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1. 发明授权

KR101801661B1 블라인드, 이를 포함하는 노광 장치 및 상기 노광 장치의 구동 방법 有权
公开(公告)号：KR101801661B1
公开(公告)日：2017-11-28
申请号：KR1020110031140
申请日：2011-04-05
申请人： 삼성디스플레이 주식회사
发明人： 김창훈 , 유홍석 , 서갑종
IPC分类号： G03F7/20 , H01L21/027
CPC分类号： G03F7/7055 , G03F7/70066
摘要： 노광장치는일정발광주기로발광하는광원, 상기광원과기판사이에배치되는마스크및 상기광원과상기마스크의사이에배치되는블라인드를포함한다. 상기마스크는일정패턴이형성된노광부및 상기노광부의주변을따라형성되고제1 정렬마크들이형성된주변부를포함한다. 상기블라인드는상기기판상에서이동하며양 단부에는각각제2 정렬마크들이형성된차단플레이트및 상기차단플레이트의위치를조정하는조정부를포함한다. 이로써, 기판상에형성되는꼬리패턴(tail pattern)의위치편차를최소화할수 있다.

2. 发明授权

KR101652887B1 기판의 노광방법, 이를 수행하기 위한 기판의 노광장치 및 이를 이용한 표시기판의 제조방법 有权
标题翻译：用于实施方法的基板曝光装置的曝光方法和使用该方法的显示基板的制造方法
公开(公告)号：KR101652887B1
公开(公告)日：2016-09-02
申请号：KR1020090119736
申请日：2009-12-04
申请人： 삼성디스플레이 주식회사
发明人： 안보경 , 조국래 , 유홍석 , 김창훈 , 김민욱 , 배주한
IPC分类号： H01L21/027
CPC分类号： G03B27/72 , G02F1/133516 , G03F7/7035 , G03F7/70558 , G03F7/70575
摘要： 제1 광을이용하여마스크가포함하는제1 슬릿들에의해노출된기판상의포토레지스트층을노광하고, 제1 광이반투과셔터에의해반투과된제2 광을이용하여마스크가포함하는제2 슬릿들에의해노출된포토레지스트층을노광한다. 기판과마스크의상대적인위치를변경시키며기판을노광한다. 기판에조사되는광의광량을영역별로조절할수 있어노광장치의제조비용이감소될수 있다.

3. 发明公开

KR1020130011401A 노광기 제어 방법 有权
标题翻译：接触装置的控制方法
公开(公告)号：KR1020130011401A
公开(公告)日：2013-01-30
申请号：KR1020110072540
申请日：2011-07-21
申请人： 삼성디스플레이 주식회사
发明人： 토리고에츠네미츠 , 유홍석 , 김창훈
IPC分类号： G03F7/20 , G03F7/207
CPC分类号： G03F7/70141 , G03F7/7035 , G03F7/70791
摘要： PURPOSE: A controlling method of a light-exposure apparatus is provided to reduce time consumption for re-setting by correcting the light shaft of an exposure beam by internal control of an exposure beam generator. CONSTITUTION: A light-exposure apparatus comprises an exposure-beam generator which comprises a prism or a bend mirror, and a vacuum chamber. Light generated from the exposure-beam generator passes through the vacuum chamber. A controlling method of the light-exposure apparatus comprises: a step of generating the exposure-beam from the exposure-beam generator; a step of measuring leaning of a light shaft in the vacuum chamber; and a step of adjusting the light shaft by controlling the prism or bend mirror in the exposure-beam generator. [Reference numerals] (AA) Leaning; (BB) No leaning; (S10) Acquiring laser energy; (S100) OSC voltage readjustment(355nm); (S110) AMP voltage readjustment(355nm); (S120) Exposure preparation completion; (S20) OSC voltage adjustment(1064nm); (S30) AMP voltage adjustment(355nm); (S40) SHG crystal adjustment; (S50) THG crystal adjustment; (S60) Delay adjustment; (S70,S90) Measuring the leaning of the diameter of laser beam; (S80) Adjusting the angle of a prism
摘要翻译：目的：提供一种曝光装置的控制方法，通过曝光光束发生器的内部控制来校正曝光光束的光轴，以减少重新设定的时间消耗。构成：曝光装置包括曝光光束发生器，其包括棱镜或弯曲镜以及真空室。从曝光光束发生器产生的光通过真空室。曝光装置的控制方法包括：从曝光光束发生器产生曝光光束的步骤; 测量真空室中光轴倾斜的步骤; 以及通过控制曝光光束发生器中的棱镜或弯曲镜来调节光轴的步骤。（附图标记）（AA）倾斜; （BB）不倾斜（S10）获取激光能量; （S100）OSC电压重新调整（355nm）; （S110）AMP电压调整（355nm）; （S120）曝光准备完成; （S20）OSC电压调整（1064nm）; （S30）AMP电压调整（355nm）; （S40）SHG晶体调整; （S50）THG晶体调整; （S60）延时调整; （S70，S90）测量激光束直径的倾斜度; （S80）调整棱镜的角度

