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    • 2. 发明公开
    • 스퍼터 및 이를 이용한 박막 증착 방법
    • 用于沉积薄膜的溅射器和方法
    • KR1020130126090A
    • 2013-11-20
    • KR1020120049894
    • 2012-05-10
    • 삼성디스플레이 주식회사
    • 정윤모정정영박종력서진욱
    • C23C14/34
    • C23C14/34C23C14/564H01J37/32532H01J37/34
    • The embodiment of the present invention relates to a sputter, wherein the sputter according to the embodiment of present invention includes: a cathode part including a cathode body and a target supporting part, wherein a target is placed on the front side of the cathode body, and the target supporting part is coupled to the front edge of the cathode part and supports the edge of the target; an anode part including an anode body and an anode electrode, wherein the anode body surrounds the side and the rear side of the cathode part, and the anode electrode being coupled to the anode body covers the target and the partial edge of the target with separation; an inner insulating body being place between the cathode part and the anode body; an electrode insulating body being placed in a space in which the anode electrode, the target supporting part, and the partial edge of the target are separated with one another; and a power supply part being connected to the cathode part and the anode part.
    • 本发明的实施例涉及一种溅射,其中根据本发明的实施例的溅射器包括:阴极部分,包括阴极体和目标支撑部分,其中靶位于阴极体的前侧, 并且目标支撑部分耦合到阴极部分的前边缘并且支撑目标的边缘; 阳极部分,其包括阳极体和阳极电极,其中阳极体围绕阴极部分的侧面和背面,并且与阳极体耦合的阳极电极以分离方式覆盖靶材和靶材的部分边缘 ; 内绝缘体位于阴极部分和阳极体之间; 将电极绝缘体放置在所述阳极电极,所述靶支撑部和所述靶的所述部分边缘彼此分离的空间中; 以及与阴极部和阳极部连接的供电部。