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    • 1. 发明公开
    • 나노 또는 마이크로 크기의 유무기 복합 디바이스 및 그의제조방법
    • 纳米或微米有机无机复合材料及其生产方法
    • KR1020080073019A
    • 2008-08-08
    • KR1020070011501
    • 2007-02-05
    • 삼성전자주식회사삼성에스디아이 주식회사
    • 정원철두석광박성호박상철유상훈김성완
    • B82B1/00B82B3/00B82Y20/00
    • C25D1/04C23C28/00H01L51/4253H01L51/441Y02E10/549Y02P70/521Y10T428/31533Y10T428/31678Y10T428/31855
    • A nano or micro sized organic-inorganic composite device and a fabrication method thereof are provided to improve the transfer of electron by comprising fullerene-conducting composite and to mass-produce a single unit device having uniform size and quality by employing porous template in fabrication. A nano or micro sized organic-inorganic composite device has a photoactive layer(3) consisting of fullerene-conducting polymer composite between a first electrode(1) and a second electrode(2). The material for the first electrode and the second electrode is selected from Pt, Au, Al, Ni, Mo, W, ITO, carbon or carbon nanotube and conductive polymer. The organic-inorganic composite device optionally has a control layer between the second electrode and the photoactive layer. The material for the control layer is selected from Ag, Cu and Cd. The fullerene is selected from a group consisting of C60 fullerene, C70 fullerene, C76 fullerene, C78 fullerene and C84 fullerene. The conductive polymer is at least one selected from a group consisting of polypyrrole, polyaniline, polythiophene, polypyridine, polyazulene, polyindole, polycarbazole, polyazine, polyquinone, poly(3,4-ethylenedioxythiophene), polyacetylene, polyphenylene sulfide, polyphenylene vinylene, polyphenylene, polyisothianaphthene, poly(2-methoxy-5-(2'-ethyl)hexyloxy-p-phenylene vinylene), indium-tin oxide, indium-zinc oxide, polyethylene dioxythiophene/polystyrene sulfonate mixture, polyfuran, polythienyl vinylene and derivative thereof having alkane chain, carboxylic group and isocyanide functional group. A fabrication method of the organic-inorganic composite device comprises steps of: preparing porous template having a number of hollow channel; forming a first electrode by plating metal at the lower part inside a number of hollow channel of the template; forming a photoactive layer consisting of fullerene-conducting polymer composite on the first electrode in a number of hollow channel of the template; forming a second electrode on the photoactive layer in a number of hollow channels of the template; and removing the template.
    • 提供纳米或微尺寸的有机 - 无机复合器件及其制造方法,以通过包括富勒烯导电复合材料改进电子传递,并通过在制造中采用多孔模板大量生产具有均匀尺寸和质量的单一单元器件。 纳米或微尺寸的有机 - 无机复合器件在第一电极(1)和第二电极(2)之间具有由富勒烯导电聚合物复合材料组成的光敏层(3)。 第一电极和第二电极的材料选自Pt,Au,Al,Ni,Mo,W,ITO,碳或碳纳米管和导电聚合物。 有机 - 无机复合器件任选地在第二电极和光敏层之间具有控制层。 控制层的材料选自Ag,Cu和Cd。 富勒烯选自C60富勒烯,C70富勒烯,C76富勒烯,C78富勒烯和C84富勒烯。 导电聚合物是选自聚吡咯,聚苯胺,聚噻吩,聚吡啶,聚薁,聚吲哚,聚咔唑,聚嗪,聚醌,聚(3,4-亚乙基二氧噻吩),聚乙炔,聚苯硫醚,聚亚苯基亚乙烯基,聚亚苯基, 聚异硫茚,聚(2-甲氧基-5-(2'-乙基)己氧基 - 对亚苯基亚乙烯基),氧化铟锡,氧化铟锌,聚乙烯二氧噻吩/聚苯乙烯磺酸盐混合物,聚呋喃,聚噻吩乙烯及其衍生物, 链,羧基和异氰化物官能团。 有机 - 无机复合器件的制造方法包括以下步骤:制备具有多个中空通道的多孔模板; 通过在模板的多个中空通道内的下部电镀金属来形成第一电极; 在所述模板的多个空心通道中的所述第一电极上形成由富勒烯导电聚合物复合材料构成的光活性层; 在模板的多个中空通道中的光敏层上形成第二电极; 并删除模板。
    • 3. 发明公开
    • 연속 증착 장치
    • 连续蒸发装置
    • KR1020120102823A
    • 2012-09-19
    • KR1020110014351
    • 2011-02-18
    • 삼성에스디아이 주식회사
    • 임영창이제완이성호박성호최완욱정석헌
    • C23C14/24C23C14/56C23C14/04C23C14/54
    • PURPOSE: A continuous deposition device is provided to obtain an uncoated area without surface contamination by employing a first masking unit, a first guide unit, and first and second driving units which drive the first masking and guide units respectively. CONSTITUTION: A continuous deposition device comprises a first guide drum(130), a first evaporation source(140), a first masking unit(150), a first driving unit(160), a first guide unit(170), and a second driving unit. The first guide drum contacts one side of an electrode current collector supplied from an unwinder(120) and supports the electrode current collector. The first evaporation source is arranged close to the first guide drum and supplies an active material to the electrode current collector passing through the first guide drum. The first masking unit blocks a part of the electrode current collector passing through the first guide drum to form an uncoated area. The first driving unit reciprocates the first masking unit along the outer surface of the first guide drum. The first guide unit supports the motion of the first masking unit. The second driving unit is connected to the first guide unit and reciprocates the first guide unit in a direction perpendicular to the moving direction of the first masking unit.