4. 发明公开

KR1020120132074A 블라인드를 포함하는 노광 장치 및 이의 구동 방법 审中-实审
标题翻译：具有盲孔的曝光装置及其驱动方法
公开(公告)号：KR1020120132074A
公开(公告)日：2012-12-05
申请号：KR1020110050672
申请日：2011-05-27
申请人： 삼성디스플레이 주식회사
发明人： 김창훈 , 유홍석
IPC分类号： G03F7/20 , G02F1/13 , G02B5/20
CPC分类号： G03B27/423 , G03F7/7055
摘要： PURPOSE: An exposure apparatus including a blind and a driving method of the same are provided to improve the display quality of a display panel by reducing the generation of stains on a substrate. CONSTITUTION: An exposure apparatus includes a light source, a mask(570), a blind, and a blind driving part. The light source emits light by a regular light emitting period. The mask is arranged on the upper part of a substrate and includes an exposure window with predetermined patterns. The blind includes a plurality of blocking plates(P1) with blocking parts and opening parts on the upper part of the exposure window. The blocking plates move to first direction in order to conceal the non-exposed region of the substrate and returns to a second direction by passing through the region of the exposure window. [Reference numerals] (AA) Light
摘要翻译：目的：提供包括盲人和其驱动方法的曝光装置，以通过减少衬底上的污渍的产生来改善显示面板的显示质量。构成：曝光装置包括光源，掩模（570），盲人和盲驱动部。光源通过规则的发光周期发光。掩模布置在基板的上部并且包括具有预定图案的曝光窗口。盲板包括在曝光窗的上部具有阻挡部件和开口部分的多个阻挡板（P1）。阻挡板移动到第一方向，以便隐藏基板的未曝光区域并通过穿过曝光窗口的区域而返回到第二方向。（附图标记）（AA）光

5. 发明公开

KR1020110062881A 기판의 노광방법, 이를 수행하기 위한 기판의 노광장치 및 이를 이용한 표시기판의 제조방법 有权
标题翻译：基板曝光方法，使用该方法执行显示基板的方法和制造方法的曝光装置
公开(公告)号：KR1020110062881A
公开(公告)日：2011-06-10
申请号：KR1020090119736
申请日：2009-12-04
申请人： 삼성디스플레이 주식회사
发明人： 안보경 , 조국래 , 유홍석 , 김창훈 , 김민욱 , 배주한
IPC分类号： H01L21/027
CPC分类号： G03B27/72 , G02F1/133516 , G03F7/7035 , G03F7/70558 , G03F7/70575 , G03F7/70208 , G03F7/70275 , G03F7/70466
摘要： PURPOSE: A method for exposing substrates, an apparatus for exposing the substrates for the same, and a method for manufacturing a display substrate using the same are provided to control the amount of light radiated to the substrates by regions using a semi-transmitting shutter. CONSTITUTION: A substrate(2000) is introduced into a loading part. A stage transfers the substrate to the lower side of an exposing part along a first direction. The exposing part includes a light source module(510) and an exposing module(530). The light source module radiates first light to the stage through the exposing module. The light source module includes light source(511) and a light collector(513). The light collector includes at least one reflecting lens. The light collector reflects first light, and the reflected first light is radiated to the substrate through the exposing module.
摘要翻译：目的：提供用于曝光基板的方法，用于使基板曝光的装置以及使用其的基板的制造方法，以通过使用半透光快门的区域来控制辐射到基板的光量。构成：将衬底（2000）引入装载部件中。阶段沿着第一方向将基板转移到曝光部分的下侧。曝光部分包括光源模块（510）和曝光模块（530）。光源模块通过曝光模块将第一个光照射到舞台上。光源模块包括光源（511）和集光器（513）。光收集器包括至少一个反射透镜。光收集器反射第一光，并且反射的第一光通过曝光模块辐射到衬底。

