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    • 4. 发明公开
    • 금속 배선용 화학기계적 연마 조성물
    • 金属电路化学机械抛光组合物
    • KR1020070056205A
    • 2007-06-04
    • KR1020050114542
    • 2005-11-29
    • 코닝정밀소재 주식회사
    • 송명근엄대홍이지훈이윤규이상익
    • C09K3/14
    • Provided is a chemical mechanical polishing composition for a metal wire to reduce level difference of the wafer surface of a metal wire, thereby improving the smoothness of a metal layer. The chemical mechanical polishing composition comprises an abrasive; 0.005-5.0 wt% of a compound having an oxy-imine (or oxime) (>C=N-OH) group as a chelating agent; and a corrosion inhibitor. Preferably the abrasive is at least one selected from alumina (Al2O3), magnesia (MgO2), zirconia (ZrO2), ceria (CeO2), titania (TiO2) and tungsten oxide (WO3) and has a diameter of 10-300 nm; and the anticorrosive is selected from benzotriazole, 1,2,4-triazole, benzofuroxan, 2,1,3-benzotriazole, o-phenylenediamine, m-phenylenediamine, catechol, o-aminophenol, 2-mecaptobenzotriazole, 2-mercaptobenzimidazole, 2-mercaptobenzoxazole, melamine, their derivatives, and anionic, nonionic and amphiphilic surfactant.
    • 提供一种用于金属线的化学机械抛光组合物,以减少金属线的晶片表面的水平差,从而提高金属层的平滑度。 化学机械抛光组合物包括研磨剂; 0.005-5.0重量%的具有氧亚胺(或肟)(> C = N-OH)基的化合物作为螯合剂; 和腐蚀抑制剂。 优选地,研磨剂是选自氧化铝(Al 2 O 3),氧化镁(MgO 2),氧化锆(ZrO 2),氧化铈(CeO 2),二氧化钛(TiO 2)和氧化钨(WO 3)中的至少一种,并且具有10-300nm的直径; 防腐剂选自苯并三唑1,2,4-三唑,苯并呋喃糖,2,1,3-苯并三唑,邻苯二胺,间苯二胺,邻苯二酚,邻氨基苯酚,2-烟酸苯并三唑,2-巯基苯并咪唑, 巯基苯并恶唑,三聚氰胺,它们的衍生物和阴离子,非离子和两亲性表面活性剂。
    • 5. 发明公开
    • 원심 분리형 필터링 장치
    • 离心过滤器
    • KR1020070023379A
    • 2007-02-28
    • KR1020050077912
    • 2005-08-24
    • 코닝정밀소재 주식회사
    • 이윤규정재인현홍섭송명근구자호
    • B01D21/26B01D29/11
    • 본 발명은 원심 분리형 필터링 장치에 관한 것으로서, 서스펜션을 원심 분리 및 필터링하는 장치로서, 서스펜션이 공급 및 배출되기 위한 공급구 및 배출구가 각각 형성되며, 회전 가능하게 설치되는 회전용기와, 회전용기를 회전시키는 회전수단과, 회전용기의 회전시 회전용기내의 서스펜션에 존재하는 입자가 원심력에 의해 포집되도록 회전용기 내측에 설치되는 포집수단과, 회전용기내에서 공급구로부터 배출구로 이동하는 서스펜션을 필터링하도록 회전용기 내측에 설치되는 필터를 포함한다. 따라서, 본 발명은 서스펜션을 강제적인 회전력의 제공에 의해 원심 분리시킴과 아울러 필터링을 동시에 실시함으로써 고농도의 서스펜션에 대한 일정 크기 이상의 입자를 효과적으로 제거하고, 원심력에 의해 서스펜션에 존재하는 거대 입자들을 우선적으로 제거함으로써 필터 표면에 케익이 형성되는 것을 방지하여 필터링의 효율 및 능력을 최상으로 유지함과 아울러 필터의 수명을 연장시키며, 서스펜션에 대한 원심분리와 필터링을 정해진 시간마다 반복적으로 실시함으로써 침강하는 입자에 의한 오염을 방지함으로써 항상 안정된 상태를 유지하도록 하는 효과를 가지고 있다.
    • 8. 发明公开
    • 산화인듐주석 분말 및 그 제조 방법
    • 氧化铅粉末及其制造方法
    • KR1020080065793A
    • 2008-07-15
    • KR1020070002890
    • 2007-01-10
    • 코닝정밀소재 주식회사
    • 조윤주이지훈송명근윤필상정경구
    • C01G19/00C01G15/00
    • A method for preparing indium tin oxide powder is provided to produce the indium tin oxide powder capable of manufacturing a high-density target after sintering by improving a miscibility between indium and tin from the preparation step of powder. A method for preparing indium tin oxide powder includes the steps of: (S11) liquefying indium to prepare an indium solution; (S12) reacting a metal tin with nitric acid to prepare a metastannic acid solution; (S13) mixing the indium solution with the metastannic acid solution to prepare a mixed solution; and powdering the mixed solution. The powdering step comprises the steps of: (S14) neutralizing the mixed solution; (S15-S17) aging, filtering, and drying the precipitate to obtain powder; (S18) heat-treating the powder; and (S19) milling the heat-treated powder. Further, the indium solution is prepared by reacting indium and nitric acid, and a mixing ratio of the indium solution and the metastannic acid solution is 8:1 to 10:1.
