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    • 9. 发明申请
    • FABRICATION OF STRUCTURES IN AN OPTICAL SUBSTRATE
    • 在光学基板上制造结构
    • WO2006068707A1
    • 2006-06-29
    • PCT/US2005/039955
    • 2005-11-04
    • 3M INNOVATIVE PROPERTIES COMPANY
    • BIYIKLI, LeventPORQUE, Jerome C.BATTIATO, James M.STEGALL, David B.
    • G02B6/02
    • G02B6/02138G02B6/02133G02B6/02152
    • A system and method for fabricating structures (52) in an optical substrate (54). An optical element (80) produces first and second write beams (110, 112) that intersect at a first intersection location (112) at the optical substrate (54). The first intersection location (118) includes a fringe pattern (52) produced by the first and second write beams (110, 112). The optical element (80) also produces first and second reference beams (114, 116) that intersect and are recombined at a second intersection location (119) in substantially the same plane as the first intersection location (118). A controller then controls relative positioning between the optical substrate (54) and the fringe pattern based on a signal derived from the recombined first and second reference beams (114, 116).
    • 一种用于在光学基板(54)中制造结构(52)的系统和方法。 光学元件(80)产生在光学基板(54)处的第一交叉位置(112)处相交的第一和第二写入光束(110,112)。 第一交叉位置(118)包括由第一和第二写入光束(110,112)产生的条纹图案(52)。 光学元件(80)还产生第一和第二参考光束(114,116),其在与第一相交位置(118)基本相同的平面中的第二交叉点(119)处相交并重新组合。 控制器然后基于从重组的第一和第二参考光束(114,116)导出的信号来控制光学基板(54)和条纹图案之间的相对定位。