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    • 2. 发明授权
    • 감광성 수지 조성물, 경화막의 제조 방법, 경화막, 액정 표시 장치 및 유기 EL 표시 장치
    • 感光性树脂组合物,固化膜的制造方法,固化膜,液晶显示装置,有机EL显示装置
    • KR101819625B1
    • 2018-01-17
    • KR1020167007212
    • 2014-09-25
    • 후지필름 가부시키가이샤
    • 마츠다토모키야마다사토루야마자키켄타시모야마타츠야
    • G03F7/039G03F7/004G03F7/40G03F7/38H01L27/32H01L51/50
    • G03F7/0392G02F1/133345G03F7/0045G03F7/038G03F7/0397G03F7/40H01L27/3258H01L51/5253
    • 내약품성을양호하게하고, 비유전율을낮게하여, 패턴의치수안정성을더 양호하게할 수있는감광성수지조성물, 경화막의제조방법, 경화막, 액정표시장치및 유기 EL 표시장치의제공. (A) 중합체성분, (B) 광산발생제, (C) 용제를함유하고, (A) 중합체성분이, (1) (a1) 산기가산분해성기로보호된기를갖는구성단위, 및 (a2) 가교성기를갖는구성단위를포함하는중합체 (A1) 및 (2) 구성단위 (a1)을포함하는중합체 (A2), 및구성단위 (a2)를포함하는중합체 (A3) 중적어도한쪽을포함하며; (3) 중합체 (A1)~(A3) 중적어도 1종이, (a4) 알칼리가수분해에의하여카복실기를발생하는기를갖는구성단위를포함하는중합체이거나, (4) 구성단위 (a4)를더 포함하고, 또한구성단위 (a1) 및구성단위 (a2)를포함하지않는중합체 (A4)를포함하며, (A) 중합체성분을구성하는전체구성단위에대하여, 구성단위 (a2)의비율이 10~40몰%이고, 구성단위 (a4)의비율이 1.0~20몰%인감광성수지조성물.
    • 一种固化膜,液晶显示装置和有机EL显示装置,其能够改善耐化学性,降低相对介电常数并改善图案的尺寸稳定性。 (A)包含(A)聚合物组分,(B)光酸产生剂和(C)溶剂的树脂组合物,其中聚合物组分(A) (A1),含有具有氰基的结构单元的聚合物(A1),含有结构单元(a1)的聚合物(A2)和含有结构单元(a2)的聚合物(A3)。 (3)至少一种聚合物(A1)至(A3),(a4)含有具有能够通过碱水解生成羧基的基团的结构单元的聚合物,(4) (a2)相对于构成聚合物成分(A)的全部构成单元的比例不同的构成单元(a1)和构成单元(a2) %构成单元(a4)的比例为1.0〜20摩尔%。
    • 7. 发明公开
    • 감광성 수지 조성물, 경화막의 형성 방법, 경화막, 유기 EL 표시 장치 및 액정 표시 장치
    • 感光性树脂组合物,固化膜的形成方法,固化膜,有机电致发光显示装置和液晶显示装置
    • KR1020130088776A
    • 2013-08-08
    • KR1020130008601
    • 2013-01-25
    • 후지필름 가부시키가이샤
    • 사키타쿄헤이카와시마타카시야마다사토루요네자와히로유키카시와기다이스케안도타케시
    • G03F7/004G03F7/26H01L51/50G02F1/13
    • G03F7/0045G02F1/13G03F7/039G03F7/0392G03F7/20G03F7/2002G03F7/26H01L51/50
    • PURPOSE: A photo-sensitive resin composition is provided to have the excellent substrate adhesion after hardening and to suppress a heat flow of patterns. CONSTITUTION: A photo-sensitive resin composition contains (Component A) satisfying the following (1) or (2); (Component B) a mineral acid generating agent; (Component C) a compound of the molecular weight less than 1000 having one or more residues of which acid radical is protected by an acid dissolution radical; and (Component D) a solvent. (a1) a constituent unit with the residues protected by acid dissolution radical and (a2) polymer having a constituent unit with a cross-linking radical (a1) polymer having a constituent unit with the residues protected by acid dissolution radical and (a2) polymer having a constituent unit with a cross-linking radical A hardening film forming method includes the following steps of: (1) spreading the photo-sensitive resin composition on a substrate; (2) removing a solvent from the spread photo-sensitive resin composition; (3) exposing the photo-sensitive resin composition in which the solvent is removed to active beams; (4) developing the exposed photo-sensitive resin composition with aqueous developing solution; and (5) thermally hardening the developed photo-sensitive resin composition.
    • 目的:提供一种光敏树脂组合物,其在硬化后具有优异的基材粘合性并抑制图案的热流。 构成:感光性树脂组合物含有满足下述(1)或(2)的(成分A)。 (组分B)无机酸产生剂; (组分C)分子量小于1000的化合物,其具有酸残基被酸溶解基团保护的一个或多个残基; 和(组分D)溶剂。 (a1)具有被酸溶自由基保护的残基的构成单元和(a2)具有具有交联基团(a1)的构成单元的聚合物,所述交联基团(a1)具有具有由酸溶解自由基保护的残基的构成单元和(a2)聚合物 具有交联自由基的组成单元A固化膜形成方法包括以下步骤:(1)将感光树脂组合物铺展在基材上; (2)从涂布光敏树脂组合物中除去溶剂; (3)将其中去除溶剂的感光树脂组合物曝光到活性光束; (4)用含水显影液显影曝光的感光树脂组合物; 和(5)对显影的感光树脂组合物进行热硬化。