6. 发明公开

KR1020110021586A 박막 트랜지스터 기판 및 그 제조 방법 有权
标题翻译：薄膜晶体管阵列和制造它们
公开(公告)号：KR1020110021586A
公开(公告)日：2011-03-04
申请号：KR1020090079467
申请日：2009-08-26
申请人： 삼성디스플레이 주식회사
发明人： 김종인 , 김장수 , 유홍석 , 김용환 , 오화열 , 최재호 , 장상희
IPC分类号： G02F1/1333
CPC分类号： G02F1/13624 , G02F2001/134345 , G02F2001/136222 , G02F2001/136236 , H01L27/1248 , H01L27/1288
摘要： PURPOSE: A thin film transistor substrate and a manufacturing method thereof are provided to prevent the deterioration of contact property and to maintain liquid crystal display cell interval. CONSTITUTION: A signal line is formed on an insulating substrate. A color filter(230) is formed on the insulating substrate. A thin film is connected to the signal line. An organic insulating film(180) is formed on the color filter and includes a first part and a second part. A light blocking member is formed on the second part of the organic insulating film.
摘要翻译：目的：提供一种薄膜晶体管基板及其制造方法，以防止接触性能的劣化并保持液晶显示单元间隔。构成：在绝缘基板上形成信号线。在绝缘基板上形成滤色器（230）。薄膜连接到信号线。有机绝缘膜（180）形成在滤色器上，并包括第一部分和第二部分。在有机绝缘膜的第二部分上形成遮光部件。

7. 发明公开

KR1020100066929A 박막 트랜지스터 기판 및 그 제조 방법 有权
标题翻译：薄膜晶体管阵列及其制造方法
公开(公告)号：KR1020100066929A
公开(公告)日：2010-06-18
申请号：KR1020080125449
申请日：2008-12-10
申请人： 삼성디스플레이 주식회사
发明人： 이영욱 , 유홍석 , 송진호 , 윤재형 , 이우근 , 김기원 , 김종인
IPC分类号： G02F1/136 , H01L29/786
CPC分类号： H01L29/66742 , H01L27/1225 , H01L27/124 , H01L27/1248 , H01L27/1214
摘要： PURPOSE: A thin film transistor substrate and a method for manufacturing the same are provided to prevent defective picture quality due to organic materials attached to a gate electrode. CONSTITUTION: Data lines(171,179) and a gate electrode(124) are formed on the first interlayer insulating film. A semiconductor(154) formed on a gate insulating layer is overlapped with the gate electrode. The first connection unit(83) is formed on the second interlayer insulating film. The first connection unit electrically connects gate lines(121,129) with the gate electrode. A drain electrode(175) is connected to the semiconductor. The second connection unit(84) connects the data line with the semiconductor.
摘要翻译：目的：提供薄膜晶体管基板及其制造方法，以防止由附着于栅电极的有机材料引起的图像质量不良。构成：数据线（171,179）和栅电极（124）形成在第一层间绝缘膜上。形成在栅绝缘层上的半导体（154）与栅电极重叠。第一连接单元（83）形成在第二层间绝缘膜上。第一连接单元将栅极线（121,129）与栅电极电连接。漏电极（175）连接到半导体。第二连接单元（84）将数据线与半导体连接。

