发明申请

WO2005029542A2 APPARATUS AND METHOD FOR POINT-OF-USE TREATMENT OF EFFLUENT GAS STREAMS 审中-公开
标题翻译：装置和方法，用于处理有利气体流的一些点
公开(公告)号：WO2005029542A2
公开(公告)日：2005-03-31
申请号：PCT/US2004029519
申请日：2004-09-09
申请人： ADVANCED TECH MATERIALS , ARNO JOSE I , STURM EDWARD A , SWEENEY JOSEPH D
发明人： ARNO JOSE I , STURM EDWARD A , SWEENEY JOSEPH D
IPC分类号： B01D19/04 , B01D45/00 , B01D53/14 , B01D53/68 , B01D53/70 , B01D53/78 , B01J4/00 , B01J4/04 , B01J8/00 , B01J8/20 , B01J8/22 , B01J19/00 , B01J19/26 , C23C16/44 , C30B25/14 , H01L20060101 , H01L
CPC分类号： C23C16/4412 , B01D19/04 , B01D45/00 , B01D53/14 , B01D53/68 , B01D53/70 , B01D53/75 , B01D53/78 , B01D53/86 , B01D2257/2047 , B01D2258/0216 , B01D2259/804 , B01J8/003 , B01J8/20 , B01J8/22 , B01J19/002 , B01J19/26 , B01J2219/00065 , B01J2219/00094 , B01J2219/00135 , B01J2219/00164 , B01J2219/00252 , B01J2219/00268 , C30B25/14
摘要： Multi-stage abatement systems and methods of use to remove final traces of pollutants and hazardous substances such as fluorinated species from effluents generated by semiconductor manufacturing operations. The effluent is treated in a main abatement tool, in combination with a secondary polishing scrubber that utilizes a high efficiency abatement technique to remove the final traces of pollutants from the effluent gas. The polishing scrubber can utilize treatment units such as high retention time scrubber vessels, recirculating post scrubber beds, dry post scrubbers, catalytic systems for OF2 abatement, and/or UV radiation systems for OF2 abatement.
摘要翻译：多级减排系统和使用方法，用于从半导体制造业务产生的污水中除去污染物和有害物质如氟化物质的最终痕迹。废水在主要减排工具中处理，与二次抛光洗涤器结合使用，其利用高效减排技术从废气中除去污染物的最终痕迹。抛光洗涤器可以利用处理单元，例如高保留时间洗涤器容器，循环洗涤器床，干燥后洗涤器，用于减少OF2的催化系统和/或UV辐射系统以减少OF2。

10. 发明申请

WO2008103241A3 A FLUID FILTER WITH POLYMERIC MEMBRANE AND METAL SUPPORTS 审中-公开
标题翻译：具有聚合物薄膜和金属支持的流体过滤器
公开(公告)号：WO2008103241A3
公开(公告)日：2009-12-23
申请号：PCT/US2008001541
申请日：2008-02-06
申请人： ENTEGRIS INC , ADVANCED TECH MATERIALS , DIPRIZIO ANTHONY , MATTHEWS PAUL , ARNO JOSE I
发明人： DIPRIZIO ANTHONY , MATTHEWS PAUL , ARNO JOSE I
IPC分类号： B01D37/00 , B01D61/00
CPC分类号： F16L55/24 , B01D65/00 , B01D65/003 , B01D69/10 , B01D71/36 , B01D2313/20 , F17C2205/0338 , F17C2205/0341 , F17C2205/0344 , F17C2205/0391 , Y10T137/794
摘要： The present invention provides a fluid filter utilizing a polymeric membrane supports by metallic screens contained in a housing. The supports have apertures through which fluid can pass. The metallic supports are created such that they have at least one surface substantially free from burrs, so as not to damage the membrane. This smooth surface is in communication with the polymeric membrane. One or more indexing protrusions can be added along the circumference to restrict the relative movement between the supports, and to align the apertures of the two supports.
摘要翻译：本发明提供了一种利用包含在壳体中的金属筛网利用聚合物膜支架的流体过滤器。支撑件具有流体可以通过的孔。制造金属支撑体使得它们具有至少一个基本上没有毛刺的表面，以便不损坏膜。该光滑表面与聚合物膜连通。可以沿着圆周添加一个或多个分度突起，以限制支撑件之间的相对运动并且对准两个支撑件的孔。

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