    • 目的:提供连续沉积装置,以通过采用第一掩蔽单元,第一引导单元以及分别驱动第一掩蔽引导单元的第一和第二驱动单元来获得没有表面污染的未涂覆区域。 构造:连续沉积装置包括第一导向鼓(130),第一蒸发源(140),第一掩模单元(150),第一驱动单元(160),第一引导单元(170)和第二 驾驶单位 第一引导鼓接触从退绕器(120)供给的电极集电体的一侧并支撑电极集电器。 第一蒸发源被布置成靠近第一导向鼓并且将活性材料提供给通过第一导向鼓的电极集电体。 第一掩模单元阻挡通过第一导向鼓的电极集电体的一部分,以形成未涂覆的区域。 第一驱动单元沿着第一导向鼓的外表面使第一掩模单元往复运动。 第一引导单元支撑第一掩蔽单元的运动。 第二驱动单元连接到第一引导单元并使第一引导单元沿与第一蒙版单元的移动方向垂直的方向往复运动。
    • 4. 发明公开
    • 진공 증착 장치 및 이를 이용한 진공 증착 방법
    • 真空蒸发器和使用该蒸发器的蒸气蒸发方法
    • KR1020120046610A
    • 2012-05-10
    • KR1020100108351
    • 2010-11-02
    • 삼성에스디아이 주식회사
    • 이제완임영창이성호박성호최완욱정석헌
    • C23C14/24C23C14/04C23C14/54C23C14/56
    • PURPOSE: A vacuum deposition apparatus and method are provided to selectively deposit a source material in a coated portion, except a non-coated portion, by blocking the source material propagating to the non-coated portion. CONSTITUTION: A vacuum deposition apparatus comprises a drum(6), an evaporation source(7), a mask(8), a detecting sensor(9), and a control part. The drum supports the continuous movement of a polar substrate(2), which has a coated portion(22) and a non-coated portion(21), in a vacuum chamber(1). The evaporation source is installed opposite side of the drum and provides a deposition material to the coated portion. The mask travels between openings(711,721) of the evaporation source and controls the propagation of the deposition material from the evaporation source to the coated portion. The detecting sensor detects first and second reference points set on the traveling polar substrate. Third and fourth reference points set on the mask are calculated based on the first and second reference points. The control part controls the traveling of the polar substrate and the mask so that the deposition material is deposited on the coated portion according to the matching of the third and fourth reference points.
    • 目的:提供一种真空沉积装置和方法,通过阻挡传播到未涂覆部分的源材料来选择性地将源材料沉积在除了未涂覆部分之外的涂覆部分中。 构成:真空沉积装置包括鼓(6),蒸发源(7),掩模(8),检测传感器(9)和控制部分。 滚筒支撑在真空室(1)中具有涂覆部分(22)和非涂覆部分(21)的极性基底(2)的连续移动。 蒸发源安装在滚筒的相对侧,并向涂布部分提供沉积材料。 掩模在蒸发源的开口(711,721)之间行进,并控制沉积材料从蒸发源到涂覆部分的传播。 检测传感器检测设置在行驶极性基板上的第一和第二参考点。 基于第一和第二参考点计算掩模上设置的第三和第四参考点。 控制部控制极性基板和掩模的移动,使得根据第三和第四参考点的匹配,沉积材料沉积在涂覆部分上。
    • 5. 发明授权
    • 연속 증착 장치
    • KR101797243B1
    • 2017-11-14
    • KR1020110029382
    • 2011-03-31
    • 삼성에스디아이 주식회사
    • 이성호박성호임영창이제완정석헌최완욱
    • C23C14/24C23C14/56C23C14/54
    • 본발명은전극집전체에무지부를형성할수 있는연속증착장치에관한것이다. 일례로, 언와인더에서공급되는전극집전체의타면과접하여상기전극집전체를가이드하는제 1 가이드드럼; 상기제 1 가이드드럼과인접하여상기제 1 가이드드럼을지나는전극집전체에전극형성물질을뿌려주는제 1 증착원; 상기제 1 가이드드럼과인접하고일부가개방되어상기전극집전체를전극형성물질에노출시키는제 1 노출부를포함하는제 1 고정차폐유닛; 상기제 1 고정차폐유닛의하부일측에위치하고수평이동을하여상기제 1 노출부를차폐하는제 1 마스크부, 상기제 1 마스크부와다른평면상에위치하고, 상기제 1 고정차폐유닛의하부타측에위치하고, 수평이동을하며, 상기제 1 마스크부와수직배열되어상기제 1 노출부를차폐하는제 2 마스크부, 상기제 1 마스크부및 상기제 2 마스크부각각을수평운동시키는제 1, 2 구동부를포함하는제 1 이동차폐유닛;을포함하는것을특징으로하는연속증착장치가개시된다.
