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1. 发明公开

KR1020160118116A 박막 증착 설비 审中-实审
标题翻译：沉积薄膜设备
公开(公告)号：KR1020160118116A
公开(公告)日：2016-10-11
申请号：KR1020150095307
申请日：2015-07-03
申请人： 삼성전자주식회사
发明人： 구봉진 , 김범석 , 정우철 , 조성휘 , 하우성
IPC分类号： H01L21/203 , H01L21/324 , H01L21/02
摘要： 본발명은박막제조설비를개시한다. 그의설비는챔버내에기판을수납하는서셉터와, 챔버외부에배치된반사하우징및 반사하우징내에배치된열원들을포함하는가열모듈과, 열원들및 챔버사이의반사하우징내에배치된반사제어모듈을포함한다. 반사제어모듈은반사하우징에의해기판의중심으로제공되는열원들의광을기판의가장자리로반사하여기판을균일한온도로가열시킬수 있다.

2. 发明公开

KR1020100093665A 홀로그램 노광 장치 无效
标题翻译： HOLOGRAM曝光装置
公开(公告)号：KR1020100093665A
公开(公告)日：2010-08-26
申请号：KR1020090012710
申请日：2009-02-17
申请人： 삼성전자주식회사
发明人： 김의석 , 장인배 , 이성진 , 조성휘 , 이근희 , 홍상준 , 박상욱
IPC分类号： H01L21/027
CPC分类号： G03H1/0408 , G03F7/70408 , G03H2001/0094 , G03F7/70716 , G03F7/70758
摘要： PURPOSE: A hologram exposure apparatus is provided to precisely transfer a mask holder and to precisely control the interval between an object and a hologram mask by comprising a piezoelectric element in a gaping unit. CONSTITUTION: An object with an exposure target is prepared. A pattern is recorded in a hologram mask(20) transferred to the object. A stage supports the hologram mask. A gaping unit(40) is arranged between the hologram mask and the stage. The gaping unit comprises a piezoelectric element(100) arranged between the stage and the mask holder.
摘要翻译：目的：提供一种全息曝光装置，通过在间隙单元中包括压电元件来精确地传送掩模支架并精确地控制物体和全息掩模之间的间隔。构成：准备具有曝光对象的物体。在传送到物体的全息掩模（20）中记录图案。舞台支持全息面具。间隙单元（40）布置在全息掩模和台之间。间隙单元包括布置在平台和面罩座之间的压电元件（100）。

3. 发明公开

KR1020170045949A 플라즈마 광원 장치 및 그 광원 장치를 구비한 광원 시스템 审中-实审
标题翻译：等离子光源装置和包括该光源装置的光源系统
公开(公告)号：KR1020170045949A
公开(公告)日：2017-04-28
申请号：KR1020150146095
申请日：2015-10-20
申请人： 삼성전자주식회사
发明人： 김욱래 , 박영규 , 이정철 , 전병환 , 조성휘 , 주원돈 , 안진우
IPC分类号： H01J65/04 , H01J61/52 , H05G2/00 , G03F1/22 , H01J37/244 , H01J37/05
CPC分类号： H05H1/46 , H01J61/025 , H01J61/30 , H01J61/54 , H01J65/04 , H05G2/00 , H05H1/24 , H05H2240/00
摘要： 본발명의기술적사상은레이저가효율적으로집광하여입력되고, 플라즈마광을효율적으로집광하여출력하며, 광원장치를효율적으로냉각할수 있는고효율및 고휘도의플라즈마광원장치를제공한다. 그플라즈마광원장치는제1 레이저를발생시키는제1 레이저발생기; 제2 레이저를발생시키는제2 레이저발생기; 및플라즈마점화(ignition)용매체물질을수용하여밀폐시키고, 상기제1 레이저에의해플라즈마가점화되며상기제2 레이저에의해상기플라즈마가유지되며, 내부면이곡면거울(curved mirror)로이루어지되 2개의곡면거울이서로마주보는구조를갖는챔버;를포함한다.
摘要翻译：本发明的技术特征是输入到激光被有效地冷凝，在等离子体光有效地会聚输出，并且提供了高效率和等离子体光源装置，其能够有效地冷却光源装置的高亮度。等离子体光源装置包括用于产生第一激光器的第一激光发生器; 第二激光发生器，用于产生第二激光; 等离子体点火介质材料，等离子体由第一激光器点燃，等离子体由第二激光器维持，内表面由曲面镜构成，腔室具有曲面镜相互面对的结构。