    • 提供一种制备铟锡氧化物粉末的方法以制备能够在烧结之后通过从粉末制备步骤提高铟和锡之间的混溶性来制造高密度靶的氧化铟锡粉末。 制备氧化铟锡粉末的方法包括以下步骤:(S11)液化铟以制备铟溶液; (S12)使金属锡与硝酸反应,制备偏钛酸溶液; (S13)将铟溶液与偏钒酸溶液混合以制备混合溶液; 并粉化混合溶液。 粉化步骤包括以下步骤:(S14)中和混合溶液; (S15-S17)老化,过滤和干燥沉淀物得到粉末; (S18)对粉末进行热处理; 和(S19)研磨经热处理的粉末。 此外,铟溶液通过铟和硝酸反应制备,铟溶液和偏转酸溶液的混合比为8:1至10:1。
    • 9. 发明公开
    • 금속 산화물 서스펜션 제조 방법
    • 制备金属氧化物悬浮液的方法
    • KR1020060110979A
    • 2006-10-26
    • KR1020050033248
    • 2005-04-21
    • 코닝정밀소재 주식회사
    • 이윤규이진호송명근송신애구자호
    • H01L21/304
    • C09G1/02
    • A method for fabricating suspension of metal oxide is provided to obtain a hydration control and distributing effect while simplifying the fabricating process by incorporating a milling process and a hydration control process and a hydration distribution process in one step. A metal oxide is prepared(S1). A solvent and a surface process agent are mixed with the metal oxide(S2). The mixture is wet-milled so that the grain size of the metal oxide in the mixture is nano-scaled while the grain of the metal oxide is uniformly distributed into the mixture(S3). The mixture step and the wet-milling step are performed continuously or simultaneously.
    • 提供制造金属氧化物悬浮液的方法,以通过在一个步骤中结合研磨过程和水合控制方法和水合分配过程简化制造过程,从而获得水合控制和分配效果。 制备金属氧化物(S1)。 将溶剂和表面加工剂与金属氧化物(S2)混合。 将混合物湿磨,使得混合物中的金属氧化物的晶粒尺寸为纳米级,而金属氧化物的颗粒均匀分布在混合物中(S3)。 混合步骤和湿磨步骤连续或同时进行。
    • 10. 发明公开
    • 산화 주석 분말의 제조 방법 및 그 제조용 반응 장치
    • 生产氧化钛粉的制造方法及其制造方法
    • KR1020080053809A
    • 2008-06-16
    • KR1020060125791
    • 2006-12-11
    • 코닝정밀소재 주식회사
    • 윤필상송명근이지훈정경구조윤주
    • B22F9/16
    • A reaction apparatus for preparing a tin oxide powder is provided to manufacture a high density ITO(Indium-Tin-Oxide) target by improving structure of the reaction apparatus, and a method for preparing a tin oxide powder is provided to increase rate of a reaction between metal tin and nitric acid by using the reaction apparatus is provided. In a reaction apparatus(200) for preparing tin oxide, comprising a reactor(220) for reacting metal tin(50) with an aqueous nitric acid solution to produce a precipitate, the reaction apparatus further comprises a metal tin supporting support(240) disposed in a state that the metal tin supporting support is spaced from a bottom face of the reactor in a predetermined distance. The reaction apparatus further comprises an aerator(270) for supplying gas to generated bubbles. The aerator includes: a gas supply part(272) for supplying gas; a gas transfer part(274) for transferring gas generated by a gas generating part into the reactor; and a bubble generating part(276) for blowing the gas transferred from the gas transfer part into the reactor to generate bubbles. The reaction apparatus further comprises a gas chromatography having a thermal conductivity detector mounted thereon. The gas is at least one gas selected from the group consisting of an inert gas, a nitrogen gas, and a compressed gas.
    • 提供了制备氧化锡粉末的反应装置,通过改善反应装置的结构来制造高密度ITO(铟锡氧化物)靶,并且提供了制备氧化锡粉末的方法以增加反应速率 提供了通过使用反应装置在金属锡和硝酸之间。 在用于制备氧化锡的反应装置(200)中,包括用于使金属锡(50)与硝酸水溶液反应以产生沉淀物的反应器(220),反应装置还包括设置在金属锡支撑载体(240) 在金属锡支撑支撑件以预定距离与反应器的底面间隔开的状态。 反应装置还包括用于将气体供应到生成的气泡的曝气器(270)。 曝气机包括:用于供给气体的气体供给部(272) 用于将由气体发生部产生的气体输送到反应器中的气体转移部分(274) 以及用于将从气体传递部分输送的气体吹送到反应器中以产生气泡的气泡发生部分(276)。 反应装置还包括其上安装有热导检测器的气相色谱法。 气体是选自惰性气体,氮气和压缩气体中的至少一种气体。