8. 发明公开

KR1020100024731A 박막 트랜지스터 기판 및 그 제조 방법 有权
标题翻译：薄膜晶体管阵列和制造它们
公开(公告)号：KR1020100024731A
公开(公告)日：2010-03-08
申请号：KR1020080083421
申请日：2008-08-26
申请人： 삼성디스플레이 주식회사
发明人： 이광호 , 김장수 , 유홍석 , 김상수 , 김시열 , 윤재형
IPC分类号： G02F1/136 , H01L29/786
CPC分类号： H01L27/124 , G02F1/13394 , G02F1/136209 , G02F1/136227 , G02F2001/136222 , H01L27/1248 , H01L27/1262 , G02F1/133514 , H01L27/1214
摘要： PURPOSE: A thin film transistor panel and a manufacturing method thereof are provided to form a color filter by an inkjet process after forming a high partition wall made of an organic film, thereby improving a color feeling of a color filter and preventing mixed colors. CONSTITUTION: A thin film transistor panel includes an insulating substrate, a thin film transistor, a protection film, a partition wall(215), a color filter, an organic capping layer, and a pixel electrode(191). The color filter is formed on the protection film. The color filter is formed on an area divided by the partition wall. The organic capping layer is formed on the partition wall and the color filter. The pixel electrode is connected to a drain electrode through contact holes formed in the protection film, a contact unit of the partition wall and the organic capping layer.
摘要翻译：目的：提供一种薄膜晶体管面板及其制造方法，在形成由有机膜制成的高分隔壁之后通过喷墨工艺形成滤色器，从而改善滤色器的颜色感并防止混色。构成：薄膜晶体管面板包括绝缘衬底，薄膜晶体管，保护膜，分隔壁（215），滤色器，有机覆盖层和像素电极（191）。滤色片形成在保护膜上。滤色器形成在由分隔壁分割的区域上。有机覆盖层形成在分隔壁和滤色器上。像素电极通过形成在保护膜中的接触孔，分隔壁的接触单元和有机覆盖层连接到漏电极。

9. 发明授权

KR101766251B1 블라인드를 포함하는 노광 장치 및 이의 구동 방법 有权
标题翻译：一种包括百叶窗的曝光装置及其驱动方法
公开(公告)号：KR101766251B1
公开(公告)日：2017-08-09
申请号：KR1020100098248
申请日：2010-10-08
申请人： 삼성디스플레이 주식회사
发明人： 김창훈 , 안보경 , 유홍석
IPC分类号： G03F7/20 , G02F1/13
CPC分类号： G03F7/2008 , G03F7/7055
摘要： 노광장치는광원, 마스크, 블라인드및 블라인드구동부를포함한다. 광원은일정발광주기로발광한다. 마스크는기판상부에배치되고일정패턴이형성된노광창을포함한다. 블라인드는마스크의노광창상부에배치되어기판내의비노광영역을가리기위해일 방향으로이동하고, 광원의비발광시간동안노광창영역을통과하면서회송되는복수의차단플레이트들을포함한다. 블라인드구동부는차단플레이트들을구동하는복수의모터들, 및광원의발광신호와동기되어모터들의동작을제어하는모터제어유닛을포함한다.
摘要翻译：曝光装置包括光源，面罩，百叶窗和盲人驱动器。光源以恒定的发光周期发光。掩模包括设置在基板上并且以预定图案形成的曝光窗口。百叶帘包括被布置在所述掩模nogwangchang的顶部上的多个块板的在一个方向移动，以覆盖在所述衬底中的未曝光区域，并且穿过用于光源的非发光时的返回nogwangchang区域。盲驱动部分包括用于驱动阻挡板的多个电动机以及用于与光源的发光信号同步地控制电动机的操作的电动机控制单元。

10. 发明授权

KR101595818B1 박막 트랜지스터 기판 및 그 제조 방법 有权
标题翻译：薄膜晶体管阵列和制造它们
公开(公告)号：KR101595818B1
公开(公告)日：2016-02-22
申请号：KR1020090079467
申请日：2009-08-26
申请人： 삼성디스플레이 주식회사
发明人： 김종인 , 김장수 , 유홍석 , 김용환 , 오화열 , 최재호 , 장상희
IPC分类号： G02F1/1333
CPC分类号： G02F1/13624 , G02F2001/134345 , G02F2001/136222 , G02F2001/136236 , H01L27/1248 , H01L27/1288
摘要： 본발명의한 실시예에따른박막트랜지스터표시판은절연기판, 상기절연기판위에형성되어있는신호선, 상기신호선과연결되어있는박막트랜지스터, 상기기판위에형성되어있는색필터, 상기색필터위에형성되어있으며, 위치에따라서로두께가다른제1 부분및 제2 부분을포함하는유기절연막, 그리고상기유기절연막의제2 부분위에형성되어있는차광부재를포함하고, 상기유기절연막의제1 부분의표면높이와상기유기절연막의제2 부분의표면높이차이는약 2.0㎛내지 3.0㎛이다.

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