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    • 6. 发明公开
    • 분할 타겟 펄스 레이저 증착 장치 및 이를 이용한 초박막 다층구조 증착 방법
    • 具有分离靶的脉冲激光沉积装置和使用其的多层薄膜的沉积方法
    • KR1020140065901A
    • 2014-05-30
    • KR1020120132942
    • 2012-11-22
    • 한국과학기술연구원
    • 손지원박정훈윤경중이해원제해준김병국이종호
    • C23C14/28
    • The present invention relates to a pulse laser deposition apparatus including: a chamber in which a substrate and deposition materials are located, a target which is located in the chamber and rotates the deposition materials while supporting the deposition materials; and a laser generator for irradiating a portion of the target with laser so as to dissolve the deposition materials and to deposit a thin film on the substrate with the dissolved deposition materials, wherein the target supports two or more deposition materials while having physically segmented surfaces by the deposition materials, so that the deposition materials onto which the laser is irradiated are changed as the target rotates. According to the present invention, a multilayered ultrathin film having a predetermined cycle can be very precisely made by simple manipulation only.
    • 脉冲激光沉积设备技术领域本发明涉及一种脉冲激光沉积设备,包括:其中定位有基底和沉积材料的腔室,位于腔室中的靶,并且在沉积材料支撑的同时旋转沉积材料; 激光发生器,用于用激光照射靶的一部分,以溶解沉积材料,并用溶解的沉积材料将薄膜沉积在基底上,其中目标支持两种或更多种沉积材料,同时具有物理分段的表面, 沉积材料,使得激光照射到其上的沉积材料随着靶旋转而改变。 根据本发明,可以通过简单的操作非常精确地制造具有预定周期的多层超薄膜。