4. 发明公开

KR1020100092212A 홀로그래픽 노광장치용 프리즘 및 이를 구비하는 노광장치 无效
标题翻译：用于装置的装置的装置和装置具有其自身的全息图
公开(公告)号：KR1020100092212A
公开(公告)日：2010-08-20
申请号：KR1020090011489
申请日：2009-02-12
申请人： 삼성전자주식회사
发明人： 박상욱 , 클루브프란시스 , 김의석 , 조성휘 , 이근희 , 홍상준
IPC分类号： H01L21/027 , G03F7/20 , H01L21/66
CPC分类号： G03F7/70408 , G01B11/02 , G03F7/7085
摘要： PURPOSE: The prism for the holographic exposure apparatus and exposure apparatus including the same improves the space measurement structure between the holographic mask and material. It applies to the prism having the various shape. CONSTITUTION: The holographic mask(50) is combined in the mask combining surface(11). The wire extend of the second incline(13) and the first inclined plane(12) prepares in order to accomplish approximately, figure 45 with the wire extend of the mask combining surface. The beam incident part for the space measurement at least prepares among the first inclined plane and the second incline in one. The beam incident part for the space measurement comprises the entrance face in which the beam for the space measurement for measuring interval between the material(60) is income.
摘要翻译：目的：全息曝光装置的棱镜和包括其的曝光装置改善了全息掩模和材料之间的空间测量结构。适用于具有各种形状的棱镜。构成：全息掩模（50）组合在掩模组合表面（11）中。准备第二斜面（13）和第一倾斜平面（12）的导线延伸，以便通过掩模组合表面的导线延伸达到图45。用于空间测量的光束入射部分至少在第一倾斜平面和第二倾斜面之间准备。用于空间测量的光束入射部分包括入射面，用于用于测量物质（60）之间的间隔的空间测量的光束是入射面。

5. 发明公开

KR1020100093666A 홀로그램 노광 장치 无效
标题翻译： HOLOGRAM曝光装置
公开(公告)号：KR1020100093666A
公开(公告)日：2010-08-26
申请号：KR1020090012711
申请日：2009-02-17
申请人： 삼성전자주식회사
发明人： 김의석 , 조성휘 , 이근희 , 홍상준 , 박상욱 , 장인배
IPC分类号： H01L21/027
CPC分类号： G03H1/22 , G03F7/70408 , G03H1/0408 , G03H2001/0094 , G03F7/70716 , G03F7/70758
摘要： PURPOSE: A hologram exposure apparatus is provided to control the gap between a hologram mask and a target by minutely driving a mask stage. CONSTITUTION: A mask stage(30) is supported in a main body(1). A hologram mask(20) is supported by the mask stage. A drive unit(80) is arranged between the main body and the mask stage. The drive unit moves relatively the mask stage to the main body. A driving unit includes piezoelectric element(10) and a power supply source(90) supplying power to the piezoelectric element.
摘要翻译：目的：提供一种全息曝光装置，通过微小地驱动掩模台来控制全息掩模与目标之间的间隙。构成：荫罩台（30）支撑在主体（1）中。全息掩模（20）由掩模台支撑。驱动单元（80）布置在主体和掩模台之间。驱动单元将掩模台相对于主体移动。驱动单元包括压电元件（10）和向压电元件供电的电源（90）。

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