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    • 2. 发明授权
    • 비휘발성 메모리 소자 및 그 제조 방법
    • 非易失性存储器件及其制造方法
    • KR100772905B1
    • 2007-11-05
    • KR1020060107326
    • 2006-11-01
    • 삼성전자주식회사
    • 양봉길엄중섭주섭열박세종한현숙
    • H01L27/115H01L21/8247
    • H01L29/7885H01L21/28273H01L29/42324H01L29/66825
    • A non-volatile memory device and a manufacturing method thereof are provided to suppress a reverse tunneling phenomenon by increasing a slant angle between a lower portion of a floating gate electrode and a semiconductor substrate. A non-volatile memory device includes a semiconductor substrate(100), a floating gate electrode(132), and a control gate electrode(150). The floating gate electrode has an acute tip at an upper portion thereof. An angle between the semiconductor substrate and the upper portion of the floating gate electrode is smaller than the angle between the semiconductor substrate and a lower portion of the floating gate electrode. The control gate electrode is insulated from the floating gate electrode and arranged to face at least a portion of the floating gate electrodes.
    • 提供了一种非易失性存储器件及其制造方法,以通过增加浮置栅电极的下部与半导体衬底之间的倾斜角来抑制反向隧道现象。 非易失性存储器件包括半导体衬底(100),浮栅电极(132)和控制栅电极(150)。 浮栅电极在其上部具有尖锐尖端。 半导体衬底与浮栅电极的上部之间的角度小于半导体衬底与浮栅电极的下部之间的角度。 控制栅极电极与浮置栅电极绝缘并且布置成面对至少一部分浮栅电极。
    • 3. 发明公开
    • 분리 게이트 구조를 갖는 플래쉬 메모리 소자 및 그제조방법
    • 具有分层门结构的闪存存储器件及其制造方法
    • KR1020080036846A
    • 2008-04-29
    • KR1020060103629
    • 2006-10-24
    • 삼성전자주식회사
    • 엄중섭박세종한현숙
    • H01L27/115H01L21/8247
    • H01L27/11521H01L21/28141H01L21/28273H01L21/823437H01L29/66825
    • A flash memory device having a split gate structure and a method for manufacturing the same are provided to prevent degradation of a gate dielectric by minimizing a mechanical stress applied to the gate dielectric. A floating gate(110a) is provided on an active region of a semiconductor substrate(100). A lower width of the floating gate is greater than an upper width thereof. A first gate dielectric(105a) is disposed between the floating gate and the adjacent active region. A control gate(130) crosses the active region adjacent to the floating gate and partially covers the floating gate. Second gate dielectrics(125) are disposed between the control gate and the floating gate, and between the control gate and the active region. The floating gate has a round sidewall. An upper region of the floating gate has a vertical sidewall. A lower region of the floating gate has a round sidewall. An upper surface of the floating gate is a concave shape.
    • 提供一种具有分割栅极结构的闪存器件及其制造方法,以通过使施加到栅极电介质的机械应力最小化来防止栅极电介质的劣化。 浮置栅极(110a)设置在半导体衬底(100)的有源区上。 浮动栅极的较低宽度大于其上部宽度。 第一栅极电介质(105a)设置在浮置栅极和相邻有源区域之间。 控制栅极(130)跨越与浮动栅极相邻的有源区域并且部分地覆盖浮置栅极。 第二栅极电介质(125)设置在控制栅极和浮动栅极之间以及控制栅极和有源区域之间。 浮动门具有圆形侧壁。 浮动栅极的上部区域具有垂直侧壁。 浮动栅极的下部区域具有圆形侧壁。 浮栅的上表面是凹形。
    • 5. 发明公开
    • 매몰형 스플릿 게이트를 구비한 불휘발성 메모리소자 및 그제조방법
    • 具有双层型分离门的非易失性存储器件及其制造方法
    • KR1020080069481A
    • 2008-07-28
    • KR1020070007248
    • 2007-01-23
    • 삼성전자주식회사
    • 고정욱엄중섭박세종이기조서문선
    • H01L21/8247H01L27/115
    • H01L27/11521H01L21/28141H01L21/28273H01L21/76224H01L21/76838
    • A nonvolatile memory device having a buried type split gate and a method for fabricating the same are provided to embed floating gates in trenches for precluding misalignment between the floating gates and active regions, thereby preventing mismatching of program/erasing characteristics between cells. A semiconductor substrate(200) has an active region. A pair of trenches(210) are separated from the active region. Coupling insulating layers(230) are formed in the trenches. Floating gates(240) are arranged on the coupling insulating layers. A source region(270) is formed at the active region. A pair of drain regions(280) are separated from the trenches respectively. A tunneling insulating layer(250) is formed on the floating gates and the substrate. A control gate(260) is formed on the tunneling insulating layer. Gate spacers(290) are formed at the side walls of the control gate.
    • 提供具有埋式分离栅极的非易失性存储器件及其制造方法,以将浮置栅极嵌入沟槽中,以防止浮置栅极和有源区域之间的未对准,从而防止单元之间的编程/擦除特性失配。 半导体衬底(200)具有有源区。 一对沟槽(210)与有源区域分离。 在沟槽中形成耦合绝缘层(230)。 浮动栅极(240)布置在耦合绝缘层上。 源极区(270)形成在有源区。 一对漏极区域(280)分别与沟槽分离。 隧道绝缘层(250)形成在浮动栅极和衬底上。 在隧道绝缘层上形成控制栅极(260)。 栅极间隔件(290)形成在控制栅极的侧壁处。
    • 6. 发明公开
    • 플래시 메모리 소자 및 그 제조 방법
    • 闪存存储器件及其制造方法
    • KR1020070069626A
    • 2007-07-03
    • KR1020050131956
    • 2005-12-28
    • 삼성전자주식회사
    • 박세종박형무
    • H01L27/115
    • A flash memory device and its fabricating method are provided to enhance a stable operation characteristic of the device by minimizing asymmetry between a pair of floating gates. A linear isolation film is formed on a semiconductor substrate(110) to define an active region. A tunnel oxide layer pattern(112a), a floating gate electrode(113a) and a field oxide layer pattern(116a) are formed in the active region on the substrate. A gate interlayer dielectric pattern(117a) and a control gate electrode(118) are formed to be overlapped with the floating gate electrode and the substrate. The floating gate electrode has a pointed tip on an edge thereof adjacent to the control gate electrode.
    • 提供闪速存储器件及其制造方法,通过使一对浮栅之间的不对称最小化来提高器件的稳定工作特性。 在半导体衬底(110)上形成线性隔离膜以限定有源区。 在衬底上的有源区中形成隧道氧化物层图案(112a),浮栅电极(113a)和场氧化物层图案(116a)。 栅极层间介质图案(117a)和控制栅电极(118)形成为与浮栅电极和基板重叠。 浮栅电极在与控制栅电极相邻的边缘上具有尖端尖端。