    • 6. 发明授权
    • 연속 증착 장치
    • 连续蒸发装置
    • KR101222310B1
    • 2013-01-15
    • KR1020110014351
    • 2011-02-18
    • 삼성에스디아이 주식회사
    • 임영창이제완이성호박성호최완욱정석헌
    • C23C14/24C23C14/56C23C14/04C23C14/54
    • 본 발명의 일 실시 예는 양극판 또는 음극판에 무지부를 포함한 활물질층을 형성할 수 있는 연속 증착 장치에 관한 것이다.
      일례로, 언와인더에서 공급되는 전극 집전체의 일면과 접하여 상기 전극 집전체를 지지하는 제 1 가이드 드럼; 상기 제 1 가이드 드럼과 인접하여 상기 제 1 가이드 드럼을 통과하는 전극 집전체에 활물질을 공급하는 제 1 증착원; 상기 제 1 가이드 드럼을 통과하는 전극집전체의 일부분을 차폐하여 무지부가 형성되도록 하는 제 1 마스킹 유닛; 상기 제 1 마스킹 유닛과 연결되어 상기 제 1 마스킹 유닛을 상기 제 1 가이드 드럼의 외측면을 따라 왕복 운동시키는 제 1 구동 유닛; 상기 제 1 마스킹 유닛과 인접하고 상기 제 1 마스킹 유닛과 연결되어 상기 제 1 마스킹 유닛의 운동을 지지하는 제 1 가이드 유닛; 상기 제 1 가이드 유닛과 연결되어 상기 제 1 구동유닛에 의해 운동하는 제 1 마스킹유닛의 운동방향과 수직인 방향으로 제 1 가이드 유닛을 수평왕복운동시키는 제 2 구동유닛을 포함하는 것을 특징으로 하는 연속 증착장치가 개시된다.
    • 9. 发明公开
    • 연속 증착 장치
    • 连续蒸发装置
    • KR1020120111088A
    • 2012-10-10
    • KR1020110029382
    • 2011-03-31
    • 삼성에스디아이 주식회사
    • 이성호박성호임영창이제완정석헌최완욱
    • C23C14/24C23C14/56C23C14/54
    • C23C14/042C23C14/541C23C14/562H01M4/0423
    • PURPOSE: A continuous deposition apparatus is provided to easily cope with the variation of width of a non-coated portion by controlling the horizontal travel speed of moving shield units. CONSTITUTION: A continuous deposition apparatus(100) comprises a first guide drum(130) which contacts one side of an electrode collector(10) and guides the electrode collector, a first evaporation source(140) which spreads electrode forming materials to the electrode collector passing through the first guide drum, a first fixed shield unit(150) including a first exposure part(156) which exposes the electrode collector to the electrode forming materials, and a first moving shied unit(160) including first and second mask parts(162,166) and first and second driving parts(164,168). The first mask part is located at one side of the lower part of the first fixed shield unit and the second mask part is located on the other side of the lower part of the first fixed shield unit on a plane different from the first mask part. The first and second mask parts are horizontally moved to shield the first exposure part. The first and second driving parts horizontally move the first and second mask parts.
    • 目的:提供一种连续沉积装置,通过控制移动屏蔽单元的水平行进速度来容易地处理未涂覆部分的宽度变化。 构成:连续沉积装置(100)包括与电极集电器(10)的一侧接触并引导电极集电器的第一导向鼓(130),将电极形成材料铺展到电极集电体的第一蒸发源(140) 通过第一导向鼓,第一固定屏蔽单元(150)包括将电极集电体暴露于电极形成材料的第一曝光部分(156),以及包括第一和第二掩模部分(160)的第一移动屏蔽单元 162,166)和第一和第二驱动部件(164,168)。 第一掩模部分位于第一固定屏蔽单元的下部的一侧,并且第二掩模部分位于与第一掩模部分不同的平面上的第一固定屏蔽单元的下部的另一侧。 水平移动第一和第二掩模部分以屏蔽第一曝光部分。 第一和第二驱动部件水平地移动第一和第二掩模部件。